JP2018197163A5 - - Google Patents
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- JP2018197163A5 JP2018197163A5 JP2017103313A JP2017103313A JP2018197163A5 JP 2018197163 A5 JP2018197163 A5 JP 2018197163A5 JP 2017103313 A JP2017103313 A JP 2017103313A JP 2017103313 A JP2017103313 A JP 2017103313A JP 2018197163 A5 JP2018197163 A5 JP 2018197163A5
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- JP
- Japan
- Prior art keywords
- magnet
- transport
- magnets
- pair
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005339 levitation Methods 0.000 claims description 88
- 238000012546 transfer Methods 0.000 claims description 53
- 230000007246 mechanism Effects 0.000 claims description 33
- 230000008859 change Effects 0.000 description 17
- 230000007423 decrease Effects 0.000 description 9
- 230000000694 effects Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000003542 behavioural effect Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical group C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017103313A JP6954597B2 (ja) | 2017-05-25 | 2017-05-25 | 磁気式浮上搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017103313A JP6954597B2 (ja) | 2017-05-25 | 2017-05-25 | 磁気式浮上搬送装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018197163A JP2018197163A (ja) | 2018-12-13 |
| JP2018197163A5 true JP2018197163A5 (enExample) | 2019-08-29 |
| JP6954597B2 JP6954597B2 (ja) | 2021-10-27 |
Family
ID=64663877
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017103313A Active JP6954597B2 (ja) | 2017-05-25 | 2017-05-25 | 磁気式浮上搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6954597B2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113169105B (zh) * | 2018-12-21 | 2024-10-01 | 应用材料公司 | 磁悬浮系统、用于磁悬浮系统的载体、真空系统以及运输载体的方法 |
| CN109677837B (zh) * | 2019-01-07 | 2020-06-26 | 安徽理工大学 | 一种可控磁电混合悬浮磁垫带式运输机及其控制电路 |
| CN113049942B (zh) * | 2021-02-25 | 2024-03-08 | 深圳市磐锋精密技术有限公司 | 一种键盘薄膜电路板功能测试设备及测试方法 |
| CN114526899B (zh) * | 2022-02-21 | 2024-01-09 | 江苏申牌万向轮有限公司 | 一种基于磁悬浮技术的脚轮转动性能检测设备及检测方法 |
| JPWO2025041629A1 (enExample) * | 2023-08-21 | 2025-02-27 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56125984A (en) * | 1980-03-10 | 1981-10-02 | Nippon Telegr & Teleph Corp <Ntt> | Magnetically floating movable base |
| JPH01168038A (ja) * | 1987-12-24 | 1989-07-03 | Toshiba Corp | 磁気浮上式案内装置 |
| JPH03223021A (ja) * | 1989-12-29 | 1991-10-02 | Ntn Corp | 特殊環境下で用いられる搬送装置 |
| JP2013021036A (ja) * | 2011-07-08 | 2013-01-31 | Canon Anelva Corp | 搬送装置 |
-
2017
- 2017-05-25 JP JP2017103313A patent/JP6954597B2/ja active Active
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