JP2022511822A5 - - Google Patents

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Publication number
JP2022511822A5
JP2022511822A5 JP2021531555A JP2021531555A JP2022511822A5 JP 2022511822 A5 JP2022511822 A5 JP 2022511822A5 JP 2021531555 A JP2021531555 A JP 2021531555A JP 2021531555 A JP2021531555 A JP 2021531555A JP 2022511822 A5 JP2022511822 A5 JP 2022511822A5
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JP
Japan
Prior art keywords
silicon
oxygen
substrate
containing layer
chamber
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JP2021531555A
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English (en)
Japanese (ja)
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JP2022511822A (ja
JP7598859B2 (ja
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Priority claimed from PCT/US2019/062833 external-priority patent/WO2020117496A1/en
Publication of JP2022511822A publication Critical patent/JP2022511822A/ja
Publication of JP2022511822A5 publication Critical patent/JP2022511822A5/ja
Application granted granted Critical
Publication of JP7598859B2 publication Critical patent/JP7598859B2/ja
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JP2021531555A 2018-12-04 2019-11-22 Ｓｉ－ヒドロキシル結合を架橋するための硬化方法 Active JP7598859B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201862775008P 2018-12-04 2018-12-04
US62/775,008 2018-12-04
US201962796899P 2019-01-25 2019-01-25
US62/796,899 2019-01-25
PCT/US2019/062833 WO2020117496A1 (en) 2018-12-04 2019-11-22 Cure methods for cross-linking si-hydroxyl bonds

Publications (3)

Publication Number Publication Date
JP2022511822A JP2022511822A (ja) 2022-02-01
JP2022511822A5 true JP2022511822A5 (https=) 2022-12-02
JP7598859B2 JP7598859B2 (ja) 2024-12-12

Family

ID=70849615

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021531555A Active JP7598859B2 (ja) 2018-12-04 2019-11-22 Ｓｉ－ヒドロキシル結合を架橋するための硬化方法

Country Status (7)

Country Link
US (1) US11090683B2 (https=)
JP (1) JP7598859B2 (https=)
KR (1) KR102787773B1 (https=)
CN (1) CN113169039A (https=)
SG (1) SG11202105182QA (https=)
TW (1) TWI860309B (https=)
WO (1) WO2020117496A1 (https=)

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US20240106070A1 (en) 2021-07-06 2024-03-28 Lg Energy Solution, Ltd. Battery Cell And Battery Module Comprising Same
US20240363337A1 (en) * 2023-04-26 2024-10-31 Applied Materials, Inc. Methods for forming low-k dielectric materials

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