JP2022549044A5 - - Google Patents

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Publication number
JP2022549044A5
JP2022549044A5 JP2021560930A JP2021560930A JP2022549044A5 JP 2022549044 A5 JP2022549044 A5 JP 2022549044A5 JP 2021560930 A JP2021560930 A JP 2021560930A JP 2021560930 A JP2021560930 A JP 2021560930A JP 2022549044 A5 JP2022549044 A5 JP 2022549044A5
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JP
Japan
Prior art keywords
nanocrystalline diamond
processing method
diamond layer
gas
range
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021560930A
Other languages
English (en)
Japanese (ja)
Other versions
JP7417627B2 (ja
JP2022549044A (ja
Filing date
Publication date
Priority claimed from US17/007,441 external-priority patent/US11594416B2/en
Application filed filed Critical
Publication of JP2022549044A publication Critical patent/JP2022549044A/ja
Publication of JP2022549044A5 publication Critical patent/JP2022549044A5/ja
Priority to JP2023161812A priority Critical patent/JP2024012282A/ja
Application granted granted Critical
Publication of JP7417627B2 publication Critical patent/JP7417627B2/ja
Priority to JP2025086973A priority patent/JP2025138631A/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2021560930A 2020-08-31 2021-08-16 ダイヤモンドフィルムのトライボロジー特性の改善 Active JP7417627B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2023161812A JP2024012282A (ja) 2020-08-31 2023-09-26 ダイヤモンドフィルムのトライボロジー特性の改善
JP2025086973A JP2025138631A (ja) 2020-08-31 2025-05-26 ダイヤモンドフィルムのトライボロジー特性の改善

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US17/007,441 2020-08-31
US17/007,441 US11594416B2 (en) 2020-08-31 2020-08-31 Tribological properties of diamond films
PCT/US2021/046095 WO2022046448A1 (en) 2020-08-31 2021-08-16 Improving tribological properties of diamond films

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2023161812A Division JP2024012282A (ja) 2020-08-31 2023-09-26 ダイヤモンドフィルムのトライボロジー特性の改善

Publications (3)

Publication Number Publication Date
JP2022549044A JP2022549044A (ja) 2022-11-24
JP2022549044A5 true JP2022549044A5 (https=) 2023-04-14
JP7417627B2 JP7417627B2 (ja) 2024-01-18

Family

ID=80353808

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2021560930A Active JP7417627B2 (ja) 2020-08-31 2021-08-16 ダイヤモンドフィルムのトライボロジー特性の改善
JP2023161812A Pending JP2024012282A (ja) 2020-08-31 2023-09-26 ダイヤモンドフィルムのトライボロジー特性の改善
JP2025086973A Pending JP2025138631A (ja) 2020-08-31 2025-05-26 ダイヤモンドフィルムのトライボロジー特性の改善

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2023161812A Pending JP2024012282A (ja) 2020-08-31 2023-09-26 ダイヤモンドフィルムのトライボロジー特性の改善
JP2025086973A Pending JP2025138631A (ja) 2020-08-31 2025-05-26 ダイヤモンドフィルムのトライボロジー特性の改善

Country Status (4)

Country Link
US (2) US11594416B2 (https=)
JP (3) JP7417627B2 (https=)
CN (1) CN114503241B (https=)
WO (1) WO2022046448A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11594416B2 (en) * 2020-08-31 2023-02-28 Applied Materials, Inc. Tribological properties of diamond films
US12148617B2 (en) * 2021-11-01 2024-11-19 International Business Machines Corporation Structure and method to pattern pitch lines
US12442104B2 (en) 2023-04-20 2025-10-14 Applied Materials, Inc. Nanocrystalline diamond with amorphous interfacial layer

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2554100B2 (ja) * 1987-09-10 1996-11-13 三菱重工業株式会社 ダイヤモンド皮膜の研磨方法
JP4018856B2 (ja) * 1999-11-22 2007-12-05 京セラ株式会社 真空チャンバー構成部材
US7079740B2 (en) 2004-03-12 2006-07-18 Applied Materials, Inc. Use of amorphous carbon film as a hardmask in the fabrication of optical waveguides
DE102004025669A1 (de) * 2004-05-21 2005-12-15 Diaccon Gmbh Funktionelle CVD-Diamantschichten auf großflächigen Substraten
JP2010517263A (ja) * 2007-01-22 2010-05-20 エレメント シックス リミテッド ダイヤモンド電子デバイス及びそれらの製造方法
US20090017258A1 (en) 2007-07-10 2009-01-15 Carlisle John A Diamond film deposition
US8007910B2 (en) 2007-07-19 2011-08-30 City University Of Hong Kong Ultrahard multilayer coating comprising nanocrystalline diamond and nanocrystalline cubic boron nitride
CN100575545C (zh) * 2008-05-19 2009-12-30 牡丹江师范学院 低成本生长高品质纳米金刚石膜的方法
US8460464B2 (en) * 2009-03-31 2013-06-11 Rajneesh Bhandari Method for producing single crystalline diamonds
US9449982B2 (en) * 2013-03-12 2016-09-20 Sandisk Technologies Llc Method of making a vertical NAND device using a sacrificial layer with air gap and sequential etching of multilayer stacks
EP2832899A1 (fr) 2013-08-02 2015-02-04 The Swatch Group Research and Development Ltd. Revêtement de diamant et procédé de dépôt d'un tel revêtement
US9382625B2 (en) * 2014-05-01 2016-07-05 Applied Materials, Inc. Remote plasma source based cyclic CVD process for nanocrystalline diamond deposition
US9695503B2 (en) 2014-08-22 2017-07-04 Applied Materials, Inc. High power impulse magnetron sputtering process to achieve a high density high SP3 containing layer
TWI670831B (zh) * 2014-09-03 2019-09-01 美商應用材料股份有限公司 用於三維nand硬遮罩應用的奈米結晶鑽石碳膜
US10662523B2 (en) * 2015-05-27 2020-05-26 John Crane Inc. Extreme durability composite diamond film
US10584412B2 (en) 2016-03-08 2020-03-10 Ii-Vi Delaware, Inc. Substrate comprising a layer of silicon and a layer of diamond having an optically finished (or a dense) silicon-diamond interface
US10254445B2 (en) 2016-03-16 2019-04-09 Adam Khan Diamond coated antireflective window system and method
KR101865476B1 (ko) * 2016-10-28 2018-06-07 고려대학교 산학협력단 나노 다이아몬드를 계면 층으로 적용한 다이아몬드상 탄소막의 제조방법 및 이에 의해 제조된 다이아몬드상 탄소막
CN108060407B (zh) * 2017-11-09 2021-08-06 上海交通大学 一种微纳多层复合金刚石薄膜的制备方法
US11594416B2 (en) * 2020-08-31 2023-02-28 Applied Materials, Inc. Tribological properties of diamond films

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