JP2022029546A - 半導体記憶装置及びその製造方法 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 99
- 238000003860 storage Methods 0.000 title claims abstract description 70
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 40
- 238000000034 method Methods 0.000 title claims abstract description 21
- 238000005530 etching Methods 0.000 claims abstract description 133
- 238000010030 laminating Methods 0.000 claims abstract description 13
- 239000004020 conductor Substances 0.000 claims description 22
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 14
- 238000009413 insulation Methods 0.000 abstract description 2
- 238000012545 processing Methods 0.000 description 60
- 239000011248 coating agent Substances 0.000 description 17
- 238000000576 coating method Methods 0.000 description 17
- 230000006870 function Effects 0.000 description 12
- 238000000926 separation method Methods 0.000 description 12
- 239000000463 material Substances 0.000 description 11
- 238000001020 plasma etching Methods 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- -1 fluorocarbon ions Chemical class 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000004380 ashing Methods 0.000 description 2
- 239000003575 carbonaceous material Substances 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/20—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels
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- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/10—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the top-view layout
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- H—ELECTRICITY
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/20—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels
- H10B41/23—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
- H10B41/27—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
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- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
- H10B41/35—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region with a cell select transistor, e.g. NAND
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/20—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels
- H10B43/23—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
- H10B43/27—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/30—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region
- H10B43/35—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region with cell select transistors, e.g. NAND
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- H—ELECTRICITY
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- H10B—ELECTRONIC MEMORY DEVICES
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Abstract
【解決手段】半導体記憶装置10の製造方法は、絶縁層30と犠牲層60とを交互に積層することにより被加工部70を形成する工程と、被加工部70の表面S11上にエッチングマスク300を形成する工程と、エッチングマスク300の一部である第1領域には、エッチングマスク300の表面S20から被加工部70の表面S11まで到達する複数の貫通孔310を形成し、且つ、エッチングマスク300のうち、第1領域に隣接する第2領域には、エッチングマスク300の表面S20の一部を被加工部70に向かって凹状に後退させた凹部320、を形成する工程と、を備える。
【選択図】図5
Description
Claims (7)
- 絶縁層と導体層とが交互に積層されている積層部と、
前記積層部を貫通している複数のメモリピラーと、を備え、
前記積層部の表面に対し垂直な方向に沿って見た場合において、
前記積層部は、複数の前記メモリピラーが設けられている部分である第1領域と、前記第1領域に隣接する部分であって、前記メモリピラーが設けられていない部分である第2領域と、を有しており、
前記第1領域と前記第2領域との境界に最も近い位置に形成された前記メモリピラーを第1メモリピラーとし、
前記境界に対し垂直な方向に沿って、前記第1メモリピラーと隣り合う位置に形成された前記メモリピラーを第2メモリピラーとしたときに、
前記積層部の表面における前記第1メモリピラーの幅と、当該表面における前記第2メモリピラーの幅とが互いに同一となっている半導体記憶装置。 - 前記積層部の表面に対し垂直な方向に沿って見た場合において、
前記境界に対し垂直な方向に沿って、前記第2メモリピラーと隣り合う位置に形成されており、且つ、前記第1メモリピラーとは反対側となる位置に形成された前記メモリピラーを第3メモリピラーとしたときに、
前記積層部の表面においては、
前記第1メモリピラーの縁から前記第2メモリピラーの縁までの最短距離と、前記第2メモリピラーの縁から前記第3メモリピラーの縁までの最短距離と、が互いに等しい、請求項1に記載の半導体記憶装置。 - 絶縁層と犠牲層とを交互に積層することにより被加工部を形成する工程と、
前記被加工部の表面上にエッチングマスクを形成する工程と、
前記エッチングマスクの一部である第1領域には、前記エッチングマスクの表面から前記被加工部の表面まで到達する複数の貫通孔を形成し、且つ、
前記エッチングマスクのうち、前記第1領域に隣接する第2領域には、前記エッチングマスクの表面の一部を前記被加工部に向かって凹状に後退させた凹部、を形成する工程と、を備える半導体記憶装置の製造方法。 - 前記エッチングマスクの表面に対し垂直な方向に沿って見た場合において、
前記凹部のうち前記第1領域側の端部が、前記第1領域と前記第2領域との境界と平行となるように、前記凹部を形成する、請求項3に記載の半導体記憶装置の製造方法。 - 前記エッチングマスクの表面に対し垂直な方向に沿って見た場合において、
前記第1領域と前記第2領域との境界に最も近い位置に形成された前記貫通孔を第1貫通孔とし、
前記境界に対し垂直な方向に沿って、前記第1貫通孔と隣り合う位置に形成された前記貫通孔を第2貫通孔としたときに、
前記第1貫通孔の幅と、前記第2貫通孔の幅とが、同一の高さ位置において互いに同一となるように、それぞれの前記貫通孔を形成する、請求項4に記載の半導体記憶装置の製造方法。 - 前記エッチングマスクの表面に対し垂直な方向に沿って見た場合において、
前記境界に対し垂直な方向に沿って、前記第2貫通孔と隣り合う位置に形成され、且つ、前記第1貫通孔とは反対側となる位置に形成された前記貫通孔を第3貫通孔としたときに、
前記第1貫通孔の縁から前記第2貫通孔の縁までの最短距離と、前記第2貫通孔の縁から前記第3貫通孔の縁までの最短距離と、が互いに等しくなるように、それぞれの前記貫通孔を形成する、請求項5に記載の半導体記憶装置の製造方法。 - 前記第1貫通孔の縁から前記第2貫通孔の縁までの最短距離と、前記第1貫通孔の縁からから前記凹部までの最短距離と、が互いに等しくなるように、それぞれの前記貫通孔及び前記凹部を形成する、請求項5に記載の半導体記憶装置の製造方法。
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TW110102331A TWI767527B (zh) | 2020-08-05 | 2021-01-21 | 半導體記憶裝置之製造方法 |
CN202110155967.7A CN114068561A (zh) | 2020-08-05 | 2021-02-04 | 半导体存储装置及其制造方法 |
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JP2015176103A (ja) | 2014-03-18 | 2015-10-05 | ルネサスエレクトロニクス株式会社 | 半導体集積回路装置の製造方法 |
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US9899399B2 (en) * | 2015-10-30 | 2018-02-20 | Sandisk Technologies Llc | 3D NAND device with five-folded memory stack structure configuration |
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