JP2021521481A - 一次的結合及び永久的結合を用いた多重積層光学素子 - Google Patents
一次的結合及び永久的結合を用いた多重積層光学素子 Download PDFInfo
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- 238000010168 coupling process Methods 0.000 title claims description 16
- 230000008878 coupling Effects 0.000 title claims description 12
- 238000005859 coupling reaction Methods 0.000 title claims description 12
- 230000003287 optical effect Effects 0.000 claims abstract description 342
- 239000000758 substrate Substances 0.000 claims abstract description 203
- 238000000034 method Methods 0.000 claims abstract description 77
- 239000011521 glass Substances 0.000 claims abstract description 19
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 6
- 239000000463 material Substances 0.000 claims description 112
- 238000004519 manufacturing process Methods 0.000 claims description 60
- 230000008569 process Effects 0.000 claims description 21
- 238000001127 nanoimprint lithography Methods 0.000 claims description 20
- 238000005530 etching Methods 0.000 claims description 19
- 238000011049 filling Methods 0.000 claims description 17
- 238000000206 photolithography Methods 0.000 claims description 9
- 229920000642 polymer Polymers 0.000 claims description 7
- 239000012780 transparent material Substances 0.000 claims description 6
- 229910003460 diamond Inorganic materials 0.000 claims description 3
- 239000010432 diamond Substances 0.000 claims description 3
- 239000013077 target material Substances 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052710 silicon Inorganic materials 0.000 abstract description 7
- 239000010703 silicon Substances 0.000 abstract description 7
- 238000010586 diagram Methods 0.000 abstract description 4
- 230000000295 complement effect Effects 0.000 abstract description 3
- 229910044991 metal oxide Inorganic materials 0.000 abstract description 3
- 150000004706 metal oxides Chemical class 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 405
- 238000012545 processing Methods 0.000 description 9
- 239000011241 protective layer Substances 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 229910021417 amorphous silicon Inorganic materials 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- 238000012856 packing Methods 0.000 description 7
- 238000000059 patterning Methods 0.000 description 7
- 229910010413 TiO 2 Inorganic materials 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 229910005540 GaP Inorganic materials 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 238000000231 atomic layer deposition Methods 0.000 description 5
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 description 5
- 238000011065 in-situ storage Methods 0.000 description 5
- 229910004541 SiN Inorganic materials 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 239000002356 single layer Substances 0.000 description 4
- 238000000137 annealing Methods 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 238000001900 extreme ultraviolet lithography Methods 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- 229920002313 fluoropolymer Polymers 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 239000002105 nanoparticle Substances 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000003190 augmentative effect Effects 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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Abstract
Description
Claims (15)
- 光学装置を形成する方法であって、
(a)第1の基板上のターゲット層に、複数のトレンチによって分離された複数のアイランドを含むパターンを形成すること、
(b)パターニングされた前記ターゲット層の上、及びパターニングされた前記ターゲット層に形成された前記複数のトレンチ内に、充填層を形成して、第1の光学素子層を形成すること、並びに
(c)(a)及び(b)を複数の反復で繰り返すことによって、前記第1の光学素子層上に光学素子層積層体を形成することを含む、方法。 - (d)(c)に続いて、第2の基板を、前記第1の基板とは反対側の前記光学素子層積層体に結合することを更に含む、請求項1に記載の方法。
- 前記充填層が中間層を含み、前記中間層が、前記ターゲット層の頂面から、約50nmから約50ミクロンの厚さだけ延在する、請求項1に記載の方法。
- 前記第1の基板が、CCD、CMOSセンサ、VCSEL、又はLEDを含む、請求項1に記載の方法。
- (f)(a)に続いて、前記ターゲット層の上、及びパターニングされた前記ターゲット層の前記複数のトレンチ内に、光学素子層を形成すること、
(g)前記光学素子層の一部分を取り除くことによって、前記光学素子層の頂面と前記ターゲット層の頂面が同一平面上にあるようにすること、
(h)(g)に続いて、前記光学素子層及び前記ターゲット層の上に第2の充填層であって、前記光学素子層の頂面を越えて0.5ミクロンから50ミクロンの距離だけ延在する中間層を含む、第2の充填層を形成して、第1の光学素子層を形成すること、
(i)(a)〜(h)を繰り返して、前記第1の光学素子層上に複数の光学素子層を形成することを更に含む、請求項1に記載の方法。 - 光学装置を製造する方法であって、
第1の基板上に形成される第1のターゲット層に第1のパターンを形成すること、
第2の基板上に形成された第2のターゲット層に第2のパターンを形成すること、
透明な材料から形成され且つ約10μmから3mmの厚さを有する第3の基板の第1の面に前記第1のパターンを結合すること、
前記第2のパターンを前記第3の基板の第2の面に結合すること、
前記第1の基板を前記第1のパターンから結合解除すること、及び
前記第2の基板を前記第2のパターンから結合解除することを含む、方法。 - 前記第1のパターンが、ナノインプリントリソグラフィ(NIL)及びエッチングを使用して形成される、請求項6に記載の方法。
- 前記第1のパターンを形成することが、第1のパターンマスターを使用して前記第1のターゲット層を直接インプリントすることを含む、請求項6に記載の方法。
- 前記第1のパターン又は前記第2のパターンのうちの少なくとも一方を低屈折率材料で充填することを更に含む、請求項6に記載の方法。
- 第4の基板上の第3のターゲット材料に第3のパターンを形成すること、
約10μmから約3mmの厚さを有し且つ透明な材料から形成された第5の基板の第1の面を前記第2のパターンに結合すること、及び
前記第3のパターンを前記第5の基板の第2の面に結合することを更に含む、請求項6に記載の方法。 - 前記第1のパターンを形成することと前記第2のパターンを形成することとのそれぞれが、光リソグラフィ又はナノインプリントリソグラフィを含む、請求項6に記載の方法。
- 光学装置を形成する方法であって、
第1のパターンマスターを使用して、約10μmから約3mmの厚さを有する透明な基板の第1の面上に形成される第1のターゲット層を第1の箇所にインプリントすることによって、第1のパターンを形成すること、並びに
第2のパターンマスターを使用して、前記透明な基板の第2の面上に形成された第2のターゲット層上の第2の箇所に第2のパターンをインプリントすることによって、第2のパターンを形成することを含み、前記第2の箇所に前記第2のパターンを形成することが、前記第1のパターンに対して前記第2の箇所を特定すること、及び前記第2のパターンマスターを前記第2の箇所に位置合わせすることを含む、方法。 - 前記第1のパターンを形成することに続いて、前記第1のパターンを低屈折率材料で充填することを更に含む、請求項12に記載の方法。
- 前記第1のマスターパターンが第1のパターンを含み、前記第2のパターンマスターが第2のパターンを含み、前記第1のパターンが前記第2のパターンとは異なっている、請求項12に記載の方法。
- 前記透明な基板が、ガラス、ポリマー、又はダイヤモンドから形成される、請求項12に記載の方法。
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DE102020112312B3 (de) | 2020-05-06 | 2021-10-21 | Audi Aktiengesellschaft | Scheinwerfer für ein Kraftfahrzeug |
WO2021255077A1 (en) * | 2020-06-18 | 2021-12-23 | Nil Technology Aps | Optical devices including metastructures and methods for fabricating the optical devices |
US20220064474A1 (en) * | 2020-08-27 | 2022-03-03 | Applied Materials, Inc. | Encapsulation materials for flat optical devices |
US11520228B2 (en) | 2020-09-03 | 2022-12-06 | International Business Machines Corporation | Mass fabrication-compatible processing of semiconductor metasurfaces |
EP4354188A1 (en) * | 2023-04-19 | 2024-04-17 | Carl Zeiss SMT GmbH | Method of manufacturing a diffractive optical element and diffractive optical element |
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Also Published As
Publication number | Publication date |
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TW202125765A (zh) | 2021-07-01 |
KR20200130872A (ko) | 2020-11-20 |
US20190318957A1 (en) | 2019-10-17 |
US20220336270A1 (en) | 2022-10-20 |
KR20230074638A (ko) | 2023-05-30 |
WO2019203926A1 (en) | 2019-10-24 |
US10707118B2 (en) | 2020-07-07 |
US20200286778A1 (en) | 2020-09-10 |
KR102536821B1 (ko) | 2023-05-26 |
US11626321B2 (en) | 2023-04-11 |
TW202005046A (zh) | 2020-01-16 |
EP3782190A4 (en) | 2022-05-04 |
TW202245001A (zh) | 2022-11-16 |
EP3782190A1 (en) | 2021-02-24 |
JP7210608B2 (ja) | 2023-01-23 |
JP2023055709A (ja) | 2023-04-18 |
CN112020770A (zh) | 2020-12-01 |
TWI709220B (zh) | 2020-11-01 |
TWI771764B (zh) | 2022-07-21 |
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