JP2021018392A - 回折素子および分光装置、ならびに回折素子の製造方法 - Google Patents

回折素子および分光装置、ならびに回折素子の製造方法 Download PDF

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Publication number
JP2021018392A
JP2021018392A JP2019135679A JP2019135679A JP2021018392A JP 2021018392 A JP2021018392 A JP 2021018392A JP 2019135679 A JP2019135679 A JP 2019135679A JP 2019135679 A JP2019135679 A JP 2019135679A JP 2021018392 A JP2021018392 A JP 2021018392A
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JP
Japan
Prior art keywords
znse
diffraction grating
diffraction
zns
diffraction element
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Pending
Application number
JP2019135679A
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English (en)
Japanese (ja)
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JP2021018392A5 (enExample
Inventor
隆 助川
Takashi Sukegawa
隆 助川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
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Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2019135679A priority Critical patent/JP2021018392A/ja
Priority to EP20184701.9A priority patent/EP3770655A1/en
Priority to US16/929,543 priority patent/US11520090B2/en
Priority to CN202010718667.0A priority patent/CN112285815A/zh
Publication of JP2021018392A publication Critical patent/JP2021018392A/ja
Publication of JP2021018392A5 publication Critical patent/JP2021018392A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1876—Diffractive Fresnel lenses; Zone plates; Kinoforms
    • G02B5/188—Plurality of such optical elements formed in or on a supporting substrate
    • G02B5/1885—Arranged as a periodic array
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/1086—Beam splitting or combining systems operating by diffraction only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B2005/1804—Transmission gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Spectrometry And Color Measurement (AREA)
JP2019135679A 2019-07-23 2019-07-23 回折素子および分光装置、ならびに回折素子の製造方法 Pending JP2021018392A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2019135679A JP2021018392A (ja) 2019-07-23 2019-07-23 回折素子および分光装置、ならびに回折素子の製造方法
EP20184701.9A EP3770655A1 (en) 2019-07-23 2020-07-08 Diffraction device, spectroscopic apparatus, and manufacturing method of diffraction device
US16/929,543 US11520090B2 (en) 2019-07-23 2020-07-15 Diffraction device, spectroscopic apparatus, and manufacturing method of diffraction device
CN202010718667.0A CN112285815A (zh) 2019-07-23 2020-07-23 衍射器件、分光装置和衍射器件的制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019135679A JP2021018392A (ja) 2019-07-23 2019-07-23 回折素子および分光装置、ならびに回折素子の製造方法

Publications (2)

Publication Number Publication Date
JP2021018392A true JP2021018392A (ja) 2021-02-15
JP2021018392A5 JP2021018392A5 (enExample) 2022-07-11

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ID=71527657

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019135679A Pending JP2021018392A (ja) 2019-07-23 2019-07-23 回折素子および分光装置、ならびに回折素子の製造方法

Country Status (4)

Country Link
US (1) US11520090B2 (enExample)
EP (1) EP3770655A1 (enExample)
JP (1) JP2021018392A (enExample)
CN (1) CN112285815A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023058474A1 (ja) * 2021-10-05 2023-04-13 日本電気硝子株式会社 イマージョン回折素子及びその製造方法
JP2023055029A (ja) * 2021-10-05 2023-04-17 日本電気硝子株式会社 イマージョン回折素子及びその製造方法
JP2023055030A (ja) * 2021-10-05 2023-04-17 日本電気硝子株式会社 イマージョン回折素子

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119395799B (zh) * 2025-01-06 2025-05-13 中国科学院长春光学精密机械与物理研究所 一种内反射式浸没光栅及其制作方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5243583A (en) * 1989-04-06 1993-09-07 Ricoh Company, Ltd. Optical pickup device with dual grating element
JPH0611616A (ja) * 1992-04-28 1994-01-21 Hitachi Ltd 光偏光素子
JP2003075622A (ja) * 2001-09-05 2003-03-12 Toshiba Corp 回折格子、回折格子の加工方法及び光学要素
JP2006220705A (ja) * 2005-02-08 2006-08-24 Sumitomo Electric Ind Ltd 赤外線ハイブリッドレンズ及び赤外線ハイブリッドレンズの製造方法
JP2011081132A (ja) * 2009-10-06 2011-04-21 Olympus Corp 分散素子、分光装置、及び波長選択スイッチ
JP2014002294A (ja) * 2012-06-20 2014-01-09 Canon Inc 回折格子の製造方法
JP2015060194A (ja) * 2013-09-20 2015-03-30 株式会社タムロン 赤外線光学系
JP2016173614A (ja) * 2016-07-08 2016-09-29 キヤノン株式会社 反射型回折素子

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003006891A (ja) 2001-06-21 2003-01-10 Sankyo Seiki Mfg Co Ltd 光ピックアップ装置
US6965475B2 (en) * 2003-03-28 2005-11-15 Sumitomo Electric Industries, Ltd. Optical component, optical device and optical communications system
CN101222009A (zh) 2007-01-12 2008-07-16 清华大学 发光二极管
KR20090105747A (ko) 2008-04-03 2009-10-07 삼성전자주식회사 광주사장치 및 이를 채용한 화상형성장치
WO2015168182A1 (en) * 2014-04-28 2015-11-05 Finisar Corporation Reflective diffraction gratings employing efficiency enhancement or etch barrier layers

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5243583A (en) * 1989-04-06 1993-09-07 Ricoh Company, Ltd. Optical pickup device with dual grating element
JPH0611616A (ja) * 1992-04-28 1994-01-21 Hitachi Ltd 光偏光素子
JP2003075622A (ja) * 2001-09-05 2003-03-12 Toshiba Corp 回折格子、回折格子の加工方法及び光学要素
JP2006220705A (ja) * 2005-02-08 2006-08-24 Sumitomo Electric Ind Ltd 赤外線ハイブリッドレンズ及び赤外線ハイブリッドレンズの製造方法
JP2011081132A (ja) * 2009-10-06 2011-04-21 Olympus Corp 分散素子、分光装置、及び波長選択スイッチ
JP2014002294A (ja) * 2012-06-20 2014-01-09 Canon Inc 回折格子の製造方法
JP2015060194A (ja) * 2013-09-20 2015-03-30 株式会社タムロン 赤外線光学系
JP2016173614A (ja) * 2016-07-08 2016-09-29 キヤノン株式会社 反射型回折素子

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023058474A1 (ja) * 2021-10-05 2023-04-13 日本電気硝子株式会社 イマージョン回折素子及びその製造方法
JP2023055029A (ja) * 2021-10-05 2023-04-17 日本電気硝子株式会社 イマージョン回折素子及びその製造方法
JP2023055030A (ja) * 2021-10-05 2023-04-17 日本電気硝子株式会社 イマージョン回折素子
JP7647481B2 (ja) 2021-10-05 2025-03-18 日本電気硝子株式会社 イマージョン回折素子

Also Published As

Publication number Publication date
US20210026052A1 (en) 2021-01-28
CN112285815A (zh) 2021-01-29
EP3770655A1 (en) 2021-01-27
US11520090B2 (en) 2022-12-06

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