JP2022538161A - 処理ステーションに物体を移動させるためのデバイスおよび方法、ならびに運搬システムおよび処理装置 - Google Patents
処理ステーションに物体を移動させるためのデバイスおよび方法、ならびに運搬システムおよび処理装置 Download PDFInfo
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Abstract
Description
2 基板
3;3’ 輸送装置
4a、4b 輸送装置ガイドレール
5a~5c 輸送装置トラベラ
6a、6b ラック
7 ピニオン
8a、8b 軸
9 輸送装置モータ
10 カプラシュー
11 基板ホルダ
12 基板ホルダ部分
13 支持アセンブリ
14a、14b 支持バー
15a、15b 爪
16 バー延長部
17 延長端部分
18a、18b キャリアアセンブリ
19 キャリアアセンブリピン
20a、20b ピンフランジ
21 保持構成部品
22 基板ホルダピン
23a、23b 保持構成部品フック
24a、24b 内側縁部分
25a、25b 保持構成部品アクチュエータ
26;26’ 輸送装置フレーム
27a、27b;27’a、27’b キャリア
28 保持構成部品ガイド
29a、29b 主ねじ
30a、30b 回転モータ
31a、31b 直線アクチュエータ伝達機構
32a、32b レバー
33 トラベラ
34a、34b ガイドスロット
35 当接部
36 フォロワ
37a、37b 直線アクチュエータ
38 キャリアハウジング
39 第1のガイド
40 第2のガイド
41 第1のキャリッジ
42 第2のキャリッジ
43 チェーン
44 スプロケット
45 第1の接続デバイス
46 第2の接続デバイス
47 第1の取付板
48 第2の取付板
49 当接表面
50 当接部
Claims (15)
- 処理装置の処理ステーション(1a、1b)の開口側を通して少なくとも基板(2)を備えた物体を移動させるためのデバイスであって、
前記処理ステーション(1a、1b)に配置可能な少なくとも1つの支持体(26;26’)と、
基準座標系内の基準軸(z)と平行に主に向けられたそれぞれの経路に沿った前記支持体(26;26’)に対する移動のためにそれぞれが案内される少なくとも1つのキャリア(27a、27b;27’a、27’b)と、
前記キャリア(27a、27b;27’a、27’b)の少なくとも1つの移動を制御し、前記経路に沿った互いに反対の方向の少なくとも一方への移動を駆動するための少なくとも1つのデバイス(29a、29b、30a、30b、31a、31b;37a、37b)と、
前記物体を保持するための構成部品(21;21’)と、
前記保持構成部品(21;21’)を前記少なくとも1つのキャリア(27a、27b;27’a、27’b)に接続する懸架機構と、
を備え、
前記懸架機構は、保持構成部品(21;21’)経路に沿った前記少なくとも1つのキャリア(27a、27b;27’a、27’b)に対する前記保持構成部品(21;21’)の移動を案内するように構成され、
前記デバイス(29a、29b、30a、30b、31a、31b;37a、37b)は、前記保持構成部品経路に沿った少なくとも一方向の前記保持構成部品(21;21’)の前記移動を駆動するように構成されている、デバイスにおいて、
前記保持構成部品経路は、前記基準軸(z)と平行に主に向けられることを特徴とする、デバイス。 - 前記キャリア(27a、27b;27’a、27’b)の少なくとも1つの移動を制御するための前記デバイス(29a、29b、30a、30b、31a、31b;37a、37b)の少なくとも1つはまた、前記保持構成部品(21;21’)の前記移動を駆動するように構成されている、請求項1に記載のデバイス。
- 前記少なくとも1つのキャリア(27a、27b;27’a、27’b)は前記キャリア(27a、27b;27’a、27’b)に移動可能に軸支された部分(32a、32b;42、48)を備え、
前記キャリア(27a、27b;27’a、27’b)は、前記支持体(26;26’)に沿った前記キャリア(27a、27b;27’a、27’b)の前記経路に沿って少なくとも特定の位置から前記移動可能部分(32a、32b;42、48)に係合するように構成された形体(35;50)を通して前記支持体(26;26’)の1つに沿った移動のために案内され、
前記懸架機構は、前記キャリア(27a、27b;27’a、27’b)に対する前記移動可能部分(32a、32b;42、48)の移動を前記キャリア(27a、27b;27’a、27’b)に対する前記保持構成部品(21;21’)の移動に変換するための機構を備えている、請求項2に記載のデバイス。 - 前記移動可能部分(42、48)は、前記基準軸(z)と少なくともほぼ平行に向けられた方向の前記キャリア(27’a)に対する直線動作のために案内され、
前記キャリア(27’a、27’b)に対する前記移動可能部分(42、48)の移動を前記キャリア(27’a、27’b)に対する前記保持構成部品(21’)の移動に変換するための前記機構は、前記保持構成部品経路に少なくともほぼ平行に向けられた方向の前記キャリア(27’a、27’b)に対する直線動作のために案内されるさらなる移動可能部分(41、47)と、前記移動可能部分(42、48)と前記さらなる移動可能部分(41、47)との間で力を伝達するための力伝達デバイスと、を備えている、請求項3に記載のデバイス。 - 前記力伝達デバイスは、前記移動可能部分(42、48)および前記さらなる移動可能部分(41、47)を相互接続する媒体であって、前記キャリア(27’a)に回転可能に軸支されたホイール(44)周りに巻かれた、媒体(43)を備えている、請求項4に記載のデバイス。
- 前記キャリア(27a、27b;27’a、27’b)、前記懸架機構および前記保持構成部品(21;21’)が平面結合を形成する、請求項1から5のいずれか一項に記載のデバイス。
- 前記基準軸(z)は、基準座標系内の第1の基準軸であり、前記基準座標系は、前記第1の基準軸(z)と垂直な第2の基準軸(y)をさらに備え、前記第1の基準軸(z)および前記第2の基準軸(y)は、前記保持構成部品経路がある平面と平行な平面を共に画定し、
前記デバイスは、前記第2の基準軸(y)と平行な方向で見て前記保持構成部品(21;21’)の互いに反対の側での移動のために案内される少なくとも2つのキャリア(27a、27b;27’a、27’b)を備えている、請求項1から6のいずれか一項に記載のデバイス。 - 前記少なくとも1つの支持体(26;26’)は、前記少なくとも2つのキャリア(27a、27b;27’a、27’b)のそれぞれを支持する支持フレームを備えている、請求項7に記載のデバイス。
- 前記キャリア(27a、27b;27’a、27’b)の少なくとも1つの移動を制御するための前記少なくとも1つのデバイス(29a、29b、30a、30b、31a、31b;37a、37b)は、直線アクチュエータを備えている、請求項1から8のいずれか一項に記載のデバイス。
- 前記直線アクチュエータ(29a、29b、30a、30b、31a、31b;37a、37b)は、回転モータ(30a、30b)、および回転動作を直線動作に変換するための機構(29a、29b、31a、31b)を備え、
前記回転モータ(30a、30b)は前記少なくとも1つの支持体(26;26’)上に配置されている、請求項9に記載のデバイス。 - 前記保持構成部品経路は、使用の際、前記処理ステーション(1a、1b)に近位の前記キャリア(27a、27b;27’a、27’b)の前記経路の端部点を越えて前記基準軸(z)に平行な方向に延びている、請求項1から10のいずれか一項に記載のデバイス。
- 前記キャリア(27a、27b;27’a、27’b)および前記懸架機構は、使用の際、前記処理ステーション(1a、1b)から遠位の前記保持構成部品経路の端部点において前記保持構成部品経路に対して前記保持構成部品(21;21’)に隣接して横方向に配置されている、請求項1から11のいずれか一項に記載のデバイス。
- 処理装置の処理ステーション(1a、1b)間に少なくとも基板(2)を備えた物体を運搬するためのシステムであって、
前記運搬システムは処理ステーション(1a、1b)から処理ステーション(1a、1b)まで移動可能な輸送装置(3)を備え、
前記輸送装置(3)は請求項1から12のいずれか一項に記載のデバイスを少なくとも1つ備えている、システム。 - 請求項1から12のいずれか一項に記載のデバイスの少なくとも1つと、請求項13に記載の運搬システムと、を備えている、基板(2)を処理するための装置。
- 処理装置内で基板(2)を取り扱う方法であって、
前記処理装置の処理ステーション(1a、1b)の開口側を通して少なくとも前記基板(2)を備えた物体を移動させるステップを含み、前記開口側を通して前記物体を移動させるステップが、
基準座標系内の基準軸(z)と平行に主に向けられた経路に沿って少なくとも1つのキャリア(27a、27b;27’a、27’b)を移動させるステップと、
前記少なくとも1つのキャリア(27a、27b;27’a、27’b)に接続された保持構成部品(21;21’)により前記物体を保持するステップと、
保持構成部品経路に沿って前記少なくとも1つのキャリア(27a、27b;27’a、27’b)に対して前記保持構成部品(21;21’)を移動させるステップと、を含む方法において、
前記保持構成部品経路は、前記基準軸(z)と平行に主に向けられていることを特徴とする方法。
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EP19182628.8A EP3758049B8 (en) | 2019-06-26 | 2019-06-26 | Device and method for moving an object into a processing station, conveying system and processing apparatus |
PCT/EP2020/067697 WO2020260389A1 (en) | 2019-06-26 | 2020-06-24 | Device and method for moving an object into a processing station, conveying system and processing apparatus |
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US20030077396A1 (en) * | 2001-10-23 | 2003-04-24 | Lecompte Robert S. | Dip coating system |
JP3827627B2 (ja) * | 2002-08-13 | 2006-09-27 | 株式会社荏原製作所 | めっき装置及びめっき方法 |
JP2007056350A (ja) | 2005-08-26 | 2007-03-08 | Akebono Brake Ind Co Ltd | メッキ装置 |
US20120305193A1 (en) | 2011-06-03 | 2012-12-06 | Arthur Keigler | Parallel single substrate processing agitation module |
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