JP2020096514A5 - - Google Patents

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Publication number
JP2020096514A5
JP2020096514A5 JP2019202780A JP2019202780A JP2020096514A5 JP 2020096514 A5 JP2020096514 A5 JP 2020096514A5 JP 2019202780 A JP2019202780 A JP 2019202780A JP 2019202780 A JP2019202780 A JP 2019202780A JP 2020096514 A5 JP2020096514 A5 JP 2020096514A5
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JP
Japan
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coil
coils
mover
predetermined interval
distance
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JP2019202780A
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English (en)
Japanese (ja)
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JP7406897B2 (ja
JP2020096514A (ja
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Priority to KR1020190157174A priority Critical patent/KR102546009B1/ko
Priority to CN201911218215.XA priority patent/CN111293855B/zh
Publication of JP2020096514A publication Critical patent/JP2020096514A/ja
Publication of JP2020096514A5 publication Critical patent/JP2020096514A5/ja
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Publication of JP7406897B2 publication Critical patent/JP7406897B2/ja
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JP2019202780A 2018-12-07 2019-11-07 搬送装置および物品の製造方法 Active JP7406897B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020190157174A KR102546009B1 (ko) 2018-12-07 2019-11-29 반송 장치 및 물품의 제조 방법
CN201911218215.XA CN111293855B (zh) 2018-12-07 2019-12-03 搬送装置以及物品制造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018230243 2018-12-07
JP2018230243 2018-12-07

Publications (3)

Publication Number Publication Date
JP2020096514A JP2020096514A (ja) 2020-06-18
JP2020096514A5 true JP2020096514A5 (enExample) 2022-12-08
JP7406897B2 JP7406897B2 (ja) 2023-12-28

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JP2019202780A Active JP7406897B2 (ja) 2018-12-07 2019-11-07 搬送装置および物品の製造方法

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JP (1) JP7406897B2 (enExample)
KR (1) KR102546009B1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7538691B2 (ja) 2020-10-29 2024-08-22 キヤノン株式会社 搬送装置、真空装置、加工システム及び物品の製造方法
JP7534923B2 (ja) * 2020-10-30 2024-08-15 キヤノン株式会社 搬送システム及び搬送システムの制御方法
JP7757072B2 (ja) * 2021-07-28 2025-10-21 キヤノン株式会社 搬送システム、搬送システムの制御方法、加工システム、物品の製造方法及びモータ
CN115097851B (zh) * 2022-06-30 2025-04-22 瑞声光电科技(常州)有限公司 直驱传输系统的控制方法及相关设备

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2314178A1 (fr) * 1975-06-11 1977-01-07 Ile De France Nouveau procede de preparation du n-(1-ethyl-2-pyrrolidylmethyl) 2-methoxy 5-methoxy 5-sulfamoyl benzamide
JPS6311609A (ja) * 1986-07-02 1988-01-19 Nippon Steel Corp 鉄鉱石の予備還元装置
JPH05231068A (ja) * 1992-02-25 1993-09-07 Fuji Electric Co Ltd ドア開閉用リニアモータ
JPH08289531A (ja) * 1995-04-14 1996-11-01 Toyota Auto Body Co Ltd リニア直流モータ
JP2000245128A (ja) * 1999-02-22 2000-09-08 Nkk Corp リニア同期モータ
JP4314555B2 (ja) 2002-12-03 2009-08-19 株式会社ニコン リニアモータ装置、ステージ装置、及び露光装置
JP2004328830A (ja) * 2003-04-22 2004-11-18 Asyst Shinko Inc リニアモータレール装置
DE102006014616A1 (de) * 2006-03-29 2007-10-11 Siemens Ag Linearmotor mit verschieden gestalteten Sekundärteilabschnitten
CN101978585B (zh) * 2008-04-18 2013-08-07 株式会社安川电机 多自由度传动装置以及载物台装置
ATE544228T1 (de) * 2008-10-31 2012-02-15 Bosch Gmbh Robert Verfahren und vorrichtung zur steuerung eines linearen bewegungssystems
JP5508181B2 (ja) 2010-08-03 2014-05-28 東芝機械株式会社 リニアモータ及びリニアモータ装置
JP2012095414A (ja) 2010-10-26 2012-05-17 Murata Mach Ltd リニアモータおよびこれを用いた搬送システム
JP5829153B2 (ja) * 2012-03-12 2015-12-09 住友重機械工業株式会社 射出成形機
KR101531656B1 (ko) 2013-10-16 2015-06-25 한국전기연구원 자기 부상 이송 장치

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