KR102245810B1 - Aod 라우트 프로세싱을 위한 레이저 시스템들 및 방법들 - Google Patents

Aod 라우트 프로세싱을 위한 레이저 시스템들 및 방법들 Download PDF

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KR102245810B1
KR102245810B1 KR1020157022808A KR20157022808A KR102245810B1 KR 102245810 B1 KR102245810 B1 KR 102245810B1 KR 1020157022808 A KR1020157022808 A KR 1020157022808A KR 20157022808 A KR20157022808 A KR 20157022808A KR 102245810 B1 KR102245810 B1 KR 102245810B1
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South Korea
Prior art keywords
laser
workpiece
pulse
segments
positioning system
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Korean (ko)
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KR20150130277A (ko
Inventor
마크 에이 언라스
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일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드
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Application filed by 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 filed Critical 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/0344—Observing the speed of the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
KR1020157022808A 2013-03-15 2014-03-14 Aod 라우트 프로세싱을 위한 레이저 시스템들 및 방법들 Active KR102245810B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361791361P 2013-03-15 2013-03-15
US61/791,361 2013-03-15
PCT/US2014/027275 WO2014152380A1 (en) 2013-03-15 2014-03-14 Laser systems and methods for aod rout processing

Publications (2)

Publication Number Publication Date
KR20150130277A KR20150130277A (ko) 2015-11-23
KR102245810B1 true KR102245810B1 (ko) 2021-04-30

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ID=51522871

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KR1020157022808A Active KR102245810B1 (ko) 2013-03-15 2014-03-14 Aod 라우트 프로세싱을 위한 레이저 시스템들 및 방법들

Country Status (6)

Country Link
US (1) US9931713B2 (enExample)
JP (2) JP2016512792A (enExample)
KR (1) KR102245810B1 (enExample)
CN (1) CN105102169B (enExample)
TW (1) TWI632013B (enExample)
WO (1) WO2014152380A1 (enExample)

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JP6217624B2 (ja) * 2014-12-26 2017-10-25 ブラザー工業株式会社 レーザ加工装置及びレーザ加工方法
US11077526B2 (en) 2015-09-09 2021-08-03 Electro Scientific Industries, Inc. Laser processing apparatus, methods of laser-processing workpieces and related arrangements
JP7146770B2 (ja) 2016-12-30 2022-10-04 エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド レーザ加工装置における光学部品の寿命を延ばすための方法及びシステム
CN116275467A (zh) 2018-06-05 2023-06-23 伊雷克托科学工业股份有限公司 激光加工设备、其操作方法以及使用其加工工件的方法
JP7484112B2 (ja) 2019-09-20 2024-05-16 カシオ計算機株式会社 印刷装置、印刷方法及びプログラム
EP4359164A4 (en) * 2021-06-21 2025-06-04 Electro Scientific Industries, Inc. LASER PROCESSING DEVICE WITH BEAM ANALYSIS SYSTEM AND METHOD FOR MEASURING AND CONTROLLING BEAM PROPERTIES

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JP2012245539A (ja) * 2011-05-27 2012-12-13 Panasonic Industrial Devices Sunx Co Ltd レーザマーキング装置

Also Published As

Publication number Publication date
JP2016512792A (ja) 2016-05-09
CN105102169A (zh) 2015-11-25
WO2014152380A1 (en) 2014-09-25
US9931713B2 (en) 2018-04-03
JP6773822B2 (ja) 2020-10-21
US20140263201A1 (en) 2014-09-18
TWI632013B (zh) 2018-08-11
KR20150130277A (ko) 2015-11-23
CN105102169B (zh) 2017-05-03
TW201442814A (zh) 2014-11-16
JP2019111583A (ja) 2019-07-11

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