JP2020071488A5 - - Google Patents
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- JP2020071488A5 JP2020071488A5 JP2019199619A JP2019199619A JP2020071488A5 JP 2020071488 A5 JP2020071488 A5 JP 2020071488A5 JP 2019199619 A JP2019199619 A JP 2019199619A JP 2019199619 A JP2019199619 A JP 2019199619A JP 2020071488 A5 JP2020071488 A5 JP 2020071488A5
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- 125000006850 spacer group Chemical group 0.000 claims 38
- 108091006146 Channels Proteins 0.000 claims 14
- 239000000463 material Substances 0.000 claims 13
- 238000000034 method Methods 0.000 claims 9
- 239000007788 liquid Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 239000007787 solid Substances 0.000 claims 3
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 229910052732 germanium Inorganic materials 0.000 claims 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims 1
- 238000003754 machining Methods 0.000 claims 1
- 238000000465 moulding Methods 0.000 claims 1
- 150000004767 nitrides Chemical class 0.000 claims 1
- 238000000206 photolithography Methods 0.000 claims 1
- 229920000642 polymer Polymers 0.000 claims 1
- 238000007790 scraping Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000002834 transmittance Methods 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023002173A JP7822974B2 (ja) | 2018-11-02 | 2023-01-11 | 階段構造光学フィルタ |
| JP2024153647A JP2024174959A (ja) | 2018-11-02 | 2024-09-06 | 階段構造光学フィルタ |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US16/179,480 | 2018-11-02 | ||
| US16/179,480 US10962694B2 (en) | 2018-11-02 | 2018-11-02 | Stepped structure optical filter |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023002173A Division JP7822974B2 (ja) | 2018-11-02 | 2023-01-11 | 階段構造光学フィルタ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020071488A JP2020071488A (ja) | 2020-05-07 |
| JP2020071488A5 true JP2020071488A5 (https=) | 2022-05-27 |
| JP7210417B2 JP7210417B2 (ja) | 2023-01-23 |
Family
ID=68426196
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019199619A Active JP7210417B2 (ja) | 2018-11-02 | 2019-11-01 | 階段構造光学フィルタ |
| JP2023002173A Active JP7822974B2 (ja) | 2018-11-02 | 2023-01-11 | 階段構造光学フィルタ |
| JP2024153647A Pending JP2024174959A (ja) | 2018-11-02 | 2024-09-06 | 階段構造光学フィルタ |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023002173A Active JP7822974B2 (ja) | 2018-11-02 | 2023-01-11 | 階段構造光学フィルタ |
| JP2024153647A Pending JP2024174959A (ja) | 2018-11-02 | 2024-09-06 | 階段構造光学フィルタ |
Country Status (7)
| Country | Link |
|---|---|
| US (3) | US10962694B2 (https=) |
| EP (1) | EP3647839B1 (https=) |
| JP (3) | JP7210417B2 (https=) |
| KR (2) | KR102565869B1 (https=) |
| CN (2) | CN111142179B (https=) |
| CA (1) | CA3060740A1 (https=) |
| TW (2) | TWI791917B (https=) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10962694B2 (en) | 2018-11-02 | 2021-03-30 | Viavi Solutions Inc. | Stepped structure optical filter |
| US12392945B2 (en) * | 2020-04-28 | 2025-08-19 | Viavi Solutions Inc. | Induced transmission filter with hydrogenated silicon, silver, and silicon dioxide |
| CN111579067B (zh) * | 2020-05-22 | 2023-03-03 | 中国科学院上海技术物理研究所 | 一种具有超宽带外截止的集成窄带分光器件 |
| WO2021237567A1 (zh) * | 2020-05-28 | 2021-12-02 | 深圳市海谱纳米光学科技有限公司 | 一种可调光学滤波器件和光谱成像系统 |
| EP3943988B1 (en) | 2020-07-20 | 2023-12-27 | Samsung Electronics Co., Ltd. | Spectral filter, and image sensor and electronic device including the spectral filter |
| WO2022147920A1 (zh) * | 2021-01-11 | 2022-07-14 | 苏州联讯仪器有限公司 | 用于光通信的光波长测量系统 |
| CN113503978A (zh) * | 2021-08-16 | 2021-10-15 | 苏州联讯仪器有限公司 | 光通信用光波长测量系统 |
| WO2023027523A1 (ko) * | 2021-08-27 | 2023-03-02 | 경북대학교 산학협력단 | 마이크로옵틱 마하젠더 간섭계의 파장대역 특성을 원하는 형상으로 제어하는 방법 |
| KR102727382B1 (ko) * | 2021-08-27 | 2024-11-07 | 경북대학교 산학협력단 | 마이크로옵틱 마하젠더 간섭계의 파장대역 특성을 원하는 형상으로 제어하는 방법 |
| CN114236663B (zh) * | 2021-12-15 | 2025-07-25 | 浙江大学 | 大面积单片集成的平坦化多通道滤光片阵列及制备方法 |
| CN114551489A (zh) * | 2022-02-11 | 2022-05-27 | 中国科学院上海技术物理研究所 | 一种分光与探测一体化的短波红外光谱探测器 |
| CN115831041B (zh) * | 2023-01-09 | 2023-04-18 | 北京数字光芯集成电路设计有限公司 | 一种阶梯式线阵MicroLED、扫描装置及扫描方法 |
| CN119779483A (zh) * | 2025-01-23 | 2025-04-08 | 星遥光宇(常州)科技有限公司 | 多光谱成像系统的焦面补偿方法、焦面补偿系统 |
Family Cites Families (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5920804A (ja) | 1982-07-28 | 1984-02-02 | Minolta Camera Co Ltd | 膜厚監視装置 |
| JPH0814509B2 (ja) * | 1986-05-15 | 1996-02-14 | ミノルタ株式会社 | 分光測定センサ |
| JP3375147B2 (ja) | 1992-05-26 | 2003-02-10 | 浜松ホトニクス株式会社 | 半導体光検出装置 |
| JPH08508114A (ja) * | 1993-12-23 | 1996-08-27 | ハネウエル・インコーポレーテッド | カラーフィルタ・アレイ |
| JPH1138397A (ja) * | 1997-07-24 | 1999-02-12 | Sharp Corp | 反射型カラー液晶表示素子 |
| CA2211655C (en) * | 1997-07-28 | 2003-01-07 | Paul Colbourne | Multi-pass etalon filter |
| JP4862008B2 (ja) * | 1999-02-15 | 2012-01-25 | シャープ株式会社 | 液晶表示装置 |
| US6791736B2 (en) * | 2001-06-19 | 2004-09-14 | Teralum Llc | Optical device for dispersion compensation |
| JP2004287191A (ja) * | 2003-03-24 | 2004-10-14 | Seiko Epson Corp | カラーフィルタアレイおよび空間光変調装置および投射型表示装置 |
| KR100617039B1 (ko) * | 2004-02-26 | 2006-08-30 | 엘지.필립스 엘시디 주식회사 | 액정 표시 장치 및 이의 제조 방법 |
| FR2904432B1 (fr) | 2006-07-25 | 2008-10-24 | Commissariat Energie Atomique | Structure matricielle de filtrage optique et capteur d'images associe |
| CN104316987A (zh) * | 2006-08-09 | 2015-01-28 | 光学解决方案纳米光子学有限责任公司 | 光学滤波器及其生产方法以及用于检查电磁辐射的装置 |
| US7803704B2 (en) * | 2008-08-22 | 2010-09-28 | Chartered Semiconductor Manufacturing, Ltd. | Reliable interconnects |
| JP2010113058A (ja) * | 2008-11-05 | 2010-05-20 | Seiko Epson Corp | カラーフィルターの製造方法、カラーフィルター、画像表示装置、および、電子機器 |
| CA2765818A1 (en) | 2009-06-17 | 2010-12-23 | Koninklijke Philips Electronics N.V. | Interference filters with high transmission and large rejection range for mini-spectrometer |
| JP5868706B2 (ja) | 2010-01-21 | 2016-02-24 | 株式会社東芝 | 干渉型フィルタ層付基板及びそれを用いた表示装置 |
| US20120200852A1 (en) * | 2010-09-10 | 2012-08-09 | Aerospace Missions Corporation | Spectroscopy and spectral imaging methods and apparatus |
| CN102798917B (zh) * | 2011-05-25 | 2015-02-25 | 苏州大学 | 一种彩色图像制作方法及使用该方法制作的彩色滤光片 |
| EP3351981B1 (en) * | 2011-06-23 | 2025-04-02 | Viavi Solutions Inc. | Multi color-shifting devices |
| JP5757835B2 (ja) * | 2011-10-04 | 2015-08-05 | 浜松ホトニクス株式会社 | 分光センサの製造方法 |
| CN102832237B (zh) * | 2012-07-03 | 2015-04-01 | 电子科技大学 | 一种槽型半导体功率器件 |
| US20160182786A1 (en) | 2013-09-11 | 2016-06-23 | Lytro, Inc. | Hybrid light-field camera |
| FR3020878B1 (fr) * | 2014-05-06 | 2025-06-06 | Commissariat Energie Atomique | Dispositif de filtrage optique comportant des cavites fabry-perot a couche structuree et d'epaisseurs differentes |
| US9823395B2 (en) * | 2014-10-17 | 2017-11-21 | 3M Innovative Properties Company | Multilayer optical film having overlapping harmonics |
| CN105093376A (zh) * | 2015-09-07 | 2015-11-25 | 西安工业大学 | 中心波长渐变的带通滤光片制备方法 |
| US9960199B2 (en) | 2015-12-29 | 2018-05-01 | Viavi Solutions Inc. | Dielectric mirror based multispectral filter array |
| JP2017168822A (ja) | 2016-02-12 | 2017-09-21 | ヴァイアヴィ・ソリューションズ・インコーポレイテッドＶｉａｖｉ Ｓｏｌｕｔｉｏｎｓ Ｉｎｃ． | センサデバイスの製造方法 |
| US10170509B2 (en) * | 2016-02-12 | 2019-01-01 | Viavi Solutions Inc. | Optical filter array |
| DE102016010078A1 (de) | 2016-08-18 | 2018-02-22 | Giesecke+Devrient Currency Technology Gmbh | Optisch variables Sicherheitselement mit Dünnschichtelement |
| EP3324161B1 (de) | 2016-11-18 | 2020-06-17 | Espros Photonics AG | Spektrometer und verfahren zur justierung eines filterarrays |
| US10914961B2 (en) | 2017-02-13 | 2021-02-09 | Viavi Solutions Inc. | Optical polarizing filter |
| US10962694B2 (en) | 2018-11-02 | 2021-03-30 | Viavi Solutions Inc. | Stepped structure optical filter |
-
2018
- 2018-11-02 US US16/179,480 patent/US10962694B2/en active Active
-
2019
- 2019-10-29 CA CA3060740A patent/CA3060740A1/en active Pending
- 2019-10-31 TW TW108139486A patent/TWI791917B/zh active
- 2019-10-31 KR KR1020190137902A patent/KR102565869B1/ko active Active
- 2019-10-31 TW TW111149950A patent/TWI907760B/zh active
- 2019-11-01 EP EP19206709.8A patent/EP3647839B1/en active Active
- 2019-11-01 JP JP2019199619A patent/JP7210417B2/ja active Active
- 2019-11-04 CN CN201911067451.6A patent/CN111142179B/zh active Active
- 2019-11-04 CN CN202311061226.8A patent/CN117031607A/zh active Pending
-
2021
- 2021-03-17 US US17/249,872 patent/US11892664B2/en active Active
-
2023
- 2023-01-11 JP JP2023002173A patent/JP7822974B2/ja active Active
- 2023-08-07 KR KR1020230102639A patent/KR102951105B1/ko active Active
- 2023-11-30 US US18/523,975 patent/US12436328B2/en active Active
-
2024
- 2024-09-06 JP JP2024153647A patent/JP2024174959A/ja active Pending
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