JP2022526980A5 - - Google Patents

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Publication number
JP2022526980A5
JP2022526980A5 JP2021559101A JP2021559101A JP2022526980A5 JP 2022526980 A5 JP2022526980 A5 JP 2022526980A5 JP 2021559101 A JP2021559101 A JP 2021559101A JP 2021559101 A JP2021559101 A JP 2021559101A JP 2022526980 A5 JP2022526980 A5 JP 2022526980A5
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JP
Japan
Prior art keywords
heat
dielectric window
conical structure
conducting fluid
cooling system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2021559101A
Other languages
English (en)
Japanese (ja)
Other versions
JP7461965B2 (ja
JP2022526980A (ja
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Priority claimed from PCT/US2020/027081 external-priority patent/WO2020210240A1/en
Publication of JP2022526980A publication Critical patent/JP2022526980A/ja
Publication of JP2022526980A5 publication Critical patent/JP2022526980A5/ja
Application granted granted Critical
Publication of JP7461965B2 publication Critical patent/JP7461965B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2021559101A 2019-04-08 2020-04-07 プラズマ系反応器のための冷却 Active JP7461965B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201962830896P 2019-04-08 2019-04-08
US62/830,896 2019-04-08
PCT/US2020/027081 WO2020210240A1 (en) 2019-04-08 2020-04-07 Cooling for a plasma-based reactor

Publications (3)

Publication Number Publication Date
JP2022526980A JP2022526980A (ja) 2022-05-27
JP2022526980A5 true JP2022526980A5 (enExample) 2023-05-02
JP7461965B2 JP7461965B2 (ja) 2024-04-04

Family

ID=72751778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021559101A Active JP7461965B2 (ja) 2019-04-08 2020-04-07 プラズマ系反応器のための冷却

Country Status (6)

Country Link
US (2) US11676798B2 (enExample)
JP (1) JP7461965B2 (enExample)
KR (1) KR102606056B1 (enExample)
CN (1) CN113661560B (enExample)
TW (2) TWI834857B (enExample)
WO (1) WO2020210240A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11676798B2 (en) 2019-04-08 2023-06-13 Lam Research Corporation Cooling for a plasma-based reactor
US11894152B2 (en) * 2021-05-05 2024-02-06 Westinghouse Electric Company Llc Modular thermal and radiation shielding with passive heat removal
CN116168997A (zh) * 2021-11-24 2023-05-26 上海华力集成电路制造有限公司 一种改善刻蚀中等离子体分布的方法

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