JP2021532602A - 非接触洗浄モジュール - Google Patents
非接触洗浄モジュール Download PDFInfo
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- JP2021532602A JP2021532602A JP2021505782A JP2021505782A JP2021532602A JP 2021532602 A JP2021532602 A JP 2021532602A JP 2021505782 A JP2021505782 A JP 2021505782A JP 2021505782 A JP2021505782 A JP 2021505782A JP 2021532602 A JP2021532602 A JP 2021532602A
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- wafer
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/022—Cleaning travelling work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
- B08B5/023—Cleaning travelling work
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68728—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
- B08B2203/02—Details of machines or methods for cleaning by the force of jets or sprays
- B08B2203/0288—Ultra or megasonic jets
Abstract
Description
[0001]本開示の実施形態は、概して、処理されたウエハを洗浄するための装置および方法に関し、より詳細には、ウエハを処理するための非接触洗浄システムおよび方法に関する。
[0002]様々な事例において、ウエハは、電気装置における使用のために処理される前に、ウエハからあらゆる汚染を除去するために洗浄される。1つまたは複数の実施形態において、ウエハを洗浄するために、化学バフ研磨および/またはブラシスクラビングなどの洗浄方法が利用される。しかしながら、これらの洗浄方法では、対応する洗浄プロセスの後に、ウエハへの粒子の再付着が生じる可能性がある。例えば、これらの洗浄プロセス(例えば、バフパスおよび/または洗浄ブラシ)のための接触媒体は、汚染源でありうる。粒子は、アナログ、ロジック、および/または高度なメモリ用途を含めるための処理をサポートできないウエハをもたらす可能性がある。その結果、処理されたウエハの歩留まりは悪影響を受けるであろう。
Claims (15)
- 垂直配向でウエハを支持するように構成されたウエハ把持装置を備える洗浄モジュールであって、前記ウエハ把持装置が、
環状内表面を有する壁を含む捕獲カップであって、前記環状内表面が、処理領域を画定し、かつ前記ウエハ把持装置の中心軸を中心として対称な角度付けされた部分を有する、前記捕獲カップと、
装填位置、すすぎ位置、および洗浄位置のうちの少なくとも1つに位置決めされるように構成された把持アセンブリであって、前記把持アセンブリの前記洗浄位置が前記処理領域内部に配置される、前記把持アセンブリと
を含み、
前記把持アセンブリが、
第1のプレートアセンブリと、
第2のプレートアセンブリと、
前記第2のプレートアセンブリの把持ピンであって、前記把持アセンブリが前記装填位置にあるとき前記把持アセンブリの中心から第1の距離であり、前記把持アセンブリが前記洗浄位置にあるとき前記ウエハ把持装置の前記中心軸から第2の距離であり、前記第1の距離が前記第2の距離よりも大きい、前記把持ピンと、
前記第1のプレートアセンブリの装填ピンであって、前記把持アセンブリが前記装填位置および前記洗浄位置にあるとき前記中心軸から第3の距離である、前記第1のプレートアセンブリの装填ピンと
を含む、洗浄モジュール。 - 前記把持アセンブリが前記洗浄位置に配置されているとき、前記ウエハのエッジが前記把持ピンと接触しており、前記ウエハが前記装填ピンと接触しておらず、前記把持ピンは、前記ウエハの前記エッジと接触して洗浄プロセス中に前記ウエハの干渉を低減するように構成されている、請求項1に記載の洗浄モジュール。
- 前記把持アセンブリが前記装填位置に配置されているとき、前記装填ピンは、前記ウエハの前記エッジと接触しており、前記洗浄プロセス中に前記装填ピンによる前記ウエハの干渉を低減するように構成されている、請求項2に記載の洗浄モジュール。
- 前記捕獲カップから離間した外囲壁をさらに備え、前記外囲壁と前記捕獲カップとの間に内部領域が画定されている、請求項1に記載の洗浄モジュール。
- 前記第1のプレートアセンブリが、
前記把持アセンブリが前記装填位置にあるとき、少なくとも部分的に前記内部領域内部に位置決めされて、前記第2のプレートアセンブリから離間しており、
前記把持アセンブリが前記洗浄位置にあるとき、少なくとも部分的に前記第2のプレートアセンブリに接触している、
請求項4に記載の洗浄モジュール。 - 前記第2のプレートアセンブリが、1つまたは複数のバネ機構によって前記捕獲カップに連結されており、前記1つまたは複数のバネ機構は、前記把持アセンブリが前記洗浄位置にあるとき圧縮されている、請求項1に記載の洗浄モジュール。
- 前記捕獲カップがアクチュエータピンをさらに備え、
前記把持ピンが、
前記把持アセンブリが前記洗浄位置にあるとき前記アクチュエータピンと係合して前記把持ピンを前記洗浄位置に位置決めし、
前記把持アセンブリが前記装填位置にあるとき前記アクチュエータピンから外れて前記把持ピンを前記装填位置に位置決めする
ように構成されたアクチュエータ要素に連結されている、
請求項1に記載の洗浄モジュール。 - 前記捕獲カップが、
1つまたは複数のドレイン穴であって、前記環状内表面が、前記捕獲カップが前記中心軸を中心として回転されるときに水分を前記1つまたは複数のドレイン穴にガイドするように構成されている、前記1つまたは複数のドレイン穴
をさらに含む、請求項1に記載の洗浄モジュール。 - 前記1つまたは複数のドレイン穴の各々が、前記内部領域への水分の流入を軽減するように成形されたそれぞれの空気迷路を通して前記洗浄モジュールの内部領域に流体連結されている、請求項8に記載の洗浄モジュール。
- 前記1つまたは複数のドレイン穴の各々が、第1の壁および第2の壁を含み、前記第1の壁は、前記第2の壁から離れる方向に先細になっている、請求項9に記載の洗浄モジュール。
- 前記第2のプレートアセンブリおよび前記捕獲カップに連結されたベローズをさらに備える、請求項1に記載の洗浄モジュール。
- スイープアームに連結されたノズル機構であって、
前記第1のプレートアセンブリの表面と第1の角度に配向されて、高エネルギー流体を提供するように構成された第1のノズルと、
前記第1のプレートアセンブリの表面と、前記第1の角度とは異なる第2の角度に配向された第2のノズルと
を含む前記ノズル機構をさらに備える、請求項1に記載の洗浄モジュール。 - 洗浄プロセス中に、前記第1のノズルが高エネルギー洗浄流体を適用するように構成されており、前記第2のノズルが第2の流体を適用するように構成されている、請求項12に記載の洗浄モジュール。
- 前記第1のノズルが、気体と液体の混合物を送達するように構成されたメガソニックノズルおよびジェットノズルのうちの1つであり、前記スイープアームが、洗浄プロセス中に前記第1のプレートアセンブリの少なくとも一部分の上で前記ノズル機構を移動させるように構成されている、請求項12に記載の洗浄モジュール。
- シャフトを通して前記ウエハ把持装置に連結されて、洗浄プロセス中に、前記捕獲カップと前記把持アセンブリとを前記中心軸を中心として同時に回転させるように構成されている駆動モータをさらに備える、請求項1に記載の洗浄モジュール。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2023105054A JP2023134520A (ja) | 2018-08-06 | 2023-06-27 | 非接触洗浄モジュール |
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IN201841029454 | 2018-08-06 | ||
IN201841029454 | 2018-08-06 | ||
US201862756158P | 2018-11-06 | 2018-11-06 | |
US62/756,158 | 2018-11-06 | ||
US201962795816P | 2019-01-23 | 2019-01-23 | |
US62/795,816 | 2019-01-23 | ||
PCT/US2019/045147 WO2020033326A1 (en) | 2018-08-06 | 2019-08-05 | Non-contact clean module |
Related Child Applications (1)
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JP2023105054A Division JP2023134520A (ja) | 2018-08-06 | 2023-06-27 | 非接触洗浄モジュール |
Publications (2)
Publication Number | Publication Date |
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JP2021532602A true JP2021532602A (ja) | 2021-11-25 |
JP7304935B2 JP7304935B2 (ja) | 2023-07-07 |
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JP2021505782A Active JP7304935B2 (ja) | 2018-08-06 | 2019-08-05 | 非接触洗浄モジュール |
JP2023105054A Pending JP2023134520A (ja) | 2018-08-06 | 2023-06-27 | 非接触洗浄モジュール |
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JP2023105054A Pending JP2023134520A (ja) | 2018-08-06 | 2023-06-27 | 非接触洗浄モジュール |
Country Status (6)
Country | Link |
---|---|
US (2) | US11289347B2 (ja) |
JP (2) | JP7304935B2 (ja) |
KR (2) | KR102653771B1 (ja) |
CN (1) | CN112543991A (ja) |
TW (1) | TWI819050B (ja) |
WO (1) | WO2020033326A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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KR102419631B1 (ko) * | 2020-08-07 | 2022-07-12 | 남정원 | 분사 유닛 및 이를 포함하는 세정 장치 |
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JP2011071477A (ja) * | 2009-08-27 | 2011-04-07 | Tokyo Electron Ltd | 液処理装置および液処理方法 |
JP2013526054A (ja) * | 2010-04-30 | 2013-06-20 | アプライド マテリアルズ インコーポレイテッド | 流体ジェットを伴うディスクブラシ洗浄装置モジュール |
JP2012004320A (ja) * | 2010-06-16 | 2012-01-05 | Tokyo Electron Ltd | 処理装置及び処理方法 |
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US20200043756A1 (en) | 2020-02-06 |
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US11289347B2 (en) | 2022-03-29 |
US20220044946A1 (en) | 2022-02-10 |
TW202017080A (zh) | 2020-05-01 |
CN112543991A (zh) | 2021-03-23 |
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TW202401631A (zh) | 2024-01-01 |
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