JP2020077813A - 基板処理方法、基板処理装置および記憶媒体 - Google Patents
基板処理方法、基板処理装置および記憶媒体 Download PDFInfo
- Publication number
- JP2020077813A JP2020077813A JP2018211537A JP2018211537A JP2020077813A JP 2020077813 A JP2020077813 A JP 2020077813A JP 2018211537 A JP2018211537 A JP 2018211537A JP 2018211537 A JP2018211537 A JP 2018211537A JP 2020077813 A JP2020077813 A JP 2020077813A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- etching
- silicon
- concentration
- etching process
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 284
- 238000003672 processing method Methods 0.000 title claims abstract description 18
- 238000012545 processing Methods 0.000 title claims description 255
- 238000005530 etching Methods 0.000 claims abstract description 358
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims abstract description 146
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 132
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 132
- 239000010703 silicon Substances 0.000 claims abstract description 132
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 89
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 87
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims abstract description 73
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 44
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 43
- 238000010306 acid treatment Methods 0.000 claims abstract description 36
- 238000000034 method Methods 0.000 claims description 194
- 230000008569 process Effects 0.000 claims description 187
- 239000007788 liquid Substances 0.000 claims description 102
- 238000007654 immersion Methods 0.000 claims description 3
- 239000000243 solution Substances 0.000 description 57
- 230000007246 mechanism Effects 0.000 description 40
- 239000007864 aqueous solution Substances 0.000 description 35
- 238000010586 diagram Methods 0.000 description 25
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 19
- 230000003028 elevating effect Effects 0.000 description 17
- 238000004140 cleaning Methods 0.000 description 14
- 230000004048 modification Effects 0.000 description 11
- 238000012986 modification Methods 0.000 description 11
- 239000002210 silicon-based material Substances 0.000 description 11
- 230000001965 increasing effect Effects 0.000 description 10
- 238000001035 drying Methods 0.000 description 9
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 239000007789 gas Substances 0.000 description 4
- 239000000969 carrier Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000032258 transport Effects 0.000 description 3
- 230000007723 transport mechanism Effects 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 238000002203 pretreatment Methods 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 239000008119 colloidal silica Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 235000011194 food seasoning agent Nutrition 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/67086—Apparatus for fluid treatment for etching for wet etching with the semiconductor substrates being dipped in baths or vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02164—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon oxide, e.g. SiO2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/0217—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Weting (AREA)
Abstract
Description
まず、実施形態に係る基板処理装置1の構成について図1を参照して説明する。図1は、基板処理装置1の概略平面図である。なお、以下では、位置関係を明確にするために、互いに直交するX軸、Y軸およびZ軸を規定し、Z軸正方向を鉛直上向き方向とする。
次に、エッチング用の処理槽27について、図2を参照し説明する。図2は、実施形態に係るエッチング用の処理槽27の構成を示す概略ブロック図である。
つづいて、実施形態に係るエッチング処理について、図3A〜図3Dを参照しながら説明する。図3Aは、エッチング処理を行う前の基板8の断面を示す概略図である。図3Bは、エッチング処理が進んだ基板8の状態を示す概略図である。図3Cは、エッチング処理がさらに進んだ基板8の状態を示す概略図である。図3Dは、エッチング処理が終了した基板8の状態を示す概略図である。
つづいて、実施形態に係るエッチング処理の詳細について、図4〜図7を参照しながら説明する。図4は、実施形態に係るエッチング処理におけるエッチング液中のシリコン濃度およびエッチング液の温度の推移を示す図である。
つづいては、実施形態の各種変形例について、図8〜図14を参照しながら説明する。図8は、実施形態の変形例1に係るエッチング処理におけるエッチング液中のシリコン濃度およびエッチング液の温度の推移を示す図である。図8に示すように、基板8に施すエッチング処理は、上述の第1エッチング処理および第2エッチング処理のみを行い、第3エッチング処理を省略してもよい。
つづいて、図15を参照しながら、実施形態に係る基板処理装置1が実行するエッチング処理の詳細について説明する。図15は、実施形態に係るエッチング処理の処理手順を示すフローチャートである。
8、8−1〜8−10 基板
8A シリコン窒化膜
8B シリコン酸化膜
27、27A〜27G 処理槽
100 制御部
Claims (10)
- シリコン酸化膜およびシリコン窒化膜が形成された基板を、リン酸処理液によってエッチングするエッチング工程を含み、
前記エッチング工程は、
開始時点から第1の時間間隔が経過するまでの間、前記リン酸処理液中のシリコン濃度を前記シリコン酸化膜がエッチングされる第1のシリコン濃度にする
基板処理方法。 - 前記エッチング工程は、
前記第1の時間間隔が経過した時点から、前記リン酸処理液中のシリコン濃度を前記第1のシリコン濃度より高い第2のシリコン濃度にする
請求項1に記載の基板処理方法。 - 前記エッチング工程は、
前記第1の時間間隔の終了後、さらに第2の時間間隔が経過した時点から、前記リン酸処理液中のシリコン濃度を前記第2のシリコン濃度より高い第3のシリコン濃度にする
請求項2に記載の基板処理方法。 - 前記第3のシリコン濃度は、前記シリコン酸化膜がエッチングされない濃度である
請求項3に記載の基板処理方法。 - 前記エッチング工程は、
前記第1の時間間隔が経過した時点から、前記リン酸処理液の温度を前記第1の時間間隔が経過するまでの第1の温度より高い第2の温度にする
請求項1〜4のいずれか一つに記載の基板処理方法。 - 前記エッチング工程は、
前記第1の時間間隔の終了後、さらに第2の時間間隔が経過した時点から、前記リン酸処理液の温度を前記第2の温度より高い第3の温度にする
請求項5に記載の基板処理方法。 - シリコン酸化膜およびシリコン窒化膜が形成された基板をリン酸処理液に浸漬することでエッチング処理を行う基板処理槽と、
前記基板処理槽を制御する制御部と、
を備え、
前記制御部は、
前記基板処理槽での前記基板の浸漬を開始した時点から第1の時間間隔が経過するまでの間、前記リン酸処理液中のシリコン濃度を前記シリコン酸化膜がエッチングされる第1のシリコン濃度に制御する
基板処理装置。 - 前記エッチング処理を行う別の基板処理槽と、
前記基板処理槽と前記別の基板処理槽との間で前記基板を搬送する搬送部とをさらに備え、
前記制御部は、
前記別の基板処理槽に貯留される前記リン酸処理液中のシリコン濃度を、前記第1のシリコン濃度より高い第2のシリコン濃度に制御し、
前記基板処理槽で前記第1の時間間隔が経過するまで浸漬された前記基板を前記別の基板処理槽に搬送して浸漬させる
請求項7に記載の基板処理装置。 - 前記別の基板処理槽は、前記基板処理槽より多い数設けられる
請求項8に記載の基板処理装置。 - 請求項1〜6のいずれか一つに記載の基板処理方法をコンピュータに実行させる、プログラムを記憶した記憶媒体。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018211537A JP7158249B2 (ja) | 2018-11-09 | 2018-11-09 | 基板処理方法、基板処理装置および記憶媒体 |
TW108138926A TWI825205B (zh) | 2018-11-09 | 2019-10-29 | 基板處理方法、基板處理裝置及記錄媒體 |
US16/675,551 US11075096B2 (en) | 2018-11-09 | 2019-11-06 | Substrate processing apparatus |
KR1020190141866A KR20200054102A (ko) | 2018-11-09 | 2019-11-07 | 기판 처리 방법, 기판 처리 장치 및 기억 매체 |
CN201911089883.7A CN111180330B (zh) | 2018-11-09 | 2019-11-08 | 基板处理方法、基板处理装置以及存储介质 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018211537A JP7158249B2 (ja) | 2018-11-09 | 2018-11-09 | 基板処理方法、基板処理装置および記憶媒体 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020077813A true JP2020077813A (ja) | 2020-05-21 |
JP7158249B2 JP7158249B2 (ja) | 2022-10-21 |
Family
ID=70550751
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018211537A Active JP7158249B2 (ja) | 2018-11-09 | 2018-11-09 | 基板処理方法、基板処理装置および記憶媒体 |
Country Status (5)
Country | Link |
---|---|
US (1) | US11075096B2 (ja) |
JP (1) | JP7158249B2 (ja) |
KR (1) | KR20200054102A (ja) |
CN (1) | CN111180330B (ja) |
TW (1) | TWI825205B (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7158249B2 (ja) * | 2018-11-09 | 2022-10-21 | 東京エレクトロン株式会社 | 基板処理方法、基板処理装置および記憶媒体 |
KR20200086141A (ko) * | 2019-01-08 | 2020-07-16 | 삼성전자주식회사 | 실리콘 질화물용 식각제 조성물 및 반도체 소자의 제조 방법 |
KR102670179B1 (ko) * | 2020-09-09 | 2024-05-28 | 가부시키가이샤 스크린 홀딩스 | 기판 처리 방법, 및 기판 처리 장치 |
JP2022117321A (ja) * | 2021-01-29 | 2022-08-10 | 株式会社Screenホールディングス | 基板処理装置、および、基板処理方法 |
CN112908845B (zh) * | 2021-02-24 | 2023-10-10 | 上海华虹宏力半导体制造有限公司 | 氧化物薄膜初始蚀刻率的优化控制方法及系统 |
JP2022176662A (ja) * | 2021-05-17 | 2022-11-30 | 株式会社Screenホールディングス | 基板処理方法、及び基板処理装置 |
KR20240065582A (ko) * | 2022-11-03 | 2024-05-14 | 주식회사 제우스 | 기판 식각 방법 및 기판 식각 장치 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09275091A (ja) * | 1996-04-03 | 1997-10-21 | Mitsubishi Electric Corp | 半導体窒化膜エッチング装置 |
JP2016219449A (ja) * | 2015-05-14 | 2016-12-22 | 東京エレクトロン株式会社 | 基板液処理装置及び基板液処理方法並びに基板液処理プログラムを記憶したコンピュータ読み取り可能な記憶媒体 |
JP2018060896A (ja) * | 2016-10-04 | 2018-04-12 | 東京エレクトロン株式会社 | 基板液処理装置、基板液処理方法および記憶媒体 |
JP2018133551A (ja) * | 2017-02-15 | 2018-08-23 | 東芝メモリ株式会社 | 基板処理装置および半導体装置の製造方法 |
JP2020047886A (ja) * | 2018-09-21 | 2020-03-26 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100265556B1 (ko) * | 1997-03-21 | 2000-11-01 | 구본준 | 식각장치 |
KR100802810B1 (ko) * | 2000-05-08 | 2008-02-12 | 동경 엘렉트론 주식회사 | 액 처리 장치, 액 처리 방법, 반도체 디바이스 제조 방법,반도체 디바이스 제조 장치 |
US8052834B2 (en) * | 2003-01-09 | 2011-11-08 | Dainippon Screen Mfg. Co., Ltd. | Substrate treating system, substrate treating device, program, and recording medium |
TWI377453B (en) * | 2003-07-31 | 2012-11-21 | Akrion Technologies Inc | Process sequence for photoresist stripping and/or cleaning of photomasks for integrated circuit manufacturing |
TWI326312B (en) * | 2004-06-11 | 2010-06-21 | Chimei Innolux Corp | Single-acid slightly compensating equipment and method |
CN100399518C (zh) * | 2004-06-22 | 2008-07-02 | 茂德科技股份有限公司 | 蚀刻系统及其蚀刻液处理方法 |
JP4907400B2 (ja) * | 2006-07-25 | 2012-03-28 | 大日本スクリーン製造株式会社 | 基板処理装置及び基板処理方法 |
CN100511602C (zh) * | 2006-09-20 | 2009-07-08 | 大日本网目版制造株式会社 | 基板处理装置 |
JP5009207B2 (ja) * | 2007-09-21 | 2012-08-22 | 大日本スクリーン製造株式会社 | 基板処理装置 |
JP4966223B2 (ja) * | 2008-02-29 | 2012-07-04 | 大日本スクリーン製造株式会社 | 基板処理装置および基板処理方法 |
JP5829444B2 (ja) * | 2011-07-08 | 2015-12-09 | 株式会社Screenホールディングス | リン酸再生方法、リン酸再生装置および基板処理システム |
JP6087063B2 (ja) | 2012-05-01 | 2017-03-01 | 東京エレクトロン株式会社 | エッチング方法、エッチング装置および記憶媒体 |
JP6302708B2 (ja) * | 2013-03-29 | 2018-03-28 | 芝浦メカトロニクス株式会社 | ウェットエッチング装置 |
JP6502633B2 (ja) * | 2013-09-30 | 2019-04-17 | 芝浦メカトロニクス株式会社 | 基板処理方法及び基板処理装置 |
JP6320868B2 (ja) * | 2014-07-29 | 2018-05-09 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
US10147619B2 (en) * | 2015-08-27 | 2018-12-04 | Toshiba Memory Corporation | Substrate treatment apparatus, substrate treatment method, and etchant |
JP6994899B2 (ja) * | 2017-10-20 | 2022-01-14 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法および記憶媒体 |
JP7158249B2 (ja) * | 2018-11-09 | 2022-10-21 | 東京エレクトロン株式会社 | 基板処理方法、基板処理装置および記憶媒体 |
-
2018
- 2018-11-09 JP JP2018211537A patent/JP7158249B2/ja active Active
-
2019
- 2019-10-29 TW TW108138926A patent/TWI825205B/zh active
- 2019-11-06 US US16/675,551 patent/US11075096B2/en active Active
- 2019-11-07 KR KR1020190141866A patent/KR20200054102A/ko not_active Application Discontinuation
- 2019-11-08 CN CN201911089883.7A patent/CN111180330B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09275091A (ja) * | 1996-04-03 | 1997-10-21 | Mitsubishi Electric Corp | 半導体窒化膜エッチング装置 |
JP2016219449A (ja) * | 2015-05-14 | 2016-12-22 | 東京エレクトロン株式会社 | 基板液処理装置及び基板液処理方法並びに基板液処理プログラムを記憶したコンピュータ読み取り可能な記憶媒体 |
JP2018060896A (ja) * | 2016-10-04 | 2018-04-12 | 東京エレクトロン株式会社 | 基板液処理装置、基板液処理方法および記憶媒体 |
JP2018133551A (ja) * | 2017-02-15 | 2018-08-23 | 東芝メモリ株式会社 | 基板処理装置および半導体装置の製造方法 |
JP2020047886A (ja) * | 2018-09-21 | 2020-03-26 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20200054102A (ko) | 2020-05-19 |
US11075096B2 (en) | 2021-07-27 |
TWI825205B (zh) | 2023-12-11 |
JP7158249B2 (ja) | 2022-10-21 |
US20200152489A1 (en) | 2020-05-14 |
TW202036710A (zh) | 2020-10-01 |
CN111180330B (zh) | 2024-06-14 |
CN111180330A (zh) | 2020-05-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2020077813A (ja) | 基板処理方法、基板処理装置および記憶媒体 | |
JP6994899B2 (ja) | 基板処理装置、基板処理方法および記憶媒体 | |
KR102260913B1 (ko) | 기판 처리 장치 및 기판 처리 방법 | |
US11087992B2 (en) | Substrate processing method and substrate processing apparatus | |
KR102264002B1 (ko) | 기판 처리 장치, 기판 처리 방법 및 기억 매체 | |
JP7113952B2 (ja) | 基板処理方法、および基板処理装置 | |
JP7058701B2 (ja) | 基板処理装置、および基板処理方法 | |
JP2016219449A (ja) | 基板液処理装置及び基板液処理方法並びに基板液処理プログラムを記憶したコンピュータ読み取り可能な記憶媒体 | |
JP7224117B2 (ja) | 基板処理装置および処理液再利用方法 | |
JP7321052B2 (ja) | 基板処理装置および装置洗浄方法 | |
US10998198B2 (en) | Substrate processing method and substrate processing apparatus | |
KR102560934B1 (ko) | 기판 처리 장치, 기판 처리 방법 및 기억 매체 | |
JP6961058B2 (ja) | 基板処理装置および基板処理方法 | |
JP2020170872A (ja) | 基板処理装置、基板処理方法およびプログラム |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210906 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20220630 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220705 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220826 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20220913 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20221011 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7158249 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |