JP2020504675A5 - - Google Patents

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Publication number
JP2020504675A5
JP2020504675A5 JP2019535826A JP2019535826A JP2020504675A5 JP 2020504675 A5 JP2020504675 A5 JP 2020504675A5 JP 2019535826 A JP2019535826 A JP 2019535826A JP 2019535826 A JP2019535826 A JP 2019535826A JP 2020504675 A5 JP2020504675 A5 JP 2020504675A5
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scan lens
region
beam path
laser energy
scan
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JP2019535826A
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JP7146770B2 (ja
JP2020504675A (ja
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Priority claimed from PCT/US2017/068833 external-priority patent/WO2018126078A1/en
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JP2019535826A 2016-12-30 2017-12-28 レーザ加工装置における光学部品の寿命を延ばすための方法及びシステム Active JP7146770B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662440925P 2016-12-30 2016-12-30
US62/440,925 2016-12-30
PCT/US2017/068833 WO2018126078A1 (en) 2016-12-30 2017-12-28 Method and system for extending optics lifetime in laser processing apparatus

Publications (3)

Publication Number Publication Date
JP2020504675A JP2020504675A (ja) 2020-02-13
JP2020504675A5 true JP2020504675A5 (enExample) 2020-11-26
JP7146770B2 JP7146770B2 (ja) 2022-10-04

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JP2019535826A Active JP7146770B2 (ja) 2016-12-30 2017-12-28 レーザ加工装置における光学部品の寿命を延ばすための方法及びシステム

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US (1) US11260472B2 (enExample)
JP (1) JP7146770B2 (enExample)
KR (1) KR102401037B1 (enExample)
CN (2) CN110139727B (enExample)
TW (1) TWI774721B (enExample)
WO (1) WO2018126078A1 (enExample)

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