JP2021509544A - 可視光線及び紫外線を検出するための半導体光センサ及びその製造プロセス - Google Patents
可視光線及び紫外線を検出するための半導体光センサ及びその製造プロセス Download PDFInfo
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Abstract
Description
−同じ空間分解能で、両方のスペクトル領域から得られる情報を含む、チップ上の同一の焦点画像から紫外線及び可視光線を再構築することが可能なこと。
−より簡単で安価な統合。
−占有面積が小さくなり、システムがよりコンパクトになること。
−同じ空間分解能で、両方のスペクトル領域から得られる情報を含む、チップ上の同一の焦点画像から紫外線及び可視光線を再構築することが可能なこと。
−より簡単で安価な統合。
−占有面積が小さくなり、システムがよりコンパクトになること。
Claims (18)
- 複数の光検出器領域(4)を統合する基板(2)と、
前記基板(2)上に配置され、多数の誘電体(6a)及び導電(6b)層を含むCMOS層スタック(6)とを含み、
多数の第1の光検出器領域(4)の上方に配置され、紫外線放射を前記第1の光検出器活性領域(4)に向かう可視光線放射に変換するように構成された紫外線変換領域(10)をさらに含み、前記第1の光検出器領域(4)は、それによって、紫外線検出用の第1の光検出ユニット(16)を画定するように設計されており、
前記第1の光検出器領域(4)は、前記基板(2)内に統合され、可視光線検出用の第2の光検出ユニット(16)を画定するように設計された、多数の第2の光検出器領域(4)に対して交互になっており、光センサ(1)の光検出ユニット(16)のアレイ(15)を形成する前記第1及び第2の光検出ユニットは、紫外線及び可視光線の放射の両方に感度が高い単一の画像検出領域(15’)を共に画定する、半導体光センサ(1)。 - 前記紫外線変換領域(10)が、蛍光染料が浸漬される有機材料を含み、前記蛍光染料が、紫外線変換を行うように設計されている、請求項1に記載のセンサ。
- 前記有機材料が、紫外線を吸収し、可視光線放射を放出することができる下方変換材料であり、Lumogen、Coronene、AlQ3’及びZnS:Mnの中から選択される、請求項1又は2に記載のセンサ。
- 前記第2の光検出器領域(4)の上方に配置され、可視光線放射を透過し、紫外線放射を通さない材料からできているフィルタ領域(11)をさらに含む、請求項1〜3のいずれか一項に記載のセンサ。
- 前記紫外線変換領域(10)が、前記第1及び第2の光検出器活性領域(4)の上方に配置されたキャップ層(12)内で前記フィルタ領域(11)に対して交互になっている、請求項4に記載のセンサ。
- 前記CMOSスタック(6)が、前記光センサ(1)の外側表面を画定する前記基板(2)の裏面(2b)と対向する前記基板(2)の上面(2a)に配置され、前記キャップ層(12)が、前記CMOSスタック(6)の上部誘電体層(6a)の上方に配置される、請求項5に記載のセンサ。
- 前記CMOSスタック(6)が、前記基板(2)の上面(2a)に配置され、前記CMOSスタック(6)の上部誘電体層(6a)が、前記光センサ(1)の外側表面に配置され、前記キャップ層(12)が、前記表面(2a)と対向する前記基板(2)の裏面(2b)の上方に配置される、請求項5に記載のセンサ。
- 上部誘電体層(6a)から前記基板(2)の表面(2a)に向かって、前記CMOSスタック(6)を通るトレンチ内に形成された光チャネル領域(7’)をさらに含み、前記CMOSスタック(6)内に統合された前記紫外線変換領域(10)を画定するように設計された材料を含む前記光チャネル領域(7’)において、前記光チャネル領域(7’)が、それぞれの第1の光検出器領域(4)上に配置され、光放射を前記それぞれの第1の光検出器領域に向けて導くように構成される、請求項4に記載のセンサ。
- 前記CMOSスタック(6)の上部誘電体層(6a)の上方に配置されたキャップ層(12)内に、前記フィルタ領域(11)に対して交互になっている透過領域(11’)を含み、前記透過領域(11’)が、可視光線及び紫外線の放射の両方を透過するように設計された、請求項8に記載のセンサ。
- 前記光チャネル領域(7’)が、それぞれの第2の光検出器活性領域(4)上にも配置され、光放射を前記それぞれの第2の光検出器活性領域(4)に向けて導くように構成される、請求項8又は9に記載のセンサ。
- 前記フィルタ領域(11)が、前記可視光線放射をフィルタリングするように設計されたRGB、赤、緑及び青のフィルタを実装するために、前記可視光線スペクトルのそれぞれの部分を透過する、請求項4〜10のいずれか一項に記載のセンサ。
- 前記単一の画像検出領域(15’)が、紫外線及び可視光線の放射の両方に感度が高く、同時に同じ空間分解能を有するように設計されている、請求項1〜11のいずれか一項に記載のセンサ。
- 半導体光センサ(1)の製造プロセスであって、前記製造プロセスが、
基板(2)を提供することと、
前記基板(2)内に複数の光検出器領域(4)を形成することと、
前記基板(2)上に配置され、多数の誘電体(6a)及び導電(6b)層を含むCMOS層スタック(6)を形成することと
を含み、
多数の第1の光検出器領域(4)の上方に配置され、紫外線放射を前記第1の光検出器活性領域(4)に向かう可視光線放射に変換するように構成された紫外線変換領域(10)を形成することをさらに含み、前記第1の光検出器活性領域(4)は、それによって、紫外線検出用の第1の光検出ユニット(16)を画定するように設計されており、
前記第1の光検出器活性領域(4)に対して交互になっており、可視光線検出用の第2の光検出ユニット(16)を画定するように設計された、多数の第2の光検出器活性領域(4)を、前記基板(2)内に統合することをさらに含み、前記光センサ(1)の光検出ユニット(16)のアレイ(15)を形成する前記第1及び第2の光検出ユニットは、紫外線及び可視光線の放射の両方に感度が高い単一の画像検出領域(15’)を共に画定する、製造プロセス。 - 紫外線変換領域(10)を形成することが、蛍光染料が浸漬される有機材料を堆積させることを含み、前記蛍光染料が、紫外線変換を行うように設計されている、請求項13に記載のプロセス。
- 前記第2の光検出器領域(4)の上方に配置され、可視光線放射を透過し、紫外線放射を通さない材料からできているフィルタ領域(11)を形成することをさらに含む、請求項13又は14に記載のプロセス。
- 前記紫外線変換領域(10)及び前記フィルタ領域(11)を形成することが、蛍光染料を分散させたフォトパターニングが可能な有機材料層を堆積させ、前記紫外線変換領域(10)を画定する蛍光材料のパッチを作ることを含む、請求項15に記載のプロセス。
- 上部誘電体層(6a)から前記基板(2)の表面(2a)に向かって、前記CMOSスタック(6)を通るトレンチ内に光チャネル領域(7’)を形成することと、
前記CMOSスタック(6)内に統合された前記紫外線変換領域(10)を画定するように設計された材料で前記光チャネル領域(7’)を充填することと
をさらに含み、前記光チャネル領域(7’)の各々が、それぞれの第1の光検出器領域(4)上に配置され、光放射を前記それぞれの第1の光検出器領域に向けて導くように構成される、請求項13に記載のプロセス。 - 前記CMOSスタック(6)の上部誘電体層(6a)の上方に配置されたキャップ層(12)内に、前記フィルタ領域(11)に対して交互になっている透過領域(11’)を形成することを含み、前記透過領域(11’)が、前記可視光線及び前記紫外線の放射を透過するように設計された、請求項17に記載のプロセス。
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IT102017000143176 | 2017-12-12 | ||
IT201700143176 | 2017-12-12 | ||
PCT/IB2018/059950 WO2019116266A1 (en) | 2017-12-12 | 2018-12-12 | Semiconductor optical sensor for visible and ultraviolet light detection and corresponding manufacturing process |
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CN111712921A (zh) | 2020-09-25 |
KR20200120900A (ko) | 2020-10-22 |
US11581350B2 (en) | 2023-02-14 |
KR102666282B1 (ko) | 2024-05-14 |
WO2019116266A1 (en) | 2019-06-20 |
EP3724920B1 (en) | 2022-05-11 |
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