JP2020155690A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2020155690A JP2020155690A JP2019054580A JP2019054580A JP2020155690A JP 2020155690 A JP2020155690 A JP 2020155690A JP 2019054580 A JP2019054580 A JP 2019054580A JP 2019054580 A JP2019054580 A JP 2019054580A JP 2020155690 A JP2020155690 A JP 2020155690A
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- metal wires
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Abstract
Description
図1は、実施の形態1における半導体装置の構成を示す平面図である。半導体装置は、絶縁基板1、ケース10、半導体素子3、端子電極5および内部配線9を含む。
実施の形態2における半導体装置を説明する。なお、実施の形態1と同様の構成および動作については説明を省略する。
実施の形態3における半導体装置を説明する。なお、実施の形態1または2と同様の構成および動作については説明を省略する。
Claims (8)
- ケースに収容された半導体素子と、
前記ケースの外部に電気的に接続可能なように設けられた端子電極と、
前記ケース内に設けられ、前記半導体素子と前記端子電極との間を電気的に接続する内部配線と、を備え、
前記内部配線は、前記内部配線の一部に、過電流によって溶断する溶断部を含み、
前記溶断部は、一群の並列配線である複数の金属線を含み、
前記複数の金属線のうち、一の金属線の抵抗値は、前記一の金属線よりも外側に配線された他の金属線の抵抗値よりも高い、半導体装置。 - 前記複数の金属線は、前記複数の金属線の各々ごとの前記抵抗値として、少なくとも2種類以上の抵抗値を有する、請求項1に記載の半導体装置。
- 前記内部配線は、
導電性を有し、かつ、前記ケース内に設けられる絶縁基板の主面に配線された回路パターンをさらに含み、
前記複数の金属線は、前記半導体素子と前記端子電極との間における2つの領域間を接続し、
前記2つの領域の各々は、前記半導体素子、前記端子電極または前記回路パターンである、請求項1または請求項2に記載の半導体装置。 - 前記ケースと、
前記絶縁基板と、をさらに備え、
前記半導体素子は、前記絶縁基板の前記主面に保持されている、請求項3に記載の半導体装置。 - 前記複数の金属線の各々は、ボンディングワイヤである、請求項1から請求項4のいずれか一項に記載の半導体装置。
- 前記複数の金属線の各々は、アルミニウム、金、銀もしくは銅からなる、またはアルミニウム、金、銀もしくは銅を含む合金からなる、請求項1から請求項5のいずれか一項に記載の半導体装置。
- 前記複数の金属線のうち、前記一の金属線の断面積は、前記一の金属線よりも外側に配線された前記他の金属線の断面積よりも小さい、請求項1から請求項6のいずれか一項に記載の半導体装置。
- 前記複数の金属線に流れる電流値をIとし、前記複数の金属線の本数をnとし、前記複数の金属線にそれぞれ対応して流れる複数の電流のうち最大電流値をImaxとし、前記複数の電流のうち最小電流値をIminとした場合に、
(Imax−Imin)/(I/n)>50%
の関係式を満たす、請求項1から請求項7のいずれか一項に記載の半導体装置。
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Publication number | Priority date | Publication date | Assignee | Title |
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JPH02216475A (ja) * | 1989-02-17 | 1990-08-29 | Nec Corp | 半導体装置の検査方法 |
JPH08195411A (ja) * | 1995-01-17 | 1996-07-30 | Toshiba Fa Syst Eng Kk | パワーモジュール素子 |
JP2008235502A (ja) * | 2007-03-20 | 2008-10-02 | Mitsubishi Electric Corp | 樹脂封止型半導体装置 |
JP2009218275A (ja) * | 2008-03-07 | 2009-09-24 | Mitsubishi Electric Corp | 半導体装置及びその半導体装置を備えたインバータシステム |
JP2017059650A (ja) * | 2015-09-16 | 2017-03-23 | 三菱電機株式会社 | 増幅器 |
JP2017139903A (ja) * | 2016-02-04 | 2017-08-10 | 矢崎総業株式会社 | 電流遮断装置 |
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JPH04147635A (ja) | 1990-10-09 | 1992-05-21 | Mitsubishi Electric Corp | 高周波高出力トランジスタ |
DE102009029040A1 (de) | 2009-08-31 | 2011-03-03 | Robert Bosch Gmbh | Vorrichtung und Verfahren zur Herstellung einer Vorrichtung |
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JPH02216475A (ja) * | 1989-02-17 | 1990-08-29 | Nec Corp | 半導体装置の検査方法 |
JPH08195411A (ja) * | 1995-01-17 | 1996-07-30 | Toshiba Fa Syst Eng Kk | パワーモジュール素子 |
JP2008235502A (ja) * | 2007-03-20 | 2008-10-02 | Mitsubishi Electric Corp | 樹脂封止型半導体装置 |
JP2009218275A (ja) * | 2008-03-07 | 2009-09-24 | Mitsubishi Electric Corp | 半導体装置及びその半導体装置を備えたインバータシステム |
JP2017059650A (ja) * | 2015-09-16 | 2017-03-23 | 三菱電機株式会社 | 増幅器 |
JP2017139903A (ja) * | 2016-02-04 | 2017-08-10 | 矢崎総業株式会社 | 電流遮断装置 |
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