JP2022104583A - 基板処理装置及び基板処理方法 - Google Patents
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Abstract
Description
一例によれば、搬送チャンバー350の長さ方向の延長線を基準に一側面には付加工程チャンバー520が配置され、他の側面にはインターフェイスバッファ530が配置されることができる。
1201a 第1処理ユニット
1201b 第2処理ユニット
1220a 第1処理容器
1220b 第2処理容器
1240a 第1支持ユニット
1240b 第2支持ユニット
1400 液供給ユニット
1600 排気ユニット
1622 第1統合ダクト
1624 第2統合ダクト
1642 第1排気ライン
1644 第2排気ライン
1646 第3排気ライン
1648 第4排気ライン
Claims (20)
- 基板を処理する装置において、
内部に内部空間を有する処理容器と、
前記内部空間で基板を支持し、回転させる支持ユニットと、
前記処理容器に結合され、前記内部空間内の雰囲気を排気する排気ユニットと、を含み、
前記排気ユニットは、
前記内部空間の雰囲気を流入する第1排気口を有し、前記第1排気口を通じて流入される雰囲気を排気するように提供される第1排気ラインと、
前記内部空間の雰囲気を流入する第2排気口を有し、前記第2排気口を通じて流入される雰囲気を排気するように提供される第2排気ラインと、を含み、
上部から見る時、前記第1排気口と前記第2排気口を通る仮想の直線を基準に前記第1排気ラインは、前記直線の一側に向かう方向に雰囲気を排気し、前記第2排気ラインは、前記直線の他側に向かう方向に雰囲気を排気するように提供される基板処理装置。 - 前記支持ユニットを制御する制御器をさらに含み、
前記制御器は、前記第1排気ラインと前記第2排気ラインの内部で排気方向が前記基板の回転方向に対して順方向になるように前記支持ユニットを制御する請求項1に記載の基板処理装置。 - 前記第1排気ラインと前記第2排気ラインは、各々円弧(arc)形状に提供される請求項1又は請求項2に記載の基板処理装置。
- 前記支持ユニットは、
前記基板を支持する支持板と、
前記支持板に結合された駆動軸と、
前記駆動軸を回転させる駆動器と、を含み、
上部から見る時、前記第1排気ラインと前記第2排気ラインは、前記支持板の回転軸に対して点対称で提供される請求項1又は請求項2に記載の基板処理装置。 - 前記第1排気ラインと前記第2排気ラインは、前記処理容器の低壁に結合される請求項1又は請求項2に記載の基板処理装置。
- 前記支持ユニットに支持された基板上に処理液を供給する液供給ユニットをさらに含む請求項1又は請求項2に記載の基板処理装置。
- 基板を処理する装置において、
内部に第1内部空間を有する第1処理容器と前記第1内部空間で基板を支持し、回転させる第1支持ユニットを有し、基板を処理する第1処理ユニットと、
内部に第2内部空間を有する第2処理容器と前記第2内部空間で基板を支持し、回転させる第2支持ユニットを有し、基板を処理する第2処理ユニットと、
前記第1内部空間及び前記第2内部空間を排気する排気ユニットと、を含み、
前記第1処理ユニットと前記第2処理ユニットは、一列に配列され、
前記排気ユニットは、
前記第1処理ユニットと前記第2処理ユニットが配列されたユニット配列方向を基準に前記ユニット配列方向の一側に位置される第1統合ダクトと、
前記ユニット配列方向の他側に位置される第2統合ダクトと、
前記第1内部空間の雰囲気を流入する第1排気口を有し、前記第1排気口を通じて流入される雰囲気を前記第1統合ダクトに排気するように提供される第1排気ラインと、
前記第1内部空間の雰囲気を流入する第2排気口を有し、前記第2排気口を通じて流入される雰囲気を前記第2統合ダクトに排気するように提供される第2排気ラインと、
前記第2内部空間の雰囲気を流入する第3排気口を有し、前記第3排気口を通じて流入される雰囲気を前記第1統合ダクトに排気するように提供される第3排気ラインと、
前記第2内部空間の雰囲気を流入する第4排気口を有し、前記第4排気口を通じて流入される雰囲気を前記第2統合ダクトに排気するように提供される第4排気ラインと、を有する基板処理装置。 - 前記第1支持ユニットと前記第2支持ユニットを制御する制御器をさらに含み、
前記制御器は、前記第1排気ライン、前記第2排気ライン、前記第3排気ライン、そして前記第4排気ラインの内部で排気方向が前記基板の回転方向に順方向になるように前記第1支持ユニット及び前記第2支持ユニットを制御する請求項7に記載の基板処理装置。 - 前記第1排気ライン、前記第2排気ライン、前記第3排気ライン、そして前記第4排気ラインは、各々円弧形状に提供される請求項7又は請求項8に記載の基板処理装置。
- 前記第1支持ユニットは、
基板を支持する第1支持板と、
前記第1支持板に結合された第1駆動軸と、
前記第1駆動軸を回転させる第1駆動器と、を含み、
上部から見る時、前記第1排気ラインと前記第2排気ラインは、前記第1支持板の回転軸に対して点対称で提供され、
前記第2支持ユニットは、
基板を支持する第2支持板と、
前記第2支持板に結合された第2駆動軸と、
前記第2駆動軸を回転させる第2駆動器と、を含み、
上部から見る時、前記第3排気ラインと前記第4排気ラインは、前記第2支持板の回転軸に対して点対称で提供される請求項9に記載の基板処理装置。 - 前記第1排気管、前記第2排気管、前記第3排気管、そして前記第4排気管は、順次的に前記ユニット配列方向に沿って配列される請求項7又は請求項8に記載の基板処理装置。
- 前記制御器は、前記第1支持ユニットに支持された基板と前記第2支持ユニットに支持された基板の回転方向が同一であるように前記第1支持ユニットと前記第2支持ユニットを制御する請求項11に記載の基板処理装置。
- 前記装置は、基板に液を吐出する液供給ユニットをさらに含み、
前記液供給ユニットは、
ノズルと、
前記ノズルが前記第1支持ユニットに支持された基板と前記第2支持ユニットに支持された基板の中で選択された基板に液を吐出するように前記ノズルを前記第1支持ユニットと対向される第1工程位置又は前記第2支持ユニットと対向される第2工程位置に前記ノズルを移動させるノズル駆動器と、を有する請求項7又は請求項8に記載の基板処理装置。 - 基板を処理する装置において、
内部に内部空間を有する処理容器と、
前記内部空間で基板を支持し、回転させる支持ユニットと、
前記処理容器に結合され、前記内部空間内の雰囲気を排気する排気ユニットと、
前記支持ユニットを制御する制御器と、を含み、
前記排気ユニットは、
前記内部空間の雰囲気を流入する第1排気口を有し、前記第1排気口を通じて流入される雰囲気を第1方向に排気するように提供される第1排気ラインと、
前記内部空間の雰囲気を流入する第2排気口を有し、前記第2排気口を通じて流入される雰囲気を第2方向に排気するように提供される第2排気ラインと、を含み、
前記制御器は、前記第1排気ラインと前記第2排気ラインの内部で排気方向が前記基板の回転方向に順方向になるように前記支持ユニットを制御する基板処理装置。 - 上部から見る時、前記第1排気口と前記第2排気口は、各々円弧形状を有する請求項14に記載の基板処理装置。
- 前記支持ユニットは、
前記基板を支持する支持板と、
前記支持板に結合された駆動軸と、
前記駆動軸を回転させる駆動器と、を含み、
上部から見る時、前記第1排気ラインと前記第2排気ラインは、前記支持板の回転軸に対して点対称で提供される請求項14に記載の基板処理装置。 - 内部に内部空間を有する処理容器、前記内部空間で基板を支持し、回転させる支持ユニット、前記処理容器に結合され、前記内部空間内の雰囲気を排気する排気ユニット、そして前記支持ユニットに支持された基板に処理液を供給する液供給ユニットを有する基板処理装置を利用して基板を処理し、
前記基板に処理液を供給して基板を処理する間に前記内部空間の雰囲気は、各々排気口を有する複数の排気ラインを通じて排気され、
各々の前記排気ラインの内部で排気方向が前記基板の回転方向に順方向になるように前記基板を回転させる基板処理方法。 - 各々の前記排気ラインは、円弧形状に提供される請求項17に記載の基板処理方法。
- 前記基板の回転速度は、2000rpm以上である請求項17又は請求項18に記載の基板処理方法。
- 前記処理液は、フォトレジストである請求項17又は請求項18に記載の基板処理方法。
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