CN117031607A - 阶梯结构光滤波器 - Google Patents

阶梯结构光滤波器 Download PDF

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Publication number
CN117031607A
CN117031607A CN202311061226.8A CN202311061226A CN117031607A CN 117031607 A CN117031607 A CN 117031607A CN 202311061226 A CN202311061226 A CN 202311061226A CN 117031607 A CN117031607 A CN 117031607A
Authority
CN
China
Prior art keywords
mirror
spacer
filter
stepped
disposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202311061226.8A
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English (en)
Chinese (zh)
Inventor
威廉·D·霍克
史蒂文·萨克斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Viavi Solutions Inc
Original Assignee
Viavi Solutions Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Viavi Solutions Inc filed Critical Viavi Solutions Inc
Publication of CN117031607A publication Critical patent/CN117031607A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/26—Reflecting filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • G02B5/288—Interference filters comprising deposited thin solid films comprising at least one thin film resonant cavity, e.g. in bandpass filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/201—Filters in the form of arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/024—Manufacture or treatment of image sensors covered by group H10F39/12 of coatings or optical elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/806—Optical elements or arrangements associated with the image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/806—Optical elements or arrangements associated with the image sensors
    • H10F39/8067—Reflectors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Optical Filters (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
CN202311061226.8A 2018-11-02 2019-11-04 阶梯结构光滤波器 Pending CN117031607A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US16/179,480 US10962694B2 (en) 2018-11-02 2018-11-02 Stepped structure optical filter
US16/179,480 2018-11-02
CN201911067451.6A CN111142179B (zh) 2018-11-02 2019-11-04 阶梯结构光滤波器

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201911067451.6A Division CN111142179B (zh) 2018-11-02 2019-11-04 阶梯结构光滤波器

Publications (1)

Publication Number Publication Date
CN117031607A true CN117031607A (zh) 2023-11-10

Family

ID=68426196

Family Applications (2)

Application Number Title Priority Date Filing Date
CN202311061226.8A Pending CN117031607A (zh) 2018-11-02 2019-11-04 阶梯结构光滤波器
CN201911067451.6A Active CN111142179B (zh) 2018-11-02 2019-11-04 阶梯结构光滤波器

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201911067451.6A Active CN111142179B (zh) 2018-11-02 2019-11-04 阶梯结构光滤波器

Country Status (7)

Country Link
US (3) US10962694B2 (https=)
EP (1) EP3647839B1 (https=)
JP (3) JP7210417B2 (https=)
KR (2) KR102565869B1 (https=)
CN (2) CN117031607A (https=)
CA (1) CA3060740A1 (https=)
TW (2) TWI907760B (https=)

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US10962694B2 (en) 2018-11-02 2021-03-30 Viavi Solutions Inc. Stepped structure optical filter
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CN111579067B (zh) * 2020-05-22 2023-03-03 中国科学院上海技术物理研究所 一种具有超宽带外截止的集成窄带分光器件
CN113767309A (zh) * 2020-05-28 2021-12-07 深圳市海谱纳米光学科技有限公司 一种可调光学滤波器件和光谱成像系统
EP3943988B1 (en) 2020-07-20 2023-12-27 Samsung Electronics Co., Ltd. Spectral filter, and image sensor and electronic device including the spectral filter
WO2022147920A1 (zh) * 2021-01-11 2022-07-14 苏州联讯仪器有限公司 用于光通信的光波长测量系统
CN113503978A (zh) * 2021-08-16 2021-10-15 苏州联讯仪器有限公司 光通信用光波长测量系统
KR102727382B1 (ko) * 2021-08-27 2024-11-07 경북대학교 산학협력단 마이크로옵틱 마하젠더 간섭계의 파장대역 특성을 원하는 형상으로 제어하는 방법
WO2023027523A1 (ko) * 2021-08-27 2023-03-02 경북대학교 산학협력단 마이크로옵틱 마하젠더 간섭계의 파장대역 특성을 원하는 형상으로 제어하는 방법
CN114236663B (zh) * 2021-12-15 2025-07-25 浙江大学 大面积单片集成的平坦化多通道滤光片阵列及制备方法
CN114551489A (zh) * 2022-02-11 2022-05-27 中国科学院上海技术物理研究所 一种分光与探测一体化的短波红外光谱探测器
CN115831041B (zh) * 2023-01-09 2023-04-18 北京数字光芯集成电路设计有限公司 一种阶梯式线阵MicroLED、扫描装置及扫描方法
CN119779483A (zh) * 2025-01-23 2025-04-08 星遥光宇(常州)科技有限公司 多光谱成像系统的焦面补偿方法、焦面补偿系统

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Also Published As

Publication number Publication date
TWI791917B (zh) 2023-02-11
EP3647839A2 (en) 2020-05-06
JP2023052306A (ja) 2023-04-11
US20200142111A1 (en) 2020-05-07
JP2024174959A (ja) 2024-12-17
EP3647839A3 (en) 2020-07-29
US20210199866A1 (en) 2021-07-01
JP7822974B2 (ja) 2026-03-03
US11892664B2 (en) 2024-02-06
KR20200050882A (ko) 2020-05-12
JP2020071488A (ja) 2020-05-07
KR102951105B1 (ko) 2026-04-09
US20240094450A1 (en) 2024-03-21
EP3647839B1 (en) 2024-10-30
KR20230118795A (ko) 2023-08-14
CA3060740A1 (en) 2020-05-02
US10962694B2 (en) 2021-03-30
CN111142179B (zh) 2023-09-08
CN111142179A (zh) 2020-05-12
TWI907760B (zh) 2025-12-11
TW202024680A (zh) 2020-07-01
JP7210417B2 (ja) 2023-01-23
US12436328B2 (en) 2025-10-07
KR102565869B1 (ko) 2023-08-10
TW202316146A (zh) 2023-04-16

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