JP2020153724A5 - - Google Patents

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Publication number
JP2020153724A5
JP2020153724A5 JP2019050689A JP2019050689A JP2020153724A5 JP 2020153724 A5 JP2020153724 A5 JP 2020153724A5 JP 2019050689 A JP2019050689 A JP 2019050689A JP 2019050689 A JP2019050689 A JP 2019050689A JP 2020153724 A5 JP2020153724 A5 JP 2020153724A5
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JP
Japan
Prior art keywords
ray
side arm
disposed
ray analyzer
sample
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JP2019050689A
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English (en)
Japanese (ja)
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JP2020153724A (ja
JP7165400B2 (ja
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Priority to JP2019050689A priority Critical patent/JP7165400B2/ja
Priority claimed from JP2019050689A external-priority patent/JP7165400B2/ja
Priority to EP20156330.1A priority patent/EP3712901B1/en
Priority to CN202010190202.2A priority patent/CN111735828B/zh
Priority to US16/823,929 priority patent/US11215571B2/en
Publication of JP2020153724A publication Critical patent/JP2020153724A/ja
Publication of JP2020153724A5 publication Critical patent/JP2020153724A5/ja
Application granted granted Critical
Publication of JP7165400B2 publication Critical patent/JP7165400B2/ja
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JP2019050689A 2019-03-19 2019-03-19 Ｘ線分析装置 Active JP7165400B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2019050689A JP7165400B2 (ja) 2019-03-19 2019-03-19 Ｘ線分析装置
EP20156330.1A EP3712901B1 (en) 2019-03-19 2020-02-10 X-ray analysis apparatus
CN202010190202.2A CN111735828B (zh) 2019-03-19 2020-03-18 X射线分析装置
US16/823,929 US11215571B2 (en) 2019-03-19 2020-03-19 X-ray analysis apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019050689A JP7165400B2 (ja) 2019-03-19 2019-03-19 Ｘ線分析装置

Publications (3)

Publication Number Publication Date
JP2020153724A JP2020153724A (ja) 2020-09-24
JP2020153724A5 true JP2020153724A5 (https=) 2021-05-20
JP7165400B2 JP7165400B2 (ja) 2022-11-04

Family

ID=69570515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019050689A Active JP7165400B2 (ja) 2019-03-19 2019-03-19 Ｘ線分析装置

Country Status (4)

Country Link
US (1) US11215571B2 (https=)
EP (1) EP3712901B1 (https=)
JP (1) JP7165400B2 (https=)
CN (1) CN111735828B (https=)

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Publication number Priority date Publication date Assignee Title
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
US10845491B2 (en) 2018-06-04 2020-11-24 Sigray, Inc. Energy-resolving x-ray detection system
GB2591630B (en) 2018-07-26 2023-05-24 Sigray Inc High brightness x-ray reflection source
WO2020051221A2 (en) 2018-09-07 2020-03-12 Sigray, Inc. System and method for depth-selectable x-ray analysis
DE112020004169T5 (de) 2019-09-03 2022-05-25 Sigray, Inc. System und verfahren zur computergestützten laminografieröntgenfluoreszenz-bildgebung
US11175243B1 (en) 2020-02-06 2021-11-16 Sigray, Inc. X-ray dark-field in-line inspection for semiconductor samples
JP7395775B2 (ja) 2020-05-18 2023-12-11 シグレイ、インコーポレイテッド 結晶解析装置及び複数の検出器素子を使用するｘ線吸収分光法のためのシステム及び方法
WO2022061347A1 (en) 2020-09-17 2022-03-24 Sigray, Inc. System and method using x-rays for depth-resolving metrology and analysis
US12480892B2 (en) 2020-12-07 2025-11-25 Sigray, Inc. High throughput 3D x-ray imaging system using a transmission x-ray source
KR20260030946A (ko) 2020-12-07 2026-03-06 시그레이, 아이엔씨. 투과 x-선 소스를 이용한 고처리량 3D x-선 이미징 시스템
JP7687689B2 (ja) 2022-02-14 2025-06-03 株式会社リガク Ｘ線回折装置及び計測方法
WO2023168204A1 (en) 2022-03-02 2023-09-07 Sigray, Inc. X-ray fluorescence system and x-ray source with electrically insulative target material
WO2023177981A1 (en) 2022-03-15 2023-09-21 Sigray, Inc. System and method for compact laminography utilizing microfocus transmission x-ray source and variable magnification x-ray detector
CN119173759A (zh) 2022-05-02 2024-12-20 斯格瑞公司 X射线顺序阵列波长色散光谱仪
CN121013975A (zh) 2023-02-16 2025-11-25 斯格瑞公司 具有至少两个堆叠的平面布拉格衍射器的x射线探测器系统
US12181423B1 (en) 2023-09-07 2024-12-31 Sigray, Inc. Secondary image removal using high resolution x-ray transmission sources
US12429437B2 (en) 2023-11-07 2025-09-30 Sigray, Inc. System and method for x-ray absorption spectroscopy using spectral information from two orthogonal planes
US12429436B2 (en) 2024-01-08 2025-09-30 Sigray, Inc. X-ray analysis system with focused x-ray beam and non-x-ray microscope
WO2025155719A1 (en) 2024-01-18 2025-07-24 Sigray, Inc. Sequential array of x-ray imaging detectors
WO2025174966A1 (en) 2024-02-15 2025-08-21 Sigray, Inc. System and method for generating a focused x‑ray beam

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JPH0584850U (ja) * 1992-04-15 1993-11-16 理学電機株式会社 Ｘ線回折装置のゴニオメータ光軸調整治具
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