JP2020506539A - 熱制御素子を用いるesc温度推定のための仮想測定方法 - Google Patents
熱制御素子を用いるesc温度推定のための仮想測定方法 Download PDFInfo
- Publication number
- JP2020506539A JP2020506539A JP2019538531A JP2019538531A JP2020506539A JP 2020506539 A JP2020506539 A JP 2020506539A JP 2019538531 A JP2019538531 A JP 2019538531A JP 2019538531 A JP2019538531 A JP 2019538531A JP 2020506539 A JP2020506539 A JP 2020506539A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- model
- substrate support
- tce
- response
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims abstract description 103
- 230000004044 response Effects 0.000 claims abstract description 57
- 238000012545 processing Methods 0.000 claims abstract description 51
- 238000000034 method Methods 0.000 claims description 68
- 238000010586 diagram Methods 0.000 abstract description 8
- 230000008569 process Effects 0.000 description 30
- 235000012431 wafers Nutrition 0.000 description 12
- 238000010438 heat treatment Methods 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 9
- 238000009616 inductively coupled plasma Methods 0.000 description 8
- 239000003507 refrigerant Substances 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 8
- 238000005530 etching Methods 0.000 description 7
- 238000004891 communication Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 238000005240 physical vapour deposition Methods 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000002243 precursor Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000012625 in-situ measurement Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 238000013178 mathematical model Methods 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- -1 oxides Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000008542 thermal sensitivity Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/1917—Control of temperature characterised by the use of electric means using digital means
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
- C23C16/45536—Use of plasma, radiation or electromagnetic fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Automation & Control Theory (AREA)
- Electromagnetism (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Drying Of Semiconductors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Control Of Temperature (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
- Control Of Resistance Heating (AREA)
Abstract
Description
本願は、2017年1月20日出願の米国実用出願第15/411,389号の優先権を主張する。上述した本願の全ての開示は、参照により本明細書に援用される。
Claims (16)
- 基板処理システムにおける基板支持体のための温度制御装置であって、
(i)前記基板支持体に配置された複数の第1の熱制御素子(TCE)の温度と(ii)前記基板支持体の第1の温度応答とを関連付ける第1のモデルを格納するメモリであって、前記第1の温度応答は、前記基板支持体の表面上の位置に対応する、メモリと、
(i)前記第1のTCEの抵抗を算出し、(ii)前記算出した抵抗に基づいて前記第1のTCEの前記温度を決定し、(iii)前記格納された第1のモデルおよび前記第1のTCEの前記決定した温度を用いて前記基板支持体の実温度応答を推定する、温度推定モジュールと、を備え、
前記温度制御装置は、前記基板支持体の前記実温度応答に基づいて前記第1のTCEを制御するように構成されている、温度制御装置。 - 請求項1に記載の温度制御装置であって、前記メモリは、さらに、
(i)前記基板支持体に配置された第2のTCEに提供される電力と(ii)前記基板支持体の第2の温度応答とを関連付ける第2のモデルと、
(i)前記基板支持体の底板の温度と(ii)前記基板支持体の第3の温度応答とを関連付ける第3のモデルと、
(i)前記基板支持体に提供されるバイアス高周波(RF)電力と(ii)前記基板支持体の第4の温度応答とを関連付ける第4のモデルと、
(i)前記基板処理システムに提供されるプラズマRF電力と(ii)前記基板支持体の第5の温度応答とを関連付ける第5のモデル
のうちの少なくとも1つを格納する、温度制御装置。 - 請求項2に記載の温度制御装置であって、
前記基板支持体の前記実温度応答を推定するために、前記温度推定モジュールは、前記第2のモデル、前記第3のモデル、前記第4のモデル、および前記第5のモデルのうちの前記格納された少なくとも1つにさらに基づいて前記実温度応答を推定する、温度制御装置。 - 請求項2に記載の温度制御装置であって、
前記温度推定モジュールは、前記第1のモデルの出力と、前記第2のモデル、前記第3のモデル、前記第4のモデル、および前記第5のモデルのうちの前記少なくとも1つの出力との和に基づいて前記実温度応答を推定する、温度制御装置。 - 請求項1に記載の温度制御装置であって、
前記メモリは、(i)前記算出された抵抗と(ii)前記第1のTCEの前記温度とを関連付ける第2のモデルを格納し、前記温度推定モジュールは、前記第2のモデルおよび前記算出された抵抗を用いて前記第1のTCEの前記温度を決定する、温度制御装置。 - 基板処理システムにおける基板支持体の温度を推定する方法であって、
(i)前記基板支持体に配置された複数の第1の熱制御素子(TCE)の温度と(ii)前記基板支持体の第1の温度応答とを関連付ける第1のモデルを格納することであって、前記第1の温度応答は、前記基板支持体の表面上の位置に対応することと、
前記第1のTCEの抵抗を算出することと、
前記算出された抵抗に基づいて前記第1のTCEの前記温度を決定することと、
前記格納された第1のモデルおよび前記第1のTCEの前記決定された温度を用いて、前記基板支持体の実温度応答を推定することと、
前記基板支持体の前記実温度応答に基づいて前記第1のTCEを制御することと、
を含む、方法。 - 請求項9に記載の方法であって、さらに、
(i)前記基板支持体に配置された第2のTCEに提供される電力と(ii)前記基板支持体の第2の温度応答とを関連付ける第2のモデルと、
(i)前記基板支持体の底板の温度と(ii)前記基板支持体の第3の温度応答とを関連付ける第3のモデルと、
(i)前記基板支持体に提供されるバイアス高周波(RF)電力と(ii)前記基板支持体の第4の温度応答とを関連付ける第4のモデルと、
(i)前記基板処理システムに提供されるプラズマRF電力と(ii)前記基板支持体の第5の温度応答とを関連付ける第5のモデル
のうちの少なくとも1つを格納することを含む、方法。 - 請求項10に記載の方法であって、
前記基板支持体の前記実温度応答を推定することは、前記第2のモデル、前記第3のモデル、前記第4のモデル、および前記第5のモデルのうちの前記格納された少なくとも1つにさらに基づいて、前記実温度応答を推定することを含む、方法。 - 請求項10に記載の方法であって、
前記実温度応答を推定することは、前記第1のモデルの出力と、前記第2のモデル、前記第3のモデル、前記第4のモデル、および前記第5のモデルのうちの前記少なくとも1つの出力との和に基づいて、前記実温度応答を推定することを含む、方法。 - 請求項9に記載の方法であって、さらに、
(i)前記算出された抵抗と(ii)前記第1のTCEの前記温度とを関連付ける第2のモデルを格納することを含み、さらに、前記第2のモデルおよび前記算出された抵抗を用いて前記第1のTCEの前記温度を決定することを含む、方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/411,389 US10509425B2 (en) | 2017-01-20 | 2017-01-20 | Virtual metrology method for ESC temperature estimation using thermal control elements |
US15/411,389 | 2017-01-20 | ||
PCT/US2018/014191 WO2018136608A1 (en) | 2017-01-20 | 2018-01-18 | A virtual metrology method for esc temperature estimation using thermal control elements |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2020506539A true JP2020506539A (ja) | 2020-02-27 |
JP2020506539A5 JP2020506539A5 (ja) | 2021-04-30 |
JP7191832B2 JP7191832B2 (ja) | 2022-12-19 |
Family
ID=62905828
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019538531A Active JP7191832B2 (ja) | 2017-01-20 | 2018-01-18 | 熱制御素子を用いるesc温度推定のための仮想測定方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US10509425B2 (ja) |
JP (1) | JP7191832B2 (ja) |
KR (1) | KR102533847B1 (ja) |
CN (1) | CN110199383B (ja) |
TW (1) | TWI782943B (ja) |
WO (1) | WO2018136608A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022163214A1 (ja) * | 2021-01-29 | 2022-08-04 | 住友電気工業株式会社 | ヒータ制御装置 |
JP7467274B2 (ja) | 2020-08-07 | 2024-04-15 | 東京エレクトロン株式会社 | 温度推定方法及び成膜装置 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20210128025A (ko) * | 2019-03-13 | 2021-10-25 | 램 리써치 코포레이션 | 온도를 근사화하기 위한 정전 척 히터 저항 측정 |
CN114175208B (zh) * | 2019-07-25 | 2024-05-24 | 朗姆研究公司 | 衬底处理系统 |
JP2023535756A (ja) * | 2020-07-27 | 2023-08-21 | ワットロー・エレクトリック・マニュファクチャリング・カンパニー | システム制御および診断を改善するために中間データを使用するためのシステムおよび方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10116885A (ja) * | 1996-10-08 | 1998-05-06 | Anelva Corp | 基板温度制御機構 |
US6605955B1 (en) * | 1999-01-26 | 2003-08-12 | Trio-Tech International | Temperature controlled wafer chuck system with low thermal resistance |
JP2007088411A (ja) * | 2005-06-28 | 2007-04-05 | Hitachi High-Technologies Corp | 静電吸着装置およびウエハ処理装置ならびにプラズマ処理方法 |
JP2008177185A (ja) * | 2007-01-16 | 2008-07-31 | Powertech Technology Inc | パッケージ構造 |
JP2008177285A (ja) * | 2007-01-17 | 2008-07-31 | Hitachi High-Technologies Corp | プラズマ処理装置 |
US20120091108A1 (en) * | 2010-10-14 | 2012-04-19 | Applied Materials, Inc. | Methods and apparatus for controlling substrate temperature in a process chamber |
JP2013145806A (ja) * | 2012-01-13 | 2013-07-25 | Tokyo Electron Ltd | プラズマ処理装置及びヒータの温度制御方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1125314A1 (en) * | 1998-07-10 | 2001-08-22 | Applied Materials, Inc. | Improved endpoint detection for substrate fabrication processes |
JP2000339039A (ja) | 1999-05-25 | 2000-12-08 | Tokyo Electron Ltd | 加熱手段の温度制御方法、その装置及び熱処理装置 |
JP2006114580A (ja) * | 2004-10-13 | 2006-04-27 | Canon Inc | 温度測定装置及びプラズマ処理装置 |
US7302363B2 (en) * | 2006-03-31 | 2007-11-27 | Tokyo Electron Limited | Monitoring a system during low-pressure processes |
JP4942174B2 (ja) * | 2006-10-05 | 2012-05-30 | 東京エレクトロン株式会社 | 基板処理システムの処理レシピ最適化方法,基板処理システム,基板処理装置 |
JP4531778B2 (ja) * | 2007-02-09 | 2010-08-25 | 東京エレクトロン株式会社 | 温度制御方法、温度調節器および加熱処理装置 |
JP5219562B2 (ja) * | 2007-04-02 | 2013-06-26 | 株式会社日立国際電気 | 基板処理装置、基板処理方法及び半導体装置の製造方法 |
US20090052498A1 (en) * | 2007-08-24 | 2009-02-26 | Asm America, Inc. | Thermocouple |
JP2010219462A (ja) * | 2009-03-19 | 2010-09-30 | Renesas Electronics Corp | ウエハ温度シミュレーション装置、ウエハ温度シミュレーション方法及びそのプログラム |
NL2006913A (en) * | 2010-07-16 | 2012-01-17 | Asml Netherlands Bv | Lithographic apparatus and method. |
US8552346B2 (en) | 2011-05-20 | 2013-10-08 | Applied Materials, Inc. | Methods and apparatus for controlling temperature of a multi-zone heater in an process chamber |
US9543171B2 (en) * | 2014-06-17 | 2017-01-10 | Lam Research Corporation | Auto-correction of malfunctioning thermal control element in a temperature control plate of a semiconductor substrate support assembly that includes deactivating the malfunctioning thermal control element and modifying a power level of at least one functioning thermal control element |
JP6608923B2 (ja) * | 2014-07-02 | 2019-11-20 | アプライド マテリアルズ インコーポレイテッド | 溝に経路指定された光ファイバーによる加熱を含む温度制御装置、基板温度制御システム、電子デバイス処理システム、及び処理方法 |
US9779974B2 (en) | 2015-06-22 | 2017-10-03 | Lam Research Corporation | System and method for reducing temperature transition in an electrostatic chuck |
-
2017
- 2017-01-20 US US15/411,389 patent/US10509425B2/en active Active
-
2018
- 2018-01-15 TW TW107101366A patent/TWI782943B/zh active
- 2018-01-18 KR KR1020197023345A patent/KR102533847B1/ko active IP Right Grant
- 2018-01-18 WO PCT/US2018/014191 patent/WO2018136608A1/en active Application Filing
- 2018-01-18 CN CN201880007951.8A patent/CN110199383B/zh active Active
- 2018-01-18 JP JP2019538531A patent/JP7191832B2/ja active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10116885A (ja) * | 1996-10-08 | 1998-05-06 | Anelva Corp | 基板温度制御機構 |
US6605955B1 (en) * | 1999-01-26 | 2003-08-12 | Trio-Tech International | Temperature controlled wafer chuck system with low thermal resistance |
JP2007088411A (ja) * | 2005-06-28 | 2007-04-05 | Hitachi High-Technologies Corp | 静電吸着装置およびウエハ処理装置ならびにプラズマ処理方法 |
JP2008177185A (ja) * | 2007-01-16 | 2008-07-31 | Powertech Technology Inc | パッケージ構造 |
JP2008177285A (ja) * | 2007-01-17 | 2008-07-31 | Hitachi High-Technologies Corp | プラズマ処理装置 |
US20120091108A1 (en) * | 2010-10-14 | 2012-04-19 | Applied Materials, Inc. | Methods and apparatus for controlling substrate temperature in a process chamber |
JP2013145806A (ja) * | 2012-01-13 | 2013-07-25 | Tokyo Electron Ltd | プラズマ処理装置及びヒータの温度制御方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7467274B2 (ja) | 2020-08-07 | 2024-04-15 | 東京エレクトロン株式会社 | 温度推定方法及び成膜装置 |
WO2022163214A1 (ja) * | 2021-01-29 | 2022-08-04 | 住友電気工業株式会社 | ヒータ制御装置 |
JP7494946B2 (ja) | 2021-01-29 | 2024-06-04 | 住友電気工業株式会社 | ヒータ制御装置 |
Also Published As
Publication number | Publication date |
---|---|
TW201841091A (zh) | 2018-11-16 |
KR102533847B1 (ko) | 2023-05-17 |
CN110199383A (zh) | 2019-09-03 |
WO2018136608A1 (en) | 2018-07-26 |
KR20190100972A (ko) | 2019-08-29 |
US10509425B2 (en) | 2019-12-17 |
TWI782943B (zh) | 2022-11-11 |
US20180210473A1 (en) | 2018-07-26 |
CN110199383B (zh) | 2023-10-27 |
JP7191832B2 (ja) | 2022-12-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7191832B2 (ja) | 熱制御素子を用いるesc温度推定のための仮想測定方法 | |
US11029668B2 (en) | Systems and methods for calibrating scalar field contribution values for a limited number of sensors including a temperature value of an electrostatic chuck and estimating temperature distribution profiles based on calibrated values | |
US10381248B2 (en) | Auto-correction of electrostatic chuck temperature non-uniformity | |
US11908715B2 (en) | Dynamic temperature control of substrate support in substrate processing system | |
CN112106181A (zh) | 使用电压和电流测量来控制双区陶瓷基座 | |
KR102527489B1 (ko) | 웨이퍼의 다른 cd (critical dimension) 를 예측하기 위해 피드포워드 cd 데이터를 사용하는 가상 계측 시스템들 및 방법들 | |
JP2023145608A (ja) | エッジリング摩耗補償のためのシステムおよび方法 | |
CN113574648A (zh) | 用于估计温度的静电卡盘加热器电阻测量 | |
KR20190087609A (ko) | 기판 지지부 온도를 계산하기 위한 시스템 및 방법 | |
JP7454504B2 (ja) | 基板処理中の基板温度の決定および制御 | |
US12020960B2 (en) | Determining and controlling substrate temperature during substrate processing | |
CN117242561A (zh) | 在基于高tcr控制中的信号滤波方案的使用 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210118 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210322 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20220131 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220208 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20220428 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220801 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20221108 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20221207 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7191832 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |