JP2022505395A5 - - Google Patents

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Publication number
JP2022505395A5
JP2022505395A5 JP2021521399A JP2021521399A JP2022505395A5 JP 2022505395 A5 JP2022505395 A5 JP 2022505395A5 JP 2021521399 A JP2021521399 A JP 2021521399A JP 2021521399 A JP2021521399 A JP 2021521399A JP 2022505395 A5 JP2022505395 A5 JP 2022505395A5
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Japan
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approximately
bias
watts
substrate
mhz
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JP2021521399A
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English (en)
Japanese (ja)
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JP2022505395A (ja
JP7462626B2 (ja
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Priority claimed from PCT/US2019/054812 external-priority patent/WO2020086241A1/en
Publication of JP2022505395A publication Critical patent/JP2022505395A/ja
Publication of JP2022505395A5 publication Critical patent/JP2022505395A5/ja
Priority to JP2024049050A priority Critical patent/JP7778835B2/ja
Application granted granted Critical
Publication of JP7462626B2 publication Critical patent/JP7462626B2/ja
Priority to JP2025145127A priority patent/JP2026000945A/ja
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JP2021521399A 2018-10-26 2019-10-04 パターニング応用のための高密度炭素膜 Active JP7462626B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2024049050A JP7778835B2 (ja) 2018-10-26 2024-03-26 パターニング応用のための高密度炭素膜
JP2025145127A JP2026000945A (ja) 2018-10-26 2025-09-02 パターニング応用のための高密度炭素膜

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862751213P 2018-10-26 2018-10-26
US62/751,213 2018-10-26
PCT/US2019/054812 WO2020086241A1 (en) 2018-10-26 2019-10-04 High density carbon films for patterning applications

Related Child Applications (1)

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JP2024049050A Division JP7778835B2 (ja) 2018-10-26 2024-03-26 パターニング応用のための高密度炭素膜

Publications (3)

Publication Number Publication Date
JP2022505395A JP2022505395A (ja) 2022-01-14
JP2022505395A5 true JP2022505395A5 (cg-RX-API-DMAC7.html) 2022-10-13
JP7462626B2 JP7462626B2 (ja) 2024-04-05

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ID=70327222

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JP2021521399A Active JP7462626B2 (ja) 2018-10-26 2019-10-04 パターニング応用のための高密度炭素膜
JP2024049050A Active JP7778835B2 (ja) 2018-10-26 2024-03-26 パターニング応用のための高密度炭素膜
JP2025145127A Pending JP2026000945A (ja) 2018-10-26 2025-09-02 パターニング応用のための高密度炭素膜

Family Applications After (2)

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JP2024049050A Active JP7778835B2 (ja) 2018-10-26 2024-03-26 パターニング応用のための高密度炭素膜
JP2025145127A Pending JP2026000945A (ja) 2018-10-26 2025-09-02 パターニング応用のための高密度炭素膜

Country Status (7)

Country Link
US (2) US11842897B2 (cg-RX-API-DMAC7.html)
JP (3) JP7462626B2 (cg-RX-API-DMAC7.html)
KR (2) KR102758013B1 (cg-RX-API-DMAC7.html)
CN (2) CN120854258A (cg-RX-API-DMAC7.html)
SG (1) SG11202101496WA (cg-RX-API-DMAC7.html)
TW (2) TWI827705B (cg-RX-API-DMAC7.html)
WO (1) WO2020086241A1 (cg-RX-API-DMAC7.html)

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US20250376761A1 (en) * 2024-06-07 2025-12-11 Applied Materials, Inc. Method for forming high density carbon films with reduced substrate backside damage

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