CN112285815A - 衍射器件、分光装置和衍射器件的制造方法 - Google Patents

衍射器件、分光装置和衍射器件的制造方法 Download PDF

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Publication number
CN112285815A
CN112285815A CN202010718667.0A CN202010718667A CN112285815A CN 112285815 A CN112285815 A CN 112285815A CN 202010718667 A CN202010718667 A CN 202010718667A CN 112285815 A CN112285815 A CN 112285815A
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CN
China
Prior art keywords
znse
diffraction grating
zns
diffraction
grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202010718667.0A
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English (en)
Chinese (zh)
Inventor
助川隆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
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Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN112285815A publication Critical patent/CN112285815A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1876—Diffractive Fresnel lenses; Zone plates; Kinoforms
    • G02B5/188—Plurality of such optical elements formed in or on a supporting substrate
    • G02B5/1885—Arranged as a periodic array
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/1086—Beam splitting or combining systems operating by diffraction only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B2005/1804—Transmission gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Spectrometry And Color Measurement (AREA)
CN202010718667.0A 2019-07-23 2020-07-23 衍射器件、分光装置和衍射器件的制造方法 Pending CN112285815A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019135679A JP2021018392A (ja) 2019-07-23 2019-07-23 回折素子および分光装置、ならびに回折素子の製造方法
JP2019-135679 2019-07-23

Publications (1)

Publication Number Publication Date
CN112285815A true CN112285815A (zh) 2021-01-29

Family

ID=71527657

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010718667.0A Pending CN112285815A (zh) 2019-07-23 2020-07-23 衍射器件、分光装置和衍射器件的制造方法

Country Status (4)

Country Link
US (1) US11520090B2 (enExample)
EP (1) EP3770655A1 (enExample)
JP (1) JP2021018392A (enExample)
CN (1) CN112285815A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119395799A (zh) * 2025-01-06 2025-02-07 中国科学院长春光学精密机械与物理研究所 一种内反射式浸没光栅及其制作方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023055029A (ja) * 2021-10-05 2023-04-17 日本電気硝子株式会社 イマージョン回折素子及びその製造方法
DE112022004753T5 (de) * 2021-10-05 2024-08-14 Nippon Electric Glass Co., Ltd. Immersions-beugungselement und verfahren zu seiner herstellung
JP7647481B2 (ja) * 2021-10-05 2025-03-18 日本電気硝子株式会社 イマージョン回折素子

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1393862A (zh) * 2001-06-21 2003-01-29 株式会社三协精机制作所 光拾取装置
CN101222009A (zh) * 2007-01-12 2008-07-16 清华大学 发光二极管
CN101551519A (zh) * 2008-04-03 2009-10-07 三星电子株式会社 光学扫描设备和包括该光学扫描设备的成像设备
US20130342909A1 (en) * 2012-06-20 2013-12-26 Canon Kabushiki Kaisha Method of manufacturing a diffraction grating
US20150309220A1 (en) * 2014-04-28 2015-10-29 Finisar Corporation Reflective diffraction gratings employing efficiency enhancement or etch barrier layers

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Publication number Priority date Publication date Assignee Title
US5243583A (en) * 1989-04-06 1993-09-07 Ricoh Company, Ltd. Optical pickup device with dual grating element
JPH0611616A (ja) * 1992-04-28 1994-01-21 Hitachi Ltd 光偏光素子
JP2003075622A (ja) * 2001-09-05 2003-03-12 Toshiba Corp 回折格子、回折格子の加工方法及び光学要素
US6965475B2 (en) * 2003-03-28 2005-11-15 Sumitomo Electric Industries, Ltd. Optical component, optical device and optical communications system
JP2006220705A (ja) * 2005-02-08 2006-08-24 Sumitomo Electric Ind Ltd 赤外線ハイブリッドレンズ及び赤外線ハイブリッドレンズの製造方法
JP5599175B2 (ja) * 2009-10-06 2014-10-01 ジェイディーエス ユニフェイズ コーポレーション 分散素子、分光装置、及び波長選択スイッチ
JP6254804B2 (ja) * 2013-09-20 2017-12-27 株式会社タムロン 赤外線光学系
JP6253724B2 (ja) * 2016-07-08 2017-12-27 キヤノン株式会社 反射型回折素子

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1393862A (zh) * 2001-06-21 2003-01-29 株式会社三协精机制作所 光拾取装置
CN101222009A (zh) * 2007-01-12 2008-07-16 清华大学 发光二极管
CN101551519A (zh) * 2008-04-03 2009-10-07 三星电子株式会社 光学扫描设备和包括该光学扫描设备的成像设备
US20130342909A1 (en) * 2012-06-20 2013-12-26 Canon Kabushiki Kaisha Method of manufacturing a diffraction grating
US20150309220A1 (en) * 2014-04-28 2015-10-29 Finisar Corporation Reflective diffraction gratings employing efficiency enhancement or etch barrier layers

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
DALI LIU: "Optical bistability in ZnS/ZnSe", 《PROCEEDINGS OF SPIE》 *
ROMAN KRUZELECKY: "Hadamard spectrometer for passive LWIR standoff surveillance", 《PROCEEDINGS OF SPIE》 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119395799A (zh) * 2025-01-06 2025-02-07 中国科学院长春光学精密机械与物理研究所 一种内反射式浸没光栅及其制作方法

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US20210026052A1 (en) 2021-01-28
US11520090B2 (en) 2022-12-06
EP3770655A1 (en) 2021-01-27
JP2021018392A (ja) 2021-02-15

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