WO2019081044A1

WO2019081044A1 - Apparatus for contactless transportation of a carrier in a deposition system, system for contactless transportation of a carrier, and method for contactless transportation of a carrier in a deposition system

Info

Publication number: WO2019081044A1
Application number: PCT/EP2017/077642
Authority: WO
Inventors: Christian Wolfgang Ehmann
Original assignee: Applied Materials, Inc.
Priority date: 2017-10-27
Filing date: 2017-10-27
Publication date: 2019-05-02
Also published as: KR102171255B1; CN109983152A; TW201935602A; JP2020500256A; KR20190047658A; CN109983152B

Abstract

The present disclosure provides an apparatus for contactless transportation of a carrier (220) in a deposition system. The carrier (220) includes a guiding structure (210) having one or more active magnet units (112) configured to face a magnet structure (222) of the carrier (220), and one or more sensors (230) configured to detect a presence of the carrier (220), wherein the one or more active magnet units (112) and the one or more sensors (230) are arranged to define a guiding space (S) for the magnet structure (222) therebetween.

Description

APPARATUS FOR CONTACTLESS TRANSPORTATION OF A CARRIER IN A DEPOSITION SYSTEM, SYSTEM FOR CONTACTLESS TRANSPORTATION OF A CARRIER, AND METHOD FOR CONTACTLESS TRANSPORTATION OF

A CARRIER IN A DEPOSITION SYSTEM

FIELD [0001] Embodiments of the present disclosure relate to an apparatus for contactless transportation of a carrier in a deposition system, a system for contactless transportation of a carrier, and a method for contactless transportation of a carrier in a deposition system. Embodiments of the present disclosure particularly relate to an electrostatic chuck (E-chuck) for holding substrates and/or masks used in the manufacture of organic light-emitting diode (OLED) devices.

BACKGROUND

[0002] Techniques for layer deposition on a substrate include, for example, thermal evaporation, physical vapor deposition (PVD), and chemical vapor deposition (CVD). Coated substrates may be used in several applications and in several technical fields. For instance, coated substrates may be used in the field of organic light emitting diode (OLED) devices. OLEDs can be used in the manufacture of television screens, computer monitors, mobile phones, other hand-held devices, and the like for displaying information. An OLED device, such as an OLED display, may include one or more layers of an organic material situated between two electrodes that are all deposited on a substrate.

[0003] During processing, the substrate can be supported on a carrier configured to hold the substrate and an optional mask. The carrier can be contactlessly transported inside a deposition system, such as a vacuum deposition system, using magnetic forces. For applications such as organic light emitting devices, a purity and uniformity of the organic layers deposited on the substrate should be high. Further, handling and transportation of the carriers supporting substrates and masks using contactless transportation without sacrificing the throughput due to substrate breakage is challenging. [0004] In view of the above, new apparatuses for contactless transportation of a carrier in a deposition system, systems for contactless transportation of a carrier, and methods for contactless transportation of a carrier in a deposition system that overcome at least some of the problems in the art are beneficial. The present disclosure particularly aims at providing carriers that can be efficiently and smoothly transported in a deposition system, such as a vacuum deposition system.

SUMMARY

[0005] In light of the above, an apparatus for contactless transportation of a carrier in a deposition system, a system for contactless transportation of a carrier, and a method for contactless transportation of a carrier in a deposition system are provided. Further aspects, benefits, and features of the present disclosure are apparent from the claims, the description, and the accompanying drawings.

[0006] According to an aspect of the present disclosure, an apparatus for contactless transportation of a carrier in a deposition system is provided. The apparatus includes a guiding structure having one or more active magnet units configured to face a magnet structure of the carrier, and one or more sensors configured to detect a presence of the carrier, wherein the one or more active magnet units and the one or more sensors are arranged to define a guiding space for the magnet structure therebetween. [0007] According to another aspect of the present disclosure, an apparatus for contactless transportation of a carrier in a deposition system is provided. The apparatus includes one or more sensors configured to detect a presence of the carrier, wherein each sensor of the one or more sensors has a sensor extension in a transport direction of the carrier, wherein the sensor extension is 1% or more of a carrier extension in the transport direction. [0008] According to a further aspect of the present disclosure, a system for contactless transportation of a carrier is provided. The system includes the apparatus for contactless transportation of a carrier according to the present disclosure and the carrier.

[0009] According to a yet further aspect of the present disclosure, a method for contactless transportation of a carrier in a deposition system is provided. The method includes detecting a first side of a detectable device of the carrier, and controlling at least one active magnet unit arranged on a second side of the detectable device opposite the first side.

[0010] Embodiments are also directed at apparatuses for carrying out the disclosed methods and include apparatus parts for performing each described method aspect. These method aspects may be performed by way of hardware components, a computer programmed by appropriate software, by any combination of the two or in any other manner. Furthermore, embodiments according to the disclosure are also directed at methods for operating the described apparatus. The methods for operating the described apparatus include method aspects for carrying out every function of the apparatus.

BRIEF DESCRIPTION OF THE DRAWINGS

[0011] So that the manner in which the above recited features of the present disclosure can be understood in detail, a more particular description of the disclosure, briefly summarized above, may be had by reference to embodiments. The accompanying drawings relate to embodiments of the disclosure and are described in the following:

FIG. 1 shows a schematic view of a carrier and a guiding structure;

FIG. 2 shows a schematic view of an apparatus for contactless transportation and a carrier according to embodiments described herein; FIGs. 3A and B show schematic views of an apparatus for contactless transportation and a carrier according to further embodiments described herein;

FIGs. 4A and B show schematic views of an apparatus for contactless transportation and a carrier according to embodiments described herein;

FIG. 5 shows a schematic view of a system for substrate processing according to embodiments described herein; FIG. 6 shows a schematic view of a system for substrate processing according to further embodiments described herein; and

FIG. 7 shows a flow chart of a method for contactless transportation of a carrier in a deposition system according to embodiments described herein.

DETAILED DESCRIPTION OF EMBODIMENTS

[0012] Reference will now be made in detail to the various embodiments of the disclosure, one or more examples of which are illustrated in the figures. Within the following description of the drawings, the same reference numbers refer to same components. Generally, only the differences with respect to individual embodiments are described. Each example is provided by way of explanation of the disclosure and is not meant as a limitation of the disclosure. Further, features illustrated or described as part of one embodiment can be used on or in conjunction with other embodiments to yield yet a further embodiment. It is intended that the description includes such modifications and variations.

[0013] Carriers can be used in a deposition system, such as a vacuum deposition system, for holding and transporting substrates and/or masks within a deposition chamber of the deposition system. For example, one or more material layers can be deposited on the substrate while the substrate is supported on the carrier. For applications such as organic light emitting devices, a high purity and uniformity of the organic layers deposited on the substrate can be beneficial. Further, a smooth transportation of the carrier inside the deposition system is beneficial e.g. in order to reduce substrate breakage.

[0014] According to the embodiments of the present disclosure, one or more active magnet units and one or more sensors are arranged on opposite sides of a guiding space. In particular, the one or more active magnet units and the one or more sensors are arranged on opposite sides of the magnet structure of the carrier. The space in which the magnetic guidance is performed can be efficiently used. Further, an interference between the magnetic guidance and the one or more sensors can be avoided and a smooth transportation of the carrier in the transport direction can be achieved. Substrate breakage due to an unsteady transportation of the carrier and/or a generation of particles can be reduced or even avoided.

[0015] FIG. 1 shows a schematic view of a carrier 100 and a portion of a transport arrangement configured for contactless transportation of the carrier 100 in a transport direction 1 , which can be a horizontal direction.

[0016] The transport arrangement includes a guiding structure 110, which can be an active guiding structure. The guiding structure 110 includes a plurality of guide units 111, which are arranged along the transport direction. Each guide unit 111 includes an (e.g. electromagnetic) actuator, such as an active magnet unit 112, and a controller 114 configured to control the actuator, and a distance sensor (not shown) configured to measure a gap to the carrier 100. The guiding structure 110 can be configured to contactlessly levitate the carrier 100 using magnetic forces.

[0017] When the carrier 100 approaches or leaves a guide unit 111, a levitation accuracy and/or levitation stability can be affected. In particular, a considerable and/or pulse-like force, which may lead to a sudden acceleration or deceleration of the carrier 100, can be generated when the carrier 100 approaches or leaves a guide unit 111. The force may depend on the geometrical arrangement and configuration of the components of the guiding structure 110, and particularly of the plurality of guide units 111 (e.g. the electromagnetic actuator(s) and the distance sensor(s)). The force can lead to unwanted and sudden movements of the carrier 100, and may even lead to an accidental mechanical contact between the carrier 100 and the guiding structure 110. The carrier 100, the substrate and/or the guiding structure 110 can be damaged. Further, particles may be generated, which deteriorate a quality of a deposition process.

[0018] The pulse-like force or change of force in the direction of the levitating force, and particularly in the direction (e.g., the vertical direction 3) of a magnetic force provided by the actuator, may occur when the carrier 100 suddenly disappears e.g. from below the distance sensor. This may result in a signal value at the distance sensor which is the same as if the carrier would perform a fast movement away from the distance sensor in the distance (or measurement) direction, such as the vertical direction 3. In other words, the distance sensor indicates a gap enlargement. The signal change can make the controller to strongly change the actuator force to bring the "moving" carrier 100 back to a set distance between the guiding structure 110 and the carrier 100.

[0019] Moreover, when the carrier 100 approaches or leaves a guide unit 111, a force component along the transport direction 1 can be generated. The force component may even be strong enough to hinder a further transport of the carrier 100. The force component along the transport direction 1 can originate from the actuator's reluctance acting on the front face and/or rear face (e.g., the leading edge or trailing edge) of the carrier. This is exemplarily illustrated in FIG. 1 by the magnetic field lines at the rear face of the carrier 100.

[0020] FIG. 2 shows a schematic view of an apparatus for contactless transportation of a carrier 220 in a deposition system according to embodiments described herein.

[0021] The apparatus includes a guiding structure 210 having one or more active magnet units 112 configured to face a magnet structure 222 of the carrier 220, and one or more sensors 230 configured to detect a presence of the carrier 220. The one or more active magnet units 112 and the one or more sensors 230 are arranged to define a guiding space S for the magnet structure 222 therebetween. The magnet structure 222 of the carrier 220 extends along a transport direction 1 of the carrier 220. Likewise, the one or more active magnet units 112 are arranged along the transport direction 1 of the carrier 220. The magnet structure 222 can be a ferromagnetic material which extends along the length of the carrier 220.

[0022] In some embodiments, the magnet structure 222 can provide a sensor trail for the one or more sensors 230. In further embodiments, the sensor trail is provided by a separate element, which may be attached to the magnet structure 222. Examples for sensor trails, which may be provided by a separate element, are illustrated in FIG. 3A in the form of a detectable device, such as an inclination.

[0023] According to some embodiments, which can be combined with other embodiments described herein, the one or more active magnet units 112 are arranged above the guiding space S and the one or more sensors 230 are arranged below the guiding space S with respect to a vertical direction 3. A distance between the one or more active magnet units 112 and the one or more sensors 230 e.g. in the vertical direction 3, which defines the guide space S, can be larger than an extension of the magnet structure 222 in the same direction. In particular, a first gap Gl can be provided between the one or more active magnet units 112 and the magnet structure 222 e.g. in the vertical direction 3. Likewise, a second gap G2 can be provided between the one or more sensors 230 and the magnet structure 222 e.g. in the vertical direction 3. The first gap Gl and the second gap G2 can be essentially identical or can be different. The gaps can avoid an interference or contact between the carrier 220 and the transport arrangement e.g. due to small vertical and/or horizontal movements of the carrier 220 during transportation thereof.

[0024] The carrier 220 is configured for contactless transportation through one or more chambers, such as vacuum chamber, of the deposition system, and in particular through at least one deposition area, along a transportation path such as a linear transportation path. The carrier 220 can be configured for contactless transportation in the transport direction 1 , which can be a horizontal direction.

[0025] According to some embodiments, which can be combined with other embodiments described herein, the deposition system may include the transport arrangement configured for contactless levitation and/or contactless transportation of the carrier 220 in the deposition system. The transport management can include the guiding structure 210 for providing a magnetic levitation force for levitating the carrier 220 and a drive structure for moving the carrier 220 in the transport direction 1. The magnet structure 222 of the carrier 220 may be comprised of one or more first magnet units configured to magnetically interact with the guiding structure. In some implementations, the one or more first magnet units can be passive magnet units, such as permanent magnets unit and/or ferromagnetic parts.

[0026] According to some embodiments, which can be combined with other embodiments described herein, the carrier 220 includes another magnet structure comprised of one or more second magnet units (not shown) configured to magnetically interact with the drive structure for moving the carrier 220 in the transport direction 1. In some implementations, the one or more second magnet units can be passive magnet units, such as ferromagnets. The guiding structure 210 and the drive structure can be arranged at opposite ends or end portions of the carrier 220. Specifically, the one or more first magnet units and the one or more second magnet units can be arranged at opposite ends or end portions of the carrier 220. [0027] The deposition system, and particularly the transport arrangement, can include the guiding structure having the plurality of guide units 111. Each guide unit 111 may include an actuator, such as an active magnet unit 112, a controller 114 configured to control the actuator, and a respective sensor 230 configured to sense or measure the gap between the magnet structure, and in particularly the one or more first magnet units thereof, and the actuator. The gap, such as the first gap Gl, can be measured in a direction perpendicular to the transport direction 1, such as the vertical direction 3. In particular, the sensor 230 can be arranged to face the one or more first magnet units e.g. when the carrier 220 is at the sensor 230 to sense or measure the gap between the one or more first magnet units and the active magnet unit 112. The sensor 230 can be a distance sensor.

[0028] The controller 114 can be configured to control the active magnet unit 112 to adjust the magnetic force provided by the actuator based on the gap measured by the sensor 230. In particular, the controller 114 can be configured to control the active magnet unit 112 such that the distance between the one or more first magnet units and the active magnet unit 112 is essentially constant while the carrier 220 is transported through the deposition system. Although FIG. 2 exemplarily illustrates that each guide unit 111 has an own controller, it is to be understood that the present disclosure is not limited thereto and that a controller can be allocated to two or more guide units. For example, one single controller can be provided for all guide units. [0029] The carrier 220 can be configured to hold a substrate and/or a mask (not shown) used during substrate processing, such as vacuum processing. In some implementations, the carrier 220 can be configured to support both the substrate and the mask. In further implementations, the carrier 220 can be configured to support either the substrate or the mask. In such a case the carrier 220 can be referred to as "substrate carrier" and "mask carrier", respectively.

[0030] The carrier 220 can include a support structure or body 225 providing a support surface, which can be an essentially flat surface configured for contacting e.g. a back surface of the substrate. In particular, the substrate can have a front surface (also referred to as "processing surface") opposite the back surface and on which a layer is deposited during the processing, such as a vacuum deposition process. The magnet structure 222 can be provided at the body 225. [0031 ] The term "vacuum" as used throughout the present disclosure can be understood in the sense of a technical vacuum having a vacuum pressure of less than, for example, 10 mbar. The pressure in the vacuum chamber may be between 10^~5 mbar and about 10^~8 mbar, specifically between 10^~5 mbar and 10^~7 mbar, and more specifically between about 10^~6 mbar and about 10^~7 mbar. One or more vacuum pumps, such as turbo pumps and/or cryo-pumps, connected to the vacuum chamber for generation of the vacuum inside the vacuum chamber can be provided.

[0032] The carrier 220 according to the present disclosure can be an electrostatic chuck (E-chuck) providing an electrostatic force for holding the substrate and/or the mask at the carrier 220. For example, the carrier 220 includes an electrode arrangement configured to provide an attracting force acting on at least one of the substrate and the mask. The electrode arrangement can be embedded in the body 225, or can be provided, e.g., placed, on the body 225. According to some embodiments, which can be combined with other embodiments described herein, the body 225 is a dielectric body, such as a dielectric plate. The dielectric body can be fabricated from a dielectric material, preferably a high thermal conductivity dielectric material such as pyrolytic boron nitride, aluminum nitride, silicon nitride, alumina or an equivalent material, but may be made from such materials as polyimide. In some embodiments, the electrode arrangement includes a plurality of electrodes, such as a grid of fine metal strips, placed on the dielectric plate and covered with a thin dielectric layer. [0033] The electrode arrangement, and particularly the plurality of electrodes, can be configured to provide the attracting force, such as a chucking force. The attracting force can be a force acting on the substrate and/or the mask at a certain relative distance between the plurality of electrodes (or the support surface) and the substrate and/or the mask. The attracting force can be an electrostatic force provided by voltages applied to the plurality of electrode arrangement.

[0034] The substrate can be attracted by the attracting force provided by the carrier 220, which can be an E-chuck, towards the support surface (e.g. in a direction perpendicular to the transport direction). The attracting force can be strong enough to hold the substrate e.g. in a vertical position by frictional forces. In particular, the attracting force, can be configured to fix the substrate on the support surface essentially immoveable. For example, to hold a 0.5 mm glass substrate in a vertical position using friction forces, an attracting pressure of about 50 to 100 N/m² (Pa) can be used, depending on the friction coefficient.

[0035] According to some embodiments, which can be combined with other embodiments described herein, the carrier 220 is configured for holding or supporting the substrate and/or mask in a substantially vertical orientation or in a substantially horizontal orientation. In particular, the carrier can be configured for transportation in a vertical orientation. As used throughout the present disclosure, "substantially vertical" is understood particularly when referring to the substrate orientation, to allow for a deviation from the vertical direction or orientation of ±20° or below, e.g. of ±10° or below. This deviation can be provided for example because a substrate support with some deviation from the vertical orientation might result in a more stable substrate position. Further, fewer particles reach the substrate surface when the substrate is tilted forward. Yet, the substrate orientation, e.g., during the deposition process, is considered substantially vertical, which is considered different from the horizontal substrate orientation, which may be considered as horizontal ±20° or below. [0036] The term "vertical direction" or "vertical orientation" is understood to distinguish over "horizontal direction" or "horizontal orientation". That is, the "vertical direction" or "vertical orientation" relates to a substantially vertical orientation e.g. of the carrier and the substrate, wherein a deviation of a few degrees, e.g. up to 10° or even up to 15°, from an exact vertical direction or vertical orientation is still considered as a "substantially vertical direction" or a "substantially vertical orientation". The vertical direction can be substantially parallel to the force of gravity.

[0037] The embodiments described herein can be utilized for evaporation on large area substrates, e.g., for OLED display manufacturing. Specifically, the substrates for which the structures and methods according to embodiments described herein are provided, are large area substrates. For instance, a large area substrate or carrier can be GEN 4.5, which corresponds to a surface area of about 0.67 m² (0.73 x 0.92m), GEN 5, which corresponds to a surface area of about 1.4 m² (1.1 m x 1.3 m), GEN 7.5, which corresponds to a surface area of about 4.29 m² (1.95 m x 2.2 m), GEN 8.5, which corresponds to a surface area of about 5.7m² (2.2 m x 2.5 m), or even GEN 10, which corresponds to a surface area of about 8.7 m² (2.85 m x 3.05 m). Even larger generations such as GEN 11 and GEN 12 and corresponding surface areas can similarly be implemented. Half sizes of the GEN generations may also be provided in OLED display manufacturing.

[0038] According to some embodiments, which can be combined with other embodiments described herein, the substrate thickness can be from 0.1 to 1.8 mm. The substrate thickness can be about 0.9 mm or below, such as 0.5 mm. The term "substrate" as used herein may particularly embrace substantially inflexible substrates, e.g., a wafer, slices of transparent crystal such as sapphire or the like, or a glass plate. However, the present disclosure is not limited thereto and the term "substrate" may also embrace flexible substrates such as a web or a foil. The term "substantially inflexible" is understood to distinguish over "flexible". Specifically, a substantially inflexible substrate can have a certain degree of flexibility, e.g. a glass plate having a thickness of 0.9 mm or below, such as 0.5 mm or below, wherein the flexibility of the substantially inflexible substrate is small in comparison to the flexible substrates.

[0039] According to embodiments described herein, the substrate may be made of any material suitable for material deposition. For instance, the substrate may be made of a material selected from the group consisting of glass (for instance soda-lime glass, borosilicate glass, and the like), metal, polymer, ceramic, compound materials, carbon fiber materials or any other material or combination of materials which can be coated by a deposition process. [0040] FIG. 3A shows a schematic view of an apparatus for contactless transportation of a carrier 320 in a deposition system according to embodiments described herein. The apparatus and the carrier 320 of FIG. 3 A are similar to the apparatus and carrier illustrated in FIG. 2 and a description of similar or identical elements is not repeated.

[0041 ] According to some embodiments, which can be combined with other embodiments described herein, the carrier 320 includes a detectable device 340 detectable by the one or more sensors 230 to detect the presence of the carrier 320. In some implementations, the detectable device 340 is arranged to face the one or more sensors 230 e.g. when the detectable device 340 is located at, e.g. above, the respective sensor(s). According to some embodiments, the one or more sensors 230 face a first sensor trail provided by the detectable device 340, and the actuators, such as the one or more active magnet units 112, face an actuator trail provided by the magnet structure 222, and in particular the one or more first magnet units. The detectable device 340 can have a first side and a second side opposite the first side. For example, the first side can be a lower side and the second side can be an upper side of the detectable device 340. The one or more sensors 230 can face the first side. The one or more active magnet units 112 can face the second side.

[0042] The detectable device 340 and the magnet structure 222 can be integrally formed or can be provided as separate elements. According to some embodiments, which can be combined with other embodiments described herein, the detectable device 340 and the magnet structure 222, and in particular the one or more first magnet units, can be arranged adjacent to each other for instance in a plane parallel to the transport direction 1, such as an essentially horizontal plane. For example, the detectable device 340 can be attached to the magnet structure 222 of the carrier 320 having the one or more first magnet units.

[0043] The detectable device 340 can be arranged at an end portion of the carrier 320 and extend along the transport direction 1. The detectable device 340 may be detectable by the one or more sensors 230 of the transport arrangement of the deposition system to determine a position of the carrier 320, or positions of ends of the carrier 320, with respect to at least one guide unit of the plurality of guide units 111 of the guiding structure 210. In this regard the detectable device 340 can also be referred to as "sensor trail".

[0044] The carrier 320 has end portion(s), such as a first end portion and a second end portion opposite the first end portion. The substrate can be located between the first end portion and the second end portion. The first end portion can be a top (or upper) end portion and the second end portion can be a bottom (or lower) end portion. The first end portion and the second end portion can extend essentially parallel, for example, in an essentially horizontal direction. The detectable device 340 can be provided at the first end portion and/or the second end portion. The example of FIG. 3A exemplarily illustrates the detectable device 340 and the magnet structure 222 at the first end portion, which is a top or upper end portion of the carrier 320. The detectable device 340 and the magnet structure 222, in particular the one or more first magnet units, can face the guiding structure 210 of the transport arrangement. The one or more second magnet units can be located at the second end portion, which can be a bottom or lower end portion of the carrier 320. The one or more second magnet units can face the drive structure of the transport arrangement. [0045] According to some embodiments, which can be combined with other embodiments described herein, the detectable device 340 is for instance an element which extends over the entire length L of the carrier 320 in the transport direction 1. The length L of the carrier 320 can be defined along the transport direction 1 e.g. between a first end 201 and a second end 202 of the carrier 320 along the transport direction 1.

[0046] In some implementations, the detectable device 340 includes, or is, a geometric profile varying along the transport direction 1 and detectable by the one or more sensors 230. The one or more sensors 230 may be distance sensors configured to detect a distance between a respective sensor and the geometric profile, and particularly between a respective sensor and a surface of the geometric profile facing the sensor. The distance can be measured in a direction perpendicular to the transport direction 1, such as the vertical direction 3 or a horizontal direction 2. In some implementations, each guide unit 111 includes a respective sensor to detect the geometric profile.

[0047] The geometric profile may vary along the transport direction 1 between the first end 201 and the second end 202 of the carrier 320. The geometric profile can provide the sensor trail extending between the first end 201 and the second end 202. The term "geometric profile" as used throughout the present disclosure refers to a profile or an element having a profile which extends in the transport direction 1 and has a non-constant (or varying) cross- sectional shape in a plane defined by the transport direction 1 and at least one direction perpendicular to the transport direction 1, such as the vertical direction 3. The geometric profile may be defined between the first end 201 (e.g., a front face or the leading edge, which may define an outermost boundary of the carrier 320 in the transport direction 1) and the second end 202 (e.g., a rear face or trailing edge, which may define an outermost boundary of the carrier 320 in a direction opposite the transport direction 1) of the carrier 320 when seen in the transport direction 1. In other words, the varying geometric profile does not refer to an edge at the first end 201 or the second end 202 of the carrier 320 but refers to further structural variations between the first end 201 and the second end 202 which can be detected by the one or more sensors 230.

[0048] According to some embodiments, which can be combined with other embodiments described herein, the geometric profile includes one or more shape elements. In some implementations, the one or more shape elements can be selected from the group including a discontinuity, an inclination, an arc shape and any combination thereof. For example, the geometric profile can be an element extending along the length of the carrier 220 and have the one or more shape elements, such as one or more inclinations 342.

[0049] In some embodiments, the one or more shape elements, such as the inclinations, 5 are arranged at the first end 201 and/or the second end 202 of the carrier 320. For example, at least one first shape element can be arranged at the first and 201 and/or at least one second shape elements can be arranged the second end 202. The at least one first shape element and the at least one second shape element can be essentially the same or can be different. In the example of FIG. 3A, both the at least one first shape element and the at least one second 10 shape element are inclinations in the element providing the geometric profile.

[0050] The one or more shape elements can be arranged at the ends of the carrier 320 such that it can be determined where the ends of the carrier 320 are located with respect to the guiding structure 210. The one or more active magnet units 112 of the guide units 111 can be controlled to provide a smooth transportation of the carrier 320 in the transport direction

15 1. In particular, actuators which are located at the edge(s) of the carrier and/or which the edge(s) approach can be controlled. For example, a magnetic force provided by the actuator(s) can be continuously increased or decreased to provide a smooth transition of the ends of the carrier 320 between adjacent actuators/magnet units. For example, the operation of an actuator can be decreased such that the actuator exerts essentially no force on the carrier

20 320 when the carrier 320 "leaves" the actuator.

[0051] According to some embodiments, an individual shape element of the one or more shape elements can have a length extension along the length of the geometric profile and/or the carrier 320 in the transport direction 1. The length extension of the individual shape element can correspond to at least 1% of the length of the geometric profile and/or the carrier 25 320, specifically at least 4% of the length, specifically at least 8% of the length.

[0052] FIG. 3 A exemplarily illustrates inclinations 342 as the one or more shape elements. However, the present disclosure is not limited thereto and other shape elements can be provided, such as cutouts or continuously varying shapes. In some implementations, the inclination 342 can be a surface of the carrier 320 which is inclined with respect to the 30 transport direction 1. For example, the inclination 342 can be inclined with respect to a horizontal plane. In some embodiments, the inclinations 342 are arranged at the first end 201 and/or the second end 202 of the carrier 320. For example, at least one first inclination can be arranged at the first end 201 and/or at least one second inclination can be arranged the second end 202 of the carrier 320. The at least one first inclination and the at least one second inclination can be inclined in opposite directions. In particular, the at least one first inclination and the at least one second can be mirror-symmetrical.

[0053] The sensors 230 may be arranged to face the inclinations 342. In particular, the sensors 230 can be configured to detect the inclinations 342 when the carrier 320 moves in the transport direction 1. The detected distance between the sensor and the inclination increases or decreases depending on the transport direction 1 and/or the inclination direction. The one or more active magnet units of the guide units 111 can be controlled to provide a smooth transportation of the carrier 320 in the transport direction. In particular, actuators which are located at the inclinations(s) can be controlled. For example, a magnetic force provided by the actuator(s) can be continuously increased or decreased based on the varying distance provided by the inclination to provide a smooth transition of the ends of the carrier between adjacent actuators/magnet units. In particular, in FIG. 3A the inclination on the left side of the carrier may result in a detection signal at the sensor which is the same as if the carrier would move upwards. The controller can reduce the actuator force e.g. by reducing an actuator current such that the actuator on the left side does not exert a levitation force on the carrier when the carrier "leaves" the actuator.

[0054] FIG. 3B shows a schematic view of an apparatus for contactless transportation of a carrier 320' in a deposition system according to embodiments described herein. The apparatus and the carrier 320' of FIG. 3B are similar to the apparatus and carrier illustrated in FIG. 3A, and a description of similar or identical elements is not repeated [0055] According to an aspect of the present disclosure, the apparatus for contactless transportation of a carrier 320' in a deposition system includes one or more sensors 330 configured to detect a presence of the carrier 320'. Each sensor of the one or more sensors 330 has a sensor extension d in a transport direction 1 of the carrier 320', wherein the sensor extension d can be at least 1%, specifically at least 2%, specifically at least 4%, specifically at least 8%, and more specifically at least 10% of a carrier extension, i.e., the length L of the carrier, in the transport direction 1. The sensor extension d can be even 10% or more, specifically 15% or more, specifically 20% or more, and more specifically 25% or more of the length L of the carrier 320'.

[0056] The one or more sensor 330 are elongated in the transport direction 1. When the carrier 320' (or the sensor trail thereof) leaves the sensor 330, the signal or signal value of the sensor 330 gradually changes in a way as if the carrier 320' would (slowly) move upwards. The force provided by the active magnet unit 112 can be (gradually) reduced to zero according to the signal change such that a smooth transportation of the carrier 320' can be achieved. The gradual (or ramped) signal change can be achieved by the elongated sensors. To the contrary, short sensors as for instance illustrated in FIG. 2 provide a sudden signal change when the sensor reaches an edge of the carrier. The present embodiment can reduce or even avoid the occurrence of a pulse-like force, which may lead to a sudden acceleration or deceleration of the carrier.

[0057] FIGs. 4 A and B show schematic views of an apparatus 400 for contactless transportation of a carrier 410 according to embodiments described herein. The apparatus and the carrier 410 can be configured according to the embodiments described herein.

[0058] The apparatus 400 includes the transport arrangement having the guiding structure 470, which includes a plurality of active magnetic units 475, the one or more sensors (not shown) to detect the presence of the carrier 410, and the carrier 410 according to the present disclosure. The one or more sensors can be configured to detect a distance between the one or more sensors and the detectable device of the carrier 410. The apparatus 400 may further include a controller configured to selectively control at least one active magnet unit of the plurality of active magnet units 475 based on the detection data provided by the one or more sensors. According to some embodiments described herein, the transport arrangement may be arranged in the vacuum chamber of the vacuum system. The vacuum chamber may be a vacuum deposition chamber. However, the present disclosure is not limited to vacuum systems and the carriers and transport arrangements described herein can be implemented in atmospheric environments.

[0059] The carrier 410 can include the magnet structure having the one or more first magnet units configured to magnetically interact with the guiding structure 470 of the vacuum system for providing a magnetic levitation force for levitating the carrier 410. The one or more first magnet units can be a first passive magnetic unit 450. The guiding structure 470 may extend in the transport direction 1 of the carrier 410, which can be a horizontal direction. The guiding structure 470 can include the plurality of active magnetic units 475. The carrier 410 can be movable along the guiding structure 470. The first passive magnetic unit 450, e.g. a bar of ferromagnetic material, and the plurality of active magnetic units 475 of the guiding structure 470 can be configured for providing a first magnetic levitation force for levitating the carrier 410. The devices for levitating as described herein are devices for providing a contactless force to levitate e.g. the carrier 410.

[0060] According to some embodiments, the transport arrangement may further include a drive structure 480. The drive structure 480 can include a plurality of further magnet units, such as further active magnetic units. The carrier 410 can include one or more second magnet units configured to magnetically interact with the drive structure 480. In particular, the one or more second magnet units can be a second passive magnetic unit 460, e.g. a bar of ferromagnetic material, to interact with the further active magnetic units 485 of the drive structure 480.

[0061] FIG. 4B shows another side view of the transport arrangement. In FIG. 4B, an active magnetic unit of the plurality of active magnetic units 475 is shown. The active magnetic unit provides a magnetic force interacting with the first passive magnetic unit 450 of the carrier 410. For example, the first passive magnetic unit 450 can be a rod of a ferromagnetic material. A rod can be a portion of the carrier 410 that is connected to a support structure 412. The support structure 412 can be provided by the body of the carrier 410. The rod or the first passive magnetic unit, respectively, may also be integrally formed with the support structure 412 for supporting the substrate 10. The detectable device can be attached to the first passive magnetic unit 450 or can be provided by the first passive magnetic unit 450. The carrier 410 can further include the second passive magnetic unit 460, for example a further rod. The further rod can be connected to the carrier 410. The rod or the second passive magnetic unit, respectively, may also be integrally formed with the support structure 412.

[0062] The terminology of a "passive" magnetic unit is used herein to distinguish from the notion of an "active" magnetic unit. A passive magnetic unit may refer to an element with magnetic properties, which are not subject to active control or adjustment, at least not during operation of the transport arrangement. For example, the magnetic properties of a passive magnetic unit, e.g. the rod or the further rod of the carrier, are not subject to active control during movement of the carrier through the vacuum chamber or vacuum system in general. According to some embodiments, which can be combined with other embodiments described herein, a controller of the transport arrangement is not configured to control a passive magnetic unit. A passive magnetic unit may be adapted for generating a magnetic field, e.g. a static magnetic field. A passive magnetic unit may not be configured for generating an adjustable magnetic field. A passive magnetic unit may be a magnetic material, such as a ferromagnetic material, a permanent magnet or may have permanent magnetic properties. [0063] According to embodiments described herein, the plurality of active magnetic units 475 provides for a magnetic force on the first passive magnetic unit 450 and thus, the carrier 410. The plurality of active magnetic units 475 levitate the carrier 410. The further active magnetic units 485 can drive the carrier 410 within the vacuum chamber, for example along the transport direction 1. The plurality of further active magnetic units 485 form the drive structure for moving the carrier 410 in the transport direction 1 while being levitated by the plurality of active magnetic units 475 located above the carrier 410. The further active magnetic units 485 can interact with the second passive magnetic unit 460 to provide a force along the transport direction 1. For example, the second passive magnetic unit 460 can include a plurality of permanent magnets arranged with an alternating polarity. The resulting magnetic fields of the second passive magnetic unit 460 can interact with the plurality of further active magnetic units 485 to move the carrier 410 while being levitated.

[0064] In order to levitate the carrier 410 with the plurality of active magnetic units 475 and/or to move the carrier 410 with the plurality of further active magnetic units 485, the active magnetic units can be controlled to provide adjustable magnetic fields. The adjustable magnetic field may be a static or a dynamic magnetic field. According to embodiments, which can be combined with other embodiments described herein, an active magnetic unit is configured for generating a magnetic field for providing a magnetic levitation force extending along a vertical direction 3. According to other embodiments, which can be combined with further embodiments described herein, an active magnetic unit may be configured for providing a magnetic force extending along a transversal direction. An active magnetic unit, as described herein, may be or include an element selected from the group consisting of an electromagnetic device, a solenoid, a coil, a superconducting magnet, or any combination thereof.

[0065] Embodiments described herein relate to contactless levitation, transportation and/or alignment of a carrier, a substrate and/or a mask. The disclosure refers to a carrier, which may include one or more elements of the group consisting of: a carrier supporting a substrate, a carrier without a substrate, a substrate, or a substrate supported by a support. The term "contactless" as used throughout the present disclosure can be understood in the sense that a weight of e.g. the carrier and the substrate is not held by a mechanical contact or mechanical forces, but is held by a magnetic force. Specifically, the carrier is held in a levitating or floating state using magnetic forces instead of mechanical forces. As an example, the transport arrangement described herein may have no mechanical devices, such as a mechanical rail, supporting the weight of the carrier. In some implementations, there can be no mechanical contact between the carrier and the rest of the apparatus at all during levitation, and for example movement, of the carrier in the vacuum system. [0066] According to embodiments of the present disclosure, levitating or levitation refers to a state of an object, wherein the objects floats without mechanical contact or support. Further, moving an object refers to providing a driving force, e.g. a force in a direction different than a levitation force, wherein the object is moved from one position to another, different position. For example, an object such as a carrier can be levitated, i.e. by a force counteracting gravity, and can be moved in a direction different then a direction parallel to gravity while being levitated.

[0067] The contactless levitation and transportation of the carrier according to embodiments described herein is beneficial in that no particles are generated due to a mechanical contact between the carrier and sections of the transport arrangement, such as mechanical rails, during the transport or alignment of the carrier. Accordingly, embodiments described herein provide for an improved purity and uniformity of the layers deposited on the substrate, in particular since a particle generation is minimized when using the contactless levitation, transportation and/or alignment. [0068] FIG. 5 shows a system 500 for substrate processing according to embodiments described herein. The system 500, which can be a vacuum system, can be configured for depositing one or more layers, e.g. of an organic material, on the substrate 10.

[0069] The system 500 includes a deposition chamber, such as a vacuum chamber 502, the carrier 520 according to the embodiments described herein, and a transport arrangement 510 configured for transportation of the carrier 520 in the deposition chamber. In some implementations, the system 500 includes one or more material deposition sources 580 in the deposition chamber. The carrier 520 can be configured to hold the substrate 10 during a deposition process, such as a vacuum deposition process. The system 500 can be configured for evaporation of e.g. an organic material for the manufacture of OLED devices. In another example, the system 500 can be configured for CVD or PVD, such as sputter deposition.

[0070] In some implementations, the one or more material deposition sources 580 can be evaporation sources, particularly evaporation sources for depositing one or more organic materials on a substrate to form a layer of an OLED device. The carrier 520 for supporting the substrate 10 e.g. during a layer deposition process can be transported into and through the deposition chamber, and in particular through a deposition area, along a transportation path, such as a linear transportation path.

[0071] The material can be emitted from the one or more material deposition sources 580 in an emission direction towards the deposition area in which the substrate 10 to be coated is located. For instance, the one or more material deposition sources 580 may provide a line source with a plurality of openings and/or nozzles which are arranged in at least one line along the length of the one or more material deposition sources 580. The material can be ejected through the plurality of openings and/or nozzles.

[0072] As indicated in FIG. 5, further chambers can be provided adjacent to the vacuum chamber 502. The vacuum chamber 502 can be separated from adjacent chambers by a valve having a valve housing 504 and a valve unit 506. After the carrier 520 with the substrate 10 thereon is inserted into the vacuum chamber 502 as indicated by the arrow, the valve unit 506 can be closed. The atmosphere in the vacuum chamber 502 can be individually controlled by generating a technical vacuum, for example with vacuum pumps connected to the vacuum chamber 502. [0073] According to some embodiments, the carrier 520, the substrate 10 and optionally the mask 20 are static or dynamic during deposition of the deposition material. According to some embodiments described herein, a dynamic deposition process can be provided, e.g., for the manufacture of OLED devices. [0074] In some implementations, the system 500 can include one or more transportation paths extending through the vacuum chamber 502. The carrier 520 can be configured for transportation along the one or more transportation paths, for example, past the one or more material deposition sources 580. Although in FIG. 5 one transportation path is exemplarily indicated by the arrow, it is to be understood that the present disclosure is not limited thereto and that two or more transportation paths can be provided. For example, at least two transportation paths can be arranged substantially parallel to each other for transportation of respective carriers. The one or more material deposition sources 580 can be arranged between the two transportation paths.

[0075] FIG. 6 shows a schematic view of a system 600 for processing, such as vacuum processing, of a substrate 10 according to further embodiments described herein.

[0076] The system 600 includes two or more processing regions and a transport arrangement 660 according to the present disclosure configured for sequentially transporting a carrier 601 supporting a substrate 10 and optionally a mask to the two or more processing regions. For example, the transport arrangement 660 can be configured for transporting the carrier 601 along the transport direction 1 through the two or more processing regions for substrate processing. In other words, the same carrier is used for transportation of the substrate 10 through multiple processing regions. In particular, the substrate 10 is not removed from the carrier 601 between substrate processing in a processing region and substrate processing a subsequent processing region, i.e., the substrate stays on the same carrier for two or more substrate processing procedures. According to some embodiments, the carrier 601 can be configured according to the embodiments described herein. Optionally or alternatively, the transport arrangement 660 can be configured as described with respect to, for example, FIGs. 4A and B.

[0077] As exemplarily illustrated in FIG. 6, the two or more processing regions can include a first deposition region 608 and a second deposition region 612. Optionally, a transfer region 610 can be provided between the first deposition region 608 and the second deposition region 612. The plurality of regions, such as the two or more processing regions and the transfer region, can be provided in one vacuum chamber. Alternatively, the plurality of regions can be provided in different vacuum chambers connected to each other. For example, each vacuum chamber can provide one region. Specifically, a first vacuum chamber can provide the first deposition region 608, a second vacuum chamber can provide the transfer region 610, and a third vacuum chamber can provide the second deposition region 612. In some implementations, the first vacuum chamber and the third vacuum chamber can be referred to as "deposition chambers". The second vacuum chamber can be referred to as "processing chamber". Further vacuum chambers or regions can be provided adjacent to the regions shown in the example of FIG. 6.

[0078] The vacuum chambers or regions can be separated from adjacent regions by a valve having a valve housing 604 and a valve unit 605. After the carrier 601 with the substrate 10 thereon is inserted into a region, such as the second deposition region 612, the valve unit 605 can be closed. The atmosphere in the regions can be individually controlled by generating a technical vacuum, for example, with vacuum pumps connected to the regions and/or by inserting one or more process gases, for example, in the first deposition region 608 and/or the second deposition region 612. A transportation path, such as a linear transportation path, can be provided in order to transport the carrier 601, having the substrate 10 thereon, into, through and out of the regions. The transportation path can extend at least in part through the two or more processing regions, such as the first deposition region 608 and the second deposition region 612, and optionally through the transfer region 610.

[0079] The system 600 can include the transfer region 610. In some embodiments, the transfer region 610 can be omitted. The transfer region 610 can be provided by a rotation module, a transit module, or a combination thereof. FIG. 6 illustrates a combination of a rotation module and a transit module. In the rotation module, the track arrangement and the carrier(s) arranged thereon can be rotated around a rotational axis, such as a vertical rotation axis. For example, the carrier(s) can be transferred from the left side of the system 600 to the right side of the system 600, or vice versa. The transit module can include crossing tracks such that carrier(s) can be transferred through the transit module in different directions, e.g., directions perpendicular to each other. [0080] Within the deposition regions, such as the first deposition region 608 and the second deposition region 612, one or more deposition sources can be provided. For example, a first deposition sources 630 can be provided in the first deposition region 608. A second deposition source 650 can be provided in the second deposition region 612. The one or more deposition sources can be evaporation sources configured for deposition of one or more organic layers on the substrate 10 to form an organic layer stack for an OLED device.

[0081 ] FIG. 7 shows a flow chart of a method 700 for contactless transportation of a carrier in a deposition system, such as a vacuum system, according to embodiments described herein. The method 700 can utilize the carriers, apparatuses, and systems according to the present disclosure.

[0082] The method 700 includes in block 710 a detecting of a first side of a detectable device of the carrier, and in block 720 a controlling of at least one active magnet unit arranged on a second side of the detectable device opposite the first side. In some implementations, the method 700 can determine a position e.g. of ends of the carrier in the deposition system when the detected signals indicates a change e.g. in a distance. According to some embodiments, two or more sensors can form a group based on which a respective active magnet unit is controlled. For example, an active magnet unit can be controlled if a signal provided by a sensor thereof and (a) signal(s) provided by one or more neighboring sensors of the sensor differ from each other. [0083] In one embodiment, a current flowing through the at least one active magnet unit can be changed according to the detection signals. For example, the current can be gradually or continuously decreased to zero for an active magnet unit which the carrier "leaves". Further, the current can be gradually or continuously increased from zero to a set value for an active magnet unit which the carrier "approaches" or "enters". [0084] According to embodiments described herein, the method for contactless transportation of a carrier in a deposition system can be conducted using computer programs, software, computer software products and the interrelated controllers, which can have a CPU, a memory, a user interface, and input and output devices being in communication with the corresponding components of the carrier, apparatus and/or system. [0085] According to the embodiments of the present disclosure, one or more active magnet units and one or more sensors are arranged on opposite sides of a guiding space. In particular, the one or more active magnet units and the one or more sensors are arranged on opposite sides of the magnet structure of the carrier. The space in which the magnetic guidance is performed can be efficiently used. Further, an interference between the magnetic guidance and the one or more sensors can be avoided and a smooth transportation of the carrier in the transport direction can be achieved. Substrate breakage due to an unsteady transportation of the carrier and/or a generation of particles can be reduced or even avoided.

[0086] While the foregoing is directed to embodiments of the disclosure, other and further embodiments of the disclosure may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.

Claims

1. An apparatus for contactless transportation of a carrier in a deposition system, comprising: a guiding structure having one or more active magnet units configured to face a magnet structure of the carrier; and one or more sensors configured to detect a presence of the carrier, wherein the one or more active magnet units and the one or more sensors are arranged to define a guiding space for the magnet structure between the one or more active magnet units and the one or more sensors.

2. The apparatus of claim 1, wherein the one or more sensors are distance sensors configured to measure a distance to the carrier.

3. The apparatus of claim 1 or 2, wherein the one or more active magnet units are arranged on one side of the guiding space and the one or more sensors are arranged on the other side of the guiding space with respect to a vertical direction or horizontal direction.

4. The apparatus of any one of claims 1 to 3, wherein each sensor of the one or more sensors has a sensor extension in a transport direction of the carrier, wherein the sensor extension is 1% or more of a carrier extension in the transport direction.

5. The apparatus of any one of claims 1 to 4, further including a drive structure having a plurality of further active magnet units.

6. An apparatus for contactless transportation of a carrier in a deposition system, comprising: one or more sensors configured to detect a presence of the carrier, wherein each sensor of the one or more sensors has a sensor extension in a transport direction of the carrier, and wherein the sensor extension is 1% or more of a carrier extension in the transport direction.

7. The apparatus of claim 6, wherein the sensor extension is at least 2% of the carrier extension or at least 4% of the carrier extension.

8. The apparatus of claim 6 or 7, wherein the one or more sensors are distance sensors configured to measure a distance to the carrier.

9. A system for contactless transportation of a carrier, comprising: the apparatus of any one of claims 1 to 8; and the carrier.

10. The system of claim 9, wherein the carrier includes a detectable device detectable by the one or more sensors.

11. The system of claim 10, wherein the detectable device is arranged to face the one or more sensors.

12. The system of claim 10 or 11, wherein the detectable device includes a geometric profile varying along the transport direction and detectable by the one or more sensors.

13. The system of claim 12, wherein the geometric profile has one or more shape elements selected from the group consisting of an inclination, a discontinuity, an arc shape, and any combination thereof.

14. The system of claim 12 or 13, wherein the one or more sensors are configured to detect a distance between the one or more sensors and the geometric profile.

15. A method for contactless transportation of a carrier in a deposition system, comprising: detecting a first side of a detectable device of the carrier; and controlling at least one active magnet unit arranged on a second side of the detectable device opposite the first side.