JP2021030374A - 定温水供給装置 - Google Patents
定温水供給装置 Download PDFInfo
- Publication number
- JP2021030374A JP2021030374A JP2019153591A JP2019153591A JP2021030374A JP 2021030374 A JP2021030374 A JP 2021030374A JP 2019153591 A JP2019153591 A JP 2019153591A JP 2019153591 A JP2019153591 A JP 2019153591A JP 2021030374 A JP2021030374 A JP 2021030374A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- water
- unit
- processing
- water supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 282
- 238000012545 processing Methods 0.000 claims abstract description 209
- 238000012937 correction Methods 0.000 claims abstract description 35
- 238000009529 body temperature measurement Methods 0.000 claims abstract description 14
- 238000003754 machining Methods 0.000 claims description 67
- 239000000498 cooling water Substances 0.000 claims description 35
- 230000006870 function Effects 0.000 claims description 14
- 230000007613 environmental effect Effects 0.000 claims description 13
- 238000013459 approach Methods 0.000 claims description 12
- 238000001816 cooling Methods 0.000 claims description 7
- 230000008859 change Effects 0.000 abstract description 34
- 239000008400 supply water Substances 0.000 abstract description 3
- 238000012986 modification Methods 0.000 abstract description 2
- 230000004048 modification Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 18
- 230000007246 mechanism Effects 0.000 description 11
- 238000005520 cutting process Methods 0.000 description 10
- 230000008569 process Effects 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- 238000000227 grinding Methods 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 230000009471 action Effects 0.000 description 4
- 239000006061 abrasive grain Substances 0.000 description 2
- 238000004378 air conditioning Methods 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/14—Methods or arrangements for maintaining a constant temperature in parts of machine tools
- B23Q11/141—Methods or arrangements for maintaining a constant temperature in parts of machine tools using a closed fluid circuit for cooling or heating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
- B28D7/02—Accessories specially adapted for use with machines or devices of the preceding groups for removing or laying dust, e.g. by spraying liquids; for cooling work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/14—Methods or arrangements for maintaining a constant temperature in parts of machine tools
- B23Q11/146—Methods or arrangements for maintaining a constant temperature in parts of machine tools by controlling the temperature of a cutting liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
- B24B55/03—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant designed as a complete equipment for feeding or clarifying coolant
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Abstract
Description
1a 筐体
1b 加工室
3 チャックテーブル
3a 保持面
5 被加工物
7 加工ユニット
9 スピンドル
11 スピンドルハウジング(モータ)
13 加工工具
15 排水経路
15a 水受け
15b 排水管
17 環境
2a,2b,2c 定温水供給装置
4a,4b 温度調節ユニット
6 水源
8 給水路
10 送水路
10a 循環水送水管
10b 循環水受水管
12 噴出口
14 加工水
16 設定温度指示ユニット
18 設定温度指示部
20 設定温度登録部
22 設定温度修正部
24a,24b 利用後温度測定ユニット
26 環境温度測定ユニット
Claims (6)
- 加工工具と、該加工工具が装着されたスピンドルと、該スピンドルを回転させるモータと、を有する加工ユニットを備える加工装置に接続され、
水の温度を設定温度に調節できる温度調節ユニットを有し、該温度調節ユニットで温度が調節された水を該加工装置に供給する定温水供給装置であって、
環境の温度を測定する環境温度測定ユニットと、
該加工装置に供給され該加工装置で利用された後の該水の温度を利用後温度として測定する利用後温度測定ユニットと、
該温度調節ユニットに該設定温度を指示する設定温度指示ユニットと、を備え、
該設定温度指示ユニットは、
該設定温度が登録される設定温度登録部と、
該設定温度登録部に登録された該設定温度を修正する設定温度修正部と、を有し、
該設定温度修正部は、該利用後温度測定ユニットにより測定された該水の該利用後温度と、該環境温度測定ユニットにより測定された該環境の温度と、に基づいて該設定温度登録部に登録された該設定温度を修正することを特徴とする定温水供給装置。 - 該設定温度修正部は、該設定温度と、該利用後温度と、の間の基準温度が該環境の温度に近づくように該設定温度登録部に登録された該設定温度を修正することを特徴とする請求項1に記載の定温水供給装置。
- 該基準温度は、該設定温度と、該利用後温度と、の平均値であることを特徴とする請求項2に記載の定温水供給装置。
- 該加工装置に供給された該水は、該温度調節ユニットと、該加工ユニットと、を循環し、該スピンドルを冷却する冷却水として機能することを特徴とする請求項1乃至請求項3のいずれかに記載の定温水供給装置。
- 該加工装置に供給された該水は、該加工工具に供給され加工水として該加工装置で利用され、
該利用後温度測定ユニットは、該水の排水経路に設置され、該排水経路を通じて排水される該水の温度を該利用後温度として測定することを特徴とする請求項1乃至請求項3のいずれかに記載の定温水供給装置。 - 該環境の温度は、20℃以上25℃以下であることを特徴とする請求項1乃至請求項5のいずれかに記載の定温水供給装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019153591A JP7427326B2 (ja) | 2019-08-26 | 2019-08-26 | 定温水供給装置 |
KR1020200091106A KR20210024965A (ko) | 2019-08-26 | 2020-07-22 | 정온수 공급 장치 |
CN202010847236.4A CN112428467A (zh) | 2019-08-26 | 2020-08-21 | 恒温水提供装置 |
TW109128869A TW202108947A (zh) | 2019-08-26 | 2020-08-25 | 恆溫水供給裝置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019153591A JP7427326B2 (ja) | 2019-08-26 | 2019-08-26 | 定温水供給装置 |
Publications (2)
Publication Number | Publication Date |
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JP2021030374A true JP2021030374A (ja) | 2021-03-01 |
JP7427326B2 JP7427326B2 (ja) | 2024-02-05 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2019153591A Active JP7427326B2 (ja) | 2019-08-26 | 2019-08-26 | 定温水供給装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP7427326B2 (ja) |
KR (1) | KR20210024965A (ja) |
CN (1) | CN112428467A (ja) |
TW (1) | TW202108947A (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113385982A (zh) * | 2021-06-29 | 2021-09-14 | 徐州市固塑建筑材料有限公司 | 一种塑钢门窗加工生产用切削设备 |
CN115542968B (zh) * | 2022-09-29 | 2023-10-20 | 苏州纳芯微电子股份有限公司 | 控温装置的控制方法、控制装置、控温装置及存储介质 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55112748A (en) * | 1979-02-13 | 1980-08-30 | Toyoda Mach Works Ltd | Work device with temperature control function |
US5197537A (en) * | 1988-06-20 | 1993-03-30 | Kanto Seiki Co., Ltd. | Apparatus for controlling temperature of machine tool |
JPH05169308A (ja) * | 1991-12-18 | 1993-07-09 | Mitsubishi Materials Corp | ガンドリルおよびエンドミル |
JP2001062670A (ja) * | 1999-08-24 | 2001-03-13 | Toshiba Mach Co Ltd | ビルトイン型スピンドルユニット |
JP2004142020A (ja) * | 2002-10-24 | 2004-05-20 | Mitsubishi Heavy Ind Ltd | 工作機械及び工作機械の熱変位抑制方法 |
US20050136821A1 (en) * | 2003-11-19 | 2005-06-23 | Ex-Cell-O Gmbh | Method of controlling the temperature of the work area of a processing machine and machine tool |
JP2015020239A (ja) * | 2013-07-18 | 2015-02-02 | 東芝機械株式会社 | 立型加工機 |
JP2017156017A (ja) * | 2016-03-02 | 2017-09-07 | 株式会社ディスコ | 定温水供給装置 |
WO2019087882A1 (ja) * | 2017-10-30 | 2019-05-09 | 伸和コントロールズ株式会社 | 液体温調装置及びそれを用いた温調方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002039658A (ja) | 2000-07-28 | 2002-02-06 | Toshiba Mach Co Ltd | 流体による被冷却体の温度制御方法および装置 |
JP2007127343A (ja) | 2005-11-04 | 2007-05-24 | Disco Abrasive Syst Ltd | 定温水供給システム |
JP5829560B2 (ja) | 2012-03-21 | 2015-12-09 | 三菱重工業株式会社 | 冷却装置、加工装置、および、冷却油流量決定方法 |
JP2017024108A (ja) | 2015-07-21 | 2017-02-02 | ファナック株式会社 | 工作機械の熱変位補正装置 |
JP2017215063A (ja) | 2016-05-30 | 2017-12-07 | 株式会社ディスコ | 定温水供給システム |
JP6985174B2 (ja) | 2018-02-14 | 2021-12-22 | オークマ株式会社 | 工作機械の精度診断装置 |
-
2019
- 2019-08-26 JP JP2019153591A patent/JP7427326B2/ja active Active
-
2020
- 2020-07-22 KR KR1020200091106A patent/KR20210024965A/ko unknown
- 2020-08-21 CN CN202010847236.4A patent/CN112428467A/zh active Pending
- 2020-08-25 TW TW109128869A patent/TW202108947A/zh unknown
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55112748A (en) * | 1979-02-13 | 1980-08-30 | Toyoda Mach Works Ltd | Work device with temperature control function |
US5197537A (en) * | 1988-06-20 | 1993-03-30 | Kanto Seiki Co., Ltd. | Apparatus for controlling temperature of machine tool |
JPH05169308A (ja) * | 1991-12-18 | 1993-07-09 | Mitsubishi Materials Corp | ガンドリルおよびエンドミル |
JP2001062670A (ja) * | 1999-08-24 | 2001-03-13 | Toshiba Mach Co Ltd | ビルトイン型スピンドルユニット |
JP2004142020A (ja) * | 2002-10-24 | 2004-05-20 | Mitsubishi Heavy Ind Ltd | 工作機械及び工作機械の熱変位抑制方法 |
US20050136821A1 (en) * | 2003-11-19 | 2005-06-23 | Ex-Cell-O Gmbh | Method of controlling the temperature of the work area of a processing machine and machine tool |
JP2015020239A (ja) * | 2013-07-18 | 2015-02-02 | 東芝機械株式会社 | 立型加工機 |
JP2017156017A (ja) * | 2016-03-02 | 2017-09-07 | 株式会社ディスコ | 定温水供給装置 |
WO2019087882A1 (ja) * | 2017-10-30 | 2019-05-09 | 伸和コントロールズ株式会社 | 液体温調装置及びそれを用いた温調方法 |
Also Published As
Publication number | Publication date |
---|---|
TW202108947A (zh) | 2021-03-01 |
CN112428467A (zh) | 2021-03-02 |
JP7427326B2 (ja) | 2024-02-05 |
KR20210024965A (ko) | 2021-03-08 |
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