JP2020522728A5 - - Google Patents
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- Publication number
- JP2020522728A5 JP2020522728A5 JP2019561901A JP2019561901A JP2020522728A5 JP 2020522728 A5 JP2020522728 A5 JP 2020522728A5 JP 2019561901 A JP2019561901 A JP 2019561901A JP 2019561901 A JP2019561901 A JP 2019561901A JP 2020522728 A5 JP2020522728 A5 JP 2020522728A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- flexible
- coated substrate
- mox
- substrate according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ATGM104/2017 | 2017-05-11 | ||
| ATGM104/2017U AT15574U3 (de) | 2017-05-11 | 2017-05-11 | Flexibles Bauteil mit Schichtaufbau mit metallischer Lage |
| PCT/AT2018/000026 WO2018204944A1 (de) | 2017-05-11 | 2018-04-19 | Flexibles bauteil mit schichtaufbau mit metallischer lage |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020522728A JP2020522728A (ja) | 2020-07-30 |
| JP2020522728A5 true JP2020522728A5 (https=) | 2023-02-09 |
| JP7282688B2 JP7282688B2 (ja) | 2023-05-29 |
Family
ID=61597295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019561901A Active JP7282688B2 (ja) | 2017-05-11 | 2018-04-19 | 金属層を有する層状構造を備えたフレキシブル部品 |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JP7282688B2 (https=) |
| KR (1) | KR102557501B1 (https=) |
| CN (1) | CN110651373B (https=) |
| AT (1) | AT15574U3 (https=) |
| TW (1) | TWI793121B (https=) |
| WO (1) | WO2018204944A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102018123944A1 (de) * | 2018-09-27 | 2020-04-02 | Liebherr-Hausgeräte Ochsenhausen GmbH | Vakuumdämmkörper für Kühl- und/oder Gefriergeräte |
| CN112582479A (zh) * | 2020-12-30 | 2021-03-30 | 福建华佳彩有限公司 | 一种顶栅结构的薄膜晶体管及制作方法 |
| TW202318568A (zh) * | 2021-07-30 | 2023-05-01 | 日商尼康股份有限公司 | 金屬配線的製造方法、電晶體的製造方法及金屬配線 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002232142A (ja) * | 2001-01-30 | 2002-08-16 | Kyocera Corp | 多層配線基板およびその製造方法 |
| JP2002324874A (ja) * | 2001-04-25 | 2002-11-08 | Kyocera Corp | 配線基板 |
| JP4530579B2 (ja) * | 2001-05-22 | 2010-08-25 | 京セラ株式会社 | 半導体素子収納用パッケージ |
| JP4496518B2 (ja) * | 2002-08-19 | 2010-07-07 | 日立金属株式会社 | 薄膜配線 |
| US7547412B2 (en) * | 2002-10-28 | 2009-06-16 | A.L.M.T. Corporation | Composite material, method for producing same and member using same |
| KR20060090523A (ko) * | 2005-02-07 | 2006-08-11 | 삼성전자주식회사 | 표시 장치용 배선 및 상기 배선을 포함하는 박막트랜지스터 표시판 |
| JP2007069561A (ja) * | 2005-09-09 | 2007-03-22 | Sumitomo Metal Mining Co Ltd | 2層フレキシブル基板とその製造方法 |
| EP2188406B1 (en) * | 2007-09-12 | 2018-03-07 | Flisom AG | Method for manufacturing a compound film |
| KR101542840B1 (ko) * | 2008-09-09 | 2015-08-07 | 삼성디스플레이 주식회사 | 박막 트랜지스터 표시판 및 이의 제조 방법 |
| JP5874308B2 (ja) * | 2011-10-21 | 2016-03-02 | 三菱瓦斯化学株式会社 | 銅及びモリブデンを含む多層膜用エッチング液 |
| CN102560383B (zh) * | 2012-01-12 | 2013-10-23 | 宝鸡市科迪普有色金属加工有限公司 | 钼铌合金板靶材加工工艺 |
| DE102012023260A1 (de) * | 2012-11-29 | 2014-06-05 | Oerlikon Trading Ag, Trübbach | Verfahren zur Strukturierung von Schichtoberflächen und Vorrichtung dazu |
| KR101600169B1 (ko) * | 2013-03-12 | 2016-03-04 | 히타치 긴조쿠 가부시키가이샤 | 전자 부품용 금속 박막 및 금속 박막 형성용 Mo 합금 스퍼터링 타깃재 |
| KR102194818B1 (ko) * | 2013-08-06 | 2020-12-24 | 삼성디스플레이 주식회사 | 플렉서블 터치 표시 패널 |
| US20160204126A1 (en) * | 2013-08-27 | 2016-07-14 | Joled Inc. | Thin-film transistor substrate and method for fabricating the same |
| CN103606389B (zh) * | 2013-10-28 | 2016-11-16 | 中国科学院长春光学精密机械与物理研究所 | 高导电性无机、金属掺杂多层结构透明导电薄膜的制备方法 |
| JP2015119175A (ja) * | 2013-11-15 | 2015-06-25 | 株式会社半導体エネルギー研究所 | 半導体装置及び表示装置 |
| EP2874187B1 (en) * | 2013-11-15 | 2020-01-01 | Evonik Operations GmbH | Low contact resistance thin film transistor |
| US9544994B2 (en) * | 2014-08-30 | 2017-01-10 | Lg Display Co., Ltd. | Flexible display device with side crack protection structure and manufacturing method for the same |
| JP6706418B2 (ja) * | 2015-03-20 | 2020-06-10 | 日立金属株式会社 | 電子部品用積層配線膜および被覆層形成用スパッタリングターゲット材 |
| JP6832634B2 (ja) * | 2015-05-29 | 2021-02-24 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| KR102439505B1 (ko) * | 2015-06-11 | 2022-09-02 | 삼성디스플레이 주식회사 | 박막 트랜지스터 기판 |
| US10501003B2 (en) * | 2015-07-17 | 2019-12-10 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, lighting device, and vehicle |
| AT15048U1 (de) * | 2015-11-27 | 2016-11-15 | Plansee Se | Beschichtetes flexibles Bauteil |
-
2017
- 2017-05-11 AT ATGM104/2017U patent/AT15574U3/de unknown
-
2018
- 2018-04-19 CN CN201880030970.2A patent/CN110651373B/zh active Active
- 2018-04-19 WO PCT/AT2018/000026 patent/WO2018204944A1/de not_active Ceased
- 2018-04-19 KR KR1020197036521A patent/KR102557501B1/ko active Active
- 2018-04-19 JP JP2019561901A patent/JP7282688B2/ja active Active
- 2018-05-02 TW TW107114884A patent/TWI793121B/zh active
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