JP6954597B2 - 磁気式浮上搬送装置 - Google Patents

磁気式浮上搬送装置 Download PDF

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JP6954597B2
JP6954597B2 JP2017103313A JP2017103313A JP6954597B2 JP 6954597 B2 JP6954597 B2 JP 6954597B2 JP 2017103313 A JP2017103313 A JP 2017103313A JP 2017103313 A JP2017103313 A JP 2017103313A JP 6954597 B2 JP6954597 B2 JP 6954597B2
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magnet
transport
pair
moving direction
magnets
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JP2018197163A (ja
JP2018197163A5 (enExample
Inventor
佐藤　勝
勝 佐藤
学 大沼
学 大沼
雄真 鈴木
雄真 鈴木
悠平 大石
悠平 大石
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Prospine Co Ltd
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Prospine Co Ltd
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  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Non-Mechanical Conveyors (AREA)
JP2017103313A 2017-05-25 2017-05-25 磁気式浮上搬送装置 Active JP6954597B2 (ja)

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JP2017103313A JP6954597B2 (ja) 2017-05-25 2017-05-25 磁気式浮上搬送装置

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JP2017103313A JP6954597B2 (ja) 2017-05-25 2017-05-25 磁気式浮上搬送装置

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JP2018197163A JP2018197163A (ja) 2018-12-13
JP2018197163A5 JP2018197163A5 (enExample) 2019-08-29
JP6954597B2 true JP6954597B2 (ja) 2021-10-27

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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113169105B (zh) * 2018-12-21 2024-10-01 应用材料公司 磁悬浮系统、用于磁悬浮系统的载体、真空系统以及运输载体的方法
CN109677837B (zh) * 2019-01-07 2020-06-26 安徽理工大学 一种可控磁电混合悬浮磁垫带式运输机及其控制电路
CN113049942B (zh) * 2021-02-25 2024-03-08 深圳市磐锋精密技术有限公司 一种键盘薄膜电路板功能测试设备及测试方法
CN114526899B (zh) * 2022-02-21 2024-01-09 江苏申牌万向轮有限公司 一种基于磁悬浮技术的脚轮转动性能检测设备及检测方法
JPWO2025041629A1 (enExample) * 2023-08-21 2025-02-27

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56125984A (en) * 1980-03-10 1981-10-02 Nippon Telegr & Teleph Corp <Ntt> Magnetically floating movable base
JPH01168038A (ja) * 1987-12-24 1989-07-03 Toshiba Corp 磁気浮上式案内装置
JPH03223021A (ja) * 1989-12-29 1991-10-02 Ntn Corp 特殊環境下で用いられる搬送装置
JP2013021036A (ja) * 2011-07-08 2013-01-31 Canon Anelva Corp 搬送装置

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