JP2022132297A5 - - Google Patents
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- JP2022132297A5 JP2022132297A5 JP2022101492A JP2022101492A JP2022132297A5 JP 2022132297 A5 JP2022132297 A5 JP 2022132297A5 JP 2022101492 A JP2022101492 A JP 2022101492A JP 2022101492 A JP2022101492 A JP 2022101492A JP 2022132297 A5 JP2022132297 A5 JP 2022132297A5
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また、本発明に係る凹面回折格子の製造方法は、（１）フォトリソグラフィおよびエッチング、または機械加工により、平面状基板上に鋸歯形状を形成し、不等間隔の格子溝であって、格子溝の間隔がブレーズ方向に等差的に拡大させた形状を有すると共に一定のブレーズ角を有するよう形成して、平面状の回折格子基板を作製する工程と、（２）前記格子溝が形成された面に凹面が対向するよう凹面基板を設置すると共に、前記格子溝が形成された面とは反対側の面に凸面が対向するよう接着層を介して凸面基板を設置する工程と、（３）前記平面状の回折格子基板の格子溝が形成された面を前記凹面基板に倣わせると共に、前記接着層により前記平面状の回折格子基板を前記凸面基板に接着する接着工程と、（４） 前記凹面基板が取り外された後、前記平面状の回折格子基板のうち前記凸面基板の凸面よりも外側へと延在する外周部を除去し、凹面回折格子の型を形成する工程と、（５）格子溝の間隔がブレーズ方向に等差的に拡大させた形状を有すると共に凹面回折格子の反射面は球面の一部を成す前記凹面回折格子の型を、金属または樹脂の表面に転写する工程と、を備えることを特徴とする。 Further, the method for manufacturing a concave diffraction grating according to the present invention includes: (1) forming a sawtooth shape on a planar substrate by photolithography and etching or machining, and forming grating grooves at uneven intervals; (2) a step of fabricating a planar diffraction grating substrate by forming a planar diffraction grating substrate having a shape in which the intervals of are expanded equidistantly in the blaze direction and having a constant blaze angle; (3) installing a concave substrate so that the concave surface faces the surface, and placing the convex substrate through an adhesive layer so that the convex surface faces the surface opposite to the surface on which the grating grooves are formed; (4) a bonding step of making the surface of the planar diffraction grating substrate on which the grating grooves are formed conform to the concave substrate, and bonding the planar diffraction grating substrate to the convex substrate by the adhesive layer; (5) removing the outer peripheral portion of the planar diffraction grating substrate extending outside the convex surface of the convex substrate after the concave substrate is removed, and forming a concave diffraction grating mold; ) A step of transferring the mold of the concave diffraction grating having a shape in which the intervals of the grating grooves are expanded equidistantly in the blaze direction and the reflecting surface of the concave diffraction grating forming a part of a spherical surface, onto the surface of metal or resin. and.
また、本発明に係る凹面回折格子の製造方法は、（１）フォトリソグラフィおよびエッチング、または機械加工により、平面状基板上に鋸歯形状を形成し、不等間隔の格子溝であって、相互に隣接する格子溝の間隔が、ブレーズ方向に沿って狭間隔から広間隔へと段階的に徐々に変化する形状を有するよう形成して、平面状の回折格子基板を作製する工程と、（２）前記格子溝が形成された面に凹面が対向するよう凹面基板を設置すると共に、前記格子溝が形成された面とは反対側の面に凸面が対向するよう接着層を介して凸面基板を設置する工程と、（３）前記平面状の回折格子基板の格子溝が形成された面を前記凹面基板に倣わせると共に、前記接着層により前記平面状の回折格子基板を前記凸面基板に接着する接着工程と、（４）前記凹面基板が取り外された後、前記平面状の回折格子基板のうち前記凸面基板の凸面よりも外側へと延在する外周部を除去し、凹面回折格子の型を形成する工程と、（５）相互に隣接する格子溝の間隔が、ブレーズ方向に沿って狭間隔から広間隔へと段階的に徐々に変化する形状を有すると共に凹面回折格子の反射面は球面の一部を成す前記凹面回折格子の型を、金属または樹脂の表面に転写する工程と、を備えることを特徴とする。 In addition, the method for manufacturing a concave diffraction grating according to the present invention includes: (1) forming a sawtooth shape on a planar substrate by photolithography and etching or machining, and forming unevenly spaced grating grooves mutually (2) fabricating a planar diffraction grating substrate by forming an interval between adjacent grating grooves so as to gradually change from a narrow interval to a wide interval along the blaze direction; A concave substrate is installed so that the concave surface faces the surface on which the grating grooves are formed, and a convex substrate is installed via an adhesive layer so that the convex surface faces the surface opposite to the surface on which the grating grooves are formed. and (3) making the surface of the planar diffraction grating substrate on which the grating grooves are formed conform to the concave substrate, and bonding the planar diffraction grating substrate to the convex substrate by the adhesive layer. (4) after the concave substrate is removed, an outer peripheral portion of the planar diffraction grating substrate extending outside the convex surface of the convex substrate is removed to form a concave diffraction grating mold; (5) the interval between grating grooves adjacent to each other has a shape in which the interval between adjacent grating grooves gradually changes in stages from narrow to wide along the blaze direction, and the reflecting surface of the concave diffraction grating is spherical. and transferring the mold of the concave diffraction grating forming a part to the surface of metal or resin.
Claims (5)
凹面状の基板上に鋸歯形状の格子溝を有し、前記鋸歯形状の格子溝の間隔が不等であって、前記格子溝の間隔がブレーズ方向に等差的に縮小させた形状を有すると共に凹面回折格子の反射面は球面の一部を成していることを特徴とする凹面回折格子。 A concave diffraction grating that disperses and collects light,
It has sawtooth-shaped grating grooves on a concave substrate, the intervals between the sawtooth-shaped grating grooves are unequal, and the intervals between the grating grooves are equally reduced in the blaze direction. A concave diffraction grating characterized in that the reflection surface of the concave diffraction grating forms a part of a spherical surface.
凹面状の基板上に鋸歯形状の格子溝を有し、前記鋸歯形状の格子溝の間隔が不等であって、相互に隣接する格子溝の間隔がブレーズ方向に沿って広間隔から狭間隔へと段階的に徐々に変化する形状をすると共に凹面回折格子の反射面は球面の一部を成していることを特徴とする凹面回折格子。 A concave diffraction grating that disperses and collects light,
Saw-tooth grating grooves are provided on a concave substrate, the intervals between the saw-tooth grating grooves are unequal, and the intervals between adjacent grating grooves change from wide to narrow along the blaze direction. and a concave diffraction grating characterized in that the reflecting surface of the concave diffraction grating forms a part of a spherical surface.
光を分光、集光する凹面が、球面であることを特徴とする凹面回折格子。 In the concave diffraction grating according to claim 1 or claim 2,
A concave diffraction grating characterized in that the concave surface that disperses and converges light is a spherical surface.
前記格子溝が形成された面に凹面が対向するよう凹面基板を設置すると共に、前記格子溝が形成された面とは反対側の面に凸面が対向するよう接着層を介して凸面基板を設置する工程と、
前記平面状の回折格子基板の格子溝が形成された面を前記凹面基板に倣わせると共に、前記接着層により前記平面状の回折格子基板を前記凸面基板に接着する接着工程と、
前記凹面基板が取り外された後、前記平面状の回折格子基板のうち前記凸面基板の凸面よりも外側へと延在する外周部を除去し、凹面回折格子の型を形成する工程と、
格子溝の間隔がブレーズ方向に等差的に拡大させた形状を有すると共に凹面回折格子の反射面は球面の一部を成す前記凹面回折格子の型を、金属または樹脂の表面に転写する工程と、を備えることを特徴とする凹面回折格子の製造方法。 By photolithography and etching, or machining, a sawtooth shape is formed on a planar substrate so as to have unevenly spaced grating grooves, the spacing of which is expanded equidistantly in the blaze direction. forming to fabricate a planar diffraction grating substrate;
A concave substrate is installed so that the concave surface faces the surface on which the grating grooves are formed, and a convex substrate is installed via an adhesive layer so that the convex surface faces the surface opposite to the surface on which the grating grooves are formed. and
a bonding step of causing the surface of the planar diffraction grating substrate on which the grating grooves are formed to conform to the concave substrate, and bonding the planar diffraction grating substrate to the convex substrate with the adhesive layer;
After the concave substrate is removed, a step of removing an outer peripheral portion of the planar diffraction grating substrate extending outside the convex surface of the convex substrate to form a concave diffraction grating mold;
a step of transferring the mold of the concave diffraction grating having a shape in which the intervals of the grating grooves are expanded equidistantly in the blaze direction and the reflecting surface of the concave diffraction grating forming a part of a spherical surface, onto a surface of metal or resin; A method for manufacturing a concave diffraction grating, comprising:
前記格子溝が形成された面に凹面が対向するよう凹面基板を設置すると共に、前記格子溝が形成された面とは反対側の面に凸面が対向するよう接着層を介して凸面基板を設置する工程と、
前記平面状の回折格子基板の格子溝が形成された面を前記凹面基板に倣わせると共に、前記接着層により前記平面状の回折格子基板を前記凸面基板に接着する接着工程と、
前記凹面基板が取り外された後、前記平面状の回折格子基板のうち前記凸面基板の凸面よりも外側へと延在する外周部を除去し、凹面回折格子の型を形成する工程と、
相互に隣接する格子溝の間隔が、ブレーズ方向に沿って狭間隔から広間隔へと段階的に徐々に変化する形状を有すると共に凹面回折格子の反射面は球面の一部を成す前記凹面回折格子の型を、金属または樹脂の表面に転写する工程と、を備えることを特徴とする凹面回折格子の製造方法。 By photolithography and etching or machining, a sawtooth shape is formed on a planar substrate, with unevenly spaced grating grooves, the spacing of adjacent grating grooves varying from narrow to wide along the blaze direction. fabricating a planar diffraction grating substrate by forming it to have a shape that gradually changes to the spacing ;
A concave substrate is installed so that the concave surface faces the surface on which the grating grooves are formed, and a convex substrate is installed via an adhesive layer so that the convex surface faces the surface opposite to the surface on which the grating grooves are formed. and
a bonding step of causing the surface of the planar diffraction grating substrate on which the grating grooves are formed to conform to the concave substrate, and bonding the planar diffraction grating substrate to the convex substrate with the adhesive layer;
After the concave substrate is removed, a step of removing an outer peripheral portion of the planar diffraction grating substrate extending outside the convex surface of the convex substrate to form a concave diffraction grating mold;
The concave diffraction grating has a shape in which the intervals between grating grooves adjacent to each other gradually change in stages from narrow intervals to wide intervals along the blaze direction, and the reflecting surface of the concave diffraction grating forms a part of a spherical surface. A method of manufacturing a concave diffraction grating, characterized by comprising the step of transferring the mold of to a surface of metal or resin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| JP2022101492A JP7301201B2 (en) | 2018-08-29 | 2022-06-24 | Manufacturing method of concave diffraction grating |
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| JP2018160640A JP7096738B2 (en) | 2018-08-29 | 2018-08-29 | Concave diffraction grating and its manufacturing method |
| JP2022101492A JP7301201B2 (en) | 2018-08-29 | 2022-06-24 | Manufacturing method of concave diffraction grating |
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| JP2018160640A Division JP7096738B2 (en) | 2018-08-29 | 2018-08-29 | Concave diffraction grating and its manufacturing method |
Publications (3)
| Publication Number | Publication Date |
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| JP2022132297A JP2022132297A (en) | 2022-09-08 |
| JP2022132297A5 true JP2022132297A5 (en) | 2023-03-06 |
| JP7301201B2 JP7301201B2 (en) | 2023-06-30 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4012843A (en) | 1973-04-25 | 1977-03-22 | Hitachi, Ltd. | Concave diffraction grating and a manufacturing method thereof |
| JPS6184604A (en) * | 1984-10-03 | 1986-04-30 | Hitachi Ltd | Producing of diffraction grating of unequally spaced grating groove |
| US4798446A (en) | 1987-09-14 | 1989-01-17 | The United States Of America As Represented By The United States Department Of Energy | Aplanatic and quasi-aplanatic diffraction gratings |
| JPH0915410A (en) * | 1995-06-29 | 1997-01-17 | Olympus Optical Co Ltd | Production of optical element and production of metal mold for optical element |
| JP4221965B2 (en) * | 2002-07-22 | 2009-02-12 | 日立電線株式会社 | Diffraction grating, wavelength multiplexer / demultiplexer, and wavelength multiplexed signal optical transmission module using them |
| JP2008051822A (en) * | 2007-10-09 | 2008-03-06 | Toshiba Corp | Chemical analyzer |
| JP5637702B2 (en) | 2010-03-09 | 2014-12-10 | キヤノン株式会社 | Exposure apparatus and device manufacturing method |
| US20150095191A1 (en) | 2013-09-30 | 2015-04-02 | Amazon Technologies, Inc. | Global merchant network |
| JP6510548B2 (en) | 2014-10-16 | 2019-05-08 | 株式会社日立ハイテクノロジーズ | Method of manufacturing mold of curved surface diffraction grating, method of manufacturing curved surface diffraction grating, curved surface diffraction grating, and optical device |
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