JP2022072437A5 - - Google Patents

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Publication number
JP2022072437A5
JP2022072437A5 JP2020181876A JP2020181876A JP2022072437A5 JP 2022072437 A5 JP2022072437 A5 JP 2022072437A5 JP 2020181876 A JP2020181876 A JP 2020181876A JP 2020181876 A JP2020181876 A JP 2020181876A JP 2022072437 A5 JP2022072437 A5 JP 2022072437A5
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JP
Japan
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region
magnetic body
vacuum
predetermined intervals
ratio
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JP2020181876A
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English (en)
Japanese (ja)
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JP7538691B2 (ja
JP2022072437A (ja
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Priority to JP2020181876A priority Critical patent/JP7538691B2/ja
Priority claimed from JP2020181876A external-priority patent/JP7538691B2/ja
Priority to US17/506,352 priority patent/US12065319B2/en
Publication of JP2022072437A publication Critical patent/JP2022072437A/ja
Publication of JP2022072437A5 publication Critical patent/JP2022072437A5/ja
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JP2020181876A 2020-10-29 2020-10-29 搬送装置、真空装置、加工システム及び物品の製造方法 Active JP7538691B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2020181876A JP7538691B2 (ja) 2020-10-29 2020-10-29 搬送装置、真空装置、加工システム及び物品の製造方法
US17/506,352 US12065319B2 (en) 2020-10-29 2021-10-20 Transport apparatus, vacuum apparatus, processing system, and a method for manufacturing an article

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020181876A JP7538691B2 (ja) 2020-10-29 2020-10-29 搬送装置、真空装置、加工システム及び物品の製造方法

Publications (3)

Publication Number Publication Date
JP2022072437A JP2022072437A (ja) 2022-05-17
JP2022072437A5 true JP2022072437A5 (enExample) 2023-10-31
JP7538691B2 JP7538691B2 (ja) 2024-08-22

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JP2020181876A Active JP7538691B2 (ja) 2020-10-29 2020-10-29 搬送装置、真空装置、加工システム及び物品の製造方法

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US (1) US12065319B2 (enExample)
JP (1) JP7538691B2 (enExample)

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61185286U (enExample) * 1985-05-09 1986-11-19
JP3817883B2 (ja) * 1998-01-09 2006-09-06 株式会社安川電機 リニアモータ
DE19829052C1 (de) * 1998-06-29 1999-12-30 Siemens Ag Synchronlinearmotor
JP3872055B2 (ja) * 2003-06-20 2007-01-24 三菱電機株式会社 リニアモータの電機子
US6949846B2 (en) * 2003-08-29 2005-09-27 Sanyo Denki Co., Ltd. Linear motor with reduced cogging force
DE102008032314A1 (de) 2008-07-09 2010-01-14 Siemens Aktiengesellschaft Dynamoelektrische Maschine mit Zahnspulen-Wicklung im Stator
CA2753898C (en) * 2009-03-03 2017-02-28 Ats Automation Tooling Systems Inc. Multi-mode scroll cam conveyor system
JP5041017B2 (ja) * 2010-03-11 2012-10-03 株式会社安川電機 リニアモータ
JP6224380B2 (ja) 2013-08-30 2017-11-01 ヤマハ発動機株式会社 リニアコンベア用のカバー部材及びリニアコンベア
JP2016073164A (ja) 2014-10-02 2016-05-09 株式会社日立製作所 リニアモータ
US9906110B2 (en) 2014-12-04 2018-02-27 Rockwell Automation Technologies, Inc. Controlled motion system having end teeth to facilitate the formation of a magnetic flux bridge joining linear motor sections
JP5937263B1 (ja) * 2015-08-18 2016-06-22 山洋電気株式会社 リニアモータ
JP6991783B2 (ja) 2017-08-23 2022-01-13 キヤノン株式会社 物品の搬送方法、物品の搬送装置、光学素子の製造方法、光学素子の製造装置、プログラム、記録媒体
US10164555B1 (en) * 2018-02-14 2018-12-25 Rockwel Automation Technologies, Inc. Virtual mid-bus generation in a power system for industrial control
EP3661033A1 (de) * 2018-11-27 2020-06-03 B&R Industrial Automation GmbH Transporteinrichtung in form eines langstatorlinearmotors
JP7406897B2 (ja) 2018-12-07 2023-12-28 キヤノン株式会社 搬送装置および物品の製造方法

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