JP2016204685A5 - - Google Patents

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Publication number
JP2016204685A5
JP2016204685A5 JP2015085018A JP2015085018A JP2016204685A5 JP 2016204685 A5 JP2016204685 A5 JP 2016204685A5 JP 2015085018 A JP2015085018 A JP 2015085018A JP 2015085018 A JP2015085018 A JP 2015085018A JP 2016204685 A5 JP2016204685 A5 JP 2016204685A5
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JP
Japan
Prior art keywords
heating element
vacuum chamber
gas
pressure
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015085018A
Other languages
English (en)
Japanese (ja)
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JP6474673B2 (ja
JP2016204685A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2015085018A external-priority patent/JP6474673B2/ja
Priority to JP2015085018A priority Critical patent/JP6474673B2/ja
Priority to PCT/JP2016/061070 priority patent/WO2016167152A1/ja
Priority to SG11201708290QA priority patent/SG11201708290QA/en
Priority to EP16779943.6A priority patent/EP3284846B1/en
Priority to US15/566,515 priority patent/US10487397B2/en
Priority to AU2016248605A priority patent/AU2016248605A1/en
Priority to KR1020177032902A priority patent/KR20170138476A/ko
Priority to MYPI2017703465A priority patent/MY186446A/en
Priority to CN201680021428.1A priority patent/CN107429392B/zh
Priority to TW105111263A priority patent/TWI686497B/zh
Publication of JP2016204685A publication Critical patent/JP2016204685A/ja
Priority to PH12017501752A priority patent/PH12017501752A1/en
Publication of JP2016204685A5 publication Critical patent/JP2016204685A5/ja
Publication of JP6474673B2 publication Critical patent/JP6474673B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2015085018A 2015-04-17 2015-04-17 ガスバリア性プラスチック成形体及びその製造方法 Active JP6474673B2 (ja)

Priority Applications (11)

Application Number Priority Date Filing Date Title
JP2015085018A JP6474673B2 (ja) 2015-04-17 2015-04-17 ガスバリア性プラスチック成形体及びその製造方法
KR1020177032902A KR20170138476A (ko) 2015-04-17 2016-04-05 가스 배리어성 플라스틱 성형체 및 그 제조 방법
CN201680021428.1A CN107429392B (zh) 2015-04-17 2016-04-05 阻气性塑料成型体及其制造方法
EP16779943.6A EP3284846B1 (en) 2015-04-17 2016-04-05 Gas-barrier plastic molded product and method for manufacturing same
US15/566,515 US10487397B2 (en) 2015-04-17 2016-04-05 Gas-barrier plastic molded product and method for manufacturing same
AU2016248605A AU2016248605A1 (en) 2015-04-17 2016-04-05 Gas-barrier plastic molded product and method for manufacturing same
PCT/JP2016/061070 WO2016167152A1 (ja) 2015-04-17 2016-04-05 ガスバリア性プラスチック成形体及びその製造方法
MYPI2017703465A MY186446A (en) 2015-04-17 2016-04-05 Gas-barrier plastic molded product and method for manufacturing same
SG11201708290QA SG11201708290QA (en) 2015-04-17 2016-04-05 Gas-barrier plastic molded product and method for manufacturing same
TW105111263A TWI686497B (zh) 2015-04-17 2016-04-11 阻氣性塑膠成形體及其製造方法
PH12017501752A PH12017501752A1 (en) 2015-04-17 2017-09-25 Gas-barrier plastic molded product and method for manufacturing same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015085018A JP6474673B2 (ja) 2015-04-17 2015-04-17 ガスバリア性プラスチック成形体及びその製造方法

Publications (3)

Publication Number Publication Date
JP2016204685A JP2016204685A (ja) 2016-12-08
JP2016204685A5 true JP2016204685A5 (https=) 2018-01-25
JP6474673B2 JP6474673B2 (ja) 2019-02-27

Family

ID=57126273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015085018A Active JP6474673B2 (ja) 2015-04-17 2015-04-17 ガスバリア性プラスチック成形体及びその製造方法

Country Status (11)

Country Link
US (1) US10487397B2 (https=)
EP (1) EP3284846B1 (https=)
JP (1) JP6474673B2 (https=)
KR (1) KR20170138476A (https=)
CN (1) CN107429392B (https=)
AU (1) AU2016248605A1 (https=)
MY (1) MY186446A (https=)
PH (1) PH12017501752A1 (https=)
SG (1) SG11201708290QA (https=)
TW (1) TWI686497B (https=)
WO (1) WO2016167152A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3260573B1 (en) * 2015-02-18 2019-10-02 Kirin Company Limited Heat generation element and method for producing the same
JP2018095937A (ja) * 2016-12-15 2018-06-21 三菱重工機械システム株式会社 電極状態評価装置、成膜装置及び電極状態評価方法
JP7163041B2 (ja) * 2018-03-13 2022-10-31 東レエンジニアリング株式会社 バリアフィルムおよび光変換部材

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2001250886A1 (en) * 2000-03-20 2001-10-03 N V. Bekaert S.A. Materials having low dielectric constants and methods of making
JP2004107689A (ja) * 2002-09-13 2004-04-08 Ulvac Japan Ltd ダイヤモンド状炭素膜形成方法及び製造装置
US7288311B2 (en) * 2003-02-10 2007-10-30 Dai Nippon Printing Co., Ltd. Barrier film
KR101307040B1 (ko) 2005-05-27 2013-09-11 기린비루 가부시키가이샤 가스 배리어성 플라스틱 용기의 제조 장치, 그 용기의 제조 방법
JP5290564B2 (ja) * 2007-11-13 2013-09-18 トーヨーエイテック株式会社 炭素質薄膜
WO2010067857A1 (ja) * 2008-12-12 2010-06-17 リンテック株式会社 積層体、その製造方法、電子デバイス部材および電子デバイス
JP5704610B2 (ja) * 2009-05-22 2015-04-22 リンテック株式会社 成形体、その製造方法、電子デバイス用部材および電子デバイス
WO2012091095A1 (ja) * 2010-12-28 2012-07-05 麒麟麦酒株式会社 ガスバリア性プラスチック成形体の製造方法
JP5684288B2 (ja) * 2010-12-28 2015-03-11 麒麟麦酒株式会社 ガスバリア性プラスチック成形体及びその製造方法
JP5706777B2 (ja) 2011-07-25 2015-04-22 麒麟麦酒株式会社 ガスバリア性プラスチック成形体
BR112014015773A8 (pt) 2011-12-27 2017-07-04 Kirin Brewery aparelho para a formação de película fina
TWI576242B (zh) 2011-12-28 2017-04-01 Kirin Brewery Gas barrier plastic molded body and manufacturing method thereof
JP6009243B2 (ja) 2012-06-27 2016-10-19 麒麟麦酒株式会社 炭酸飲料用ボトル及びその製造方法

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