JP2021072449A - 基板処理装置及び方法 - Google Patents
基板処理装置及び方法 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims abstract description 338
- 238000000034 method Methods 0.000 title claims abstract description 63
- 230000008569 process Effects 0.000 claims abstract description 43
- 230000002209 hydrophobic effect Effects 0.000 claims abstract description 26
- 238000012545 processing Methods 0.000 claims description 83
- NEXSMEBSBIABKL-UHFFFAOYSA-N hexamethyldisilane Chemical compound C[Si](C)(C)[Si](C)(C)C NEXSMEBSBIABKL-UHFFFAOYSA-N 0.000 claims description 13
- 238000003672 processing method Methods 0.000 claims 8
- 238000010438 heat treatment Methods 0.000 description 75
- 239000007788 liquid Substances 0.000 description 67
- 239000007789 gas Substances 0.000 description 62
- 238000012546 transfer Methods 0.000 description 61
- 239000000872 buffer Substances 0.000 description 36
- 238000000576 coating method Methods 0.000 description 29
- 239000011248 coating agent Substances 0.000 description 27
- 238000001816 cooling Methods 0.000 description 26
- 230000032258 transport Effects 0.000 description 23
- 229920002120 photoresistant polymer Polymers 0.000 description 10
- 230000003028 elevating effect Effects 0.000 description 9
- 238000007789 sealing Methods 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 5
- 238000011161 development Methods 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- 238000004873 anchoring Methods 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000002829 reductive effect Effects 0.000 description 3
- 230000006837 decompression Effects 0.000 description 2
- 239000007888 film coating Substances 0.000 description 2
- 238000009501 film coating Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
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Abstract
Description
また、本発明の目的は同一装置内で基板表面の疎水化程度を異なりに適用することができる装置及び方法を提供することにある。
基板を処理する装置は基板を処理する処理空間を提供するチャンバー、前記処理空間で基板を支持する基板支持ユニット、前記基板支持ユニットに支持された基板上に疎水化ガスを供給するガス供給ユニット、そして前記基板支持ユニット及び前記ガス供給ユニットを制御する制御器を含み、前記基板支持ユニットは基板が置かれる支持プレートと前記支持プレートから基板を持ち上げるか、或いは前記支持プレートに基板を下ろすピンアセンブリを含み、前記制御器は前記ピンアセンブリを調節して基板の表面の疎水化程度を制御する。
また、本発明の実施形態によれば、基板表面の疎水化程度を調節することにおいて、疎水化ガスの流量調節が必要としない。
インデックスロボット2200は基板Wを容器10で取り出して前段バッファ3802に搬送する。搬送ロボット3422は前段バッファ3802に保管された基板Wを前段熱処理チャンバー3200に搬送する。基板Wは搬送プレート3240によって加熱ユニット3230に基板Wを搬送する。加熱ユニット3230で基板の加熱工程が完了すると、搬送プレート3240は基板を冷却ユニット3220に搬送する。搬送プレート3240は基板Wを支持した状態で、冷却ユニット3220に接触されて基板Wの冷却工程を遂行する。冷却工程が完了すると、搬送プレート3240が冷却ユニット3220の上部に移動され、搬送ロボット3422は熱処理チャンバー3200から基板Wを搬出し、前段液処理チャンバー3602に搬送する。
搬送ロボット3422が前段液処理チャンバー3602から基板Wを搬出し、熱処理チャンバー3200に基板Wを搬入する。熱処理チャンバー3200には上述した加熱工程及び冷却工程順次的に進行され、各熱処理工程が完了すると、搬送ロボット3422は基板Wを搬出し、後段液処理チャンバー3604に搬送する。
搬送ロボット3422が後段液処理チャンバー3604から基板Wを搬出し、熱処理チャンバー3200に基板Wを搬入する。熱処理チャンバー3200には上述した加熱工程及び冷却工程が順次的に進行され、各熱処理工程が完了すると、搬送ロボット3422は基板Wを後段バッファ3804に搬送する。インターフェイスモジュール40の第1ロボット4602が後段バッファ3804から基板Wを搬出し、補助工程チャンバー4200に搬送する。
その後、第1ロボット4602が補助工程チャンバー4200から基板Wを搬出し、インターフェイスバッファ4400に基板Wを搬送する。
第2ロボット4606が露光装置50から基板Wを搬出し、インターフェイスバッファ4400に基板Wを搬送する。
基板Wは搬送ロボット3422によって現像チャンバー3600から搬出されて熱処理チャンバー3200に搬入される。基板Wは熱処理チャンバー3200で加熱工程及び冷却工程が順次的に遂行される。冷却工程が完了すると、基板Wは搬送ロボット3422によって熱処理チャンバー3200から基板Wを搬出されて前段バッファ3802に搬送する。
1320 支持プレート
1340 ピンアセンブリ
1360 支持ピン
1380 ガイド
Claims (20)
- 基板を処理する装置において、
基板を処理する処理空間を提供するチャンバーと、
前記処理空間で基板を支持する基板支持ユニットと、
前記基板支持ユニットに支持された基板上に疎水化ガスを供給するガス供給ユニットと、
前記基板支持ユニット及び前記ガス供給ユニットを制御する制御器と、を含み、
前記基板支持ユニットは、
基板が置かれる支持プレートと、
前記支持プレートから基板を持ち上げるか、或いは前記支持プレートに基板を下ろすピンアセンブリと、を含み、
前記制御器は、前記ピンアセンブリを調節して基板の表面の疎水化程度を制御する基板処理装置。 - 前記制御器は、第1基板の表面が第1疎水性を有するように前記第1基板を第1高さに移動させ、第2基板の表面が第2疎水性を有するように前記第2基板を第2高さに移動させ、
前記第1疎水性は、前記第2疎水性より疎水化程度が大きく提供され、
前記第1高さは、前記第2高さに比べて前記ガス供給ユニットにさらに近く位置される高さに提供される請求項1に記載の基板処理装置。 - 前記ガス供給ユニットは、
前記処理空間内に疎水化ガスを供給し、前記支持プレートの上部に位置されるガス供給管を含み、
上部から見る時、前記ガス供給管の吐出端は、前記支持プレートと重畳されるように位置され、
前記第1高さは、前記第2高さに比べて前記吐出端にさらに近く位置される高さに提供される請求項2に記載の基板処理装置。 - 前記制御器は、前記ガス供給管から吐出される流量が一定するように前記ガス供給ユニットを制御する請求項3に記載の基板処理装置。
- 前記第1高さは、前記第1基板が前記支持プレートから離隔された高さであり、
前記第2高さは、前記第2基板が前記支持プレートに安着された高さに提供される請求項2乃至請求項4のいずれかの一項に記載の基板処理装置。 - 前記第1高さは、前記第1基板が前記支持プレートから離隔された高さであり、
前記第2高さは、前記第2基板が前記支持プレートから離隔された高さに提供される請求項2乃至請求項4のいずれかの一項に記載の基板処理装置。 - 前記ガス供給ユニットが供給する前記疎水化ガスは、ヘキサメチルジシラン(hexamethyldisilane、HMDS)ガスを含む請求項1乃至請求項4のいずれかの一項に記載の基板処理装置。
- 基板を処理する方法において、
第1基板に疎水化ガスを供給して前記第1基板の表面が第1疎水性を有するように疎水化処理する第1処理段階と、
第2基板に疎水化ガスを供給して前記第2基板の表面が第2疎水性を有するように疎水化処理する第2処理段階と、を含み、
前記第1疎水性と前記第2疎水性は、疎水化程度が互いに異なり、
前記第1処理段階で疎水化ガスが吐出される吐出端と前記第1基板との間の第1距離は、前記第2処理段階で疎水化ガスが吐出される吐出端と前記第2基板との間の第2距離と異なる基板処理方法。 - 前記第1疎水性は、前記第2疎水性に比べて大きい疎水化程度を有し、
前記第1距離は、前記第2距離より小さく提供される請求項8に記載の基板処理方法。 - 前記第1処理段階で使用される疎水化ガスと前記第2処理段階で使用される疎水化ガスは、同一なガスである請求項9に記載の基板処理方法。
- 前記第1処理段階と前記第2処理段階は、同一チャンバーで遂行される請求項10に記載の基板処理方法。
- 疎水化ガスが吐出される吐出端は、前記第1基板と前記第2基板を支持する支持プレートに対向し、上部から見る時、前記支持プレートに重畳されるように位置される請求項11に記載の基板処理方法。
- 前記吐出端は、前記第1基板と前記第2基板各々の中心に対向するように位置される請求項12に記載の基板処理方法。
- 前記第1処理段階と前記第2処理段階の各々で前記疎水化ガスが吐出される吐出流量は、同一に提供される請求項8乃至請求項13のいずれかの一項に記載の基板処理方法。
- 前記疎水化ガスは、ヘキサメチルジシラン(hexamethyldisilane、HMDS)ガスを含む請求項14に記載の基板処理方法。
- 基板を処理する方法において、
前記基板に疎水化ガスを供給して前記基板の表面を疎水化処理し、
前記基板の位置を調節して前記表面の疎水化程度を調節する基板処理方法。 - 前記基板の位置を調節することは、前記疎水化ガスが吐出される吐出位置と前記基板との間の距離を調節することを含む請求項16に記載の基板処理方法。
- 前記吐出位置は、前記基板の上部に位置され、
前記基板を第1高さに移動させて前記表面が第1疎水性を有するか、或いは前記基板を第2高さに移動させて前記表面が第2疎水性を有するように前記疎水化程度を調節し、
前記第1高さは、前記第2高さより高い位置であり、
前記第1疎水性は、前記第2疎水性に比べて前記疎水化程度が大きい請求項17に記載の基板処理方法。 - 前記疎水化ガスの吐出流量を一定に提供される請求項17又は請求項18に記載の基板処理方法。
- 前記疎水化ガスは、ヘキサメチルジシラン(hexamethyldisilane、HMDS)ガスを含む請求項19に記載の基板処理方法。
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