JP2022132297A5 - - Google Patents
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- Publication number
- JP2022132297A5 JP2022132297A5 JP2022101492A JP2022101492A JP2022132297A5 JP 2022132297 A5 JP2022132297 A5 JP 2022132297A5 JP 2022101492 A JP2022101492 A JP 2022101492A JP 2022101492 A JP2022101492 A JP 2022101492A JP 2022132297 A5 JP2022132297 A5 JP 2022132297A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- concave
- diffraction grating
- grating
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000000758 substrate Substances 0.000 claims description 47
- 239000012790 adhesive layer Substances 0.000 claims description 8
- 238000005530 etching Methods 0.000 claims description 4
- 238000003754 machining Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 238000000206 photolithography Methods 0.000 claims description 4
- 239000011347 resin Substances 0.000 claims description 4
- 229920005989 resin Polymers 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 3
- 238000009740 moulding (composite fabrication) Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022101492A JP7301201B2 (ja) | 2018-08-29 | 2022-06-24 | 凹面回折格子の製造方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018160640A JP7096738B2 (ja) | 2018-08-29 | 2018-08-29 | 凹面回折格子及びその製造方法 |
| JP2022101492A JP7301201B2 (ja) | 2018-08-29 | 2022-06-24 | 凹面回折格子の製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018160640A Division JP7096738B2 (ja) | 2018-08-29 | 2018-08-29 | 凹面回折格子及びその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2022132297A JP2022132297A (ja) | 2022-09-08 |
| JP2022132297A5 true JP2022132297A5 (enExample) | 2023-03-06 |
| JP7301201B2 JP7301201B2 (ja) | 2023-06-30 |
Family
ID=86938605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022101492A Active JP7301201B2 (ja) | 2018-08-29 | 2022-06-24 | 凹面回折格子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP7301201B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2025142024A1 (ja) * | 2023-12-27 | 2025-07-03 | コニカミノルタ株式会社 | 回折格子及び分光測定器 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4012843A (en) * | 1973-04-25 | 1977-03-22 | Hitachi, Ltd. | Concave diffraction grating and a manufacturing method thereof |
| JPS6184604A (ja) * | 1984-10-03 | 1986-04-30 | Hitachi Ltd | 不等間隔格子溝回折格子の製造方法 |
| US4798446A (en) * | 1987-09-14 | 1989-01-17 | The United States Of America As Represented By The United States Department Of Energy | Aplanatic and quasi-aplanatic diffraction gratings |
| JPH0915410A (ja) * | 1995-06-29 | 1997-01-17 | Olympus Optical Co Ltd | 光学素子の製造方法および光学素子用金型の製造方法 |
| JP4221965B2 (ja) * | 2002-07-22 | 2009-02-12 | 日立電線株式会社 | 回折格子、波長合分波器及びこれらを用いた波長多重信号光伝送モジュール |
| JP2008051822A (ja) * | 2007-10-09 | 2008-03-06 | Toshiba Corp | 化学分析装置 |
| JP5637702B2 (ja) * | 2010-03-09 | 2014-12-10 | キヤノン株式会社 | 露光装置およびデバイス製造方法 |
| CN106574998A (zh) * | 2014-10-16 | 2017-04-19 | 株式会社日立高新技术 | 曲面衍射光栅的模型的制造方法、曲面衍射光栅的制造方法、曲面衍射光栅以及光学装置 |
-
2022
- 2022-06-24 JP JP2022101492A patent/JP7301201B2/ja active Active
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