JP2021064707A - 半導体モジュール - Google Patents
半導体モジュール Download PDFInfo
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- JP2021064707A JP2021064707A JP2019188629A JP2019188629A JP2021064707A JP 2021064707 A JP2021064707 A JP 2021064707A JP 2019188629 A JP2019188629 A JP 2019188629A JP 2019188629 A JP2019188629 A JP 2019188629A JP 2021064707 A JP2021064707 A JP 2021064707A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 216
- 229910052751 metal Inorganic materials 0.000 claims abstract description 116
- 239000002184 metal Substances 0.000 claims abstract description 116
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 238000009792 diffusion process Methods 0.000 claims description 17
- 238000001514 detection method Methods 0.000 abstract description 19
- 238000012546 transfer Methods 0.000 description 24
- 239000000463 material Substances 0.000 description 23
- 229920005989 resin Polymers 0.000 description 14
- 239000011347 resin Substances 0.000 description 14
- 238000007789 sealing Methods 0.000 description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 8
- 239000010949 copper Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 239000000956 alloy Substances 0.000 description 6
- 230000017525 heat dissipation Effects 0.000 description 6
- 229910000679 solder Inorganic materials 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 229910000838 Al alloy Inorganic materials 0.000 description 3
- 229910000881 Cu alloy Inorganic materials 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 2
- 229910000640 Fe alloy Inorganic materials 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000003353 gold alloy Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 238000001721 transfer moulding Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/10—Containers; Seals characterised by the material or arrangement of seals between parts, e.g. between cap and base of the container or between leads and walls of the container
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49838—Geometry or layout
- H01L23/49844—Geometry or layout for devices being provided for in H01L29/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/0601—Structure
- H01L2224/0603—Bonding areas having different sizes, e.g. different heights or widths
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L2224/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
- H01L2224/401—Disposition
- H01L2224/40151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/40221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/40225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73201—Location after the connecting process on the same surface
- H01L2224/73221—Strap and wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/16—Fillings or auxiliary members in containers or encapsulations, e.g. centering rings
- H01L23/18—Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device
- H01L23/24—Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device solid or gel at the normal operating temperature of the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/191—Disposition
- H01L2924/19101—Disposition of discrete passive components
- H01L2924/19107—Disposition of discrete passive components off-chip wires
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Geometry (AREA)
- Ceramic Engineering (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
Description
上記実施の形態に記載の半導体モジュールは、絶縁板の上面に回路板が配置され、前記絶縁板の下面に放熱板が配置された積層基板と、前記回路板の上面に配置される半導体素子と、前記半導体素子の上面に配置される金属配線板と、前記金属配線板の上面に配置され、前記半導体素子の温度を検出する温度センサと、を備え、前記金属配線板は、前記半導体素子の熱を遮蔽する熱遮蔽部を有する。
2 :積層基板
3 :半導体素子
3a :電極パッド
3b :電極パッド
4 :金属配線板
4a :第1端部
4b :第2端部
5 :金属配線板
6 :温度センサ
7 :封止樹脂
10 :ケース部材
11 :環状壁部
12 :凹部
13 :段部
14 :主端子
15 :主端子
16 :制御端子
17 :温度センサ端子
20 :絶縁板
21 :放熱板
22 :回路板
40 :切欠き部
41 :切欠き部
42 :切欠き部
43 :切欠き部
44 :切欠き部
D1 :切欠き部の幅
D2 :距離
S :接合材
T :伝熱経路
θ1 :角度範囲
θ2 :角度範囲
θ3 :角度範囲
Claims (8)
- 絶縁板の上面に回路板が配置され、前記絶縁板の下面に放熱板が配置された積層基板と、
前記回路板の上面に配置される半導体素子と、
前記半導体素子の上面に配置される金属配線板と、
前記金属配線板の上面に配置され、前記半導体素子の温度を検出する温度センサと、を備え、
前記金属配線板は、前記半導体素子の熱を遮蔽する熱遮蔽部を有する半導体モジュール。 - 前記金属配線板は、
前記半導体素子が接合される第1端部と、
前記第1端部とは反対側に位置する第2端部と、を有し、
前記熱遮蔽部は、少なくとも一部が前記温度センサよりも前記第1端部から前記第2端部に向かう方向の下流側に配置される請求項1に記載の半導体モジュール。 - 前記熱遮蔽部は、前記第1端部から前記第2端部に向かう方向に対して交差する方向に延びる切欠き部で形成される請求項2に記載の半導体モジュール。
- 前記温度センサは、平面視で前記半導体素子に重なるように配置される請求項1から請求項3のいずれかに記載の半導体モジュール。
- 前記熱遮蔽部は、平面視で前記半導体素子に重なるように配置される請求項4に記載の半導体モジュール。
- 前記熱遮蔽部は、前記温度センサの周囲を囲うように配置される請求項5に記載の半導体モジュール。
- 前記熱遮蔽部は、平面視における前記半導体素子の熱の拡散範囲内に配置される請求項1から請求項3のいずれかに記載の半導体モジュール。
- 前記熱遮蔽部は、断面視における前記半導体素子の熱の拡散範囲よりも外側に配置される請求項7に記載の半導体モジュール。
Priority Applications (3)
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JP2019188629A JP7322654B2 (ja) | 2019-10-15 | 2019-10-15 | 半導体モジュール |
US17/003,604 US11239131B2 (en) | 2019-10-15 | 2020-08-26 | Semiconductor module |
CN202010905134.3A CN112670262A (zh) | 2019-10-15 | 2020-09-01 | 半导体模块 |
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JP2019188629A JP7322654B2 (ja) | 2019-10-15 | 2019-10-15 | 半導体モジュール |
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JP2021064707A true JP2021064707A (ja) | 2021-04-22 |
JP7322654B2 JP7322654B2 (ja) | 2023-08-08 |
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US (1) | US11239131B2 (ja) |
JP (1) | JP7322654B2 (ja) |
CN (1) | CN112670262A (ja) |
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TWI764256B (zh) * | 2020-08-28 | 2022-05-11 | 朋程科技股份有限公司 | 智慧功率模組封裝結構 |
JP7482815B2 (ja) * | 2021-03-09 | 2024-05-14 | 三菱電機株式会社 | 半導体装置および半導体装置の製造方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11258063A (ja) * | 1998-03-12 | 1999-09-24 | Tamagawa Seiki Co Ltd | パワー素子の温度検出方法 |
JP2008171876A (ja) * | 2007-01-09 | 2008-07-24 | Sharp Corp | 半導体装置 |
JP2012212863A (ja) * | 2011-03-30 | 2012-11-01 | Internatl Rectifier Corp | 温度センサーを具えたデュアルコンパートメント半導体パッケージ |
WO2014103036A1 (ja) * | 2012-12-28 | 2014-07-03 | 三菱電機株式会社 | 半導体装置、自動車 |
JP2018014356A (ja) * | 2016-07-19 | 2018-01-25 | パナソニックIpマネジメント株式会社 | 半導体装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
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JP4024531B2 (ja) | 2001-12-18 | 2007-12-19 | 株式会社三社電機製作所 | サーミスタ内蔵電力用半導体モジュール |
JP2004127983A (ja) | 2002-09-30 | 2004-04-22 | Mitsubishi Electric Corp | 電力用半導体装置 |
JP2005039948A (ja) | 2003-07-16 | 2005-02-10 | Sharp Corp | 半導体装置及び電子機器 |
JP4695041B2 (ja) | 2006-08-09 | 2011-06-08 | 本田技研工業株式会社 | 半導体装置 |
KR102162186B1 (ko) * | 2013-04-26 | 2020-10-07 | 에이비비 슈바이쯔 아게 | 전력 반도체 모듈 |
KR20150027583A (ko) * | 2013-09-04 | 2015-03-12 | 삼성전자주식회사 | 열전 소자를 갖는 반도체 소자 |
JP6668617B2 (ja) | 2015-06-04 | 2020-03-18 | 富士電機株式会社 | サーミスタ搭載装置およびサーミスタ部品 |
JP6685143B2 (ja) | 2016-02-03 | 2020-04-22 | 三菱電機株式会社 | 電極端子、半導体装置及び電力変換装置 |
JP7067205B2 (ja) * | 2018-04-02 | 2022-05-16 | 富士電機株式会社 | 半導体装置 |
-
2019
- 2019-10-15 JP JP2019188629A patent/JP7322654B2/ja active Active
-
2020
- 2020-08-26 US US17/003,604 patent/US11239131B2/en active Active
- 2020-09-01 CN CN202010905134.3A patent/CN112670262A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11258063A (ja) * | 1998-03-12 | 1999-09-24 | Tamagawa Seiki Co Ltd | パワー素子の温度検出方法 |
JP2008171876A (ja) * | 2007-01-09 | 2008-07-24 | Sharp Corp | 半導体装置 |
JP2012212863A (ja) * | 2011-03-30 | 2012-11-01 | Internatl Rectifier Corp | 温度センサーを具えたデュアルコンパートメント半導体パッケージ |
WO2014103036A1 (ja) * | 2012-12-28 | 2014-07-03 | 三菱電機株式会社 | 半導体装置、自動車 |
JP2018014356A (ja) * | 2016-07-19 | 2018-01-25 | パナソニックIpマネジメント株式会社 | 半導体装置 |
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Publication number | Publication date |
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US11239131B2 (en) | 2022-02-01 |
US20210111092A1 (en) | 2021-04-15 |
CN112670262A (zh) | 2021-04-16 |
JP7322654B2 (ja) | 2023-08-08 |
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