JP2020144037A - 光学モジュール及び光学式エンコーダ - Google Patents
光学モジュール及び光学式エンコーダ Download PDFInfo
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
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- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34746—Linear encoders
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
- G01D5/34715—Scale reading or illumination devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/28—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication
- G01D5/30—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication the beams of light being detected by photocells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/16—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits
- H01L25/167—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits comprising optoelectronic devices, e.g. LED, photodiodes
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- Condensed Matter Physics & Semiconductors (AREA)
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Abstract
Description
以下に、本発明の第1実施形態に係る反射型の光学式エンコーダついて説明する。
<第1変形例>
図7は、第1変形例に係る光学モジュールの構造を示す概略断面図である。本変形例は、センサ基板20の構成が異なること以外は、第1実施形態と同様の構成である。
<第2変形例>
図8は、第2変形例に係る光学モジュールの構造を示す概略断面図である。本変形例は、固定基板30の構成が異なること以外は、第1実施形態と同様の構成である。第1実施形態では、受光素子21a,22aを逆バイアスとするために、第4の外部端子37dからセンサ基板20の上面側に形成された配線層(図示せず)を介してセンサ基板20のn型領域に電源電圧(VCC)を供給している。
<第3変形例>
第1実施形態では、図6に示すように、センサ基板20としてn型半導体基板を用いているが、n型半導体基板に代えて、p型半導体基板を用いてもよい。この場合、受光素子21a,22a及びダミー受光素子23をn型拡散層で構成すればよい。
<第4変形例>
図9は、第4変形例に係る光学モジュールの構造を示す概略断面図である。本変形例は、センサ基板20の構成が異なること以外は、第1実施形態と同様の構成である。第1実施形態では、図6に示すように、ダミー受光素子23を構成する不純物拡散層を、受光素子21a,22aを構成する不純物拡散層より深く形成しているが、本変形例では、両者を同程度の深さとする。
Claims (7)
- 固定基板と、
前記固定基板上に固着され、貫通孔が形成されたセンサ基板と、
前記貫通孔内に位置するように前記固定基板上に固着された発光素子と、
を備え、
前記センサ基板は、受光素子と、前記受光素子と前記貫通孔との間であって前記貫通孔の周囲に形成されたダミー受光素子とを有し、
前記受光素子と前記ダミー受光素子とは、前記センサ基板の表層に形成された同じ導電型の不純物拡散層からなり、前記ダミー受光素子の深さが前記受光素子の深さよりも大きい光学モジュール。 - 前記センサ基板は半導体基板であって、
前記受光素子と前記ダミー受光素子とは、逆バイアスとされたpn接合型のフォトダイオードである請求項1に記載の光学モジュール。 - 前記発光素子は、LEDである請求項2に記載の光学モジュール。
- 前記センサ基板は前記固定基板側がカソードであり、前記発光素子は前記固定基板側がカソードである請求項3に記載の光学モジュール。
- 前記ダミー受光素子を構成する不純物拡散層は、前記受光素子を構成する不純物拡散層よりも不純物濃度が高い請求項1ないし4いずれか1項に記載の光学モジュール。
- 固定基板と、
前記固定基板上に固着され、貫通孔が形成されたセンサ基板と、
前記貫通孔内に位置するように前記固定基板上に固着された発光素子と、
を備え、
前記センサ基板は、受光素子と、前記受光素子と前記貫通孔との間であって前記貫通孔の周囲に形成されたダミー受光素子とを有し、
前記受光素子と前記ダミー受光素子とは、前記センサ基板の表層に形成された同じ導電型の不純物拡散層からなり、前記センサ基板は、光吸収部材を含む導電性の接着層を介して前記固定基板に固着されている光学モジュール。 - 請求項1ないし6いずれか1項に記載の光学モジュールと、
反射型のスケールと、
を備えた光学式エンコーダ。
Priority Applications (4)
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JP2019041594A JP7206489B2 (ja) | 2019-03-07 | 2019-03-07 | 光学モジュール及び光学式エンコーダ |
CN202010081792.5A CN111664877A (zh) | 2019-03-07 | 2020-02-06 | 光学模块及光学式编码器 |
US16/807,585 US11112279B2 (en) | 2019-03-07 | 2020-03-03 | Optical module and optical encoder comprising a dummy light receiving device formed between a light receiving device and a through hole in a sensor substrate |
JP2022208826A JP7381961B2 (ja) | 2019-03-07 | 2022-12-26 | 光学モジュール及び光学式エンコーダ |
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JP2019041594A JP7206489B2 (ja) | 2019-03-07 | 2019-03-07 | 光学モジュール及び光学式エンコーダ |
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JP7206489B2 JP7206489B2 (ja) | 2023-01-18 |
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CN116507885A (zh) * | 2020-11-06 | 2023-07-28 | 松下知识产权经营株式会社 | 编码器 |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6433733A (en) * | 1987-07-30 | 1989-02-03 | Sony Corp | Light emitting and receiving conjugated element |
JPH0982936A (ja) * | 1995-09-13 | 1997-03-28 | Sony Corp | 光学装置 |
JPH11306574A (ja) * | 1998-04-22 | 1999-11-05 | Sankyo Seiki Mfg Co Ltd | 受光素子一体型半導体レーザユニットおよび光ピックアップ装置 |
JPH11316967A (ja) * | 1998-05-07 | 1999-11-16 | Sankyo Seiki Mfg Co Ltd | 受光素子一体型半導体レーザユニットおよび光ピックアップ装置 |
JP2003130689A (ja) * | 2001-10-23 | 2003-05-08 | Olympus Optical Co Ltd | 光学式エンコーダ |
JP2004006753A (ja) * | 2002-04-05 | 2004-01-08 | Canon Inc | 光半導体用パッケージ |
JP2005043192A (ja) * | 2003-07-28 | 2005-02-17 | Olympus Corp | 光学式エンコーダ及びその製造方法並びに光学レンズモジュール |
US20050129079A1 (en) * | 2003-12-16 | 2005-06-16 | Matsushita Electric Industrial Co., Ltd. | Optical semiconductor device and method for fabricating the same |
JP2013187357A (ja) * | 2012-03-08 | 2013-09-19 | Stanley Electric Co Ltd | 反射光センサ |
WO2013161722A1 (ja) * | 2012-04-25 | 2013-10-31 | 京セラ株式会社 | 受発光素子モジュールおよびこれを用いたセンサ装置 |
US20170047455A1 (en) * | 2015-08-12 | 2017-02-16 | Xintec Inc. | Sensing chip package and a manufacturing method thereof |
JP2018038546A (ja) * | 2016-09-06 | 2018-03-15 | 京セラ株式会社 | 計測センサ用パッケージおよび計測センサ |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008078771A1 (ja) * | 2006-12-26 | 2008-07-03 | Kyocera Corporation | 太陽電池素子及び太陽電池素子の製造方法 |
EP2304782A1 (en) * | 2008-06-20 | 2011-04-06 | Polymer Vision Limited | An integrated circuit comprising light absorbing adhesive |
JP2010283290A (ja) | 2009-06-08 | 2010-12-16 | Panasonic Electric Works Co Ltd | 発光装置 |
WO2012022002A1 (de) * | 2010-08-19 | 2012-02-23 | Elesta Relays Gmbh | Positionsmessvorrichtung |
CN104103650B (zh) | 2014-07-09 | 2018-03-23 | 日月光半导体制造股份有限公司 | 光学模块及其制造方法以及包括光学模块的电子装置 |
US10429509B2 (en) | 2014-12-24 | 2019-10-01 | Stmicroelectronics Pte Ltd. | Molded proximity sensor |
CN208093578U (zh) * | 2015-09-07 | 2018-11-13 | Lg伊诺特有限公司 | 感测装置 |
-
2019
- 2019-03-07 JP JP2019041594A patent/JP7206489B2/ja active Active
-
2020
- 2020-02-06 CN CN202010081792.5A patent/CN111664877A/zh active Pending
- 2020-03-03 US US16/807,585 patent/US11112279B2/en active Active
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- 2022-12-26 JP JP2022208826A patent/JP7381961B2/ja active Active
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6433733A (en) * | 1987-07-30 | 1989-02-03 | Sony Corp | Light emitting and receiving conjugated element |
JPH0982936A (ja) * | 1995-09-13 | 1997-03-28 | Sony Corp | 光学装置 |
JPH11306574A (ja) * | 1998-04-22 | 1999-11-05 | Sankyo Seiki Mfg Co Ltd | 受光素子一体型半導体レーザユニットおよび光ピックアップ装置 |
JPH11316967A (ja) * | 1998-05-07 | 1999-11-16 | Sankyo Seiki Mfg Co Ltd | 受光素子一体型半導体レーザユニットおよび光ピックアップ装置 |
JP2003130689A (ja) * | 2001-10-23 | 2003-05-08 | Olympus Optical Co Ltd | 光学式エンコーダ |
JP2004006753A (ja) * | 2002-04-05 | 2004-01-08 | Canon Inc | 光半導体用パッケージ |
JP2005043192A (ja) * | 2003-07-28 | 2005-02-17 | Olympus Corp | 光学式エンコーダ及びその製造方法並びに光学レンズモジュール |
US20050129079A1 (en) * | 2003-12-16 | 2005-06-16 | Matsushita Electric Industrial Co., Ltd. | Optical semiconductor device and method for fabricating the same |
JP2013187357A (ja) * | 2012-03-08 | 2013-09-19 | Stanley Electric Co Ltd | 反射光センサ |
WO2013161722A1 (ja) * | 2012-04-25 | 2013-10-31 | 京セラ株式会社 | 受発光素子モジュールおよびこれを用いたセンサ装置 |
US20170047455A1 (en) * | 2015-08-12 | 2017-02-16 | Xintec Inc. | Sensing chip package and a manufacturing method thereof |
JP2018038546A (ja) * | 2016-09-06 | 2018-03-15 | 京セラ株式会社 | 計測センサ用パッケージおよび計測センサ |
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JP2023027395A (ja) | 2023-03-01 |
US11112279B2 (en) | 2021-09-07 |
US20200284620A1 (en) | 2020-09-10 |
CN111664877A (zh) | 2020-09-15 |
JP7206489B2 (ja) | 2023-01-18 |
JP7381961B2 (ja) | 2023-11-16 |
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