JP2021534591A - 第1のキャリア及び第2のキャリアを搬送するための装置、基板を垂直に処理するための処理システム、及びそれらの方法 - Google Patents
第1のキャリア及び第2のキャリアを搬送するための装置、基板を垂直に処理するための処理システム、及びそれらの方法 Download PDFInfo
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Abstract
Description
Claims (15)
- 真空チャンバ(210)内で第1のキャリア(10A)及び第2のキャリア(10B)を搬送するための装置(100)であって、
−第1の搬送経路(T1)に沿って設けられ、かつ第1の上部トラックセクション(11U)を備える第1の搬送システム(101)であって、前記第1の上部トラックセクション(11U)が、
第1のキャリア搬送空間(15A)内に前記第1のキャリア(10A)を非接触で保持するための1つ又は複数の磁気軸受(120)であって、搬送される前記第1のキャリア(10A)の重心上方の中央に配置されている1つ又は複数の磁気軸受(120)、及び
前記第1の搬送経路(T1)に沿って前記第1のキャリア(10A)を移動させるための駆動ユニット(130)
を備え、前記1つ又は複数の磁気軸受(120)及び前記駆動ユニット(130)が、前記第1のキャリア搬送空間(15A)の上方に配置されている、第1の搬送システム(101)と、
−前記第1の搬送経路(T1)から水平にオフセットされた第2の搬送経路(T2)に沿って設けられ、かつ第2の上部トラックセクション(14U)を含む第2の搬送システム(102)であって、前記第2の上部トラックセクション(14U)が、
第2のキャリア搬送空間(15B)内に前記第2のキャリア(10B)を非接触で保持するための1つ又は複数の更なる磁気軸受(120B)であって、搬送される前記第2のキャリア(10B)の重心上方の中央に配置されている1つ又は複数の更なる磁気軸受(120B)、及び
前記第2の搬送経路(T2)に沿って前記第2のキャリア(10B)を移動させるための更なる駆動ユニット(130B)
を備え、前記1つ又は複数の更なる磁気軸受(120B)及び前記更なる駆動ユニット(130B)が、前記第2のキャリア搬送空間(15B)の上方に配置されている、第2の搬送システム(102)と
を備え、
前記1つ又は複数の更なる磁気軸受(120B)が、前記1つ又は複数の磁気軸受(120)に隣接して配置される、装置(100)。 - 前記1つ又は複数の磁気軸受(120)及び前記1つ又は複数の更なる磁気軸受(120B)が、対称面(105)に対してミラー対称に配置され、前記対称面(105)が、前記第1のキャリア搬送空間(15A)と前記第2のキャリア搬送空間(15B)との間に位置している、請求項1に記載の装置(100)。
- 前記駆動ユニット(130)及び前記更なる駆動ユニット(130B)が、前記対称面(105)に対してミラー対称に配置され、前記駆動ユニット(130)の前記対称面(105)に対する側方距離が、前記1つ又は複数の磁気軸受(120)の前記対称面(105)に対する側方距離よりも大きく、前記更なる駆動ユニット(130B)の前記対称面(105)に対する側方距離が、前記1つ又は複数の更なる磁気軸受(120B)の前記対称面(105)に対する側方距離よりも大きい、請求項2に記載の装置(100)。
- 第1の下部トラックセクション(11L)及び第2の下部トラックセクション(14L)を更に備え、前記第1の下部トラックセクション(11L)が、前記第1の搬送経路(T1)に沿って前記第1のキャリア(10A)を案内するための第1の非接触案内装置(140A)を備え、第2の下部トラックセクション(14L)が、前記第2の搬送経路(T2)に沿って前記第2のキャリア(10B)を案内するための第2の非接触案内装置(140B)を備える、請求項1から3のいずれか一項に記載の装置(100)。
- 前記第1の下部トラックセクション(11L)及び前記第2の下部トラックセクション(14L)が、垂直方向(V)に移動可能である、請求項4に記載の装置(100)。
- 前記第1の下部トラックセクション(11L)と前記第1の上部トラックセクション(11U)との間の距離を修正するとともに、前記第2の下部トラックセクション(14L)と前記第2の上部トラックセクション(14U)との間の距離を修正するために、前記第1の下部トラックセクション(11L)及び前記第2の下部トラックセクション(14L)に連結されたアクチュエータ(124)を更に備える、請求項4又は5に記載の装置(100)。
- 前記1つ又は複数の磁気軸受(120)が、前記第1のキャリア(10A)を非接触で保持するための1つ又は複数の第1のアクチュエータ(121)を備え、前記1つ又は複数の更なる磁気軸受(120B)が、前記第2のキャリア(10B)を非接触で保持するための1つ又は複数の第3のアクチュエータ(121B)を備え、前記駆動ユニット(130)が、前記第1の搬送経路(T1)に沿って前記第1のキャリア(10A)を移動させるための1つ又は複数の第2のアクチュエータ(132)を備え、前記更なる駆動ユニット(130B)が、前記第2の搬送経路(T2)に沿って前記第2のキャリア(10B)を移動させるための1つ又は複数の第4のアクチュエータ(132B)を備え、前記1つ又は複数の第1のアクチュエータ(121)、前記1つ又は複数の第2のアクチュエータ(132)、前記1つ又は複数の第3のアクチュエータ(121B)、及び前記1つ又は複数の第4のアクチュエータ(132B)が、大気空間に配置される、請求項1から6のいずれか一項に記載の装置(100)。
- 前記第1のキャリア(10A)を、前記第1の搬送経路(T1)から離れるように第1のキャリア転送方向(S1)に移動させるための第1のキャリア転送アセンブリ(150A)を更に備え、前記第1のキャリア転送アセンブリ(150A)が、大気空間、特に前記真空チャンバの外側又は大気ボックス内に設けられた第1の転送アクチュエータ(154A)を備える、請求項1から7のいずれか一項に記載の装置(100)。
- 前記第2のキャリア(10B)を、前記第2の搬送経路(T2)から前記第1の搬送経路(T1)に向かって第2のキャリア転送方向(S2)に移動させるための第2のキャリア転送アセンブリ(150B)を更に備え、前記第2のキャリア転送アセンブリ(150B)が、大気空間、特に前記真空チャンバの外側又は大気ボックス内に設けられた第2の転送アクチュエータ(154B)を備える、請求項1から8のいずれか一項に記載の装置(100)。
- 前記第1のキャリア(10A)及び/又は前記第2のキャリア(10B)の搬送方向(T)を横切る側方(L)に前記第1のキャリア(10A)及び/又は前記第2のキャリア(10B)に復元力(F)を加えるように構成された少なくとも1つの安定化磁石(161)を有する、少なくとも1つの側部安定化デバイス(160)を更に備える、請求項1から9のいずれか一項に記載の装置(100)。
- 前記第1のキャリア搬送空間(15A)と前記第2のキャリア搬送空間(15B)との間に設けられた側方ガード案内要素(171)、並びに前記第1のキャリア(10A)及び/又は前記第2のキャリア(10B)に垂直支持体を提供するための安全ローラ(172)からなる群のうちの少なくとも1つの要素を備える安全装置(170)を更に備える、請求項1から10のいずれか一項に記載の装置(100)。
- 前記第1のキャリア搬送空間(15A)及び/又は前記第2のキャリア搬送空間(15B)に対する安定化デバイス(160)の少なくとも1つの安定化磁石(161)の垂直位置、前記少なくとも1つの安定化磁石(161)の配向又は角度位置、側方ガード案内要素(171)の垂直位置、並びに前記側方ガード案内要素(171)の配向又は角度位置からなる群のうちの1つ又は複数を調整するように構成された調整デバイス(155)を更に備える、請求項1から11のいずれか一項に記載の装置(100)。
- 処理デバイス(205)を備える少なくとも1つの真空チャンバ(210)と、請求項1から12のいずれか一項に記載の第1のキャリア(10A)及び第2のキャリア(10B)を搬送するための装置(100)とを備える、基板を垂直に処理するための処理システム(200)。
- 真空チャンバ(210)内で第1のキャリア(10A)及び第2のキャリア(10B)を搬送する方法であって、
−搬送される前記第1のキャリア(10A)の重心上方の中央に配置されている1つ又は複数の磁気軸受(120)を使用して、第1のキャリア搬送空間(15A)内に前記第1のキャリア(10A)を非接触で保持することと、
−搬送される前記第2のキャリア(10B)の重心上方の中央に配置され、かつ前記1つ又は複数の磁気軸受(120)に隣接して配置されている1つ又は複数の更なる磁気軸受(120B)を使用して、第2のキャリア搬送空間(15B)内に前記第2のキャリア(10B)を非接触で保持することと、
−前記第1のキャリア搬送空間(15A)の上方に配置されている駆動ユニット(130)を使用して、前記第1のキャリア(10A)を搬送方向(T)に搬送することと、
−前記第2のキャリア搬送空間(15B)の上方に配置されている更なる駆動ユニット(130B)を使用して、前記第2のキャリア(10B)を搬送方向(T)に搬送することと
を含む、方法。 - 真空チャンバ(210)内の第1のキャリア(10A)と第2のキャリア(10B)との間の距離を調整する方法であって、
−請求項1及び9に記載の第1のキャリア(10A)及び第2のキャリア(10B)を搬送するための装置(100)を設けることと、
−第2の転送アクチュエータ(154B)を使用することによって、前記第2のキャリア(10B)を、前記第2の搬送経路(T2)から前記第1の搬送経路(T1)に向かって移動させること、又は前記第2のキャリア(10B)を、前記第2の搬送経路(T2)から前記第1の搬送経路(T1)から遠ざかるように第2のキャリア転送方向(S2)に移動させることと
を含む、方法。
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JPS6036222A (ja) * | 1983-08-05 | 1985-02-25 | Irie Koken Kk | 高真空中の物品搬送装置 |
JP2012072478A (ja) * | 2010-09-30 | 2012-04-12 | Canon Tokki Corp | 成膜装置 |
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TWI518832B (zh) * | 2012-04-26 | 2016-01-21 | 因特瓦克公司 | 真空處理系統架構 |
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KR102192244B1 (ko) * | 2013-12-30 | 2020-12-17 | 삼성디스플레이 주식회사 | 기판 이송장치 |
EP3016136B1 (en) * | 2014-10-27 | 2021-07-21 | Robert Bosch GmbH | Transport system with magnetically driven transport elements and according transportation method |
KR20180071360A (ko) * | 2015-10-25 | 2018-06-27 | 어플라이드 머티어리얼스, 인코포레이티드 | 기판 상의 진공 증착을 위한 장치 및 진공 증착 동안에 기판을 마스킹하기 위한 방법 |
CN108475654B (zh) * | 2016-01-18 | 2022-06-07 | 应用材料公司 | 用于在真空腔室中传送基板载体的设备、用于真空处理基板的系统、及用于在真空腔室中传送基板载体的方法 |
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JPS6036222A (ja) * | 1983-08-05 | 1985-02-25 | Irie Koken Kk | 高真空中の物品搬送装置 |
JP2012072478A (ja) * | 2010-09-30 | 2012-04-12 | Canon Tokki Corp | 成膜装置 |
JP2016532308A (ja) * | 2013-10-16 | 2016-10-13 | コリア エレクトロテクノロジー リサーチ インスティテュートKorea Electrotechnology Research Institute | 磁気浮上搬送装置 |
JP2017507870A (ja) * | 2014-03-19 | 2017-03-23 | メカトロニクス・アクチェンゲゼルシャフトMecatronix AG | 物体を移動および/または位置決めするための搬送装置 |
WO2017198298A1 (en) * | 2016-05-18 | 2017-11-23 | Applied Materials, Inc. | Apparatus and method for transport |
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WO2020043277A1 (en) | 2020-03-05 |
JP7222073B2 (ja) | 2023-02-14 |
KR102468292B1 (ko) | 2022-11-16 |
KR20210046746A (ko) | 2021-04-28 |
CN112640073A (zh) | 2021-04-09 |
TW202025336A (zh) | 2020-07-01 |
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