JP2021018392A5 - - Google Patents
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- Publication number
- JP2021018392A5 JP2021018392A5 JP2019135679A JP2019135679A JP2021018392A5 JP 2021018392 A5 JP2021018392 A5 JP 2021018392A5 JP 2019135679 A JP2019135679 A JP 2019135679A JP 2019135679 A JP2019135679 A JP 2019135679A JP 2021018392 A5 JP2021018392 A5 JP 2021018392A5
- Authority
- JP
- Japan
- Prior art keywords
- diffraction grating
- znse
- diffraction
- element according
- zns
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 claims 11
- 238000004519 manufacturing process Methods 0.000 claims 5
- 238000000151 deposition Methods 0.000 claims 3
- 238000005304 joining Methods 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 2
- 230000000737 periodic effect Effects 0.000 claims 2
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 229910003460 diamond Inorganic materials 0.000 claims 1
- 239000010432 diamond Substances 0.000 claims 1
- 238000007654 immersion Methods 0.000 claims 1
- 238000003754 machining Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019135679A JP2021018392A (ja) | 2019-07-23 | 2019-07-23 | 回折素子および分光装置、ならびに回折素子の製造方法 |
| EP20184701.9A EP3770655A1 (en) | 2019-07-23 | 2020-07-08 | Diffraction device, spectroscopic apparatus, and manufacturing method of diffraction device |
| US16/929,543 US11520090B2 (en) | 2019-07-23 | 2020-07-15 | Diffraction device, spectroscopic apparatus, and manufacturing method of diffraction device |
| CN202010718667.0A CN112285815A (zh) | 2019-07-23 | 2020-07-23 | 衍射器件、分光装置和衍射器件的制造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019135679A JP2021018392A (ja) | 2019-07-23 | 2019-07-23 | 回折素子および分光装置、ならびに回折素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2021018392A JP2021018392A (ja) | 2021-02-15 |
| JP2021018392A5 true JP2021018392A5 (enExample) | 2022-07-11 |
Family
ID=71527657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019135679A Pending JP2021018392A (ja) | 2019-07-23 | 2019-07-23 | 回折素子および分光装置、ならびに回折素子の製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US11520090B2 (enExample) |
| EP (1) | EP3770655A1 (enExample) |
| JP (1) | JP2021018392A (enExample) |
| CN (1) | CN112285815A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023055029A (ja) * | 2021-10-05 | 2023-04-17 | 日本電気硝子株式会社 | イマージョン回折素子及びその製造方法 |
| DE112022004753T5 (de) * | 2021-10-05 | 2024-08-14 | Nippon Electric Glass Co., Ltd. | Immersions-beugungselement und verfahren zu seiner herstellung |
| JP7647481B2 (ja) * | 2021-10-05 | 2025-03-18 | 日本電気硝子株式会社 | イマージョン回折素子 |
| CN119395799B (zh) * | 2025-01-06 | 2025-05-13 | 中国科学院长春光学精密机械与物理研究所 | 一种内反射式浸没光栅及其制作方法 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5243583A (en) * | 1989-04-06 | 1993-09-07 | Ricoh Company, Ltd. | Optical pickup device with dual grating element |
| JPH0611616A (ja) * | 1992-04-28 | 1994-01-21 | Hitachi Ltd | 光偏光素子 |
| JP2003006891A (ja) | 2001-06-21 | 2003-01-10 | Sankyo Seiki Mfg Co Ltd | 光ピックアップ装置 |
| JP2003075622A (ja) * | 2001-09-05 | 2003-03-12 | Toshiba Corp | 回折格子、回折格子の加工方法及び光学要素 |
| US6965475B2 (en) * | 2003-03-28 | 2005-11-15 | Sumitomo Electric Industries, Ltd. | Optical component, optical device and optical communications system |
| JP2006220705A (ja) * | 2005-02-08 | 2006-08-24 | Sumitomo Electric Ind Ltd | 赤外線ハイブリッドレンズ及び赤外線ハイブリッドレンズの製造方法 |
| CN101222009A (zh) | 2007-01-12 | 2008-07-16 | 清华大学 | 发光二极管 |
| KR20090105747A (ko) | 2008-04-03 | 2009-10-07 | 삼성전자주식회사 | 광주사장치 및 이를 채용한 화상형성장치 |
| JP5599175B2 (ja) * | 2009-10-06 | 2014-10-01 | ジェイディーエス ユニフェイズ コーポレーション | 分散素子、分光装置、及び波長選択スイッチ |
| JP6049319B2 (ja) * | 2012-06-20 | 2016-12-21 | キヤノン株式会社 | 回折格子および回折格子の製造方法 |
| JP6254804B2 (ja) * | 2013-09-20 | 2017-12-27 | 株式会社タムロン | 赤外線光学系 |
| WO2015168182A1 (en) * | 2014-04-28 | 2015-11-05 | Finisar Corporation | Reflective diffraction gratings employing efficiency enhancement or etch barrier layers |
| JP6253724B2 (ja) * | 2016-07-08 | 2017-12-27 | キヤノン株式会社 | 反射型回折素子 |
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2019
- 2019-07-23 JP JP2019135679A patent/JP2021018392A/ja active Pending
-
2020
- 2020-07-08 EP EP20184701.9A patent/EP3770655A1/en not_active Withdrawn
- 2020-07-15 US US16/929,543 patent/US11520090B2/en active Active
- 2020-07-23 CN CN202010718667.0A patent/CN112285815A/zh active Pending