JP2021503544A - より良好なバイオセンサ性能のための自然酸化物除去及び誘電体酸化物の再成長の方法、材料及びプロセス - Google Patents
より良好なバイオセンサ性能のための自然酸化物除去及び誘電体酸化物の再成長の方法、材料及びプロセス Download PDFInfo
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Abstract
Description
Claims (15)
- 自然酸化物を減少させるための方法であって、
金属構造体のアレイが形成された基板を処理チャンバ内に位置付けることであって、前記金属構造体のアレイには自然酸化物層が形成されている、基板を処理チャンバ内に位置付けることと、
前記自然酸化物層を1つ又は複数のリガンドに曝露することと、
前記自然酸化物層を除去することと
を含む方法。 - 前記金属構造体のアレイがチタン構造体を含む、請求項1に記載の方法。
- 前記1つ又は複数のリガンドが、一級アミン、二級アミン、及び三級アミンからなる群から選択される、請求項2に記載の方法。
- 前記1つ又は複数のリガンドの各々が、ジエチルアミン、プロピルアミン、及びジプロピルアミンからなる群から選択される、請求項3に記載の方法。
- 前記処理チャンバの温度が、摂氏約150度と摂氏約300度との間である、請求項3に記載の方法。
- 誘電体材料を堆積するための方法であって、
金属構造体のアレイが形成された基板を処理チャンバ内に位置付けることと、
第1の前駆体を前記処理チャンバに導入することと、
第2の前駆体を前記処理チャンバに導入することと、
前記処理チャンバで水パルスを実行することと、
前記金属構造体のアレイを覆うように誘電体層を形成することと
を含む方法。 - 前記第1の前駆体が、チタン含有前駆体、タンタル含有前駆体、又はケイ素含有前駆体であり、前記第2の前駆体が、ハフニウム含有前駆体である、請求項6に記載の方法。
- 前記第2の前駆体を導入する前に、前記処理チャンバを不活性ガスでパージすることを更に含み、前記不活性ガスが、ヘリウム、アルゴン、ネオン、クリプトン、キセノン、及び/又はラドンからなる群から選択される、請求項6に記載の方法。
- 前記処理チャンバで前記水パルスを実行する前に、前記処理チャンバを不活性ガスでパージすることを更に含む、請求項6に記載の方法。
- 前記誘電体層が、約50mV dec−1と約70mV dec−1との間の表面電位を有している、請求項6に記載の方法。
- 前記誘電体層が、約2ナノメートルと約10ナノメートルとの間の厚さを有している、請求項10に記載の方法。
- バイオセンシングのための基板を形成する方法であって、
金属構造体のアレイが形成された基板を処理チャンバ内に位置付けることであって、前記金属構造体のアレイには自然酸化物層が形成されている、基板を処理チャンバ内に位置付けることと、
前記自然酸化物層を1つ又は複数のリガンドに曝露することと、
前記自然酸化物層を除去することと、
第1の前駆体を前記処理チャンバに導入することと、
第2の前駆体を前記処理チャンバに導入することと、
前記処理チャンバで水パルスを実行することと、
前記金属構造体のアレイを覆うように誘電体層を形成することと
を含む方法。 - 前記金属構造体のアレイを覆うように前記誘電体層を形成することが、プラズマ強化原子層堆積を実行することを含む、請求項12に記載の方法。
- 前記第1の前駆体又は第2の前駆体が、酸素、酸素と窒素との混合物、及び酸素とアルゴンとの混合物からなる群から選択される、請求項13に記載の方法。
- 前記誘電体層を覆うように保護層を堆積することと、
摂氏約300度と摂氏約500度との間の温度で、約30分と約4時間との間の期間、前記基板をアニーリングすることと
を更に含む、請求項12に記載の方法。
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