JP7538691B2 - 搬送装置、真空装置、加工システム及び物品の製造方法 - Google Patents

搬送装置、真空装置、加工システム及び物品の製造方法 Download PDF

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Publication number
JP7538691B2
JP7538691B2 JP2020181876A JP2020181876A JP7538691B2 JP 7538691 B2 JP7538691 B2 JP 7538691B2 JP 2020181876 A JP2020181876 A JP 2020181876A JP 2020181876 A JP2020181876 A JP 2020181876A JP 7538691 B2 JP7538691 B2 JP 7538691B2
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Japan
Prior art keywords
region
mover
teeth
coil
magnetic body
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JP2020181876A
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English (en)
Japanese (ja)
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JP2022072437A5 (enExample
JP2022072437A (ja
Inventor
光晴 江澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2020181876A priority Critical patent/JP7538691B2/ja
Priority to US17/506,352 priority patent/US12065319B2/en
Publication of JP2022072437A publication Critical patent/JP2022072437A/ja
Publication of JP2022072437A5 publication Critical patent/JP2022072437A5/ja
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/12—Stationary parts of the magnetic circuit
    • H02K1/14—Stator cores with salient poles
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/12—Stationary parts of the magnetic circuit
    • H02K1/16—Stator cores with slots for windings

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Linear Motors (AREA)
  • Non-Mechanical Conveyors (AREA)
JP2020181876A 2020-10-29 2020-10-29 搬送装置、真空装置、加工システム及び物品の製造方法 Active JP7538691B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2020181876A JP7538691B2 (ja) 2020-10-29 2020-10-29 搬送装置、真空装置、加工システム及び物品の製造方法
US17/506,352 US12065319B2 (en) 2020-10-29 2021-10-20 Transport apparatus, vacuum apparatus, processing system, and a method for manufacturing an article

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020181876A JP7538691B2 (ja) 2020-10-29 2020-10-29 搬送装置、真空装置、加工システム及び物品の製造方法

Publications (3)

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JP2022072437A JP2022072437A (ja) 2022-05-17
JP2022072437A5 JP2022072437A5 (enExample) 2023-10-31
JP7538691B2 true JP7538691B2 (ja) 2024-08-22

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JP2020181876A Active JP7538691B2 (ja) 2020-10-29 2020-10-29 搬送装置、真空装置、加工システム及び物品の製造方法

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US (1) US12065319B2 (enExample)
JP (1) JP7538691B2 (enExample)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008064678A1 (de) 2008-07-09 2011-03-10 Siemens Aktiengesellschaft Dynamoelektrische Maschine mit Zahnspulen-Wicklung im Stator
JP2016073164A (ja) 2014-10-02 2016-05-09 株式会社日立製作所 リニアモータ
US20160164395A1 (en) 2014-12-04 2016-06-09 Rockwell Automation Technologies, Inc. Controlled motion system having end teeth to facilitate the formation of a magnetic flux bridge joining linear motor sections
JP2020096514A (ja) 2018-12-07 2020-06-18 キヤノン株式会社 搬送装置および物品の製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61185286U (enExample) * 1985-05-09 1986-11-19
JP3817883B2 (ja) * 1998-01-09 2006-09-06 株式会社安川電機 リニアモータ
DE19829052C1 (de) * 1998-06-29 1999-12-30 Siemens Ag Synchronlinearmotor
JP3872055B2 (ja) * 2003-06-20 2007-01-24 三菱電機株式会社 リニアモータの電機子
US6949846B2 (en) * 2003-08-29 2005-09-27 Sanyo Denki Co., Ltd. Linear motor with reduced cogging force
CA2753898C (en) * 2009-03-03 2017-02-28 Ats Automation Tooling Systems Inc. Multi-mode scroll cam conveyor system
JP5041017B2 (ja) * 2010-03-11 2012-10-03 株式会社安川電機 リニアモータ
JP6224380B2 (ja) 2013-08-30 2017-11-01 ヤマハ発動機株式会社 リニアコンベア用のカバー部材及びリニアコンベア
JP5937263B1 (ja) * 2015-08-18 2016-06-22 山洋電気株式会社 リニアモータ
JP6991783B2 (ja) 2017-08-23 2022-01-13 キヤノン株式会社 物品の搬送方法、物品の搬送装置、光学素子の製造方法、光学素子の製造装置、プログラム、記録媒体
US10164555B1 (en) * 2018-02-14 2018-12-25 Rockwel Automation Technologies, Inc. Virtual mid-bus generation in a power system for industrial control
EP3661033A1 (de) * 2018-11-27 2020-06-03 B&R Industrial Automation GmbH Transporteinrichtung in form eines langstatorlinearmotors

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008064678A1 (de) 2008-07-09 2011-03-10 Siemens Aktiengesellschaft Dynamoelektrische Maschine mit Zahnspulen-Wicklung im Stator
JP2016073164A (ja) 2014-10-02 2016-05-09 株式会社日立製作所 リニアモータ
US20160164395A1 (en) 2014-12-04 2016-06-09 Rockwell Automation Technologies, Inc. Controlled motion system having end teeth to facilitate the formation of a magnetic flux bridge joining linear motor sections
JP2020096514A (ja) 2018-12-07 2020-06-18 キヤノン株式会社 搬送装置および物品の製造方法

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US20220135348A1 (en) 2022-05-05
US12065319B2 (en) 2024-08-20
JP2022072437A (ja) 2022-05-17

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