JP2021064762A - 半導体装置 - Google Patents
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- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
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Abstract
Description
(1) 本発明の一態様に係る半導体装置は、複数のメモリチップが各メモリチップを制御するロジックチップの上に積層されたチップ積層体を備え、前記チップ積層体は、前記複数のメモリチップ及び前記ロジックチップを厚み方向に貫通する複数の貫通電極を有し、且つ、前記複数のメモリチップ及び前記ロジックチップの各間にバンプ電極を配置することなく、前記複数のメモリチップ及び前記ロジックチップの各間が前記貫通電極を介して電気的に接続されたバンプレス構造を有しており、前記メモリチップに設けられた第1のトランジスタのコンダクタンスが、前記ロジックチップに設けられた第2のトランジスタのコンダクタンスよりも小さいことを特徴とする。
なお、以下の説明で用いる図面は、特徴をわかりやすくするために、便宜上特徴となる部分を模式的に示している場合があり、各構成要素の寸法比率などが実際と同じであるとは限らない。
本実施形態の半導体装置1は、図1に示すように、HBMと呼ばれる半導体パッケージであり、第1の半導体チップ2及び第2の半導体チップ3と、第1の半導体チップ2及び第2の半導体チップ3が一面(本実施形態では上面)に実装されたインターポーザ4と、インターポーザ4が一面(本実施形態では上面)に実装されたパッケージ基板5とを備えている。
例えば、上記実施形態では、HBMと呼ばれる半導体パッケージに本発明を適用した場合を例示しているが、このような構成に必ずしも限定されるものではなく、複数のメモリチップが各メモリチップを制御するロジックチップの上に積層されたチップ積層体を備える半導体装置に対して、本発明を幅広く適用することが可能である。
Claims (5)
- 複数のメモリチップが各メモリチップを制御するロジックチップの上に積層されたチップ積層体を備え、
前記チップ積層体は、前記複数のメモリチップ及び前記ロジックチップを厚み方向に貫通する複数の貫通電極を有し、
且つ、前記複数のメモリチップ及び前記ロジックチップの各間にバンプ電極を配置することなく、前記複数のメモリチップ及び前記ロジックチップの各間が前記貫通電極を介して電気的に接続されたバンプレス構造を有しており、
前記メモリチップに設けられた第1のトランジスタのコンダクタンスが、前記ロジックチップに設けられた第2のトランジスタのコンダクタンスよりも小さいことを特徴とする半導体装置。 - 前記第2のトランジスタのコンダクタンスに対する前記第1のトランジスタのコンダクタンスの比率が1/3以下であることを特徴とする請求項1に記載の半導体装置。
- 前記第2のトランジスタのコンダクタンスに対する前記第1のトランジスタのコンダクタンスの比率が1/10以下であることを特徴とする請求項1に記載の半導体装置。
- 前記チップ積層体の厚みが40〜200μmであり、
前記メモリチップの厚みが2〜10μmであり、
前記ロジックチップの厚みが2〜20μmであることを特徴とする請求項1〜3の何れか一項に記載の半導体装置。 - 前記メモリチップがDRAMチップであることを特徴とする請求項1〜4の何れか一項に記載の半導体装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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JP2019190110A JP2021064762A (ja) | 2019-10-17 | 2019-10-17 | 半導体装置 |
US17/063,730 US20210118863A1 (en) | 2019-10-17 | 2020-10-06 | Semiconductor apparatus |
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JP2019190110A JP2021064762A (ja) | 2019-10-17 | 2019-10-17 | 半導体装置 |
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JP2021064762A true JP2021064762A (ja) | 2021-04-22 |
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JP2019190110A Pending JP2021064762A (ja) | 2019-10-17 | 2019-10-17 | 半導体装置 |
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JP (1) | JP2021064762A (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US20230197623A1 (en) * | 2021-12-20 | 2023-06-22 | Advanced Micro Devices, Inc. | Electronic device including an integrated circuit die and a support structure |
CN115394768A (zh) * | 2022-09-06 | 2022-11-25 | 华进半导体封装先导技术研发中心有限公司 | 一种多层高带宽存储器及其制造方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002516033A (ja) * | 1997-04-04 | 2002-05-28 | グレン ジェイ リーディ | 三次元構造メモリ |
JP2007157266A (ja) * | 2005-12-06 | 2007-06-21 | Elpida Memory Inc | 積層型半導体装置およびチップ選択回路 |
US20120106117A1 (en) * | 2010-11-02 | 2012-05-03 | Georgia Tech Research Corporation | Ultra-thin interposer assemblies with through vias |
JP2013065638A (ja) * | 2011-09-15 | 2013-04-11 | Elpida Memory Inc | 半導体装置 |
JP2013089001A (ja) * | 2011-10-18 | 2013-05-13 | Elpida Memory Inc | 半導体装置 |
WO2016098691A1 (ja) * | 2014-12-18 | 2016-06-23 | ソニー株式会社 | 半導体装置、製造方法、電子機器 |
US20190096867A1 (en) * | 2017-09-27 | 2019-03-28 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor component, package structure and manufacturing method thereof |
-
2019
- 2019-10-17 JP JP2019190110A patent/JP2021064762A/ja active Pending
-
2020
- 2020-10-06 US US17/063,730 patent/US20210118863A1/en not_active Abandoned
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002516033A (ja) * | 1997-04-04 | 2002-05-28 | グレン ジェイ リーディ | 三次元構造メモリ |
JP2007157266A (ja) * | 2005-12-06 | 2007-06-21 | Elpida Memory Inc | 積層型半導体装置およびチップ選択回路 |
US20120106117A1 (en) * | 2010-11-02 | 2012-05-03 | Georgia Tech Research Corporation | Ultra-thin interposer assemblies with through vias |
JP2013065638A (ja) * | 2011-09-15 | 2013-04-11 | Elpida Memory Inc | 半導体装置 |
JP2013089001A (ja) * | 2011-10-18 | 2013-05-13 | Elpida Memory Inc | 半導体装置 |
WO2016098691A1 (ja) * | 2014-12-18 | 2016-06-23 | ソニー株式会社 | 半導体装置、製造方法、電子機器 |
US20190096867A1 (en) * | 2017-09-27 | 2019-03-28 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor component, package structure and manufacturing method thereof |
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