JP2020047886A - 基板処理装置および基板処理方法 - Google Patents
基板処理装置および基板処理方法 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims abstract description 436
- 238000003672 processing method Methods 0.000 title claims abstract description 54
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims abstract description 536
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims abstract description 268
- 238000000034 method Methods 0.000 claims description 14
- 238000010438 heat treatment Methods 0.000 claims description 6
- 230000007547 defect Effects 0.000 abstract description 6
- 238000004904 shortening Methods 0.000 abstract description 3
- 238000005530 etching Methods 0.000 description 46
- 239000010408 film Substances 0.000 description 40
- 239000007789 gas Substances 0.000 description 29
- 238000010586 diagram Methods 0.000 description 27
- 229910052581 Si3N4 Inorganic materials 0.000 description 25
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 25
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 23
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 22
- 239000007788 liquid Substances 0.000 description 22
- 239000000463 material Substances 0.000 description 18
- 238000010306 acid treatment Methods 0.000 description 15
- 238000001556 precipitation Methods 0.000 description 8
- 239000000377 silicon dioxide Substances 0.000 description 8
- 230000003028 elevating effect Effects 0.000 description 6
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 239000003112 inhibitor Substances 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- JEGUKCSWCFPDGT-UHFFFAOYSA-N h2o hydrate Chemical compound O.O JEGUKCSWCFPDGT-UHFFFAOYSA-N 0.000 description 1
- DKAGJZJALZXOOV-UHFFFAOYSA-N hydrate;hydrochloride Chemical compound O.Cl DKAGJZJALZXOOV-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
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- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
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- H01L21/02041—Cleaning
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- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/0217—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
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Abstract
Description
110 処理槽
120 基板保持部
130 温度制御部
W 基板
L 燐酸
Claims (10)
- 基板を処理する基板処理方法であって、
処理槽において、第1温度に設定された燐酸で前記基板を処理する第1処理工程と、
処理槽において、第2温度に設定された燐酸で前記基板を処理する第2処理工程と
を包含する、基板処理方法。 - 前記第2処理工程は、前記第1処理工程の後で行われ、
前記第2温度は、前記第1温度よりも高い、請求項1に記載の基板処理方法。 - 前記第2処理工程において、前記第1処理工程で用いた前記処理槽の前記燐酸の温度を変化させる、請求項1または2に記載の基板処理方法。
- 前記第1処理工程は、前記第1温度に設定された燐酸を貯留する第1処理槽に前記基板を浸漬する工程を含み、
前記第2処理工程は、前記第2温度に設定された燐酸を貯留する第2処理槽に前記基板を浸漬する工程を含む、請求項1または2に記載の基板処理方法。 - 前記第1処理工程および前記第2処理工程を交互に繰り返す、請求項1から4のいずれかに記載の基板処理方法。
- 処理槽において、第3温度に設定された燐酸で前記基板を処理する第3処理工程をさらに包含する、請求項1から5のいずれかに記載の基板処理方法。
- 前記第3処理工程は、前記第1処理工程および前記第2処理工程の後で行われ、
前記第3温度は、前記第1温度および前記第2温度よりも高い、請求項6に記載の基板処理方法。 - 前記基板を支持する基板支持部を加熱する加熱工程をさらに包含する、請求項1から7のいずれかに記載の基板処理方法。
- 前記加熱工程において、前記基板支持部を断続的に加熱する、請求項8に記載の基板処理方法。
- 基板を処理するための燐酸を貯留する少なくとも1つの処理槽と、
前記処理槽の前記燐酸内で前記基板を保持する基板保持部と、
前記処理槽内の前記燐酸の温度を制御する温度制御部と
を備え、
前記温度制御部は、前記少なくとも1つの処理槽のいずれかの処理槽において、第1温度に設定された燐酸で前記基板を処理し、前記少なくとも1つの処理槽のいずれかの処理槽において、第2温度に設定された燐酸で前記基板を処理するように、前記少なくとも1つの処理槽に貯留された燐酸の温度を制御する、基板処理装置。
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JP2018177251A JP7130510B2 (ja) | 2018-09-21 | 2018-09-21 | 基板処理装置および基板処理方法 |
KR1020190100821A KR102292278B1 (ko) | 2018-09-21 | 2019-08-19 | 기판 처리 장치 및 기판 처리 방법 |
CN201910782566.7A CN110942988A (zh) | 2018-09-21 | 2019-08-23 | 基板处理装置以及基板处理方法 |
TW108130542A TWI719606B (zh) | 2018-09-21 | 2019-08-27 | 基板處理裝置以及基板處理方法 |
US16/553,169 US11164750B2 (en) | 2018-09-21 | 2019-08-27 | Substrate processing device and substrate processing method |
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JP2018177251A JP7130510B2 (ja) | 2018-09-21 | 2018-09-21 | 基板処理装置および基板処理方法 |
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JP2020047886A true JP2020047886A (ja) | 2020-03-26 |
JP7130510B2 JP7130510B2 (ja) | 2022-09-05 |
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JP (1) | JP7130510B2 (ja) |
KR (1) | KR102292278B1 (ja) |
CN (1) | CN110942988A (ja) |
TW (1) | TWI719606B (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2020077813A (ja) * | 2018-11-09 | 2020-05-21 | 東京エレクトロン株式会社 | 基板処理方法、基板処理装置および記憶媒体 |
KR20220033429A (ko) | 2020-09-09 | 2022-03-16 | 가부시키가이샤 스크린 홀딩스 | 기판 처리 방법, 및 기판 처리 장치 |
KR20220155916A (ko) | 2021-05-17 | 2022-11-24 | 가부시키가이샤 스크린 홀딩스 | 기판 처리 방법, 및 기판 처리 장치 |
WO2024096543A1 (ko) * | 2022-11-03 | 2024-05-10 | 주식회사 제우스 | 기판 식각 방법 및 기판 식각 장치 |
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US11168978B2 (en) | 2020-01-06 | 2021-11-09 | Tokyo Electron Limited | Hardware improvements and methods for the analysis of a spinning reflective substrates |
US11738363B2 (en) * | 2021-06-07 | 2023-08-29 | Tokyo Electron Limited | Bath systems and methods thereof |
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JP7158249B2 (ja) | 2018-11-09 | 2022-10-21 | 東京エレクトロン株式会社 | 基板処理方法、基板処理装置および記憶媒体 |
KR20220033429A (ko) | 2020-09-09 | 2022-03-16 | 가부시키가이샤 스크린 홀딩스 | 기판 처리 방법, 및 기판 처리 장치 |
KR20220155916A (ko) | 2021-05-17 | 2022-11-24 | 가부시키가이샤 스크린 홀딩스 | 기판 처리 방법, 및 기판 처리 장치 |
WO2024096543A1 (ko) * | 2022-11-03 | 2024-05-10 | 주식회사 제우스 | 기판 식각 방법 및 기판 식각 장치 |
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CN110942988A (zh) | 2020-03-31 |
US20200098598A1 (en) | 2020-03-26 |
KR102292278B1 (ko) | 2021-08-20 |
US11164750B2 (en) | 2021-11-02 |
KR20200034580A (ko) | 2020-03-31 |
JP7130510B2 (ja) | 2022-09-05 |
TW202013492A (zh) | 2020-04-01 |
TWI719606B (zh) | 2021-02-21 |
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