JP2022169477A5 - - Google Patents
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- Publication number
- JP2022169477A5 JP2022169477A5 JP2022072274A JP2022072274A JP2022169477A5 JP 2022169477 A5 JP2022169477 A5 JP 2022169477A5 JP 2022072274 A JP2022072274 A JP 2022072274A JP 2022072274 A JP2022072274 A JP 2022072274A JP 2022169477 A5 JP2022169477 A5 JP 2022169477A5
- Authority
- JP
- Japan
- Prior art keywords
- chemical mechanical
- mechanical polishing
- group
- formula
- chloride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 238000005498 polishing Methods 0.000 claims description 22
- 239000000126 substance Substances 0.000 claims description 17
- 239000000203 mixture Substances 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 10
- 239000003002 pH adjusting agent Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 150000001450 anions Chemical group 0.000 claims description 5
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 claims description 5
- 230000003115 biocidal effect Effects 0.000 claims description 5
- 239000003139 biocide Substances 0.000 claims description 5
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 3
- 239000006061 abrasive grain Substances 0.000 claims description 2
- 150000004023 quaternary phosphonium compounds Chemical class 0.000 claims 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical group [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims 3
- WTEPWWCRWNCUNA-UHFFFAOYSA-M benzyl(triphenyl)phosphanium;bromide Chemical compound [Br-].C=1C=CC=CC=1[P+](C=1C=CC=CC=1)(C=1C=CC=CC=1)CC1=CC=CC=C1 WTEPWWCRWNCUNA-UHFFFAOYSA-M 0.000 claims 2
- USFRYJRPHFMVBZ-UHFFFAOYSA-M benzyl(triphenyl)phosphanium;chloride Chemical compound [Cl-].C=1C=CC=CC=1[P+](C=1C=CC=CC=1)(C=1C=CC=CC=1)CC1=CC=CC=C1 USFRYJRPHFMVBZ-UHFFFAOYSA-M 0.000 claims 2
- JHYNXXDQQHTCHJ-UHFFFAOYSA-M ethyl(triphenyl)phosphanium;bromide Chemical compound [Br-].C=1C=CC=CC=1[P+](C=1C=CC=CC=1)(CC)C1=CC=CC=C1 JHYNXXDQQHTCHJ-UHFFFAOYSA-M 0.000 claims 2
- NJXBVBPTDHBAID-UHFFFAOYSA-M ethyl(triphenyl)phosphanium;chloride Chemical compound [Cl-].C=1C=CC=CC=1[P+](C=1C=CC=CC=1)(CC)C1=CC=CC=C1 NJXBVBPTDHBAID-UHFFFAOYSA-M 0.000 claims 2
- LSEFCHWGJNHZNT-UHFFFAOYSA-M methyl(triphenyl)phosphanium;bromide Chemical compound [Br-].C=1C=CC=CC=1[P+](C=1C=CC=CC=1)(C)C1=CC=CC=C1 LSEFCHWGJNHZNT-UHFFFAOYSA-M 0.000 claims 2
- QRPRIOOKPZSVFN-UHFFFAOYSA-M methyl(triphenyl)phosphanium;chloride Chemical compound [Cl-].C=1C=CC=CC=1[P+](C=1C=CC=CC=1)(C)C1=CC=CC=C1 QRPRIOOKPZSVFN-UHFFFAOYSA-M 0.000 claims 2
- BRKFQVAOMSWFDU-UHFFFAOYSA-M tetraphenylphosphanium;bromide Chemical compound [Br-].C1=CC=CC=C1[P+](C=1C=CC=CC=1)(C=1C=CC=CC=1)C1=CC=CC=C1 BRKFQVAOMSWFDU-UHFFFAOYSA-M 0.000 claims 2
- WAGFXJQAIZNSEQ-UHFFFAOYSA-M tetraphenylphosphonium chloride Chemical compound [Cl-].C1=CC=CC=C1[P+](C=1C=CC=CC=1)(C=1C=CC=CC=1)C1=CC=CC=C1 WAGFXJQAIZNSEQ-UHFFFAOYSA-M 0.000 claims 2
- 150000003863 ammonium salts Chemical class 0.000 claims 1
- 239000008119 colloidal silica Substances 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 description 3
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US17/241,377 US11274230B1 (en) | 2021-04-27 | 2021-04-27 | Polishing composition and method of polishing a substrate having enhanced defect inhibition |
| US17/241,377 | 2021-04-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2022169477A JP2022169477A (ja) | 2022-11-09 |
| JP2022169477A5 true JP2022169477A5 (enExample) | 2025-04-21 |
Family
ID=80683392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022072274A Pending JP2022169477A (ja) | 2021-04-27 | 2022-04-26 | 研磨組成物及び向上した欠陥防止を有する基材を研磨する方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US11274230B1 (enExample) |
| JP (1) | JP2022169477A (enExample) |
| KR (1) | KR20220147525A (enExample) |
| CN (1) | CN115247027B (enExample) |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5393469A (en) * | 1992-03-20 | 1995-02-28 | Lumigen, Inc. | Polymeric phosphonium salts providing enhanced chemiluminescence from 1,2-dioxetanes |
| JP2000144109A (ja) * | 1998-11-10 | 2000-05-26 | Okamoto Machine Tool Works Ltd | 化学機械研磨用研磨剤スラリ− |
| US9129907B2 (en) | 2006-09-08 | 2015-09-08 | Cabot Microelectronics Corporation | Onium-containing CMP compositions and methods of use thereof |
| KR101247890B1 (ko) * | 2008-09-19 | 2013-03-26 | 캐보트 마이크로일렉트로닉스 코포레이션 | 저-ｋ 유전체를 위한 장벽 슬러리 |
| KR20160002728A (ko) * | 2013-04-25 | 2016-01-08 | 히타치가세이가부시끼가이샤 | Cmp용 연마액 및 이것을 사용한 연마 방법 |
| US10283373B2 (en) * | 2014-07-09 | 2019-05-07 | Hitachi Chemical Company, Ltd. | CMP polishing liquid and polishing method |
| US9631122B1 (en) * | 2015-10-28 | 2017-04-25 | Cabot Microelectronics Corporation | Tungsten-processing slurry with cationic surfactant |
| WO2019142292A1 (ja) * | 2018-01-18 | 2019-07-25 | 日立化成株式会社 | 研磨液、研磨液セット及び研磨方法 |
| US10683439B2 (en) * | 2018-03-15 | 2020-06-16 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Polishing composition and method of polishing a substrate having enhanced defect inhibition |
| US10604678B1 (en) | 2019-02-08 | 2020-03-31 | Rohrn and Haas Electronic Materials CMP Holdings, Inc. | Chemical mechanical polishing of tungsten using a method and composition containing quaternary phosphonium compounds |
| TWI794474B (zh) * | 2019-04-15 | 2023-03-01 | 日商昭和電工材料股份有限公司 | 研磨液、研磨液套組及研磨方法 |
-
2021
- 2021-04-27 US US17/241,377 patent/US11274230B1/en active Active
-
2022
- 2022-04-24 CN CN202210436232.6A patent/CN115247027B/zh active Active
- 2022-04-25 KR KR1020220050984A patent/KR20220147525A/ko active Pending
- 2022-04-26 JP JP2022072274A patent/JP2022169477A/ja active Pending
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