JP7301201B2 - 凹面回折格子の製造方法 - Google Patents

凹面回折格子の製造方法 Download PDF

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JP7301201B2
JP7301201B2 JP2022101492A JP2022101492A JP7301201B2 JP 7301201 B2 JP7301201 B2 JP 7301201B2 JP 2022101492 A JP2022101492 A JP 2022101492A JP 2022101492 A JP2022101492 A JP 2022101492A JP 7301201 B2 JP7301201 B2 JP 7301201B2
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diffraction grating
substrate
concave
grating
grooves
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JP2022132297A5 (enExample
JP2022132297A (ja
Inventor
宇紀 青野
佳定 江畠
健太 八重樫
繁 松井
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Hitachi High Tech Corp
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Hitachi High Tech Corp
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Priority claimed from JP2018160640A external-priority patent/JP7096738B2/ja
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  • Spectrometry And Color Measurement (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
JP2022101492A 2018-08-29 2022-06-24 凹面回折格子の製造方法 Active JP7301201B2 (ja)

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JP2022101492A JP7301201B2 (ja) 2018-08-29 2022-06-24 凹面回折格子の製造方法

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JP2018160640A JP7096738B2 (ja) 2018-08-29 2018-08-29 凹面回折格子及びその製造方法
JP2022101492A JP7301201B2 (ja) 2018-08-29 2022-06-24 凹面回折格子の製造方法

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JP2022132297A5 JP2022132297A5 (enExample) 2023-03-06
JP7301201B2 true JP7301201B2 (ja) 2023-06-30

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Families Citing this family (1)

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Publication number Priority date Publication date Assignee Title
WO2025142024A1 (ja) * 2023-12-27 2025-07-03 コニカミノルタ株式会社 回折格子及び分光測定器

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4012843A (en) 1973-04-25 1977-03-22 Hitachi, Ltd. Concave diffraction grating and a manufacturing method thereof
US4798446A (en) 1987-09-14 1989-01-17 The United States Of America As Represented By The United States Department Of Energy Aplanatic and quasi-aplanatic diffraction gratings
JP2011187733A (ja) 2010-03-09 2011-09-22 Canon Inc 光学装置およびデバイス製造方法
WO2016059928A1 (ja) 2014-10-16 2016-04-21 株式会社 日立ハイテクノロジーズ 曲面回折格子の型の製造方法、曲面回折格子の製造方法、曲面回折格子、および光学装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6184604A (ja) * 1984-10-03 1986-04-30 Hitachi Ltd 不等間隔格子溝回折格子の製造方法
JPH0915410A (ja) * 1995-06-29 1997-01-17 Olympus Optical Co Ltd 光学素子の製造方法および光学素子用金型の製造方法
JP4221965B2 (ja) * 2002-07-22 2009-02-12 日立電線株式会社 回折格子、波長合分波器及びこれらを用いた波長多重信号光伝送モジュール
JP2008051822A (ja) * 2007-10-09 2008-03-06 Toshiba Corp 化学分析装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4012843A (en) 1973-04-25 1977-03-22 Hitachi, Ltd. Concave diffraction grating and a manufacturing method thereof
US4798446A (en) 1987-09-14 1989-01-17 The United States Of America As Represented By The United States Department Of Energy Aplanatic and quasi-aplanatic diffraction gratings
JP2011187733A (ja) 2010-03-09 2011-09-22 Canon Inc 光学装置およびデバイス製造方法
WO2016059928A1 (ja) 2014-10-16 2016-04-21 株式会社 日立ハイテクノロジーズ 曲面回折格子の型の製造方法、曲面回折格子の製造方法、曲面回折格子、および光学装置

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