JP2022104803A - 半導体デバイス - Google Patents
半導体デバイス Download PDFInfo
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
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- 229910005540 GaP Inorganic materials 0.000 description 1
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
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- 229910052710 silicon Inorganic materials 0.000 description 1
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- XLUBVTJUEUUZMR-UHFFFAOYSA-B silicon(4+);tetraphosphate Chemical compound [Si+4].[Si+4].[Si+4].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O XLUBVTJUEUUZMR-UHFFFAOYSA-B 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14603—Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
- H01L27/14607—Geometry of the photosensitive area
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
- H01L27/14645—Colour imagers
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L27/144—Devices controlled by radiation
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- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
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- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
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- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
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- Solid State Image Pick-Up Elements (AREA)
- Photovoltaic Devices (AREA)
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Abstract
Description
I=Aqφ0(1-e-αW) 方程式1
ここで、qは電荷量であり、φ0は毎秒単位面積当たりの光子数であり、空乏領域が十分に厚い場合にαW>>1である。
100,400,500:誘電体層
100a,112a,114a,412a,414a:上面
100b,112b,114b,412b,414b:底面
110,410,510:半導体基板
110a,500a:第1の側
110b,500b:第2の側
112,412:第1型半導体層
114,414:第2型半導体層
116:分離構造
118:平坦層
120:マイクロレンズ
130:カラーフィルタ
140:内部接続構造体
142:層間絶縁層
144:回路層
150,250:反射層
252:反射領域
420:下部電極
430:上部電極
A:凹部
A’:凸部
B:青色光フィルタ
DA:深さ
DA’,T100,T400,T500:厚さ
G:緑色光フィルタ
J:PN接合
L:光
P:感知画素
R:赤色光フィルタ
S:受光素子
Z:垂直方向
Claims (11)
- 凸部又は凹部を有する誘電体層と、
前記誘電体層上に順次積層された第1型半導体層及び第2型半導体層を備えた半導体基板であって、前記第1型半導体層が前記凸部又は前記凹部上に配置され、前記第1型半導体層の上面及び底面を、前記凸部に合わせて突出させるか又は前記凹部に合わせて窪ませ、前記第2型半導体層の底面を、前記凸部に合わせて突出させるか又は前記凹部に合わせて窪ませた半導体基板と、を備えた半導体デバイス。 - 前記凸部の厚さが前記誘電体層の厚さ以下であり、前記凹部の深さが前記誘電体層の厚さ以下である、請求項1に記載の半導体デバイス。
- 前記半導体デバイスがイメージセンサであり、前記誘電体層が複数の前記凸部又は複数の前記凹部を含み、前記半導体基板が、アレイ状に配置された複数の感知画素を備え、前記感知画素のそれぞれが複数の受光素子を備え、前記受光素子のそれぞれが、1つの前記第1型半導体層及び1つの前記第2型半導体層を備え、前記受光素子のそれぞれが、2つ以上の前記凸部と重なるか又は2つ以上の前記凹部と重なる、請求項1に記載の半導体デバイス。
- 前記半導体基板上に配置された複数のカラーフィルタと、
複数の前記カラーフィルタ上に配置された複数のマイクロレンズと、
複数の前記受光素子に電気的に結合された内部接続構造体と、をさらに備え、前記誘電体層が、前記内部接続構造体と前記半導体基板との間に配置された、請求項3に記載の半導体デバイス。 - 反射層をさらに備え、前記誘電体層が、前記反射層と前記半導体基板との間に配置されるか、又は前記反射層が、前記誘電体層と前記半導体基板との間に配置された、請求項3に記載の半導体デバイス。
- 前記反射層が電源電圧又は接地電圧に結合された、請求項5に記載の半導体デバイス。
- 前記反射層が、前記半導体基板に平行な方向に連続して延在し、複数の前記受光素子の前記反射層への正投影が前記反射層の範囲内にある、請求項5に記載の半導体デバイス。
- 前記反射層が、複数の分離した反射領域を含み、複数の前記受光素子の前記反射層への正投影がそれぞれ複数の前記反射領域の範囲内にある、請求項5に記載の半導体デバイス。
- 前記半導体基板が、
複数の前記受光素子を互いに分離する複数の分離構造をさらに備えた、請求項3に記載の半導体デバイス。 - 前記半導体デバイスがソーラーデバイスである、請求項1に記載の半導体デバイス。
- 第1型半導体層及び第2型半導体層を備えた半導体基板を備え、前記第1型半導体層が、凸部又は凹部を有する上面を有し、前記第2型半導体層が前記第1型半導体層の前記上面に配置され、前記第2型半導体層の底面を、前記凸部に合わせて突出させるか又は前記凹部に合わせて窪ませた半導体デバイス。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW109146726 | 2020-12-29 | ||
TW109146726A TWI751867B (zh) | 2020-12-29 | 2020-12-29 | 半導體裝置 |
CN202110180113.4A CN114695401A (zh) | 2020-12-29 | 2021-02-08 | 半导体装置 |
CN202110180113.4 | 2021-02-08 |
Publications (1)
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JP2022104803A true JP2022104803A (ja) | 2022-07-11 |
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JP2021201113A Pending JP2022104803A (ja) | 2020-12-29 | 2021-12-10 | 半導体デバイス |
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US (1) | US11961854B2 (ja) |
JP (1) | JP2022104803A (ja) |
KR (1) | KR20220095113A (ja) |
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US11961854B2 (en) * | 2020-12-29 | 2024-04-16 | Sywe Neng Lee | Semiconductor device |
CN117497551B (zh) * | 2023-12-25 | 2024-04-30 | 合肥晶合集成电路股份有限公司 | 图像传感器及其制备方法 |
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US11398512B2 (en) * | 2019-12-19 | 2022-07-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Photo-sensing device and manufacturing method thereof |
US11961854B2 (en) * | 2020-12-29 | 2024-04-16 | Sywe Neng Lee | Semiconductor device |
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FR3137448A1 (fr) * | 2022-07-04 | 2024-01-05 | Commissariat à l'Energie Atomique et aux Energies Alternatives | Matrice de filtrage multispectral à filtres de Fabry-Pérot incurvés et procédés de fabrication |
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2021
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- 2021-12-02 KR KR1020210170988A patent/KR20220095113A/ko not_active Application Discontinuation
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