TW201923943A - Method and apparatus for determining alignment of a carrier levitation system - Google Patents

Abstract

A method for determining an alignment of a carrier levitation system is provided. The carrier levitation system includes a plurality of magnetic units, the plurality of magnetic units being adapted for contactlessly levitating a carrier. The plurality of magnetic units includes a first magnetic unit and a second magnetic unit. The method includes measuring a first distance from the first magnetic unit to the carrier. The method includes measuring a second distance from the second magnetic unit to the carrier. The method includes determining, from at least the first distance and the second distance, the alignment of the carrier levitation system.

Description

Method for determining alignment of a carrier suspension system

Several embodiments relate to a processing system in which a carrier is proposed. More specifically, the embodiments described herein relate to several methods for determining the alignment of a device for guiding a carrier in a processing system.

Several systems are known in the processing chamber for performing several processes. Examples of these processes are coating of substrates in the processing chamber. Several methods are known for depositing materials on a substrate. As an example, the substrate may be coated by using an evaporation process, a physical vapor deposition (PVD) process, or a chemical vapor deposition (CVD) process. The physical vapor deposition process is, for example, a sputtering process, a spraying process, or the like. The process can be performed in the processing chamber of the deposition equipment, and the coated substrate is located in the processing chamber. A deposition material is provided into the processing chamber. Several materials can be used for deposition on the substrate, such as small molecules, metals, oxides, nitrides, and carbides. Furthermore, other processes may be performed in the processing chamber, such as etching, structuring, annealing, or the like.

For example, the coating process can be regarded as a large-area substrate used for example in display manufacturing technology. The coated substrate can be used in several applications and in several technical fields. For example, one application may be an organic light emitting diode (OLED) panel. Other applications include insulating panels, such as microelectronics for semiconductor devices, substrates with thin film transistors (TFTs), color filters, or the like. OLEDs are solid-state devices composed of thin films of (organic) molecules. In the case of electricity, a thin film of (organic) molecules generates light. As an example, OLED displays can provide bright displays on electronic devices and use less power than liquid crystal displays (LCDs), for example. In the processing chamber, organic molecules are generated (eg, evaporated, sputtered, or sprayed, etc.) and deposited on the substrate. The particles can be exemplified by forming a OLED pattern on the substrate through a mask having a boundary or a specific pattern to deposit a material at a desired position on the substrate.

The processing system may include a guide device, for example, to guide the substrate in the processing chamber during the coating process. The guiding device may be adapted to provide a carrier in the processing chamber and / or to transfer the carrier in the processing chamber. Guiding device alignment is available. As an example, the alignment should be accurate to achieve good process results. Examples are to ensure that the carrier is supported in the target position in the processing chamber, or to ensure that the carrier moves in the processing chamber according to the target path. The determination of the alignment of the guidance device should preferably be performed in a time-efficient and cost-effective manner.

In view of the foregoing, there is a need for an apparatus and method that can improve the alignment of a device that is used to guide a carrier in a processing system.

According to an embodiment, a method for determining an alignment of a carrier suspension system is proposed. The carrier suspension system includes a plurality of magnetic units. The magnetic units are suitable for non-contact suspension of a carrier. The magnetic units include a first magnetic unit and a second magnetic unit. The method includes measuring a first distance from the first magnetic unit to one of the carriers. The method includes measuring a second distance from the second magnetic unit to one of the carriers. The method includes determining the alignment of the carrier suspension system from at least a first distance and a second distance.

According to other embodiments, a method for determining alignment of a carrier suspension system is proposed. The magnetic levitation system includes several magnetic units, which are suitable for non-contact levitation of a carrier. These magnetic units include a first magnetic unit and a second magnetic unit. The method includes measuring a first distance from the first magnetic unit to the carrier when the carrier is suspended non-contact by at least the first magnetic unit. The method includes measuring a second distance from the second magnetic unit to the carrier when the carrier is suspended non-contact by at least the second magnetic unit. The method includes determining an alignment of the carrier suspension system from at least a first distance and a second distance.

According to other embodiments, a method for determining alignment of a carrier suspension system is proposed. The magnetic levitation system includes several magnetic units. These magnetic units are suitable for non-contact suspension of a carrier. These magnetic units include a first magnetic unit and a second magnetic unit. The method includes measuring a first distance from the first magnetic unit to the carrier when the carrier is mechanically supported by a mechanical support. The method includes measuring a second distance from the second magnetic unit to the carrier when the carrier is mechanically supported by a mechanical support. The method includes determining an alignment of one of the magnetic levitation system and / or the mechanical support from at least a first distance and a second distance.

According to other embodiments, a device is proposed. The device includes a carrier suspension system including several magnetic units. These magnetic units are suitable for non-contact suspension of a carrier. These magnetic units include a first magnetic unit and a second magnetic unit. The device includes a first distance sensor. The device includes a second distance sensor. The device includes a control unit connected to the first distance sensor and the second distance sensor. The control unit is assembled to determine the alignment of one of the carrier suspension systems from at least a first distance and a second distance. The first distance is from the first magnetic unit to the carrier, and the second distance is from the second magnetic unit to the carrier. In order to have a better understanding of the above and other aspects of the present invention, the following specific examples are described in detail below in conjunction with the accompanying drawings:

Detailed reference will be made in several embodiments, one or more examples of which are shown in the drawings. In the description of the drawings below, the same reference numerals refer to the same elements. Generally, only the differences between the individual embodiments are described. The examples are provided by way of illustration and are not meant to be limiting. Furthermore, the features described or described as part of one embodiment can be used in or combined with other embodiments to obtain still other embodiments. This means that this description includes such adjustments and changes.

Several embodiments described herein include non-contact suspension and / or transfer of a carrier. The carrier is exemplified by a substrate carrier. The name "non-contact" used throughout this disclosure can be understood as meaning that the weight of the carrier is not supported by mechanical contact or mechanical force, but is supported by magnetic force. In particular, the carrier can be supported in a floating or floating state by magnetic force instead of mechanical force. In some applications, there is no mechanical contact between the carrier and the rest of the device during the suspension of the carrier in the system and, for example, during the movement.

Compared with the mechanical device used to guide the carrier in the processing system, the advantage is that the non-contact suspension will not encounter friction and affect the linearity and / or precision of the carrier's movement. The non-contact conveying of the carrier provides frictionless movement of the carrier. For example, the position of the carrier relative to the mask in the sedimentation process can be controlled and maintained with high precision. Moreover, the suspension system provides fast acceleration or deceleration of the carrier and / or fine adjustment of the carrier speed.

For example, during the deposition process, non-contact suspension or transfer of the carrier is advantageous, and no particles are generated during the transfer of the carrier due to the mechanical contact between the carrier and the components of the device, such as mechanical tracks. Therefore, the non-contact suspension or transfer system provides a layer for improving the purity and uniformity of the substrate, especially because the particle generation system is minimized when using the non-contact suspension.

According to several embodiments that can be combined with other embodiments described herein, the carrier may be a carrier suitable for carrying or supporting an object. The carrier may define a plane, for example, a plane substantially parallel to the receiving surface of the substrate.

According to several embodiments that can be combined with other embodiments described herein, the carrier can be adapted to carry one substrate and / or several substrates. The carrier may be a substrate carrier. For example, the carrier may be suitable for carrying one large-area substrate and / or several large-area substrates.

According to several embodiments, the large-area substrate or individual carriers may have a size of at least 0.67 m ² . Dimensions can be from about 0.67 m ² (0.73 mx 0.92 m-4.5th generation) to about 8 m ² , more particularly from about 2 m ² to about 9 m ² or even up to 12 m ² . For example, the large-area substrate or carrier may be the 4.5th generation, the 5th generation, the 7.5th generation, the 8.5th generation, or even the 10th generation. The 4.5th generation corresponds to a substrate of approximately 0.67 m ² (0.73 mx 0.92 m), the 5th generation corresponds to a substrate of approximately 1.4 m ² (1.1 mx 1.3 m), and the 7.5th generation corresponds to a substrate of approximately 4.29 m ² (1.95 mx 2.2 m), the 8.5th generation corresponds to a substrate of about 5.7 m ² (2.2 mx 2.5 m), and the 10th generation corresponds to a substrate of about 8.7 m ² (2.85 m × 3.05 m). Even higher generations and corresponding substrate areas such as the 11th and 12th generations can be applied in a similar manner.

The name "substrate" as used herein includes both substantially non-flexible substrates and flexible substrates. Examples of the non-flexible substrate are a glass substrate, a wafer, a transparent crystal wafer such as sapphire or the like, or a glass plate. The flexible substrate is, for example, a web or a foil. The name "substantially inflexible" is understood to be different from "flexible". According to several embodiments that can be combined with other embodiments described herein, the several embodiments described herein can be used for display PVD, that is, sputtering deposition on large-area substrates for the display market.

According to several embodiments that can be combined with other embodiments described herein, the carrier may be suitable for a carrier that carries a mask, such as an edge exclusion mask to prevent the edges of the substrate from being coated in the deposition process. cloth. The carrier may be a mask carrier.

The carrier according to the embodiments described herein is not necessarily limited to a substrate carrier or a mask carrier. The methods described herein are also applicable to other forms of carriers, that is, carriers suitable for carrying objects or devices other than substrates or masks, for example.

For specific purposes, the drawings are shown as vertically oriented carriers. The embodiments described herein are not limited to vertically oriented carriers. Other orientations of the carrier can also be provided, for example horizontal orientation.

In this disclosure, the term "substantially horizontal" direction may include directions that form a small angle of up to 10 degrees or even up to 15 degrees with each other. The term "substantially vertical" direction may include directions that form an angle of less than 90 degrees with each other, for example, at least 80 degrees or at least 75 degrees. Similar considerations apply to concepts that are substantially parallel or vertical axes, planes, areas, orientations, or the like.

Some embodiments described herein include the concept of "vertical orientation". The vertical direction is considered to be a direction that is parallel or substantially parallel to a direction extending along gravity. The vertical direction can be shifted from an exact verticality (the latter is defined by gravity) to an angle of up to 15 degrees, for example.

Several embodiments described herein may further include the concept of "horizontal direction". The horizontal direction is understood to be different from the vertical direction. The horizontal direction may be vertical or substantially perpendicular to the exact vertical direction defined by gravity.

The embodiments described herein relate to a method for determining the alignment of a carrier suspension system. Before providing detailed descriptions of several embodiments, for specific purposes, reference is first made to FIG. 1. FIG. 1 illustrates an example of a device 100 according to the embodiment described herein. Several embodiments of the method described herein can be performed by using the apparatus 100 shown in Figure 1. The method described here is not limited to being performed using the apparatus 100 shown in FIG.

The device 100 shown in FIG. 1 includes a carrier 110. The carrier 110 supports the substrate 120. The carrier 110 includes a first passive magnetic unit 150, for example, a rod of ferromagnetic material. The apparatus 100 includes a carrier suspension system including a plurality of magnetic units 170. Such magnetic units 170 are exemplified as active magnetic units, such as electromagnetic devices, solenoids, coils, or superconducting magnets. Individual magnetic units of these magnetic units are denoted by reference number 175. The carrier suspension system extends in a first direction 192. The carrier 110 is movable along these magnetic units 170. The first passive magnetic unit 150 and the magnetic units 170 are assembled to provide a magnetic levitation force to suspend the carrier 110. The magnetic levitation force extends in the second direction 194.

The device 100 shown in FIG. 1 may include a plurality of distance sensors (not shown) disposed on the magnetic units 170. The distance sensor may be disposed on each active magnetic unit of these magnetic units 170. The distance sensor can be assembled for measuring the distance between these magnetic units and the carrier during non-contact suspension of the carrier.

The device 100 shown in FIG. 1 includes a magnetic driving structure 180. The magnetic driving structure 180 includes several other magnetic units, such as an active magnetic unit. The individual magnetic units of the magnetic drive structure are designated by reference number 185. The carrier 110 may include a second passive magnetic unit 160 to interact with the magnetic unit of the magnetic driving structure 180. The magnetic unit of the magnetic driving structure 180 is exemplified as a carrier driving the processing system along the first direction 192. For example, the second passive magnetic unit 160 may include several permanent magnets, which are arranged in an alternating polarity manner. The magnetic field of the generated second passive magnetic unit 160 may interact with these magnetic units of the magnetic driving structure 180 to move the carrier 110 in the first direction 192 when the carrier 110 is suspended.

The device 100 shown in FIG. 1 includes a mechanical support 140, such as a plurality of rollers, retainer bearings or emergency bearings. The mechanical support 140 is disposed below the suspended carrier. The mechanical support 140 is fixed to the magnetic driving structure 180. The magnetic support 140 can be adapted to grasp the carrier 110 in the case of failure of the carrier suspension system to suspend the carrier 110. For example, in the coating process or other processes, the carrier 110 may be magnetically suspended by the magnetic units 170. In the case where the suspended carrier 110 is suddenly interrupted due to loss of power, the carrier 110 may stop magnetic suspension and fall in the worst case. According to several embodiments described herein, the carrier 110 may fall on a mechanical support. The mechanical support can grab the carrier and avoid damage to the carrier or other parts of the system.

The apparatus shown in FIG. 1 may include a deposition source (not shown). The deposition source may be configured to coat a substrate supported by the suspended carrier 110, for example, a substrate disposed vertically. During the coating process, the non-contact suspended carrier 110 can be moved in the first direction 192 by the magnetic driving structure 180.

The device 100 includes a control unit 130. The control unit 130 may be connected to the magnetic units 170 and / or the distance sensor. The control unit 130 can be equipped for controlling the magnetic suspension of the carrier 110. The control unit 130 can be assembled, for example, to control the distance between the carrier 110 and the magnetic units 170 during the suspension of the carrier 110 based on the measurement distance measured by the distance sensor supplied to the control unit 130. Under the control of the control unit 130, the magnetic driving structure 180 can drive the carrier 110.

According to several embodiments that can be combined with other embodiments described herein, the control unit may include several controllers, such as several local controllers. Each of the controllers may be connected to and / or provided with an individual magnetic unit of the magnetic units 170. One of these controllers can be assembled, for example, based on the measurement distance measured by a distance sensor provided on the magnetic unit, and the measurement distance is supplied to the controller for controlling the carrier 110 and the magnetic unit during the suspension of the carrier 110 the distance between.

The embodiments described herein provide a method for determining the alignment of a carrier suspension system. The carrier suspension system includes several magnetic units 170. Several embodiments described herein further provide for determining the alignment of the mechanical support 140 and the magnetic drive structure 180. Several embodiments of this method may be performed by the control unit 130 or by other control units of the device.

Figures 2a-b are schematic diagrams of several magnetic units 170 suitable for the non-contact suspension carrier 110 according to the embodiments described herein. 2a-b illustrate the magnetic driving structure 180. The magnetic driving structure 180 includes several other magnetic units for driving the carrier 110 in the carrier conveying direction. The magnetic units 170 are disposed in the first direction 192. The magnetic driving structure 180 is disposed in the first direction 192. The magnetic units 170 and the magnetic driving structure 180 and the other magnetic units are shown as rectangles. The carrier 110 shown in dashed lines can be suspended and / or transferred by the magnetic units 170 in a non-contact manner.

The magnetic units of the magnetic units 170 shown in Figure 2a are well aligned. The magnetic units of the magnetic driving structure 180 shown in Figure 2a are well aligned. For example, the rectangles representing the magnetic units 170 all have the same angular orientation and the bottom edge of each rectangle is aligned with the first reference line 212. The first reference line 212 extends in a first direction 192. The first reference line 212 indicates the target alignment for such magnetic units 170. The rectangles representing the magnetic units of the magnetic driving structure 180 all have the same angular orientation and the top edge of each rectangle is aligned with the second reference line 222. The second reference line 222 extends in the first direction 192. The second reference line 222 indicates the target alignment for the magnetic drive structure.

The magnetic units 170 and the magnetic driving structure 180 shown in FIG. 2b are misaligned. As shown in the figure, the bottom edges of some of these magnetic units 170 are not aligned with the first reference line 212, but are located at an angle with respect to the first reference line 212 and / or with the first reference line 212 are separated by a distance. The top edges of some of the magnetic units of the magnetic driving structure 180 are not aligned with the second reference line 222 but are located at an angle relative to the second reference line 222 and / or spaced apart from the second reference line 222 by a distance. The misalignment shown in Figure 2b is illustrated in an exaggerated manner for easier understanding.

In order to determine the alignment of the carrier suspension system according to several embodiments described herein, measurements using laser trackers or precision scales can be used. Such measurements can be complex and time consuming. With these methods, it may be difficult to reach the measurement points used to collect the information required for the location of the magnetic unit.

Figures 3a-b are schematic diagrams illustrating a method for determining the alignment of a carrier suspension system according to the embodiments described herein.

Figures 3a-b show the carrier 110. The carrier 110 may be, for example, a suitable supporting substrate or a mask. Other forms of carriers may also be considered. The equipment shown in Figures 3a-b includes a carrier suspension system, and the carrier suspension system includes a plurality of magnetic units 170.

According to several embodiments that may be combined with other embodiments described herein, the carrier suspension system may be adapted for non-contact suspension and / or transport of the carrier 110. The carrier suspension system may be adapted to transport the carrier 110 in the first direction 192.

The magnetic units 170 include a first magnetic unit 312 and a second magnetic unit 314. In some embodiments, the magnetic units 170 may include other magnetic units, such as the magnetic unit 316 shown in dashed lines. These magnetic units 170 may be disposed in the first direction 192. The magnetic units 170 are suitable for being disposed in the first direction 192. These magnetic units 170 are suitable for the non-contact suspension carrier 110.

As shown in Figures 3a-b, the first distance 322 from the first magnetic unit 312 to the carrier 110 is measured. The first distance 322 can be measured by a first distance sensor (not shown), and the first distance sensor is disposed on the first magnetic unit 312. A second distance 324 from the second magnetic unit 314 to the carrier 110 is measurable. The second distance 324 can be measured by a second distance sensor (not shown), and the second distance sensor is disposed on the second magnetic unit 314. One or more other distances from these magnetic units 170 to the carrier 110 are measurable. The third distance from the third magnetic unit to the carrier 110 is measurable. The third magnetic unit is exemplified by one of the magnetic units 316. The third distance can be measured by a third distance sensor, and the third distance sensor is disposed on the third magnetic unit. A fourth distance from the fourth magnetic unit 170 of these magnetic units 170 to the carrier 110 can be measured. The fourth distance can be measured by a fourth distance sensor, and the fourth distance sensor is disposed on the fourth magnetic unit. Even other distances from these magnetic units 170 to the carrier 110 can be measured.

In the exemplary embodiment shown in Figure 3a, the first distance 322 and the second distance 324 are measured when the carrier is magnetically suspended. The carrier 110 shown in FIG. 3a is non-contact suspended by the carrier suspension system, as shown by an upward arrow 390. There is no mechanical contact between the carrier 110 and other components of the device. The other components of the device are, for example, mechanical supports 140. The carrier 110 shown in FIG. 3a is not mechanically supported.

As shown in FIG. 3a, the first distance 322 and the second distance 324 can be measured when the carrier 110 is magnetically suspended by the first magnetic unit 312 and the second magnetic unit 314. In the exemplary embodiment shown in FIG. 3a, the carrier 110 is non-contactly suspended by the first magnetic unit 312 and the second magnetic unit 314. In other embodiments, for example, according to the application under consideration, the carrier 110 may be non-contact suspended by a single magnetic unit or by more than two magnetic units from these magnetic units 170.

The carrier 110 does not need to measure the first distance 322 and the second distance 324 in a magnetically suspended state. For example, as shown in FIG. 3b, the first distance 322 and the second distance 324 can be measured when the carrier 110 is mechanically supported.

The device shown in FIG. 3b includes a mechanical support 140. The mechanical support 140 may include several support elements 142. The carrier 110 shown in FIG. 3b is mechanically supported by the mechanical support 140. The carrier 110 shown in FIG. 3b is not in a non-contact suspension state. In the exemplary embodiment shown in FIG. 3b, the first distance 322 and the second distance 324 are measured when the carrier 110 is supported by the mechanical support 140.

The first distance 322 and the second distance 324, and any other distances from the magnetic units 170 to the carrier 110 measured according to several embodiments described herein, provide information about the alignment of the magnetic units 170. For example, if the first distance 322 is substantially the same as the second distance 324, the first magnetic unit 312 and the second magnetic unit 314 are well aligned, as shown in FIG. 2a. If the first distance 322 is substantially different from the second distance 324, misalignment may exist, for example, as shown in FIG. 2b. Using the measured distance, possible misalignment can be detected.

In view of the above, a method for determining the alignment of a carrier suspension system is proposed. The carrier suspension system includes several magnetic units 170. Such magnetic units 170 are suitable for the non-contact suspension carrier 110. The magnetic units 170 include a first magnetic unit 312 and a second magnetic unit 314. The method includes measuring a first distance 322 from the first magnetic unit 312 to the carrier 110. The method includes measuring a second distance 324 from the second magnetic unit 314 to the carrier 110. The method includes determining the alignment of the carrier suspension system from at least a first distance 322 and a second distance 324.

For example, the method may be performed according to the embodiments described herein with respect to Figures 3a-b. According to several embodiments that can be combined with other embodiments described herein, the method may include non-contact suspending the carrier 110 by a carrier suspension system. The first distance 322 and the second distance 324 can be measured when the carrier 110 is in non-contact suspension. The method may alternatively or additionally include mechanically supporting the carrier by a mechanical support 140. The first distance 322 and the second distance 324 can be measured while the carrier is mechanically supported.

According to other embodiments, a method for determining the alignment of a carrier suspension system is proposed. The carrier suspension system includes several magnetic units 170. Such magnetic units 170 are suitable for the magnetic suspension carrier 110. The magnetic units 170 include a first magnetic unit 312 and a second magnetic unit 314. The method may include non-contact suspending the carrier 110 by one or more of the magnetic units 170. The method includes measuring a first distance 322 from the first magnetic unit 312 to the carrier 110 when the carrier is non-contact suspended by at least the first magnetic unit 312. This method includes measuring a second distance 324 from the second magnetic unit 314 to the carrier 110 when the carrier is non-contact suspended by at least the second magnetic unit 314. The method includes determining the alignment of the carrier suspension system from at least a first distance 322 and a second distance 324.

According to other embodiments, a method for determining the alignment of a carrier suspension system is proposed. The carrier suspension system includes several magnetic units 170. Such magnetic units 170 are suitable for the magnetic suspension carrier 110. The magnetic units 170 include a first magnetic unit 312 and a second magnetic unit 314. This method may include mechanically supporting the carrier 110 by a mechanical support 140. The method includes measuring a first distance 322 from the first magnetic unit 312 to the carrier 110 while the carrier 110 is mechanically supported by the mechanical support 140. This method includes measuring a second distance 324 from the second magnetic unit 314 to the carrier 110 while the carrier 110 is mechanically supported by the mechanical support 140. The method includes determining the alignment of the mechanical support 140 and / or the carrier suspension system from at least a first distance 322 and a second distance 324.

Several embodiments described herein include using the carrier itself to determine the alignment of the carrier suspension system and / or mechanical support.

The advantage is that no additional devices such as laser trackers, reflectors or inclination sensors are needed to measure the alignment. Compared to other methods such as using laser measurement, the method described here provides a simple and efficient method without being complicated and time consuming.

The distance from the magnetic unit to the carrier 110 can be measured using a distance sensor. For example, the distance sensor may be disposed in or located in the magnetic units 170 to assist in controlling the magnetic levitation process performed by the device. The same distance sensor can also be used in measurement examples such as the first distance 322 and the second distance 324 according to several embodiments described herein. In some cases, no additional distance sensor may be needed to determine the alignment of these magnetic units 170 other than the distance sensors already present in the system to control non-contact hovering. According to several embodiments that can be combined with other embodiments described herein, the first distance 322 can be measured by a first distance sensor, and the first distance sensor is disposed on the first magnetic unit 312. The second distance 324 can be measured by a second distance sensor, and the second distance sensor is located on the second magnetic unit 314. The method may include using the first distance sensor and / or the second distance sensor to control the non-contact suspension of the carrier 110 or other carriers.

Since the method described here is easy to implement, this method can be performed periodically to ensure that the magnetic units are well aligned for a longer period of time. After performing the first alignment, the alignment of the magnetic unit may deteriorate at a certain point in time. As an example, this deterioration may occur in view of the small movement of the elements of the system relative to each other over a period of time. The small movement of the components of the system relative to each other over time is exemplified by the vacuum being turned on and off repeatedly in different process cycles. For example, in view of the very small distance from the carrier to the magnetic unit during non-contact suspension, for example from 1 to 8 mm, more particularly from 1 to 4 mm, and from 2 to 3 mm, for example, This small movement may affect the alignment of the magnetic unit. It is advantageous to regularly provide a high-precision alignment of the magnetic unit. The simple and efficient method described here provides this approach. Other methods based on examples of laser trackers are complex and difficult to understand, making frequent execution of such methods disadvantageous.

By deciding alignment according to several embodiments described herein, for example, misalignment can be avoided as shown in Figure 2b. Under the good alignment of the magnetic unit, it can ensure the good operation of non-contact suspension and transfer carrier, and can avoid the adverse effects of the misaligned magnetic unit. For example, such adverse effects may include collisions of suspended carriers with misaligned carriers (in view of the small distance between suspended carriers and carrier suspension systems), which may cause particles to generate or damage the carrier or magnetic unit. Other adverse effects of misaligned magnetic units include saturation effects in the control of the magnetic levitation process, and in the worst case may cause the suspended carrier to fall. Several embodiments described herein ensure that precise positioning of the carrier during non-contact suspension is provided.

Other advantages include embodiments in which the distance from the magnetic unit to the carrier 110 is measured while the carrier 110 is mechanically supported, which provides a determination of the alignment of the mechanical support 140 relative to these magnetic units 170. The mechanical support 140 is, for example, a plurality of fixed bearings, which can be mechanically connected to the magnetic driving structure 180, and is exemplarily fixed to the magnetic driving structure 180. For example, the supporting element of the mechanical support 140 may be fixed to the magnetic driving structure 180. In view of the mechanical connection between the mechanical support 140 and the magnetic drive structure 180, determining the alignment of the mechanical support 140 can provide the alignment of the magnetic units of the magnetic drive structure 180. The several embodiments described herein provide the relative alignment of all components that determine the non-contact suspension and transfer of the carrier contained in the device.

Embodiments that include measuring the distance from the magnetic unit to the carrier 110 while the carrier 110 is mechanically supported provide even more advantages, such embodiments can be performed even in the case where the magnetic unit is substantially misaligned. In this case, it may be difficult to measure the first distance 322 and the second distance 324 when the carrier 110 is in non-contact suspension. For example, in the case of substantial misalignment, the non-contact suspension carrier may be rendered infeasible due to the saturation effect of the suspension control circuit. Even in the case of a considerable degree of misalignment of the magnetic unit, embodiments involving measuring the first distance 322 and the second distance 324 while the carrier is mechanically supported may be performed.

Other advantages are that the methods described herein can be performed under vacuum. The latter is not possible in some other methods, such as methods based on laser measurement or tilt sensor. The advantage of measuring the first distance 322 and the second distance 324 under vacuum is that the effects produced under vacuum conditions can be considered to determine the alignment of the carrier suspension system and / or the mechanical support. The effects produced under vacuum conditions are, for example, deformations of magnetic units or other elements of the system. That is, the alignment can be determined under the same process conditions that exist when vacuum processing a substrate in a carrier suspended by a magnetic unit, for example.

According to several embodiments that may be combined with other embodiments described herein, the first distance 322, the second distance 324, and / or any other distance from the carrier to the magnetic unit according to the embodiments described herein may be at Measure under vacuum. The distance can be measured when the vacuum system is supplied in a processing chamber containing a carrier. The name "vacuum" can be understood as meaning a technical vacuum with a vacuum pressure of less than 10 mbar, for example. The apparatus according to several embodiments described herein may include one or more vacuum pumps, such as turbine pumps and / or cryopumps, connected to the vacuum chamber to generate a vacuum inside the vacuum chamber.

Several embodiments described herein include determining the alignment of the carrier suspension system. Determining the alignment of the carrier suspension system may include comparing the measurement position of a magnetic unit with the measurement positions of one or more other magnetic units, or comparing the measurement position of a magnetic unit with one or more reference positions.

According to several embodiments that can be combined with other embodiments described herein, determining the alignment of the carrier suspension system may include at least one of the following: determining the relative alignment of two or more of these magnetic units 170 ; Determine the relative alignment of the first magnetic unit 312 with respect to the second magnetic unit 314; determine the relative alignment of the first magnetic unit 312 with respect to other magnetic units of these magnetic units 170; determine the relative alignment of the second magnetic unit 314 with respect to The relative alignment of other magnetic units of these magnetic units 170; determines the alignment of the first magnetic unit 312, the second magnetic unit 314, or any other magnetic unit of these magnetic units 170 with respect to one or more reference positions And compare the first distance 322, the second distance 324, and / or any other distance from the magnetic unit to the carrier 110 with the reference distance.

According to several embodiments that can be combined with other embodiments described herein, determining the alignment of the carrier suspension system may include calculating reference values from at least a first distance 322 and a second distance 324 for use from the carrier 110 to the magnetic units 170 is the distance of one magnetic unit. The reference value can be calculated by the averaging operation. The reference value can be calculated by averaging two or more measurement distances of these magnetic units to the carrier. For example, the reference value may be calculated by averaging at least a first distance and a second distance.

According to several embodiments that can be combined with other embodiments described herein, determining the alignment of the carrier suspension system may include comparing the first distance 322, the second distance 324, and the selected third distance and / or any other measurement distance And calculated reference value. By comparing the measured distance with the calculated reference value, it can be determined whether the magnetic unit is well aligned, and how much the individual deviation is in the case of possible misalignment.

Misalignment of the carrier suspension system can be corrected in several feasible ways. For example, the positions of the first magnetic unit 312 and / or the second magnetic unit 314 can be mechanically adjusted to align the magnetic units 170. According to several embodiments that may be combined with other embodiments described herein, this method may include performing an alignment operation on a carrier suspension system and / or a magnetic drive structure. The alignment operation may be a mechanical alignment operation. The alignment operation on the carrier suspension system may include adjusting a position of at least one magnetic unit of the magnetic units of the carrier suspension system based at least in part on the determined alignment. The alignment operation on the magnetic drive structure may include adjusting a position of at least one magnetic unit of the magnetic units of the magnetic drive structure based at least in part on the determined alignment.

For example, the position of the one or more magnetic units can be adjusted so that the adjusted magnetic units are aligned with the first reference line 212 or the second reference line 222, respectively, as shown in FIG. 2a.

In an alternative example, the position of the magnetic unit may not change. In the non-contact suspension or transfer of successive carriers, for example, in the coating process that occurs after the first distance 322 and the second distance 324 have been measured, the control of the carrier suspension system can control the first distance 322 and the second distance 324 The measured values are taken into consideration to compensate for misalignment detected. For example, according to the measured values of the first distance 322 and the second distance 324, the control unit can individually control the distance from the individual magnetic unit to the suspended carrier in the subsequent suspension process to compensate for the detected misalignment.

According to other embodiments that can be combined with other embodiments described herein, the method may include non-contact suspending the carrier or other carriers by the magnetic units. The method may include controlling the first levitating distance and the second levitating distance based at least in part on the determined alignment. The first suspension distance may be the distance from the first magnetic unit to the non-contact suspension carrier. Examples of the non-contact suspension carrier are the carrier 110 or other carriers. The second suspension distance may be a distance from the second magnetic unit to the non-contact suspension carrier. Control may include individually controlling the first levitation distance and the second levitation distance. Control may include setting a first target value for the first levitation distance and setting a second target distance for the second levitation distance. The first target value may be different from the second target value.

During non-contact levitation, individually controlling the distance from the magnetic unit to the carrier to compensate for detected misalignment provides advantages. For example, the effect of control saturation in magnetic levitation procedures can be reduced or even avoided, while providing greater Bandwidth. More accurate suspension procedures are available.

FIG. 4 illustrates a method for determining the alignment of a carrier suspension system according to the embodiments described herein.

As shown in FIG. 4, the first distance 322 from the first magnetic unit 312 to the carrier 110 can be measured when the carrier 110 is in the first position 532. The second distance 324 from the second magnetic unit 314 to the carrier 110 can be measured when the carrier 110 is in the first position 532. The first distance 322 and the second distance 324 can be measured when the carrier 110 is in the same position.

According to several embodiments that may be combined with other embodiments described herein, the first magnetic unit 312 and / or the second magnetic unit 314 may face the carrier 110 in the first position. The first position may be one of the positions in the processing chamber. The carrier 110 may be supported in the first position in a mechanically supported state. According to several embodiments described herein, the carrier 110 in the first position may be mechanically supported by a mechanical support 140.

The carrier 110 may alternatively or additionally be supported in the first position in a magnetically suspended state. The carrier 110 in the first position can be non-contact suspended by at least one magnetic unit of the magnetic units 170. The number of magnetic units of the carrier 110 magnetically suspended in the first position may be determined by several factors, such as the size, dimensions, and weight of the carrier.

Figures 5a-b illustrate a method for determining the alignment of a carrier suspension system according to the embodiments described herein.

According to other embodiments, and as shown in Figures 5a-b, the first distance 322 and the second distance 324 may be measured at the carrier 110 at different positions. Figure 5a illustrates the measurement of the first distance 322 when the carrier 110 is in the first position 532. When the first distance 322 is measured, the carrier 110 in the first position 532 may be magnetically suspended or mechanically supported according to several embodiments described herein. For example, the carrier in the first position 532 may be magnetically suspended by the first magnetic unit 312. After measuring the first distance 322, the carrier 110 can be moved from the first position 532 shown in FIG. 5a to the second position 534 shown in FIG. 5b.

FIG. 5b is a schematic diagram of measuring the second distance 324 when the carrier 110 is in the second position 534. When the second distance 324 is measured, the carrier 110 in the second position 534 may be magnetically suspended or mechanically supported according to several embodiments described herein. For example, the carrier in the second position 534 may be magnetically suspended by the second magnetic unit 314.

According to several embodiments that can be combined with other embodiments described herein, the first distance 322 from the first magnetic unit 312 to the carrier 110 can be measured when the carrier 110 is in the first position 532. The second distance 324 from the second magnetic unit 314 to the carrier 110 may be measured when the carrier 110 is in the second position 534.

For example, after measuring the first distance, the carrier 110 may be moved from the first position 532 to the second position 534. The movement from the first position 532 to the second position 534 may be a movement in the first direction 192. The movement from the first position 532 to the second position 534 may be a horizontal movement. The movement from the first position 532 to the second position 534 may be provided and / or guided by a magnetic drive structure. The movement from the first position 532 to the second position 534 may alternatively or additionally be provided and / or guided by a mechanical support.

The first magnetic unit 312 and / or the second magnetic unit 314 may face the carrier in the second position 534. The second position 534 may be one of the positions in the processing chamber. The carrier 110 in the second position may be mechanically supported by a mechanical support. The carrier 110 in the second position 534 may alternatively or additionally be non-contact suspended by a carrier suspension system.

For example, when the carrier 110 is in the first position 532, one, two, three, or more of the magnetic units 170 may face the carrier 110. The number of magnetic units facing the carrier 110 can be determined, for example, by the interval between the magnetic unit and the length of the carrier 110. The method may include measuring a distance from each magnetic unit facing the carrier in the first position to the carrier in the first position.

For example, when the carrier 110 is located in the second position 534, two, three, or more of the magnetic units may face the carrier 110. The method may include measuring a distance from each magnetic unit facing the carrier 110 in the second position 534 to the carrier 110 in the second position 534.

6a-c are schematic diagrams of an apparatus 500 including a plurality of magnetic units 170 according to the embodiments described herein. In the exemplary embodiment, the magnetic units 170 include magnetic units 512, 514, 516, and 518. The apparatus 500 includes a processing chamber 550.

FIG. 6 a is a schematic diagram of the carrier 110 in the first position 532. The two magnetic units 512 and 514 face the carrier 110 in the first position 532. The distance 521 from the magnetic unit 512 to the carrier 110 in the first position 532 is measured. The distance 522 from the magnetic unit 514 to the carrier 110 in the first position 532 is measured. After measuring the distances 521 and 522, the carrier 110 moves from the first position 532 shown in FIG. 6a to the second position 534 shown in FIG. 6b.

Figure 6b shows a schematic diagram of the two magnetic units 514 and 516 facing the carrier 110 in the second position 534. The distance 523 from the magnetic unit 514 to the carrier 110 in the second position 534 is measured. The distance 524 from the magnetic unit 516 to the carrier 110 in the second position 534 is measured. After measuring the distances 523 and 524, the carrier 110 can be moved from the second position 534 shown in FIG. 6b to the third position 536 shown in FIG. 6c.

Figure 6c shows a schematic diagram of the two magnetic units 516 and 518 facing the carrier 110 in the third position 536. The distance 525 from the magnetic unit 516 to the carrier 110 in the third position 536 is measured. The distance 526 from the magnetic unit 518 to the carrier 110 in the third position 536 is measured.

The distances 521, 522, 523, 524, 525, and 526 can be measured when the carrier 110 is non-contactly suspended by the carrier suspension system or when the carrier 110 is mechanically supported by a mechanical support. The measured distances 521, 522, 523, 524, 525 and 526 can be collected in a table. The measured distances 521, 522, 523, 524, 525 and 526, or any combination thereof, can be used to determine the alignment of the carrier suspension system and / or mechanical support according to several embodiments described herein.

According to several embodiments that can be combined with other embodiments described herein, the method may include providing a carrier 110 in a processing chamber, for example, shown in processing chamber 550 in Figures 6a-c.

The carrier suspension system, the first magnetic unit 312, the second magnetic unit 314, and / or these magnetic units 170 may be located in the processing chamber. The mechanical support 140 may be located in the processing chamber. The first distance sensor 732, the second distance sensor 734, and / or any other distance sensor according to several embodiments described herein may be located in the processing chamber.

The method may include measuring a first distance 322 from the first magnetic unit 312 to the carrier 110, a second distance 324 from the second magnetic unit 314 to the carrier 110, and / or from the magnetic unit when the carrier 110 is in the processing chamber. Any other distance to the carrier 110.

The processing chamber may be a vacuum chamber. The processing chamber may be a vacuum deposition chamber. The processing chamber may include one or more deposition sources for coating a substrate in the processing chamber.

According to several embodiments that can be combined with other embodiments described herein, the method may include measuring a third distance from these magnetic units 170 to the carrier 110. The third distance may be the distance from the first magnetic unit 312 to the carrier 110, the distance from the second magnetic unit 314 to the carrier 110, or the distance from these magnetic units 170 to the third magnetic unit to the carrier 110. The method may include determining the alignment of the carrier suspension system and / or the mechanical support from at least a first distance, a second distance, and a third distance.

According to several embodiments that may be combined with other embodiments described herein, the method may include measuring several distances from such magnetic units 170 to the carrier. Each of these distances may be a distance from one of the magnetic units 170 to the carrier 110. Such distances may include a first distance 322, a second distance 324, a third distance, a fourth distance, a fifth distance, or even other distances. Such distances may include two, three, four, five or more distances, for example up to 20 or even more distances. The method may include determining the alignment of the carrier suspension system and / or the mechanical support from these distances. The method may include determining the alignment of the carrier suspension system and / or the mechanical support from at least two or more, at least three or more, at least four or more, or at least five or more of these distances.

According to several embodiments that can be combined with other embodiments described herein, the plurality of magnetic units 170 may include three magnetic units. This method may include measuring a third distance from the third magnetic unit to the carrier. The third distance may be measured when the carrier is in the first position 532 or the second position 534. The alignment of the carrier suspension system and / or the mechanical support may be determined from at least a first distance, a second distance, and a third distance, or a combination thereof.

According to several embodiments that can be combined with other embodiments described herein, the plurality of magnetic units 170 may include 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, or more magnetic units. Units, for example up to 24 or more magnetic units. Such magnetic units 170 may include two rows of magnetic units, for example, two rows of up to 12 or more magnetic units.

According to several embodiments that may be combined with other embodiments described herein, the method may include measuring several distances. The distance from each of these magnetic units to the carrier can be measured. The method may include determining the alignment of the carrier suspension system and / or the mechanical support from these measured distances.

According to several embodiments that can be combined with other embodiments described herein, the first distance from the first magnetic unit to the carrier and the second distance from the second magnetic unit to the carrier may be in the carrier in the first position 532 Take measurements. The method may include measuring a third distance from the second magnetic unit to the carrier while the carrier is in the second position 534. For example, the first magnetic unit and the first distance according to the embodiments described herein may correspond to the magnetic unit 512 and the distance 521, respectively, as shown in FIG. 6a. The second magnetic unit, the second distance, and the third distance according to several embodiments described herein may correspond to the magnetic unit 514, the distance 522, and the distance 523, respectively, as shown in Figures 6a-b. The method may include determining the alignment of the carrier suspension system and / or the mechanical support from at least a first distance, a second distance, and a third distance, or a combination thereof.

According to several embodiments that can be combined with other embodiments described herein, when the second magnetic unit is in the first position, for example, the distance from the first magnetic unit to the carrier at the distance 521 shown in FIG. 6a is exemplified. A distance and / or a second distance from the second magnetic unit to the carrier, for example a distance 522, may be measured. These magnetic units may include a third magnetic unit, such as the magnetic unit 516 shown in FIGS. 6a-c. The method may include measuring a third distance from the third magnetic unit to the carrier when the carrier is in the second position 534, for example, the distance 524 shown in FIG. 6b. The method may include measuring a fourth distance from the second magnetic unit to the carrier when the carrier is in the second position, for example, the distance 523 shown in FIG. 6b. The method may include determining the alignment of the carrier suspension system and / or the mechanical support from at least a first distance, a second distance, a third distance, and a fourth distance, or a combination thereof.

Compared to the example where only one distance measurement is used for each magnetic unit, the measurement of several distances from the same magnetic unit to the carrier for different positions of the carrier is more relevant for the alignment of the carrier unit. More information is available. As a result, alignment or possible misalignment may be determined more accurately.

According to several embodiments that can be combined with other embodiments described herein, the carrier 110 used in the method described herein is a carrier assembled for measuring the distance from these magnetic units to the carrier. This assembly example is Special assembly. The carrier 110 used in the method described herein may be a measurement carrier. Compared with the process carrier, that is, the carrier suspended by the carrier suspension system in the process exemplified by the sunken process, the measurement carrier may be a carrier of different forms. For example, a measurement carrier can be manufactured more accurately than a process carrier. Compared to the process carrier, the measurement carrier may have different dimensions, such as height and / or length. The measurement carrier can be longer or shorter than the process carrier. The measurement carrier may have an adjustable size, for example an adjustable length and / or height.

According to several embodiments that can be combined with other embodiments described herein, the method described herein can be repeated several times with different carriers.

For example, in the first round, a relatively small-sized carrier may be used, and this carrier is exemplified as a measurement carrier. In particular, the height of the carrier may be smaller than that of the process carrier, so that the distance from the carrier to the carrier suspension system is greater than the distance used for the process carrier. This ensures that the carrier does not touch or collide with the magnetic unit or other components of the system when moving through the system, especially where several magnetic units have a relatively large degree of misalignment. For such a carrier, the distance from the magnetic unit to the carrier can be measured and aligned according to several embodiments described herein. After determining the alignment of the magnetic units based on the distance measured in the first round, the mechanical alignment operation can be applied to the carrier suspension system. For example, the position of some magnetic units can be adjusted to align with the carrier suspension system. After the alignment operation, a second round of the method can be performed. In the second round, for example, a second carrier having a larger size may be used. A carrier with a larger size may not collide with the magnetic unit because the latter has already undergone the first round of alignment. For this second carrier, the distance from the magnetic unit to the carrier can also be measured as described here. Alignment can be determined a second time based on these distances. By repeating this method several times, the alignment of the carrier suspension system and / or mechanical support can be further improved in each round of the method.

According to several embodiments that can be combined with other embodiments described herein, the carrier 110 is a first carrier. The method may include measuring a third distance from the first magnetic unit to the second carrier, the second carrier having a size different from the first carrier. The method may include measuring a fourth distance from the second magnetic unit to the second carrier. The method may include determining the alignment of the carrier suspension system and / or the mechanical support from at least a third distance and a fourth distance.

According to several embodiments described herein, the measurement distance from the magnetic unit to the carrier may be a distance in a vertical direction, and the vertical direction is exemplified as the second direction 194. For example, the first distance 322 and / or the second distance 324 may be a distance in the second direction 194. The first distance 322, the second distance 324, or any other distance from the magnetic unit to the carrier may be a distance in a direction that is perpendicular or substantially perpendicular to the first direction 192.

The measurement distance from the magnetic unit to the carrier may be the distance from the magnetic unit to the outside of the carrier, for example, the upper edge portion of the carrier.

When the carrier is supported in a vertical orientation, the first distance, the second distance, and / or any other distance from the magnetic unit to the carrier 110 measured according to several embodiments described herein may be measured.

The first distance 323, the second distance 324, or any other distance from the magnetic unit to the carrier 110 measured according to several embodiments described herein may be from 1 to 8 mm, more particularly from 1 to 4 mm, for example For from 2 to 3 mm.

The first distance 322 can be measured by a first distance sensor. The first distance sensor is, for example, the first distance sensor 732 shown in FIG. 7. When measuring the first distance 322, the first distance sensor may be located above and / or face the carrier 110. The first distance sensor can be connected to, fixed to, and / or part of the first magnetic unit 312. The second distance 324 can be measured by a second distance sensor. The second distance sensor is an example of the second distance sensor 734 shown in FIG. 7. When the second distance 324 is measured, the second distance sensor 734 may be located above and / or face the carrier 110. The second distance sensor 734 may be connected to, fixed to, and / or part of the second magnetic unit 314.

According to several embodiments that can be combined with other embodiments described herein, the method may include measuring several distances from the magnetic drive structure 180 to the carrier 110, particularly several vertical distances. A plurality of distance sensors may be provided on or fixed to the magnetic driving structure 180 to measure these distances from the magnetic driving structure 180 to the carrier 110. For example, when the carrier 110 is suspended and / or when the carrier 110 is supported by the mechanical support 140, these distance sensors may be disposed below the carrier 110. Such distance sensors may be separated from each other in the first direction 192. The method may include determining the alignment of the mechanical support 140 from at least a first distance 322, a second distance 324, and these distances from the magnetic drive structure 180 to the carrier 110.

According to other embodiments, and as shown in FIG. 7, the device 500 is provided. The apparatus 500 includes a carrier suspension system. The carrier suspension system includes several magnetic units 170. Such magnetic units 170 are suitable for the non-contact suspension carrier 110. The magnetic units 170 include a first magnetic unit 312 and a second magnetic unit 314. The device 500 includes a first distance sensor 732. The first distance sensor 732 may be adapted to measure a first distance 322 from the first magnetic unit 312 to the carrier 110. The device 500 includes a second distance sensor 734. The second distance sensor 734 may be adapted to measure a second distance 324 from the second magnetic unit 314 to the carrier 110. The device 500 includes a control unit 750 connected to the first distance sensor 732 and the second distance sensor 734. The control unit 750 is configured to determine the alignment of the carrier suspension system from at least a first distance 322 and a second distance 324.

The first distance 322 and the second distance 324 shown in FIG. 7 may be measured when the carrier 110 is non-contactly suspended by the carrier suspension system or mechanically supported by a mechanical support included in the device 500.

Several embodiments of the apparatus described herein are applicable to any method feature of an embodiment of the method described herein, and in particular to any feature described in the scope of a patent application for a subsidiary method. A control unit as described herein may be adapted to perform any method feature of an embodiment of the method described herein, in particular any feature described in the scope of an attached method patent application. For example, the control unit 750 may be assembled for performing a method feature determining the alignment of the carrier suspension system and / or the mechanical support according to any of the embodiments described herein.

According to several embodiments that can be combined with other embodiments described herein, the first magnetic unit 312, the second magnetic unit 314, and / or any of the magnetic units 170 may be an active magnetic unit.

According to several embodiments that can be combined with other embodiments described herein, the active magnetic unit can be assembled for generating a magnetic field to provide a magnetic levitation force extending in the vertical direction, which is illustrated in the vertical direction as an example in the illustration The second direction 194. The active magnetic unit can be controlled to provide an adjustable magnetic field. The adjustable magnetic field can be a static or dynamic magnetic field. The active magnetic unit may be or include an element selected from the group consisting of an electromagnetic device; a solenoid; a coil; a superconducting magnet; or any combination thereof.

The term "active" magnetic unit is used here to distinguish it from the concept of "passive" magnetic unit. A passive magnetic unit may mean an element that does not have at least several magnetic properties during operation of the device, such magnetic properties do not face active control or adjustment. For example, the magnetic properties of the passive magnetic unit may not be actively controlled while the carrier moves through the device. Examples of the passive magnetic unit are the first passive magnetic unit 150 and the second passive magnetic unit 160 shown in FIG. The passive magnetic unit may be a magnetic material, such as a ferromagnetic material, a permanent magnet, or may have permanent magnetic properties.

Compared with passive magnetic units, in view of the adjustable and controllable magnetic field generated by active magnetic units, active magnetic units provide more flexibility and precision.

FIG. 8 is a schematic diagram of a device 500 according to the embodiment described herein. The apparatus 500 includes a carrier suspension system. The carrier suspension system includes several magnetic units 170. The magnetic units 170 include a first magnetic unit 312, a second magnetic unit 314, a third magnetic unit 816, and a fourth magnetic unit 818. The device 500 includes a first distance sensor 732, a second distance sensor 734, a third distance sensor 836, and a fourth distance sensor 838. The device 500 includes a control unit 750. The device 500 includes a mechanical support 140. The device includes a magnetic drive structure 180.

According to several embodiments that can be combined with other embodiments described herein, the first distance sensor 732 can be connected to the first magnetic unit 312. The second distance sensor 734 may be connected to the second magnetic unit 314. The third distance sensor 836 can be connected to the third magnetic unit 816. The fourth distance sensor 838 may be connected to the fourth magnetic unit 818.

The control unit 750 may be connected to the first distance sensor 732, the second distance sensor 734, the third distance sensor 836, and / or the fourth distance sensor 838. The control unit 750 can be assembled for determining the alignment of the carrier suspension system and / or the mechanical support 140 from two or more distances. The two or more distances from the magnetic unit to the carrier are measured by a distance sensor of the device 500.

In the exemplary embodiment shown in FIG. 8, the first distance 322 and the second distance 324 are measured when the carrier 110 is supported by the mechanical support 140. The same device 500 can also be used to measure the first distance and the second distance when the carrier 110 is in non-contact suspension, and any other distance from the magnetic unit to the carrier according to several embodiments described herein.

According to several embodiments that can be combined with other embodiments described herein, the device 500 may include a magnetic drive structure 180 for driving a carrier in a carrier transfer direction (ie, a first direction 192). The magnetic driving structure 180 may include several magnetic units, such as the active magnetic unit (ie, the individual magnetic unit 185) shown in FIG. 8 as an example. According to several embodiments that can be combined with other embodiments described herein, the active magnetic unit can be assembled for providing a magnetic driving force extending in the first direction 192.

According to several embodiments that may be combined with other embodiments described herein, the device 500 may include a mechanical support 140. The mechanical support 140 may be adapted to mechanically support the carrier 110. The mechanical support 140 may be disposed below the first magnetic unit 312, below the second magnetic unit 314, and / or below these magnetic units 170. The non-contact suspended carrier and / or the mechanically supported carrier may be above the mechanical support and / or below these magnetic units.

According to several embodiments that can be combined with other embodiments described herein, the mechanical support 140 may include one or more support elements 142, such as several support elements 142. The mechanical support 140 may include several rollers or bearings, and is suitable for supporting the carrier 110. These rollers and bearings can be arranged in a plane, for example in a horizontal plane. Each roller or bearing may have a rotating shaft. The rotation axis may extend in a horizontal direction. The rotation axis may extend in a direction that is perpendicular or substantially perpendicular to the first direction 192.

In the drawings, the mechanical support 140 is shown as a plurality of separate support elements. The embodiments described herein are not limited to such mechanical supports. For example, a mechanical support may include several support elements attached to each other.

According to several embodiments that may be combined with other embodiments described herein, the mechanical support 140 may include several fixed bearings or emergency bearings. The mechanical support 140 may be adapted to grab a carrier in the event that the carrier suspension system fails during non-contact suspension or transfer of the carrier. For example, in the coating process or other processes, the carrier can be suspended in a non-contact manner by the magnetic units 170. In the case where the non-contact suspension of the carrier is exemplified by a sudden interruption due to a loss of power, the carrier may stop magnetic suspension and fall in the worst case. According to several embodiments described herein, the carrier may fall on a mechanical support, particularly a fixed bearing or an emergency bearing. The mechanical support 140 can grasp the carrier and avoid damage to the carrier or other components of the system.

The first distance sensor 732, the second distance sensor 734, the third distance sensor, and / or the fourth distance sensor may be disposed above the mechanical support 140.

According to several embodiments that can be combined with other embodiments described herein, the mechanical support 140 can be fixed to the magnetic drive structure 180. The mechanical support 140 may include, be mechanically connected to, or fixed to the magnetic drive structure 180 such that the alignment of the mechanical support 140 may affect and / or determine the alignment of the magnetic drive structure 180. According to several embodiments that can be combined with other embodiments described herein, the mechanical support includes or is mechanically connected to the magnetic drive structure 180 such that the alignment of the determining mechanical support 140 provides the determination of the alignment of the magnetic drive structure 180 .

Several embodiments described herein provide the advantage that the alignment of the magnetic units of the magnetic drive structure can be determined and corrected.

According to several embodiments that may be combined with other embodiments described herein, the apparatus 500 may include a processing chamber 550. Such magnetic units 170, carriers 110, mechanical supports 140, and / or magnetic drive structures 180 may be located in the processing chamber 550. The carrier 110 shown in FIG. 8 can be moved in the processing chamber 550, for example, in the first direction 192, so that other distances from the third magnetic unit 816 and the fourth magnetic unit 818 to the carrier 110 can be performed. measuring.

FIG. 9 shows a schematic diagram of a device 500 according to the embodiment described herein. According to several embodiments that can be combined with other embodiments described herein, the control unit 750 can be connected to the magnetic driving structure 180. The control unit 750 can be assembled to align the magnetic drive structure based on a determined alignment of the mechanical support and / or the magnetic drive structure. The alignment magnetic driving structure may be automatically aligned. Aligning the magnetic drive structure may include adjusting a position of one or more magnetic units of the magnetic drive structure. The control unit 750 may be equipped to align the carrier suspension system with the determined alignment based on the carrier suspension system. The alignment carrier suspension system may be automatically aligned. Aligning the carrier suspension system may include adjusting the position of one or more magnetic units of the carrier suspension system.

In the device 500 shown in Figs. 7, 8 and 9, any element of the device 100 shown in Fig. 1, and vice versa can be included.

According to several embodiments that can be combined with other embodiments described herein, several magnetic units 170 may be disposed in the first direction 192. Such magnetic units 170 may be a linear array of magnetic units extending in the first direction 192. Thus, the non-contact suspended or transported carriers of the magnetic units 170 may extend in the first direction 192.

According to several embodiments that may be combined with other embodiments described herein, the mechanical support 140 may have a length extending in the first direction 192. The mechanical support 140 may be adapted to guide the carrier in the first direction 192. The mechanical support 140 may extend at least along the length of the carrier suspension system in the first direction in the first direction 192. Each of the magnetic units 170 may face the mechanical support 140.

According to several embodiments that can be combined with other embodiments described herein, the magnetic drive structure 180 may be adapted to drive the carrier in the first direction 192. The first direction 192 may be a carrier conveying direction. The first direction 192 may be a horizontal direction.

In summary, although the present invention has been disclosed as above with the embodiments, it is not intended to limit the present invention. Those with ordinary knowledge in the technical field to which the present invention pertains can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be determined by the scope of the attached patent application.

100, 500‧‧‧ equipment

110‧‧‧ carrier

120‧‧‧ substrate

130, 750‧‧‧ control unit

140‧‧‧ mechanical support

142‧‧‧Support element

150‧‧‧ the first passive magnetic unit

160‧‧‧Second passive magnetic unit

170, 316, 512, 514, 516, 518‧‧‧ magnetic units

175, 185‧‧‧ individual magnetic units

180‧‧‧ magnetic drive structure

192‧‧‧ first direction

194‧‧‧second direction

212‧‧‧first reference line

222‧‧‧Second reference line

312‧‧‧The first magnetic unit

314‧‧‧Second magnetic unit

322‧‧‧First distance

324‧‧‧Second Distance

390‧‧‧ up arrow

521, 522, 523, 524, 525, 526‧‧‧ distance

532‧‧‧first position

534‧‧‧Second position

536‧‧‧ third position

550‧‧‧Processing chamber

732‧‧‧First distance sensor

734‧‧‧Second Distance Sensor

816‧‧‧Third magnetic unit

818‧‧‧Fourth magnetic unit

836‧‧‧The third distance sensor

838‧‧‧Fourth distance sensor

For those with ordinary knowledge in the technical field, a full and implementable disclosure is more particularly provided in the rest of this description. The other parts of this description include reference to the accompanying drawings, where

FIG. 1 shows a schematic diagram of a device according to the embodiments described herein;

Figures 2a-b show schematic diagrams for different alignments of several magnetic units according to the embodiments described herein;

Figures 3a-b, 4 and 5a-b illustrate methods for determining the alignment of a carrier suspension system according to the embodiments described herein; and

Figures 6a-c, and 7-9 show schematic diagrams of a device according to the embodiments described herein.

Claims (20)

A method for determining the alignment of a carrier suspension system. The carrier suspension system includes a plurality of magnetic units (170). The magnetic units are suitable for non-contact suspension of a carrier (110). The magnetic units include a first A magnetic unit (312) and a second magnetic unit (314). The method includes: Measuring a first distance from the first magnetic unit to the carrier (322); Measuring a second distance from the second magnetic unit to the carrier (324); and The alignment of the carrier suspension system is determined from at least the first distance and the second distance. The method described in item 1 of the patent application scope further includes: Non-contact suspending the carrier by the carrier suspension system, the first distance and the second distance are measured when the carrier is non-contact suspending; or The carrier is mechanically supported by a mechanical support (140), and the first distance and the second distance are measured when the carrier is mechanically supported. A method for determining the alignment of a carrier suspension system. The magnetic suspension system includes a plurality of magnetic units (170). The magnetic units are suitable for non-contact suspension of a carrier (110). A magnetic unit (312) and a second magnetic unit (314). The method includes: Measuring the first distance from the first magnetic unit to the carrier when the carrier is non-contact suspended by at least the first magnetic unit (322); Measuring a second distance from the second magnetic unit to the carrier when the carrier is non-contact suspended by at least the second magnetic unit (324); and The alignment of the carrier suspension system is determined from at least the first distance and the second distance. A method for determining the alignment of a carrier suspension system. The magnetic suspension system includes a plurality of magnetic units (170). The magnetic units are suitable for non-contact suspension of a carrier (110). The magnetic units include a first A magnetic unit (312) and a second magnetic unit (314). The method includes: When the carrier is mechanically supported by a mechanical support (140), measuring a first distance (322) from the first magnetic unit to the carrier; Measuring a second distance from the second magnetic unit to the carrier when the carrier is mechanically supported by the mechanical support (324); and The alignment of the carrier suspension system and / or the alignment of one of the mechanical supports is determined from at least the first distance and the second distance. The method according to item 2 of the patent application scope, wherein the mechanical support comprises or is mechanically connected to a magnetic driving structure (180) for driving the carrier in a carrier conveying direction, so that the An alignment of the mechanical support provides an alignment that determines the magnetic drive structure. The method according to item 4 of the patent application scope, wherein the mechanical support comprises or is mechanically connected to a magnetic driving structure (180) for driving the carrier in a carrier conveying direction, so that the The alignment of the mechanical support provides an alignment that determines one of the magnetic drive structures. The method according to item 1 of the scope of patent application, wherein the first distance and the second distance are measured under a plurality of vacuum conditions. The method of claim 3, wherein the first distance and the second distance are measured under a plurality of vacuum conditions. The method according to item 4 of the scope of patent application, wherein the first distance and the second distance are measured under a plurality of vacuum conditions. The method according to item 1 of the scope of patent application, wherein the magnetic units further include a third magnetic unit, wherein at least one of the first distance and the second distance is located at a first position of the carrier (532 ) Zhongshi measurement, the method further includes: When the carrier is located in a second position (534), measuring a third distance from the third magnetic unit to the carrier; The alignment of the carrier suspension system is determined from at least the first distance, the second distance, and the third distance, or a combination thereof. The method according to item 3 of the scope of patent application, wherein the magnetic units further include a third magnetic unit, wherein at least one of the first distance and the second distance is located at a first position of the carrier (532 ) Zhongshi measurement, the method further includes: When the carrier is located in a second position (534), measuring a third distance from the third magnetic unit to the carrier; The alignment of the carrier suspension system is determined from at least the first distance, the second distance, and the third distance, or a combination thereof. The method according to item 4 of the scope of patent application, wherein the magnetic units further include a third magnetic unit, wherein at least one of the first distance and the second distance is located at a first position of the carrier (532 ) Zhongshi measurement, the method further includes: When the carrier is located in a second position (534), measuring a third distance from the third magnetic unit to the carrier; The alignment of the carrier suspension system is determined from at least the first distance, the second distance, and the third distance, or a combination thereof. The method as described in any one of claims 1 to 12, wherein determining the alignment includes: A reference value is calculated from at least the first distance and the second distance, and the reference value is used for a distance from the carrier to a magnetic unit of the magnetic units. The method described in any one of claims 1 to 12 of the patent application scope further includes: Performing an alignment operation on the carrier suspension system, the alignment operation includes: adjusting a position of at least one magnetic unit of the magnetic units based at least in part on the determined alignment. The method described in any one of claims 1 to 12 of the patent application scope further includes: Non-contact suspension of the carrier or another carrier by the magnetic units; and Based at least in part on the determined alignment, a first levitating distance and a second levitating distance are controlled, the first levitating distance is from the first magnetic unit to the non-contact levitating carrier, and the second levitating distance is from The second magnetic unit to the carrier suspended in non-contact. The method according to any one of claims 1 to 12, wherein the carrier is a first carrier, and the method further includes: Measuring a third distance from the first magnetic unit to a second carrier, the second carrier having a size different from that of the first carrier; Measuring a fourth distance from the second magnetic unit to one of the second carriers; and The alignment of the carrier suspension system is determined from at least the third distance and the fourth distance. The method according to any one of claims 1 to 12, wherein the first distance is measured by a first distance sensor (732), and the first distance sensor is disposed on the first magnetic field. The unit and the second distance are measured by a second distance sensor (734), and the second distance sensor is disposed on the second magnetic unit. The method described in item 17 of the scope of patent application further includes: The first distance sensor and / or the second distance sensor are used to control the non-contact suspension of the carrier or one of the other carriers. A device (500) comprising: A carrier suspension system includes a plurality of magnetic units (170). The magnetic units are suitable for non-contact suspension of a carrier (110). The magnetic units include a first magnetic unit (312) and a second magnetic unit (314). ); A first distance sensor (732); A second distance sensor (734); and A control unit (750) connected to the first distance sensor and the second distance sensor. The control unit is configured to determine an alignment of one of the carrier suspension systems from at least a first distance and a second distance. The first distance is from the first magnetic unit to the carrier, and the second distance is from the second magnetic unit to the carrier. The equipment described in item 19 of the scope of patent application, further includes: A mechanical support (140) adapted to mechanically support the carrier; and A magnetic drive structure (180) is used to drive the carrier in a carrier conveying direction. The mechanical support includes or is mechanically connected to the magnetic drive structure. The control unit is configured for moving from at least the first distance and the The second distance determines the alignment of one of the magnetic driving structures.