JP2016512792A5 - - Google Patents

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Publication number
JP2016512792A5
JP2016512792A5 JP2016502393A JP2016502393A JP2016512792A5 JP 2016512792 A5 JP2016512792 A5 JP 2016512792A5 JP 2016502393 A JP2016502393 A JP 2016502393A JP 2016502393 A JP2016502393 A JP 2016502393A JP 2016512792 A5 JP2016512792 A5 JP 2016512792A5
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JP
Japan
Prior art keywords
time
laser
route sequence
turning
beam position
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JP2016502393A
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English (en)
Japanese (ja)
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JP2016512792A (ja
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Priority claimed from PCT/US2014/027275 external-priority patent/WO2014152380A1/en
Publication of JP2016512792A publication Critical patent/JP2016512792A/ja
Publication of JP2016512792A5 publication Critical patent/JP2016512792A5/ja
Pending legal-status Critical Current

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JP2016502393A 2013-03-15 2014-03-14 Ａｏｄラウト加工用レーザシステム及び方法 Pending JP2016512792A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361791361P 2013-03-15 2013-03-15
US61/791,361 2013-03-15
PCT/US2014/027275 WO2014152380A1 (en) 2013-03-15 2014-03-14 Laser systems and methods for aod rout processing

Related Child Applications (1)

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JP2019010116A Division JP6773822B2 (ja) 2013-03-15 2019-01-24 Ａｏｄラウト加工用レーザシステム及び方法

Publications (2)

Publication Number Publication Date
JP2016512792A JP2016512792A (ja) 2016-05-09
JP2016512792A5 true JP2016512792A5 (enExample) 2017-04-20

Family

ID=51522871

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JP2016502393A Pending JP2016512792A (ja) 2013-03-15 2014-03-14 Ａｏｄラウト加工用レーザシステム及び方法
JP2019010116A Active JP6773822B2 (ja) 2013-03-15 2019-01-24 Ａｏｄラウト加工用レーザシステム及び方法

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JP2019010116A Active JP6773822B2 (ja) 2013-03-15 2019-01-24 Ａｏｄラウト加工用レーザシステム及び方法

Country Status (6)

Country Link
US (1) US9931713B2 (enExample)
JP (2) JP2016512792A (enExample)
KR (1) KR102245810B1 (enExample)
CN (1) CN105102169B (enExample)
TW (1) TWI632013B (enExample)
WO (1) WO2014152380A1 (enExample)

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US11077526B2 (en) * 2015-09-09 2021-08-03 Electro Scientific Industries, Inc. Laser processing apparatus, methods of laser-processing workpieces and related arrangements
JP7146770B2 (ja) 2016-12-30 2022-10-04 エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド レーザ加工装置における光学部品の寿命を延ばすための方法及びシステム
KR102778985B1 (ko) * 2018-06-05 2025-03-12 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 레이저 가공 장치, 그 작동 방법 및 이를 사용한 작업물 가공 방법
TWI843784B (zh) 2019-01-31 2024-06-01 美商伊雷克托科學工業股份有限公司 雷射加工設備、與設備一起使用的控制器及非暫時性電腦可讀取媒體
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US20240286217A1 (en) * 2021-06-21 2024-08-29 Electro Scientific Industries, Inc. Laser processing apparatus including beam analysis system and methods of measurement and control of beam characteristics

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CN102679948A (zh) * 2012-03-28 2012-09-19 中国科学院上海技术物理研究所 一种消除高重频激光测距脉冲混叠的方法
JP6336467B2 (ja) * 2012-11-30 2018-06-06 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 不等長の前腕部を備えた多軸ロボット装置、電子デバイス製造システム、及び、電子デバイス製造において基板を搬送するための方法

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