JP2021516366A5 - - Google Patents

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Publication number
JP2021516366A5
JP2021516366A5 JP2020546104A JP2020546104A JP2021516366A5 JP 2021516366 A5 JP2021516366 A5 JP 2021516366A5 JP 2020546104 A JP2020546104 A JP 2020546104A JP 2020546104 A JP2020546104 A JP 2020546104A JP 2021516366 A5 JP2021516366 A5 JP 2021516366A5
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Japan
Prior art keywords
overlay
weighing system
tool
weighing
target
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JP2020546104A
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English (en)
Japanese (ja)
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JP2021516366A (ja
JP7177846B2 (ja
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Priority claimed from US16/057,498 external-priority patent/US10533848B2/en
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JP2020546104A 2018-03-05 2019-03-04 オーバレイ及びエッジ配置誤差の計量及び制御 Active JP7177846B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201862638900P 2018-03-05 2018-03-05
US62/638,900 2018-03-05
US16/057,498 2018-08-07
US16/057,498 US10533848B2 (en) 2018-03-05 2018-08-07 Metrology and control of overlay and edge placement errors
PCT/US2019/020471 WO2019173171A1 (en) 2018-03-05 2019-03-04 Metrology and control of overlay and edge placement errors

Publications (3)

Publication Number Publication Date
JP2021516366A JP2021516366A (ja) 2021-07-01
JP2021516366A5 true JP2021516366A5 (https=) 2022-03-10
JP7177846B2 JP7177846B2 (ja) 2022-11-24

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JP2020546104A Active JP7177846B2 (ja) 2018-03-05 2019-03-04 オーバレイ及びエッジ配置誤差の計量及び制御

Country Status (9)

Country Link
US (1) US10533848B2 (https=)
EP (1) EP3762780B1 (https=)
JP (1) JP7177846B2 (https=)
KR (1) KR102450009B1 (https=)
CN (1) CN111801625B (https=)
IL (1) IL276811B2 (https=)
SG (1) SG11202008005WA (https=)
TW (1) TWI781298B (https=)
WO (1) WO2019173171A1 (https=)

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