JP2022512001A5 - - Google Patents

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Publication number
JP2022512001A5
JP2022512001A5 JP2021543594A JP2021543594A JP2022512001A5 JP 2022512001 A5 JP2022512001 A5 JP 2022512001A5 JP 2021543594 A JP2021543594 A JP 2021543594A JP 2021543594 A JP2021543594 A JP 2021543594A JP 2022512001 A5 JP2022512001 A5 JP 2022512001A5
Authority
JP
Japan
Prior art keywords
mirror assembly
heat
generating resistor
current
assembly according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021543594A
Other languages
English (en)
Japanese (ja)
Other versions
JP7358486B2 (ja
JP2022512001A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/IB2019/001075 external-priority patent/WO2020070554A2/en
Publication of JP2022512001A publication Critical patent/JP2022512001A/ja
Publication of JP2022512001A5 publication Critical patent/JP2022512001A5/ja
Priority to JP2023164129A priority Critical patent/JP7727695B2/ja
Application granted granted Critical
Publication of JP7358486B2 publication Critical patent/JP7358486B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2021543594A 2018-10-04 2019-10-03 発熱体を有する電気光学システム Active JP7358486B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2023164129A JP7727695B2 (ja) 2018-10-04 2023-09-27 発熱体を有する電気光学システム

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862741034P 2018-10-04 2018-10-04
US62/741,034 2018-10-04
PCT/IB2019/001075 WO2020070554A2 (en) 2018-10-04 2019-10-03 Electrooptical systems having heating elements

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2023164129A Division JP7727695B2 (ja) 2018-10-04 2023-09-27 発熱体を有する電気光学システム

Publications (3)

Publication Number Publication Date
JP2022512001A JP2022512001A (ja) 2022-02-01
JP2022512001A5 true JP2022512001A5 (https=) 2022-10-19
JP7358486B2 JP7358486B2 (ja) 2023-10-10

Family

ID=68425165

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2021543594A Active JP7358486B2 (ja) 2018-10-04 2019-10-03 発熱体を有する電気光学システム
JP2023164129A Active JP7727695B2 (ja) 2018-10-04 2023-09-27 発熱体を有する電気光学システム

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2023164129A Active JP7727695B2 (ja) 2018-10-04 2023-09-27 発熱体を有する電気光学システム

Country Status (6)

Country Link
US (2) US12105277B2 (https=)
EP (1) EP3861367B1 (https=)
JP (2) JP7358486B2 (https=)
KR (1) KR102793661B1 (https=)
CN (1) CN112771406A (https=)
WO (1) WO2020070554A2 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11368658B2 (en) * 2020-06-15 2022-06-21 Microsoft Technology Licensing, Llc Amplitude and biphase control of MEMS scanning device
US11681048B2 (en) 2020-07-31 2023-06-20 Uatc, Llc Multi-channel light detection and ranging (LIDAR) unit having a telecentric lens assembly and single circuit board for emitters and detectors
US11624653B2 (en) 2020-12-03 2023-04-11 Artilux, Inc. Multi-application optical sensing apparatus and method thereof
US20220204339A1 (en) * 2020-12-29 2022-06-30 Beijing Voyager Technology Co., Ltd. Array of heating resistors for mems mirrors
FR3121760B1 (fr) * 2021-04-12 2023-12-29 Commissariat Energie Atomique Dispositif reflecteur destine a emettre une pluralite de faisceaux reflechis a partir d’un unique faisceau lumineux principal
JPWO2023233809A1 (https=) * 2022-05-30 2023-12-07
CN115808658A (zh) * 2022-11-24 2023-03-17 北京北醒智能设备有限公司 一种雷达系统自加热方法、雷达系统及终端设备
WO2025045338A1 (en) * 2023-08-25 2025-03-06 Volkswagen Aktiengesellschaft A sensing device, comprising a first electrooptical device for a motor vehicle, as well as an arrangement

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2981600B2 (ja) * 1996-01-17 1999-11-22 オムロン株式会社 光スキャナおよびそれを用いた光センサ装置
JP2001188970A (ja) * 1999-12-28 2001-07-10 Optex Co Ltd 赤外線センサ
JP3690663B2 (ja) * 2001-10-01 2005-08-31 京セラ株式会社 光半導体装置
US7485485B2 (en) 2004-02-09 2009-02-03 Microvision, Inc. Method and apparatus for making a MEMS scanner
JP2007322466A (ja) * 2006-05-30 2007-12-13 Canon Inc 光偏向器、及びそれを用いた光学機器
US7566865B2 (en) * 2007-02-20 2009-07-28 Elbit Systems Of America, Llc Temperature controlled photodetector
JP2009053100A (ja) * 2007-08-28 2009-03-12 Mitsutoyo Corp Memsモジュール及びmemsモジュールの特性安定化方法
EP2223169A4 (en) 2007-12-10 2011-05-25 Artificial Muscle Inc OPTICAL LENS IMAGE STABILIZATION SYSTEMS
JP2009229517A (ja) 2008-03-19 2009-10-08 Seiko Epson Corp アクチュエータ
JP5531275B2 (ja) * 2009-10-02 2014-06-25 旭化成エレクトロニクス株式会社 赤外線センサ及びその製造方法
EP2487480B1 (en) * 2011-02-09 2014-01-15 ABB Technology AG Optical sensor element and optical sample analysing apparatus
EP2703872A4 (en) 2011-04-26 2014-08-20 Toyota Motor Co Ltd MIRROR DEVICE
JP6253915B2 (ja) * 2013-08-01 2017-12-27 浜松ホトニクス株式会社 アクチュエータ装置及びミラー駆動装置
JP2016080890A (ja) 2014-10-17 2016-05-16 株式会社リコー 電気機械システム
CN111506132B (zh) * 2015-04-20 2022-04-05 深圳市大疆创新科技有限公司 用于对传感器操作进行热调节的系统和方法
CA2992105C (en) * 2015-07-13 2020-08-11 Intrepid Visions Inc. Systems and methods for micro-cantilever actuation by base excitation
CN205120965U (zh) * 2015-11-13 2016-03-30 武汉理工大学 一种基于mems微镜的激光雷达
WO2018001467A1 (fr) 2016-06-28 2018-01-04 Institut National Des Radioéléments Procede de production d'une fraction contenant le radio-isotope mo-99 pur, fraction et generateur contenant ladite fraction du radio-isotope mo-99 pur
US20180081037A1 (en) 2016-09-20 2018-03-22 Innoviz Technologies Ltd. Methods Circuits Assemblies Devices Systems and Functionally Associated Machine Executable Code for Controllably Steering an Optical Beam
KR102554215B1 (ko) * 2016-09-20 2023-07-11 이노비즈 테크놀로지스 엘티디 Lidar 시스템 및 방법
KR102605618B1 (ko) * 2016-11-14 2023-11-23 삼성전자주식회사 이미지 센서 패키지

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