KR102546009B1 - 반송 장치 및 물품의 제조 방법 - Google Patents

반송 장치 및 물품의 제조 방법 Download PDF

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Publication number
KR102546009B1
KR102546009B1 KR1020190157174A KR20190157174A KR102546009B1 KR 102546009 B1 KR102546009 B1 KR 102546009B1 KR 1020190157174 A KR1020190157174 A KR 1020190157174A KR 20190157174 A KR20190157174 A KR 20190157174A KR 102546009 B1 KR102546009 B1 KR 102546009B1
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South Korea
Prior art keywords
mover
coils
coil
disposed
distance
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KR1020190157174A
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English (en)
Korean (ko)
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KR20200070108A (ko
Inventor
다케시 야마모토
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캐논 가부시끼가이샤
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Publication of KR20200070108A publication Critical patent/KR20200070108A/ko
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Publication of KR102546009B1 publication Critical patent/KR102546009B1/ko
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N15/00—Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2812/00—Indexing codes relating to the kind or type of conveyors
    • B65G2812/99—Conveyor systems not otherwise provided for

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)
  • Non-Mechanical Conveyors (AREA)
KR1020190157174A 2018-12-07 2019-11-29 반송 장치 및 물품의 제조 방법 Active KR102546009B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPJP-P-2018-230243 2018-12-07
JP2018230243 2018-12-07
JP2019202780A JP7406897B2 (ja) 2018-12-07 2019-11-07 搬送装置および物品の製造方法
JPJP-P-2019-202780 2019-11-07

Publications (2)

Publication Number Publication Date
KR20200070108A KR20200070108A (ko) 2020-06-17
KR102546009B1 true KR102546009B1 (ko) 2023-06-22

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ID=71085197

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020190157174A Active KR102546009B1 (ko) 2018-12-07 2019-11-29 반송 장치 및 물품의 제조 방법

Country Status (2)

Country Link
JP (1) JP7406897B2 (enExample)
KR (1) KR102546009B1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7538691B2 (ja) 2020-10-29 2024-08-22 キヤノン株式会社 搬送装置、真空装置、加工システム及び物品の製造方法
JP7534923B2 (ja) * 2020-10-30 2024-08-15 キヤノン株式会社 搬送システム及び搬送システムの制御方法
JP7757072B2 (ja) * 2021-07-28 2025-10-21 キヤノン株式会社 搬送システム、搬送システムの制御方法、加工システム、物品の製造方法及びモータ
CN115097851B (zh) * 2022-06-30 2025-04-22 瑞声光电科技(常州)有限公司 直驱传输系统的控制方法及相关设备

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004328830A (ja) 2003-04-22 2004-11-18 Asyst Shinko Inc リニアモータレール装置
JP2009532003A (ja) 2006-03-29 2009-09-03 シーメンス アクチエンゲゼルシヤフト リニアモータ

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2314178A1 (fr) * 1975-06-11 1977-01-07 Ile De France Nouveau procede de preparation du n-(1-ethyl-2-pyrrolidylmethyl) 2-methoxy 5-methoxy 5-sulfamoyl benzamide
JPS6311609A (ja) * 1986-07-02 1988-01-19 Nippon Steel Corp 鉄鉱石の予備還元装置
JPH05231068A (ja) * 1992-02-25 1993-09-07 Fuji Electric Co Ltd ドア開閉用リニアモータ
JPH08289531A (ja) * 1995-04-14 1996-11-01 Toyota Auto Body Co Ltd リニア直流モータ
JP2000245128A (ja) * 1999-02-22 2000-09-08 Nkk Corp リニア同期モータ
JP4314555B2 (ja) * 2002-12-03 2009-08-19 株式会社ニコン リニアモータ装置、ステージ装置、及び露光装置
JP5387570B2 (ja) * 2008-04-18 2014-01-15 株式会社安川電機 多自由度アクチュエータおよびステージ装置
ATE544228T1 (de) * 2008-10-31 2012-02-15 Bosch Gmbh Robert Verfahren und vorrichtung zur steuerung eines linearen bewegungssystems
JP5508181B2 (ja) * 2010-08-03 2014-05-28 東芝機械株式会社 リニアモータ及びリニアモータ装置
JP2012095414A (ja) * 2010-10-26 2012-05-17 Murata Mach Ltd リニアモータおよびこれを用いた搬送システム
JP5829153B2 (ja) * 2012-03-12 2015-12-09 住友重機械工業株式会社 射出成形機
KR101531656B1 (ko) 2013-10-16 2015-06-25 한국전기연구원 자기 부상 이송 장치

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004328830A (ja) 2003-04-22 2004-11-18 Asyst Shinko Inc リニアモータレール装置
JP2009532003A (ja) 2006-03-29 2009-09-03 シーメンス アクチエンゲゼルシヤフト リニアモータ

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Publication number Publication date
KR20200070108A (ko) 2020-06-17
JP7406897B2 (ja) 2023-12-28
JP2020096514A (ja) 2020-06-18

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