JP2021019205A - 搬送ユニット及びこれを有する基板処理装置 - Google Patents
搬送ユニット及びこれを有する基板処理装置 Download PDFInfo
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- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
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Abstract
Description
前記第2ハンドを支持する第2支持ロードの移動を案内する第2ガイドレールを含み、前記第1ガイドレールは前記支持体の側面に形成され、前記第2ガイドレールは前記支持体の上面に形成される。
前記第1ハンドを支持する第1支持ロードの移動を案内する第1ガイドレール、前記支持体に提供され、前記第2ハンドを支持する第2支持ロードの移動を案内する第2ガイドレール、そして前記支持体の内部に提供される排気流路を減圧する減圧部材を含み、
前記排気流路は前記第1ガイドレールに連通されるように提供される第1流路、前記第2ガイドレールに連通されるように提供される第2流路、そして前記第1流路と前記第2流路が合わさる第3流路を含み、前記減圧部材は前記第3流路を減圧する。
1100 ガイドレール
1220 第1流路
1240 第2流路
1600 減圧部材
1260 第3流路
3420 ハンド
3423 支持ロード
Claims (19)
- 基板を搬送するユニットにおいて、
支持体と、
基板が置かれる第1ハンドと、
前記第1ハンドと積層されるように位置され、基板が置かれる第2ハンドと、
前記支持体に提供され、前記第1ハンドを支持する第1支持ロードの移動を案内する第1ガイドレールと、
前記支持体に提供され、前記第2ハンドを支持する第2支持ロードの移動を案内する第2ガイドレールと、
前記支持体の内部に提供される排気流路を減圧する減圧部材と、を含み、
前記排気流路は、
前記第1ガイドレールに連通されるように提供される第1流路と、
前記第2ガイドレールに連通されるように提供される第2流路と、
前記第1流路と前記第2流路が合わさる第3流路と、を含み、
前記減圧部材は、前記第3流路を減圧する搬送ユニット。 - 前記第1流路と前記第2流路の各々は、折れ曲がるように提供される屈曲部を有する請求項1に記載の搬送ユニット。
- 前記第1ガイドレールは、前記支持体の側面に形成され、
前記第2ガイドレールは、前記支持体の上面に形成される請求項1又は請求項2に記載の搬送ユニット。 - 前記支持体は、
前記排気流路、前記第1ガイドレール、そして前記第2ガイドレールが提供される本体と、
前記第1流路内に位置され、前記第1流路内の気流動線が迂回されるように気流の流れを干渉する第1隔壁と、
前記第2流路内に位置され、前記第2流路内の気流動線が迂回されるように気流の流れを干渉する第2隔壁と、を含み、
前記第3流路は、前記第1流路及び前記第2流路に比べて前記本体の中心軸にさらに近く位置される請求項1又は請求項2に記載の搬送ユニット。 - 前記第1隔壁は、前記第1ガイドレールの内側で前記第1ガイドレールと対向するように位置される請求項4に記載の搬送ユニット。
- 前記第1隔壁は、前記第1流路を形成する天井面から下に延長され、前記第1流路を形成する底面から離隔されるように位置される請求項5に記載の搬送ユニット。
- 前記第2隔壁は、前記第2ガイドレールの下で前記第2ガイドレールと対向するように位置される請求項4に記載の搬送ユニット。
- 前記第3流路は、前記第1流路と前記第2流路が合わさり、前記中心軸に近づくなる方向に延長される第1領域と前記第1領域から下に延長される第2領域を有し、
前記第1領域は、前記第1隔壁の下端より高く位置される請求項1乃至請求項7のいずれかの一項に記載の搬送ユニット。 - 基板を搬送するユニットにおいて、
支持体と、
基板が置かれる第1ハンドと、
前記第1ハンドと積層されるように位置され、基板が置かれる第2ハンドと、
前記支持体に提供され、前記第1ハンドを支持する第1支持ロードの移動を案内する第1ガイドレールと、
前記支持体に提供され、前記第2ハンドを支持する第2支持ロードの移動を案内する第2ガイドレールをと、含み、
前記第1ガイドレールは、前記支持体の側面に形成され、
前記第2ガイドレールは、前記支持体の上面に形成される搬送ユニット。 - 前記第1ガイドレールと前記第2ガイドレールは、各々複数に提供され、
複数の前記第1ガイドレールは、前記支持体の両側面に各々提供され、
複数の前記第2ガイドレールは、前記支持体の上面に各々提供され、
前記第1支持ロードは、複数の前記第1ガイドレールに各々連結され、
前記第2支持ロードは、複数の前記第2ガイドレールに各々連結される請求項9に記載の搬送ユニット。 - 前記第1ハンドは、前記第2ハンドの上部に位置される請求項10に記載の搬送ユニット。
- 前記支持体の内部に提供される排気流路を減圧する減圧部材を含み、
前記排気流路は、
前記第1ガイドレールに連通されるように提供される第1流路と、
前記第2ガイドレールに連通されるように提供される第2流路と、
前記第1流路と前記第2流路が合わさる第3流路と、を含み、
前記減圧部材は、前記第3流路を減圧する請求項11に記載の搬送ユニット。 - 基板を処理する装置において、
第1ユニットと、
前記第2ユニットと、
前記第1ユニットと前記第2ユニットとの間に基板を搬送する搬送ユニットと、を含み、
前記搬送ユニットは、
支持体と、
基板が置かれる第1ハンドと、
前記第1ハンドと積層されるように位置され、基板が置かれる第2ハンドと、
前記支持体に提供され、前記第1ハンドを支持する第1支持ロードの移動を案内する第1ガイドレールと、
前記支持体に提供され、前記第2ハンドを支持する第2支持ロードの移動を案内する第2ガイドレールと、
前記支持体の内部に提供される排気流路を減圧する減圧部材と、を含み、
前記排気流路は、
前記第1ガイドレールに連通されるように提供される第1流路と、
前記第2ガイドレールに連通されるように提供される第2流路と、
前記第1流路と前記第2流路が合わさる第3流路と、を含み、
前記減圧部材は、前記第3流路を減圧する基板処理装置。 - 前記第1流路と前記第2流路の各々は、前記第3流路に近づくなる方向に沿って折れ曲がるように提供される請求項13に記載の基板処理装置。
- 前記第1ガイドレールは、前記支持体の側面に形成され、
前記第2ガイドレールは、前記支持体の上面に形成される請求項14に記載の基板処理装置。 - 前記支持体は、
前記排気流路、前記第1ガイドレール、そして前記第2ガイドレールが提供される本体と、
前記第1流路内に位置され、前記第1流路内の気流動線が迂回されるように気流の流れを干渉する第1隔壁と、
前記第2流路内に位置され、前記第2流路内の気流動線が迂回されるように気流の流れを干渉する第2隔壁と、を含み、
前記第3流路は、前記第1流路及び前記第2流路に比べて前記本体の中心軸にさらに近く位置される請求項15に記載の基板処理装置。 - 前記第1隔壁は、前記第1ガイドレールの内側で前記第1ガイドレールと対向するように位置される請求項16に記載の基板処理装置。
- 前記第1隔壁は、前記第1流路を形成する天井面から下に延長され、前記第1流路を形成する底面から離隔されるように位置される請求項17に記載の基板処理装置。
- 前記第2隔壁は、前記第2ガイドレールの下で前記第2ガイドレールと対向するように位置される請求項17に記載の基板処理装置。
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KR10-2019-0088354 | 2019-07-22 | ||
KR1020190088354A KR102280034B1 (ko) | 2019-07-22 | 2019-07-22 | 반송 유닛 및 이를 가지는 기판 처리 장치 |
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JP2008264923A (ja) * | 2007-04-19 | 2008-11-06 | Daihen Corp | 搬送装置 |
KR20140117000A (ko) * | 2013-03-25 | 2014-10-07 | 세메스 주식회사 | 기판반송장치 |
US9943969B2 (en) * | 2008-04-15 | 2018-04-17 | Brooks Automation (Germany) Gmbh | Clean transfer robot |
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KR20060021578A (ko) | 2004-09-03 | 2006-03-08 | 주성엔지니어링(주) | 기판의 오염방지수단을 포함하는 기판이송로봇 |
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JP5480605B2 (ja) * | 2009-12-01 | 2014-04-23 | 東京エレクトロン株式会社 | 基板搬送装置および基板処理システム |
KR101515908B1 (ko) * | 2013-07-29 | 2015-04-29 | 주식회사 티이에스 | 기판이송장치 |
KR20150014147A (ko) * | 2013-07-29 | 2015-02-06 | 윤일식 | 엘리베이터 도어에 설치된 모니터의 완충지지장치 |
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KR20210011202A (ko) | 2021-02-01 |
CN112289722A (zh) | 2021-01-29 |
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