JP2022000930A - メモリデバイスおよびメモリデバイスの形成方法 - Google Patents
メモリデバイスおよびメモリデバイスの形成方法 Download PDFInfo
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- H—ELECTRICITY
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/20—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/50—EEPROM devices comprising charge-trapping gate insulators characterised by the boundary region between the core and peripheral circuit regions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0688—Integrated circuits having a three-dimensional layout
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
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- H10B43/10—EEPROM devices comprising charge-trapping gate insulators characterised by the top-view layout
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/20—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels
- H10B43/23—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
- H10B43/27—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/30—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region
- H10B43/35—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region with cell select transistors, e.g. NAND
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Abstract
Description
本出願は、2017年3月7日に出願された中国特許出願第201710131738.5号の優先権を主張し、中国特許出願の内容全体は参照により本明細書に組み込まれる。
Claims (20)
- メモリデバイスであって、
基板と、
前記基板の上で第1の方向に沿って延伸する複数のワード線であって、前記複数のワード線は、第1の領域内で階段構造を形成する複数のワード線と、
第2の領域内に形成され、前記複数のワード線を貫通する複数のチャネルであって、前記第2の領域は、領域境界において前記第1の領域に隣接する、複数のチャネルと、
前記第1の領域および前記第2の領域内に、前記第1の方向に沿って形成されている絶縁スリットと
を備え、
前記絶縁スリットは、前記第1の領域内に形成され、前記第1の領域を分割する第1の絶縁スリット、および、前記第2の領域内に形成され、前記第2の領域を分割する第2の絶縁スリットを含み、
第2の方向において測定される前記第1の絶縁スリットの第1の幅は、前記第2の方向において測定される前記第2の絶縁スリットの第2の幅よりも大きく、
前記第1の絶縁スリットは、傾斜した側壁を含み、
前記第2の絶縁スリットは、垂直な側壁を含む、
メモリデバイス。 - 前記第1の方向は、前記基板の上面に平行である、
請求項1に記載のメモリデバイス。 - 前記第2の方向は、前記第1の方向に垂直である、
請求項1または2に記載のメモリデバイス。 - 前記第1の幅は、前記第1の方向に沿って均一である、
請求項1〜3のいずれか1項に記載のメモリデバイス。 - 前記第1の幅は、前記第2の幅よりも約10nm〜約50nm大きい、
請求項1〜4のいずれか1項に記載のメモリデバイス。 - 前記第1の幅は、前記第1の方向に沿って、前記領域境界から離れるに従って増大する、
請求項1〜5のいずれか1項に記載のメモリデバイス。 - 前記第1の絶縁スリットは、長方形の形状を含む、
請求項1〜5のいずれか1項に記載のメモリデバイス。 - 前記第1の絶縁スリットは、湾曲端部構造を含む、
請求項1〜6のいずれか1項に記載のメモリデバイス。 - 前記湾曲端部構造は、弧状構造を含む、
請求項8に記載のメモリデバイス。 - 前記弧状構造は、前記第1の幅を直径とする半円である、
請求項9に記載のメモリデバイス。 - 前記メモリデバイスは、前記第1の領域内に形成された複数のコンタクト構造をさらに備え、前記複数のコンタクト構造の各コンタクト構造は、前記複数のワード線のうちの少なくとも1つのワード線に電気的に接続され、前記領域境界から最も遠い、前記複数のコンタクト構造のコンタクト構造、および前記湾曲端部構造のそれぞれの部分は、前記第1の方向において約0.5μm〜約2μm離れている、
請求項8〜10のいずれか1項に記載のメモリデバイス。 - メモリデバイスであって、
第1の方向に沿って延伸するワード線階段領域と、
領域境界において前記ワード線階段領域に隣接するアレイ領域と、
複数のスリット構造と
を備え、
前記複数のスリット構造の各々は、前記ワード線階段領域内に形成され、前記ワード線階段領域を分割する第1のスリット構造、および、前記アレイ領域内に形成され、前記アレイ領域を分割する第2のスリット構造を含み、
前記第1のスリット構造の幅は、前記第2のスリット構造の幅より大きく、
前記第1のスリット構造は、傾斜した側壁を含み、
前記第2のスリット構造は、垂直な側壁を含む、
メモリデバイス。 - 前記複数のスリット構造は、前記第1の方向に沿って延在し、前記幅は、前記第1の方向に垂直な第2の方向において測定される、
請求項12に記載のメモリデバイス。 - 前記第1のスリット構造の幅は、前記第1の方向に沿って均一である、
請求項12または13に記載のメモリデバイス。 - 前記第1のスリット構造の幅は、前記第2のスリット構造の幅よりも約10nm〜約50nm大きい、
請求項12〜14のいずれか1項に記載のメモリデバイス。 - 前記第1のスリット構造の幅は、前記第1の方向に沿って漸進的に増大する、
請求項12〜15のいずれか1項に記載のメモリデバイス。 - 前記複数のスリット構造のスリット構造は、長方形の形状を含む、
請求項12〜15のいずれか1項に記載のメモリデバイス。 - 前記複数のスリット構造のスリット構造は、湾曲端部構造を含む、
請求項12〜16のいずれか1項に記載のメモリデバイス。 - 前記湾曲端部構造は、弧状構造を含む、
請求項18に記載のメモリデバイス。 - メモリデバイスを形成するための方法であって、
ワード線階段領域および領域境界において前記ワード線階段領域に隣接するアレイ領域を備える基板を提供することと、
前記ワード線階段領域内に前記ワード線階段領域を分割するワード線階段スリットを形成するために、前記基板をエッチングすることと、
前記アレイ領域内に前記アレイ領域を分割するアレイスリットを形成するために、前記基板をエッチングすることと
を含み、
前記ワード線階段スリットの幅は、前記アレイスリットの幅よりも大きく、
前記ワード線階段スリットは、傾斜した側壁を含み、
前記アレイスリットは、垂直な側壁を含む、
方法。
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