CN112771406A - 具有加热元件的电光系统 - Google Patents

具有加热元件的电光系统 Download PDF

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Publication number
CN112771406A
CN112771406A CN201980064254.0A CN201980064254A CN112771406A CN 112771406 A CN112771406 A CN 112771406A CN 201980064254 A CN201980064254 A CN 201980064254A CN 112771406 A CN112771406 A CN 112771406A
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CN
China
Prior art keywords
light
heating resistor
heating
temperature
mirror assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201980064254.0A
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English (en)
Chinese (zh)
Inventor
Y·阿尔珀恩
M·吉尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Creative Technology Ltd
Original Assignee
Creative Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Creative Technology Ltd filed Critical Creative Technology Ltd
Publication of CN112771406A publication Critical patent/CN112771406A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems ; Auxiliary parts of microstructural devices or systems
    • B81B7/0083—Temperature control
    • B81B7/0087—On-device systems and sensors for controlling, regulating or monitoring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G01S17/93—Lidar systems specially adapted for specific applications for anti-collision purposes
    • G01S17/931—Lidar systems specially adapted for specific applications for anti-collision purposes of land vehicles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/16—Optical objectives specially designed for the purposes specified below for use in conjunction with image converters or intensifiers, or for use with projectors, e.g. objectives for projection TV
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B1/00—Details of electric heating devices
    • H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
    • H05B1/0227—Applications
    • H05B1/023—Industrial applications
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/18—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor the conductor being embedded in an insulating material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
CN201980064254.0A 2018-10-04 2019-10-03 具有加热元件的电光系统 Pending CN112771406A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862741034P 2018-10-04 2018-10-04
US62/741,034 2018-10-04
PCT/IB2019/001075 WO2020070554A2 (en) 2018-10-04 2019-10-03 Electrooptical systems having heating elements

Publications (1)

Publication Number Publication Date
CN112771406A true CN112771406A (zh) 2021-05-07

Family

ID=68425165

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980064254.0A Pending CN112771406A (zh) 2018-10-04 2019-10-03 具有加热元件的电光系统

Country Status (6)

Country Link
US (2) US12105277B2 (https=)
EP (1) EP3861367B1 (https=)
JP (2) JP7358486B2 (https=)
KR (1) KR102793661B1 (https=)
CN (1) CN112771406A (https=)
WO (1) WO2020070554A2 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11368658B2 (en) * 2020-06-15 2022-06-21 Microsoft Technology Licensing, Llc Amplitude and biphase control of MEMS scanning device
US11681048B2 (en) 2020-07-31 2023-06-20 Uatc, Llc Multi-channel light detection and ranging (LIDAR) unit having a telecentric lens assembly and single circuit board for emitters and detectors
US11624653B2 (en) 2020-12-03 2023-04-11 Artilux, Inc. Multi-application optical sensing apparatus and method thereof
US20220204339A1 (en) * 2020-12-29 2022-06-30 Beijing Voyager Technology Co., Ltd. Array of heating resistors for mems mirrors
FR3121760B1 (fr) * 2021-04-12 2023-12-29 Commissariat Energie Atomique Dispositif reflecteur destine a emettre une pluralite de faisceaux reflechis a partir d’un unique faisceau lumineux principal
JPWO2023233809A1 (https=) * 2022-05-30 2023-12-07
CN115808658A (zh) * 2022-11-24 2023-03-17 北京北醒智能设备有限公司 一种雷达系统自加热方法、雷达系统及终端设备
WO2025045338A1 (en) * 2023-08-25 2025-03-06 Volkswagen Aktiengesellschaft A sensing device, comprising a first electrooptical device for a motor vehicle, as well as an arrangement

Citations (7)

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US20050173770A1 (en) * 2004-02-09 2005-08-11 Linden Kelly D. Method and apparatus for making a MEMS scanner
CN101082697A (zh) * 2006-05-30 2007-12-05 佳能株式会社 光偏转器及使用光偏转器的光学仪器
JP2009053100A (ja) * 2007-08-28 2009-03-12 Mitsutoyo Corp Ｍｅｍｓモジュール及びｍｅｍｓモジュールの特性安定化方法
CN101925836A (zh) * 2007-12-10 2010-12-22 人工肌肉有限公司 光学透镜图像稳定系统
CN205120965U (zh) * 2015-11-13 2016-03-30 武汉理工大学 一种基于mems微镜的激光雷达
CN107533339A (zh) * 2015-04-20 2018-01-02 深圳市大疆创新科技有限公司 用于对传感器操作进行热调节的系统和方法
CN108349723A (zh) * 2015-07-13 2018-07-31 勇愿公司 用于通过基部激励进行微悬臂致动的系统和方法

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JP2981600B2 (ja) * 1996-01-17 1999-11-22 オムロン株式会社 光スキャナおよびそれを用いた光センサ装置
JP2001188970A (ja) * 1999-12-28 2001-07-10 Optex Co Ltd 赤外線センサ
JP3690663B2 (ja) * 2001-10-01 2005-08-31 京セラ株式会社 光半導体装置
US7566865B2 (en) * 2007-02-20 2009-07-28 Elbit Systems Of America, Llc Temperature controlled photodetector
JP2009229517A (ja) 2008-03-19 2009-10-08 Seiko Epson Corp アクチュエータ
JP5531275B2 (ja) * 2009-10-02 2014-06-25 旭化成エレクトロニクス株式会社 赤外線センサ及びその製造方法
EP2487480B1 (en) * 2011-02-09 2014-01-15 ABB Technology AG Optical sensor element and optical sample analysing apparatus
EP2703872A4 (en) 2011-04-26 2014-08-20 Toyota Motor Co Ltd MIRROR DEVICE
JP6253915B2 (ja) * 2013-08-01 2017-12-27 浜松ホトニクス株式会社 アクチュエータ装置及びミラー駆動装置
JP2016080890A (ja) 2014-10-17 2016-05-16 株式会社リコー 電気機械システム
WO2018001467A1 (fr) 2016-06-28 2018-01-04 Institut National Des Radioéléments Procede de production d'une fraction contenant le radio-isotope mo-99 pur, fraction et generateur contenant ladite fraction du radio-isotope mo-99 pur
US20180081037A1 (en) 2016-09-20 2018-03-22 Innoviz Technologies Ltd. Methods Circuits Assemblies Devices Systems and Functionally Associated Machine Executable Code for Controllably Steering an Optical Beam
KR102554215B1 (ko) * 2016-09-20 2023-07-11 이노비즈 테크놀로지스 엘티디 Lidar 시스템 및 방법
KR102605618B1 (ko) * 2016-11-14 2023-11-23 삼성전자주식회사 이미지 센서 패키지

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050173770A1 (en) * 2004-02-09 2005-08-11 Linden Kelly D. Method and apparatus for making a MEMS scanner
CN101082697A (zh) * 2006-05-30 2007-12-05 佳能株式会社 光偏转器及使用光偏转器的光学仪器
JP2009053100A (ja) * 2007-08-28 2009-03-12 Mitsutoyo Corp Ｍｅｍｓモジュール及びｍｅｍｓモジュールの特性安定化方法
CN101925836A (zh) * 2007-12-10 2010-12-22 人工肌肉有限公司 光学透镜图像稳定系统
CN107533339A (zh) * 2015-04-20 2018-01-02 深圳市大疆创新科技有限公司 用于对传感器操作进行热调节的系统和方法
CN108349723A (zh) * 2015-07-13 2018-07-31 勇愿公司 用于通过基部激励进行微悬臂致动的系统和方法
CN205120965U (zh) * 2015-11-13 2016-03-30 武汉理工大学 一种基于mems微镜的激光雷达

Also Published As

Publication number Publication date
EP3861367B1 (en) 2026-04-29
KR102793661B1 (ko) 2025-04-08
JP7358486B2 (ja) 2023-10-10
US20240361587A1 (en) 2024-10-31
WO2020070554A2 (en) 2020-04-09
EP3861367A2 (en) 2021-08-11
US12105277B2 (en) 2024-10-01
JP7727695B2 (ja) 2025-08-21
JP2023182655A (ja) 2023-12-26
US20210341729A1 (en) 2021-11-04
KR20210066906A (ko) 2021-06-07
JP2022512001A (ja) 2022-02-01
WO2020070554A3 (en) 2020-05-14

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